CN103834927A - Method for judging magnet performance - Google Patents
Method for judging magnet performance Download PDFInfo
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- CN103834927A CN103834927A CN201410097487.XA CN201410097487A CN103834927A CN 103834927 A CN103834927 A CN 103834927A CN 201410097487 A CN201410097487 A CN 201410097487A CN 103834927 A CN103834927 A CN 103834927A
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Abstract
The invention provides a method for judging magnet performance. Since the magnet performance is reflected in magnetic field intensity, if the magnetic field is reduced, the ignition efficiency can be reduced, and when the ignition test is performed under the action of the argon with the lowest flow required for the ignition in the magnetic field, the successful ignition means that the magnetic field intensity brought by the magnet is not reduced, namely the magnet performance meets the demand; the unsuccessful ignition means that the magnetic field intensity of the magnet is reduced, the magnet performance is abnormal, whether the magnet performance is abnormal can be fast judged without replacing RF (radio frequency).
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of method that judges magnet performance.
Background technology
Physical vapor deposition (Physical Vapor Deposition, PVD) in, sputter coating ultimate principle is under the vacuum condition of argon filling (Ar) gas, make argon gas carry out glow discharge, at this moment argon (Ar) atomic ionization becomes argon ion (Ar+), argon ion is under the effect of electrical forces, accelerate the cathode targets that bombardment is made with plating material, target can be sputtered out and deposit to the surface of wafer.Wherein sputter comprises by radio frequency generators (RF Generator) and causes the radio-frequency sputtering of glow discharge and caused the magnetron sputtering of glow discharge by magnet (Magnet) magnetic control.
In prior art, forming the physical vapor deposition chamber of TIN has RF to have again Magnet, both actings in conjunction by Ar igniting (Ignition) thus anticathode target bombards, and then at the surface deposition film of wafer.Wherein, Magnet is arranged on the rear of target, for catching and limit the electronics that is located at target material surface.This design can improve the bombardment rate of target, concrete, and because argon (Ar) atom is to need electronics to collide with it could form argon ion, argon ion can bombard by anticathode target.Because the density of electronics increases, improve the probability of electronics and ar atmo secondary collision, also just can improve the efficiency that increases igniting.
But; in prior art; the equipment board that the is used to form TIN prompting " power supply exists abnormal (DC Power Fault) " that often can give the alarm causes carrying out normal physical vapor deposition reaction; cause equipment board out of service, even can make to be positioned at the product rejection of equipment board inside.
The reason that produces above-mentioned alarm may be that RF exists extremely, may be also that Magnet exists extremely, and magnetic does not reach by force requirement.And in prior art, cannot distinguish the specifically problem of RF or the problem of Magnet, and be merely able to attempt by changing RF, look at whether can address the above problem.This method is extremely lost time, and the inefficiency of dealing with problems, and is unfavorable for producing.Therefore, how judgement is that RF or Magnet exist and extremely carry out problem debug targetedly and just become those skilled in the art and be badly in need of one of technical problem solving fast.
Summary of the invention
The object of the present invention is to provide a kind of method that judges magnet performance, can judge fast whether magnet performance meets the requirements.
Whether to achieve these goals, the present invention proposes a kind of method that judges magnet performance, meet the requirements for the magnet performance that judges Pvd equipment, described method comprises step:
Flow into the argon gas of the required minimum flow of igniting;
Keep the power of pre-sizing;
Light a fire, if light a fire successfully, magnet performance meets the requirements; If loss of ignition, magnet performance exists abnormal.
Further, the required minimum flow of the igniting of described argon gas is more than or equal to 20sccm.
Further, the predetermined magnitude range of described power is to be greater than 500W.
Further, when flowing into described argon gas, also flow into the nitrogen of predetermined amount of flow.
Further, the flow range of described nitrogen is 20sccm～120sccm.
Further, described reaction pressure scope is 2mT～6mT.
Further, be more than or equal to 7s described ignition time.
Compared with prior art, beneficial effect of the present invention is mainly reflected in: because magnet performance is embodied in magneticstrength, if magneticstrength declines to some extent, can cause ignition effectiveness to decline, in the time that the argon gas of the required minimum flow of inflow igniting carries out light-off trial, if can light a fire successfully, illustrate that the magneticstrength that magnet brings does not decline, be that magnet performance meets the requirements, if can not light a fire successfully, the magneticstrength that magnet is described declines, the performance of magnet exists abnormal, whether thereby judging fast magnet performance exists extremely, attempt without changing RF.
Brief description of the drawings
Fig. 1 is the schema that judges the method for magnet performance in one embodiment of the invention.
Embodiment
Below in conjunction with schematic diagram, the method for judgement magnet performance of the present invention is described in more detail, the preferred embodiments of the present invention are wherein represented, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to about system or about the restriction of business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with way of example, the present invention is more specifically described with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Please refer to Fig. 1, in the present embodiment, whether a kind of method that judges magnet performance, meet the requirements for the magnet performance that judges Pvd equipment, and described method comprises step:
S100: the argon gas that flows into the required minimum flow of igniting;
The required minimum flow of igniting of described argon gas is more than or equal to 20sccm, for example, be 50sccm; In the present embodiment, when flowing into described argon gas, also flow into the nitrogen of predetermined amount of flow, for increasing reaction pressure, because reaction pressure also can affect igniting success or not, in order objectively to react the performance of magnet, therefore only change argon flow amount, other factors are consistent while all needing with normal reaction, the flow range of described nitrogen is 20sccm～120sccm, for example, be 100sccm; Described reaction pressure scope is 2mT～6mT, for example, be 4mT.
S200: the power that keeps pre-sizing;
The predetermined magnitude range of described power is to be greater than 500W, for example, be 6500W, is used to the argon ion of formation to increase energy.
S300: light a fire, if light a fire successfully, magnet performance meets the requirements; If loss of ignition, magnet performance exists abnormal.
In step S300, should keep being more than or equal to ignition time 7s, time is too short, cannot light a fire successfully, ensureing that other igniting factors all can light a fire when successful, because argon flow amount has reduced, if the magneticstrength that magnet provides declines, just can cause loss of ignition, thereby judge according to igniting success or not whether magnet performance meets the requirements.
To sum up, in the method for the judgement magnet performance providing in the embodiment of the present invention, because magnet performance is embodied in magneticstrength, if magneticstrength declines to some extent, can cause ignition effectiveness to decline, in the time that the argon gas of the required minimum flow of inflow igniting carries out light-off trial, if can light a fire successfully, illustrate that the magneticstrength that magnet brings does not decline, be that magnet performance meets the requirements, if can not light a fire successfully, the magneticstrength that magnet is described declines, the performance of magnet exists abnormal, whether thereby judging fast magnet performance exists extremely, attempt without changing RF.
Above are only the preferred embodiments of the present invention, the present invention is not played to any restriction.Any person of ordinary skill in the field; not departing from the scope of technical scheme of the present invention; the technical scheme that the present invention is disclosed and technology contents make any type of variations such as replacement or amendment that are equal to; all belong to the content that does not depart from technical scheme of the present invention, within still belonging to protection scope of the present invention.
Claims (7)
1. whether judge a method for magnet performance, meet the requirements for the magnet performance that judges Pvd equipment, described method comprises step:
Flow into the argon gas of the required minimum flow of igniting;
Keep the power of pre-sizing;
Light a fire, if light a fire successfully, magnet performance meets the requirements; If loss of ignition, magnet performance exists abnormal.
2. the method for judgement magnet performance as claimed in claim 1, is characterized in that, the required minimum flow of igniting of described argon gas is more than or equal to 20sccm.
3. the method for judgement magnet performance as claimed in claim 2, is characterized in that, the predetermined magnitude range of described power is to be greater than 500W.
4. the method for judgement magnet performance as claimed in claim 3, is characterized in that, also flows into the nitrogen of predetermined amount of flow when flowing into described argon gas.
5. the method for judgement magnet performance as claimed in claim 4, is characterized in that, the flow range of described nitrogen is 20sccm～120sccm.
6. the method for judgement magnet performance as claimed in claim 5, is characterized in that, described reaction pressure scope is 2mT～6mT.
7. the method for judgement magnet performance as claimed in claim 1, is characterized in that, is more than or equal to 7s described ignition time.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410097487.XA CN103834927B (en) | 2014-03-17 | 2014-03-17 | The method judging Magnet performance |
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| CN201410097487.XA CN103834927B (en) | 2014-03-17 | 2014-03-17 | The method judging Magnet performance |
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| CN103834927B CN103834927B (en) | 2016-08-17 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040140205A1 (en) * | 1997-05-08 | 2004-07-22 | Jianming Fu | Rotational and reciprocal radial movement of a sputtering magnetron |
| CN101595238A (en) * | 2006-06-07 | 2009-12-02 | 朗姆研究公司 | Detect the method and apparatus of the faulty condition of plasma processing reactor |
| CN102027576A (en) * | 2008-05-12 | 2011-04-20 | 朗姆研究公司 | Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations |
| CN102403191A (en) * | 2010-09-14 | 2012-04-04 | 中微半导体设备(上海)有限公司 | Air leakage detecting method for reaction cavity and control method for vacuum reactor |
-
2014
- 2014-03-17 CN CN201410097487.XA patent/CN103834927B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040140205A1 (en) * | 1997-05-08 | 2004-07-22 | Jianming Fu | Rotational and reciprocal radial movement of a sputtering magnetron |
| CN101595238A (en) * | 2006-06-07 | 2009-12-02 | 朗姆研究公司 | Detect the method and apparatus of the faulty condition of plasma processing reactor |
| CN102027576A (en) * | 2008-05-12 | 2011-04-20 | 朗姆研究公司 | Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations |
| CN102403191A (en) * | 2010-09-14 | 2012-04-04 | 中微半导体设备(上海)有限公司 | Air leakage detecting method for reaction cavity and control method for vacuum reactor |
Non-Patent Citations (1)
| Title |
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| 陈建国等: "射频-直流等离子体增强化学气相沉积设备的研制", 《真空与低温》 * |
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| CN103834927B (en) | 2016-08-17 |
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