CN103855049A - Intelligent probe card stylus pressure control system and method - Google Patents

Intelligent probe card stylus pressure control system and method Download PDF

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Publication number
CN103855049A
CN103855049A CN201410118188.XA CN201410118188A CN103855049A CN 103855049 A CN103855049 A CN 103855049A CN 201410118188 A CN201410118188 A CN 201410118188A CN 103855049 A CN103855049 A CN 103855049A
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setting unit
test formula
value
pin
submodule
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CN201410118188.XA
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CN103855049B (en
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沈茜
莫保章
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Shanghai Huali Microelectronics Corp
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Shanghai Huali Microelectronics Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/14Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67282Marking devices

Abstract

The invention discloses an intelligent probe card stylus pressure control system and method. The control method comprises the following steps that before starting a testing program execution unit, a data extraction submodule respectively extracts stylus pressure values of a testing program setup unit and a stylus pressure detection setup unit that the testing program need to be executed at present; a judgment submodule judges whether the stylus pressure values of the testing program execution unit and the stylus pressure detection setup unit are the same, if the stylus pressure values are the same, the testing program execution unit is informed to start the testing program, and if the stylus pressure values are different, a processing submodule sets the stylus pressure value of the stylus pressure detection setup unit to be the same as that of the testing program setup unit. Therefore, when a machine table is controlled to be tested, stylus pressure setup parameters of a probe card can be detected, and data abnormity caused by artificial wrong modification is avoided.

Description

A kind of intelligent probe card pin pressure control system and control method
Technical field
The present invention relates to microelectronics technical field of measurement and test, more particularly, relate to a kind of intelligent probe card pin pressure control system and control method.
Background technology
Semiconductor process techniques is advanced by leaps and bounds in recent years, and leading Moore's Law is estimated rule several years, and present stage drive ons boldly below to 32 nanometers.Product is stressed compact at present, volume is more and more less, function is more and more stronger for integrated circuit (Integrated Circuit is called for short IC), and number of pins is more and more, in order to reduce the shared area of chip package and to improve IC usefulness, present stage flip-chip (Flip Chip) mode encapsulates be generally applied to drawing chip, chipset, memory and central processing unit (Central Processing Unit is called for short CPU) etc.Above-mentioned high-order packaged type unit price is high, if can carry out chip testing before encapsulation, finds that there is defective products, carries out mark, until the defective products of these marks is given up before back segment packaging technology, can save unnecessary packaging cost.Thus, on silicon chip, the probe test of chip is that preliminary survey becomes an important operation in ic manufacturing process.
In probe test process, its process of measurement is being played the part of extremely important role.Because the result of preliminary survey has played the effect of forming a connecting link, preliminary survey result and pulse code modulation (Pulse Code Modulation, be called for short PCM) measurement result can give silicon chip production line feed back rich for stabilizing and increasing the extremely valuable information of conforming product rate and product quality.Meanwhile, preliminary survey data, for controlling conforming product rate, control of product quality QC level and controlling the whole production cost of product a rational level, have the effect of not replacing.
Probe is a kind of test interface, mainly naked core is tested, and directly directly contacts with weld pad or projection on chip by the probe in probe, draws chip signal, then coordinates peripheral test instrument and software control to reach the object of automatic measurement.
Refer to Fig. 1, Fig. 1 is the structural representation of prior art middle probe card pin pressure control system.As shown in the figure, in conventionally test process, board internal control module (FWK) is controlled respectively the arrange module, pin of test formula and is pressed to survey and module and other formula are set parameter and the process conditions setting of module etc. are set, and sends the information of control command.Because the pin in current board is pressed pin pressure (the Over Driver that surveys the inner setting of formula (prober recipe), being called for short OD) the inner pin arranging of parameter and test formula (test recipe) presses parameter to input respectively, it is a variable that the pin that particularly pin presses detection formula inside to arrange is pressed parameter, can change with artificial setting, therefore, if pin presses the pin of surveying the inner setting of formula to press parameter to press parameter not mate with the inner pin arranging of test formula, test data there will be extremely; OD is excessive, can probe acupuncture treatment scope exceed the scope of can having an acupuncture treatment, if pin presses OD too small, can cause the unsettled result of acupuncture treatment test.
For example, carrying out responsive small resistor test result, if two OD values are not identical,, from after section sometime, it is large that the data exception of test becomes, and presses at inquiry OD(pin) after, just find that pin presses the OD value surveyed in setting unit to be made into 30 microns by original 45 microns, because this has tested a period of time, affect multiple batches of (lot) products and be not found, have a strong impact on the time of board production capacity and test cost.
Summary of the invention
Main order of the present invention is to provide a kind of intelligent probe card pin pressure control system, in can intelligentized control board test process, control OD changes in unknowable situation, guarantee that probe OD(pin presses) correctness that arranges, does not cause unnecessary abnormal of data with artificial bug patch.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of intelligent probe card pin pressure control system, comprises that board internal control unit, test formula setting unit, test formula performance element, pin pressure are surveyed setting unit and pin is pressed detection performance element; Described board internal control unit also comprises parameter adaptation module between formula, and described adaptation module comprises data extraction submodule, judges submodule and processes submodule; Data are extracted submodule and are carried out the described test formula setting unit of test formula and the OD value of pin pressure detection setting unit for extracting respectively current need; Judge that whether submodule is identical for judging the OD value of described test formula setting unit and pin pressure detection setting unit, obtains judged result; Process submodule according to described judged result, described pin presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit.
Preferably, described control system also comprises alarm unit, and described board internal control unit, according to the not identical result that judges that submodule draws, is controlled described alarm unit and reported to the police.
Preferably, described board internal control unit and test formula setting unit and test formula setting unit are made up of host computer+slave computer framework; Wherein, slave computer is Programmable Logic Controller.
For achieving the above object, the present invention also comprises that another technical scheme is as follows:
A control method that adopts above-mentioned intelligent probe card pin pressure control system, it comprises the steps:
Step S1: starting before described test formula performance element, described data are extracted submodule and extracted respectively described test formula setting unit and the pin that current need carry out test formula and press the OD value of surveying in setting unit;
Step S2: judge that submodule judges that whether the OD value in described test formula setting unit and pin pressure detection setting unit is identical, if identical, notifies described test formula performance element can start described test formula; If different, execution step S3;
Step S3: the described pin of described processing submodule presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit.
Preferably, described step S3 specifically comprises the steps:
Step S31: described processing submodule starts alert program;
Step S32: described pin presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit;
Step 33: notify described test formula performance element can start described test formula.
Can find out from technique scheme, the present invention, by increasing parameter adaptation module (ODconstrain function) between formula, has realized the accuracy of board test execution unit acquired results data.
Brief description of the drawings
Figure 1 shows that the structural representation of prior art middle probe card pin pressure control system
Figure 2 shows that the structural representation of intelligent probe card pin pressure control system in the embodiment of the present invention
Figure 3 shows that the schematic flow sheet of intelligent probe card pin pressure-controlled method in the embodiment of the present invention
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Refer to Fig. 2, Figure 2 shows that the structural representation of intelligent probe card pin pressure control system in the embodiment of the present invention.As shown in the figure, in embodiments of the present invention, with prior art systems, this intelligent probe card pin pressure control system, comprises that board internal control unit, test formula setting unit, test formula performance element, pin pressure are surveyed setting unit and pin is pressed detection performance element.
Unlike the prior art, this board internal control unit can also comprise parameter adaptation module between formula, and this adaptation module comprises data extraction submodule, judges submodule and processes submodule; Data are extracted submodule and are carried out the test formula setting unit of test formula and the OD value of pin pressure detection setting unit for extracting respectively current need; Judge that whether submodule is identical for judging the OD value of test formula setting unit and pin pressure detection setting unit, obtains judged result; This processing submodule can be according to judged result, and pin presses the OD value of surveying setting unit to be set to identical with the OD value of test formula setting unit.In further embodiments, this board internal control unit can be according to judging that not identical result control alarm unit that submodule draws reports to the police, and notifies this board of engineer cannot proper testing, needs engineer to confirm; Whether engineer inspection's pin presses the detection OD value of setting unit identical with the OD value of test formula setting unit; If really different, this board internal control unit presses the OD value of surveying setting unit to be arranged to identical with the OD value of test formula setting unit on pin.
After confirming that pin presses the detection OD value of setting unit identical with the OD value of test formula setting unit, can notify test formula performance element to start ensuing test formula, can ensure like this accuracy of test result.
It should be noted that the probe pin pressure control system that the present invention proposes can be based upon some control system of current board employing as exploitation basis.For example, board internal control unit and test formula setting unit and test formula setting unit can be made up of host computer+slave computer framework; Wherein, slave computer is Programmable Logic Controller.
In embodiments of the present invention, between formula, parameter adaptation module can be called in inner fwk file at board, increases OD parameter adaptation (OD constrain) function, and in test process, board is can directly call inner fwk file to test.Wherein, test formula is divided into pin and presses the test formula performance element of surveying performance element and board, when the OD value that only arranges in said two units is identical, board just can enter proper testing, otherwise there will be alarm signal, need to stop test, engineer need to check concrete reason, so just can not cause the abnormal of data.
Refer to Fig. 3, Figure 3 shows that the schematic flow sheet of intelligent probe card pin pressure-controlled method in the embodiment of the present invention.As shown in the figure, the method specifically comprises the steps:
Step S1: starting before test formula performance element or carrying out in test formula process, data are extracted submodule and extracted respectively test formula setting unit and the pin that current need carry out test formula and press the OD value of surveying in setting unit.Conventionally, it is to be safeguarded by different engineers that test formula setting unit and pin are pressed the OD value of surveying in setting unit, especially easily not identical.
Step S2: judge that submodule judges that whether the OD value in test formula setting unit and pin pressure detection setting unit is identical, if identical, notice test formula performance element can start test formula; If different, execution step S3;
Step S3: the described pin of described processing submodule presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit.
In an embodiment of the present invention, step S3 can specifically comprise the steps:
Step S31: described processing submodule starts alert program;
Step S32: described pin presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit;
Step 33: notify described test formula performance element can start described test formula.
It should be noted that, for ensureing that test formula normally carries out increased OD parameter adaptation (OD constrain) function, preferably, be to complete before startup test formula performance element; Or, in execution test formula process, also can regularly detect pin and press whether survey the OD value of setting unit identical with the OD value of test formula setting unit, change in unknowable situation with the OD value of getting rid of in pin pressure detection setting unit, the situation that board cannot proper testing.
Above-described is only the preferred embodiments of the present invention; described embodiment is not in order to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization specification of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.

Claims (5)

1. an intelligent probe card pin pressure control system, comprising: board internal control unit, test formula setting unit, test formula performance element, pin are pressed and surveyed setting unit and pin pressure detection performance element; It is characterized in that, described board internal control unit also comprises parameter adaptation module between formula, and described adaptation module comprises:
Data are extracted submodule, carry out described test formula setting unit and the pin of test formula press the OD value of surveying setting unit for extracting respectively current need;
Judge submodule, judge that whether the OD value in described test formula setting unit and pin pressure detection setting unit is identical, obtain judged result;
Process submodule, according to described judged result, described pin presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit.
2. intelligent probe card pin pressure control system as claimed in claim 1, is characterized in that, also comprises alarm unit, and the not identical result that described board internal control unit draws according to described judgement submodule is controlled described alarm unit and reported to the police.
3. intelligent probe card pin pressure control system as claimed in claim 1, is characterized in that, described board internal control unit and test formula setting unit and test formula setting unit are made up of host computer+slave computer framework; Wherein, slave computer is Programmable Logic Controller.
4. a control method that adopts intelligent probe card pin pressure control system described in claim 1, is characterized in that, comprises the steps:
Step S1: starting before described test formula performance element, described data are extracted submodule and extracted respectively described test formula setting unit and the pin that current need carry out test formula and press the OD value of surveying in setting unit;
Step S2: judge submodule, judge that whether the OD value in described test formula setting unit and pin pressure detection setting unit is identical, if identical, notify described test formula performance element can start described test formula; If different, execution step S3;
Step S3: the described pin of described processing submodule presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit.
5. intelligent probe card pin pressure-controlled method as claimed in claim 4, is characterized in that, described step S3 specifically comprises the steps:
Step S31: described processing submodule starts alert program;
Step S32: described pin presses the OD value of surveying setting unit to be set to identical with the OD value of described test formula setting unit;
Step 33: notify described test formula performance element can start described test formula.
CN201410118188.XA 2014-03-27 2014-03-27 A kind of intelligent probe card pin pressure control system and control method Active CN103855049B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105699834A (en) * 2016-01-15 2016-06-22 上海华虹宏力半导体制造有限公司 Probe card detection method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198273B1 (en) * 1996-11-12 2001-03-06 Advantest Corporation IC tester simultaneously testing plural ICS
US20040124519A1 (en) * 2002-10-10 2004-07-01 Yu Zhou Contact structure and production method thereof and probe contact assembly using same
CN101069277A (en) * 2004-12-24 2007-11-07 飞而康公司 A probe card manufacturing method including sensing probe and the probe card, probe card inspection system
CN103135022A (en) * 2011-11-23 2013-06-05 上海华虹Nec电子有限公司 Method for automatically detecting contact characteristic of probe card in test program
CN103207293A (en) * 2012-01-12 2013-07-17 旺矽科技股份有限公司 Correction method and correction device for probe pressure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198273B1 (en) * 1996-11-12 2001-03-06 Advantest Corporation IC tester simultaneously testing plural ICS
US20040124519A1 (en) * 2002-10-10 2004-07-01 Yu Zhou Contact structure and production method thereof and probe contact assembly using same
CN101069277A (en) * 2004-12-24 2007-11-07 飞而康公司 A probe card manufacturing method including sensing probe and the probe card, probe card inspection system
CN103135022A (en) * 2011-11-23 2013-06-05 上海华虹Nec电子有限公司 Method for automatically detecting contact characteristic of probe card in test program
CN103207293A (en) * 2012-01-12 2013-07-17 旺矽科技股份有限公司 Correction method and correction device for probe pressure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105699834A (en) * 2016-01-15 2016-06-22 上海华虹宏力半导体制造有限公司 Probe card detection method

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