CN103822620A - Electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope - Google Patents
Electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope Download PDFInfo
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- CN103822620A CN103822620A CN201410058548.1A CN201410058548A CN103822620A CN 103822620 A CN103822620 A CN 103822620A CN 201410058548 A CN201410058548 A CN 201410058548A CN 103822620 A CN103822620 A CN 103822620A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
Abstract
The invention provides an electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope, comprising a disc-shaped substrate, four non-cross comb electrostatic drive electrodes, four cross comb parallel plate detection electrodes and eight U-shaped beams, wherein four drive electrodes and four detection electrodes are uniformly and alternatively arranged along an outer edge of the disc-shaped substrate; and the tail end of each drive electrode and each detection electrode is provided with a U-shaped beam playing the fixing and supporting roles. The disc-shaped substrate is driven to work in a manner of parameter excitation; the drive modality and the detection modality are matched with each other. The gyroscope is manufactured by an MEMS bulk silicon processing technology. A drive frequency is twice that of an inherent frequency of the gyroscope; generated spurious signals have no interference to detection signals; and at the same time, the parameter excitation has the characteristics of large gain, strong stability and small damping influence.
Description
Technical field
The present invention relates to the solid fluctuation mode coupling gyro of field of micro electromechanical technology, particularly, relate to the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation.
Background technology
Gyroscope is a kind of inertia device that can detect carrier angle or angular velocity, has very important effect in fields such as attitude control and navigator fixs.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, multiaxis detection, high reliability, can adapt to the future development of various rugged surroundings.Therefore, the importance of the micro-gyro of MEMS is self-evident.Especially, static drives the important research direction of gyroscope as the micro-gyro of MEMS, has become a study hotspot in this field.
But in electrostatic-driven MEMS gyroscope, due to the existence of stray capacitance, output signal can be activated the interference of signal, make directly from output signal, to obtain information accurately, even resonance frequency all can have larger gap.
Based on this, in the urgent need to proposing a kind of new gyroscope structure or new principle of work, make the spur signal of its generation can detection signal not produced and be disturbed, thereby guarantee to obtain signal output accurately.
Summary of the invention
For defect of the prior art, the object of this invention is to provide the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation, the drive principle that this gyro utilization is new, its driving frequency is the twice of gyroscope natural frequency, so the spur signal producing can not produce and disturb detection signal.Meanwhile, it is large that parametric excitation itself also has gain, and stability is strong, is subject to damping to affect little feature.
For realizing above object, the invention provides the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation, comprising:
A disc matrix;
Four non-intersection broach electrostatic drive electrodes;
Four intersection broach parallel-plate detecting electrodes;
Eight U-shaped beams;
Wherein, four drive electrodes and four detecting electrodes are respectively along the even alternate configurations in disc matrix outer shroud edge, and the end of four drive electrodes and four detecting electrodes is equipped with a U-shaped beam playing fixed supporting role;
Described micro-gyro utilizes the mode driver plate shape matrix vibration of parametric excitation, its driven-mode and sensed-mode match each other, by apply sinusoidal voltage in a pair of non-intersection broach electrostatic drive electrodes, produce the vibration of disc matrix at driven-mode by fringing field effect; When have perpendicular to disc matrix bottom turning rate input time, under corioliseffect, the resonance manner of disc matrix can change to sensed-mode from driven-mode; Intersect the variation of the inductance capacitance between broach parallel-plate detecting electrode by test disks shape matrix, just can detection of vertical in the angular velocity size of disc matrix base plane.
Preferably, described disc matrix material is monocrystalline silicon, a broach of even configuration driven electrode and detecting electrode on it, wherein: in drive electrode structure, comb electrodes corresponding in plate-shaped base body forms the non-comb structure that intersects with the electrode of other both sides; In detector electrode structure, in plate-shaped base body, corresponding comb electrodes and the electrode formation of both sides are in addition intersected broach parallel-plate structure.
Preferably, described drive electrode material is monocrystalline silicon, deposits layer of metal or adopt ion doping mode to form required electrode on it; Described drive electrode adopts static type of drive, specifically, is to utilize fringing field effect to produce the vibration of disc matrix at driven-mode, and its structure is non-intersection comb structure.
Preferably, described detecting electrode material is monocrystalline silicon, deposits layer of metal or adopt ion doping mode to form required electrode on it; Described detecting electrode utilizes capacitive sensing effect to detect, and its structure is for intersecting broach parallel-plate structure.
Preferably, described U-shaped girder construction is positioned at the end of drive electrode and detecting electrode, and its material is monocrystalline silicon, plays fixing, support disk shape matrix.
Preferably, when two relative drive electrodes in four described drive electrodes are applied in alternating voltage, produce the vibration of disc matrix at driven-mode by fringing field effect; In the time there is input angular velocity, the vibration shape of disc matrix changes to sensed-mode, and the responsive electric signal that utilizes detecting electrode place capacitive sensing effect to produce carries out input; Above-mentioned driven-mode and sensed-mode match each other.
Compared with prior art, the present invention has following beneficial effect:
1, affected by damping factor little, according to the theory of nonlinear oscillation, when gyroscope vibration, if external condition (temperature etc.) changes, material damping coefficient can change thereupon, but the size of the vibration amplitude of this micro-gyro in principal mode and ratio of damping is irrelevant, and the size of damping is just relevant with the threshold value of input voltage, damping is larger, and the minimum value of input voltage is also larger;
2, gyroscope bandwidth increases, and gyrostabilization is strengthened greatly;
3, gyrostatic sensitivity improves greatly, and the vibration amplitude that utilizes nonlinear vibration to obtain is more much bigger than the amplitude of direct simple harmonic oscillation;
4, the frequency of gyrostatic driving signal is the twice left and right of the natural frequency of its vibration, can reduce the impact of stray capacitance for detection signal, thereby can reduce gyrostatic noise, increases gyrostatic resolution.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 is the present embodiment perspective view;
Fig. 2 is the present embodiment planar structure schematic diagram;
Fig. 3 is the structural representation of the non-intersection broach of the present embodiment electrostatic drive electrodes;
Fig. 4 is the section of structure of the present embodiment intersection broach parallel-plate detecting electrode;
In figure: 1 is disc matrix, 2 is drive electrode, and 3 is detecting electrode, and 4 is U-shaped beam.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art further to understand the present invention, but not limit in any form the present invention.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
As shown in Figure 1, the present embodiment provides the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation, comprising:
A disc matrix 1;
Four non-intersection broach electrostatic drive electrodes 2;
Four intersection broach parallel-plate detecting electrodes 3;
Eight U-shaped beams 4;
Wherein, four drive electrodes 2 and four detecting electrodes 3 are respectively along the disc matrix 1 even alternate configurations in outer shroud edge, and the end of four drive electrodes 2 and four detecting electrodes 3 is equipped with a U-shaped beam 4 playing fixed supporting role.
In the present embodiment, the material of described disc matrix 1 is monocrystalline silicon, a broach of even configuration driven electrode 2 and detecting electrode 3 on it, wherein: in drive electrode 2 structures, comb electrodes corresponding on disc matrix 1 forms the non-comb structure that intersects with the electrode of other both sides; In detecting electrode 3 structures, on disc matrix 1, corresponding comb electrodes and the electrode formation of both sides are in addition intersected broach parallel-plate structure (as shown in Figure 1).
In the present embodiment, described drive electrode 2 materials are monocrystalline silicon, deposit layer of metal or adopt ion doping mode to form required electrode on it.Drive electrode 2 adopts static type of drive, specifically, is to utilize fringing field effect to produce the vibration of disc matrix 1 at driven-mode, and its structure is non-intersection comb structure (as shown in Figure 2).
In the present embodiment, described detecting electrode 3 materials are monocrystalline silicon, deposit layer of metal or adopt ion doping mode to form required electrode on it.Detecting electrode 3 utilizes capacitive sensing effect to detect, and its structure is for intersecting broach parallel-plate structure (as shown in Figure 3).
In the present embodiment, described U-shaped beam 4 structures are positioned at the end of drive electrode 2 and detecting electrode 3, and its material is monocrystalline silicon, play fixing, support disk shape matrix 1.
In the present embodiment, when two relative drive electrodes in four described drive electrodes 2 are applied in alternating voltage, produce the vibration of disc matrix 1 at driven-mode by fringing field effect; In the time there is input angular velocity, the vibration shape of disc matrix 1 changes to sensed-mode, and the responsive electric signal that utilizes detecting electrode 3 place's capacitive sensing effects to produce carries out input; Above-mentioned driven-mode and sensed-mode match each other.
The present invention utilizes the mode driver plate shape matrix 1 of parametric excitation to vibrate, and its driven-mode and sensed-mode match each other.In the time that two relative drive electrodes 2 in four described drive electrodes 2 are applied in alternating voltage, produce the vibration of disc matrix 1 at driven-mode by fringing field effect; When have perpendicular to disc matrix 1 bottom turning rate input time, under corioliseffect, the resonance manner of disc matrix 1 can change to sensed-mode from driven-mode; Intersect the variation of the inductance capacitance between broach parallel-plate electrode by test disks shape matrix 1, just can detection of vertical in the angular velocity size of disc matrix 1 base plane.
The micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation described in the present embodiment, use single crystal silicon substrate, adopt silicon body processing technology, by depositing layer of metal on the monocrystalline silicon broach corresponding or adopting ion doping mode to form needed drive electrode and detecting electrode; Finally, for dish type harmonic oscillator welding peripheral circuit and carry out final encapsulation and obtain GYROCHIP finished product.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (6)
1. the micromechanics solid of a static drive-type parametric excitation fluctuation dish type gyroscope, is characterized in that, comprising:
A disc matrix;
Four non-intersection broach electrostatic drive electrodes;
Four intersection broach parallel-plate detecting electrodes;
Eight U-shaped beams;
Wherein, four drive electrodes and four detecting electrodes are respectively along the even alternate configurations in disc matrix outer shroud edge, and the end of four drive electrodes and four detecting electrodes is equipped with a U-shaped beam playing fixed supporting role;
Described micro-gyro utilizes the mode driver plate shape matrix vibration of parametric excitation, its driven-mode and sensed-mode match each other, by apply sinusoidal voltage in a pair of non-intersection broach electrostatic drive electrodes, produce the vibration of disc matrix at driven-mode by fringing field effect; When have perpendicular to disc matrix bottom turning rate input time, under corioliseffect, the resonance manner of disc matrix can change to sensed-mode from driven-mode; By the variation of the inductance capacitance between test disks shape matrix intersection broach parallel-plate detecting electrode, detection of vertical is in the angular velocity size of disc matrix base plane.
2. the micromechanics solid of a kind of static drive-type according to claim 1 parametric excitation fluctuation dish type gyroscope, it is characterized in that, described disc matrix material is monocrystalline silicon, a broach of even configuration driven electrode and detecting electrode on it, wherein: in drive electrode structure, comb electrodes corresponding in plate-shaped base body forms the non-comb structure that intersects with the electrode of other both sides; In detector electrode structure, in plate-shaped base body, corresponding comb electrodes and the electrode formation of both sides are in addition intersected broach parallel-plate structure.
3. the micromechanics solid of a kind of static drive-type according to claim 2 parametric excitation fluctuation dish type gyroscope, is characterized in that, described drive electrode material is monocrystalline silicon, deposits layer of metal or adopt ion doping mode to form required electrode on it; Described drive electrode adopts static type of drive, is to utilize fringing field effect to produce the vibration of disc matrix at driven-mode, and its structure is non-intersection comb structure.
4. the micromechanics solid of a kind of static drive-type according to claim 2 parametric excitation fluctuation dish type gyroscope, is characterized in that, described detecting electrode material is monocrystalline silicon, deposits layer of metal or adopt ion doping mode to form required electrode on it; Described detecting electrode utilizes capacitive sensing effect to detect, and its structure is for intersecting broach parallel-plate structure.
5. according to the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation described in claim 1-4 any one, it is characterized in that, described U-shaped girder construction is positioned at the end of drive electrode and detecting electrode, and its material is monocrystalline silicon, plays fixing, support disk shape matrix.
6. according to the micromechanics solid fluctuation dish type gyroscope of a kind of static drive-type parametric excitation described in claim 1-4 any one, it is characterized in that, when two relative drive electrodes in four described drive electrodes are applied in alternating voltage, produce the vibration of disc matrix at driven-mode by fringing field effect; In the time there is input angular velocity, the vibration shape of disc matrix changes to sensed-mode, and the responsive electric signal that utilizes detecting electrode place capacitive sensing effect to produce carries out input; Above-mentioned driven-mode and sensed-mode match each other.
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Cited By (5)
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| CN104457726A (en) * | 2014-11-27 | 2015-03-25 | 歌尔声学股份有限公司 | Three-axis micro-electromechanical gyroscope |
| CN106597839A (en) * | 2016-12-08 | 2017-04-26 | 东南大学 | MEMS gyro automatic modal matching control device and method based on negative stiffness effect |
| CN106767747A (en) * | 2016-12-28 | 2017-05-31 | 清华大学 | A kind of digital rate integrating gyroscope control method and platform based on parametric excitation |
| US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
| CN110672081A (en) * | 2019-08-30 | 2020-01-10 | 北京时代民芯科技有限公司 | Large-capacitance annular resonant micromechanical gyroscope |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104457726A (en) * | 2014-11-27 | 2015-03-25 | 歌尔声学股份有限公司 | Three-axis micro-electromechanical gyroscope |
| CN104457726B (en) * | 2014-11-27 | 2017-07-04 | 歌尔股份有限公司 | A kind of three axis microelectromechanicdevice gyroscopes |
| US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
| CN106597839A (en) * | 2016-12-08 | 2017-04-26 | 东南大学 | MEMS gyro automatic modal matching control device and method based on negative stiffness effect |
| CN106597839B (en) * | 2016-12-08 | 2019-04-09 | 东南大学 | A kind of MEMS gyro automatic modality matching control apparatus and method based on negative stiffness effects |
| CN106767747A (en) * | 2016-12-28 | 2017-05-31 | 清华大学 | A kind of digital rate integrating gyroscope control method and platform based on parametric excitation |
| CN106767747B (en) * | 2016-12-28 | 2019-09-27 | 清华大学 | A kind of digital rate integrating gyroscope control method and platform based on parametric excitation |
| CN110672081A (en) * | 2019-08-30 | 2020-01-10 | 北京时代民芯科技有限公司 | Large-capacitance annular resonant micromechanical gyroscope |
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Application publication date: 20140528 |