CN103966548B - Mask plate, manufacturing method of mask plate and mask assembly with mask plate - Google Patents
Mask plate, manufacturing method of mask plate and mask assembly with mask plate Download PDFInfo
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- CN103966548B CN103966548B CN201410191585.XA CN201410191585A CN103966548B CN 103966548 B CN103966548 B CN 103966548B CN 201410191585 A CN201410191585 A CN 201410191585A CN 103966548 B CN103966548 B CN 103966548B
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- mask plate
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- mask
- plate body
- evaporation hole
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The embodiment of the invention provides a mask plate, a manufacturing method of the mask plate and a mask assembly with the mask plate, and relates to the technical field of displaying; the uniformity of vapor deposition can be improved, so that the displaying effect is improved. The mask plate comprises a first sub mask plate and a second sub mask plate, wherein each of the first and second sub mask plates comprises a mask plate body and a vapor deposition hole formed in the mask plate body; the vapor deposition holes in the first and second sub mask plates are small in size and completely overlapped; the mask plate bodies of the first and second sub mask plates are made from plastics with predetermined rigidity and are 5-150 microns in thickness. The mask plate is used for preparing an organic material layer in a display device.
Description
Technical field
The present invention relates to technique of display field, particularly relate to a kind of mask plate and preparation method thereof, mask assembly.
Background technology
Organic Light Emitting Diode (Organic Light Emitting Diode, be called for short OLED) is a kind of electroluminescent device of organic thin film, and it has and easily forms the advantages such as flexible structure, visual angle be wide; Therefore, the technique of display of Organic Light Emitting Diode is utilized to become a kind of important technique of display.
The full-color display of OLED generally comprises the independent luminous or white light OLED of R (red) G (green) B (indigo plant) sub-pixel in conjunction with modes such as color filter films.Wherein, the luminescence of RGB sub-pixel independence adopts maximum color modes at present, and it utilizes the luminous organic material in sub-pixel unit independent luminous.
At present, organic light emitting material is all generally by carrying out vacuum vapor plating formation to organic materials.Wherein, for the independent luminous OLED of RGB sub-pixel, because each RGB sub-pixel unit adopts different luminous organic materials, thus the organic luminous layer of RGB sub-pixel unit needs to carry out evaporation respectively, generally adopt the mask plate of metallic substance to control the plated film position of organic materials on substrate in the process, then the corresponding organic materials of evaporation in each sub-pixel unit successively.
But; mask plate due to metallic substance has the restriction of its thickness; when organic material particles is incident with less angle of inclination; this part organic material particles can be covered by evaporation hole wall and cannot arrive substrate; thus making the edge evaporation thickness of each sub-pixel unit can be starkly lower than the middle evaporation thickness of sub-pixel unit, this is called " shade influence ".
On this basis; due to the mask plate properties of materials of metallic substance; in the process in evaporation hole making aforementioned mask plate, only energy accumulating to a certain extent time, evaporation hole could be formed thereon; in the process; as shown in Figure 1, usually can, due to the gathering of energy, the surface in evaporation hole 1012 be made not to be completely vertical; but the problem of angle can be there is, this just increases the weight of the generation of " shade influence " further.
Summary of the invention
Embodiments of the invention provide a kind of mask plate and preparation method thereof, mask assembly, can improve the homogeneity of evaporation, thus improve display effect.
For achieving the above object, embodiments of the invention adopt following technical scheme:
On the one hand, a kind of mask plate is provided, comprises: the first sub-mask plate and the second sub-mask plate; Described first sub-mask plate and described second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described first sub-mask plate and described second sub-mask plate is equal and completely overlapping;
Wherein, the material of the described mask plate body of described first sub-mask plate and described second sub-mask plate is the plastic material with redetermined rigidity, and thickness is 5 ~ 150 μm.
Preferably, the material of described mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
Preferably, the thickness of described first sub-mask plate and described second sub-mask plate is equal.
Preferred further, the thickness of described first sub-mask plate and described second sub-mask plate is 5 ~ 20 μm.
Based on above-mentioned, preferably, the spacing between described first sub-mask plate and described second sub-mask plate is 0 ~ 5 μm.
On the other hand, providing a kind of mask assembly, comprising above-mentioned mask plate and the mask frame for fixedly evening up described mask plate.
Preferably, described mask frame comprises the gripping portion being positioned at relative both sides, and described gripping portion clamps the relative both sides of the edge of described mask plate.
Again on the one hand, a kind of making method of mask plate is provided, comprises:
Using there is the plastic film of redetermined rigidity as the first mask plate body, evening up and being fixed on mask frame;
Evaporation hole is formed in the prospective region of described first mask plate body;
Using the described plastic film with redetermined rigidity as the second mask plate body, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole being positioned at described first mask plate body, described second mask plate body forms described evaporation hole;
Wherein, the described evaporation hole be positioned on described first mask plate body is completely overlapping with the described evaporation hole be positioned on described second mask plate body, and the thickness of described first mask plate body and described second mask plate body is 5 ~ 150 μm.
Preferably, the described prospective region at described first mask plate body forms evaporation hole, comprising: by laser technology, forms evaporation hole in the prospective region of described first mask plate body;
Describedly on described second mask plate body, form described evaporation hole, comprising: by laser technology, described second mask plate body forms described evaporation hole.
Preferred further, the material of described first mask plate body and described second mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
The invention process provides a kind of mask plate and preparation method thereof, mask assembly, and this mask plate comprises the first sub-mask plate and the second sub-mask plate; Described first sub-mask plate and described second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described first sub-mask plate and described second sub-mask plate is equal and completely overlapping; Wherein, the material of the described mask plate body of described first sub-mask plate and described second sub-mask plate is the plastic material with redetermined rigidity, and thickness is 5 ~ 150 μm.
On the one hand, by the material of mask plate body being chosen to be the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in hinge structure, when can improve the described evaporation hole of formation, the problem of the angle produced due to the gathering of energy and mask plate thickness produces " shade influence "; On the other hand, by arranging two sub-mask plates and the size in the evaporation hole of two sub-mask plates being set to equal and completely overlapping, the sub-mask plate of a sub-mask plate such as first away from evaporation substrate can be made to ensure only to make the incident deposition material in larger pitch angle (such as close to vertical angle) to enter and by the evaporation hole of the second sub-mask plate, in the process owing to avoiding the deposition material of all the other small angle inclination angle incidences to the impact of evaporation homogeneity, thus the homogeneity of evaporation can be improved, and then improve display effect.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The schematic diagram in the evaporation hole of the mask plate that Fig. 1 provides for prior art;
The structural representation one of a kind of mask plate that Fig. 2 provides for the embodiment of the present invention;
The structural representation two of a kind of mask plate that Fig. 3 provides for the embodiment of the present invention;
The structural representation of a kind of mask assembly that Fig. 4 provides for the embodiment of the present invention;
The schematic flow sheet of the making mask plate that Fig. 5 provides for the embodiment of the present invention.
Reference numeral:
10-mask plate; The sub-mask plate of 101-first; The sub-mask plate of 102-second; 1011-first mask plate body; 1012-evaporation hole; 1021-second mask plate body; The gripping portion of 201-mask frame.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiments provide a kind of mask plate 10, as shown in Figures 2 and 3, this mask plate 10 comprises: the first sub-mask plate 101 and the second sub-mask plate 102; Described first sub-mask plate 101 and described second sub-mask plate 102 include mask plate body and are arranged on the evaporation hole 1012 on described mask plate body; Described evaporation hole 1012 size on described first sub-mask plate 101 and described second sub-mask plate 102 is equal and completely overlapping.
Wherein, the material of the described mask plate body of described first sub-mask plate 101 and described second sub-mask plate 102 is the plastic material with redetermined rigidity, and thickness is 5 ~ 150 μm.
Here, the mask plate body of described first sub-mask plate 101 can be called the first mask plate body 1011, the mask plate body of described second sub-mask plate 102 is called the second mask plate body 1021.
It should be noted that, the first, be positioned at the described evaporation hole 1012 of described first sub-mask plate 101 and be positioned at described evaporation hole 1012 one_to_one corresponding of described second sub-mask plate 102.
Second, in the embodiment of the present invention, the material of described first mask plate body 1011 and described second mask plate body 1021 is, should not when carrying out organic materials evaporation, make this mask plate 10 produce the plastic material of deformation, that is: there is low thermal coefficient of expansion and there is the material of certain rigidity.
3rd, (can directly not contact the spacing between described first sub-mask plate 101 and described second sub-mask plate 102, also certain spacing can be had) limit, can make evenly to be as the criterion to the organic material layer on substrate by described evaporation hole 1012 evaporation.
4th, the accompanying drawing of all embodiments of the present invention all schematically shows the patterned layer relevant with inventive point, does not carry out illustrating or only showing part for the patterned layer irrelevant with inventive point.
Embodiments provide a kind of mask plate 10, comprising: the first sub-mask plate 101 and the second sub-mask plate 102; Described first sub-mask plate 101 and described second sub-mask plate 102 include mask plate body and are arranged on the evaporation hole 1012 on described mask plate body; Described evaporation hole 1012 size on described first sub-mask plate 101 and described second sub-mask plate 102 is equal and completely overlapping.Wherein, the material of the described mask plate body of described first sub-mask plate 101 and described second sub-mask plate 102 is the plastic material with redetermined rigidity, and thickness is 5 ~ 150 μm.
On the one hand, by the material of mask plate body being chosen to be the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in hinge structure, when can avoid the formation of described evaporation hole 1012, the problem of the angle produced due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by arranging two sub-mask plates and the size in the evaporation hole 1012 of two sub-mask plates being set to equal and completely overlapping, the sub-mask plate 101 of a sub-mask plate such as first away from evaporation substrate can be made to ensure only to make the incident deposition material in larger pitch angle (such as close to vertical angle) to enter and by the evaporation hole 1012 of the second sub-mask plate 102, in the process owing to avoiding the deposition material of all the other small angle inclination angle incidences to the impact of evaporation homogeneity, thus the homogeneity of evaporation can be improved, and then improve display effect.
Preferably, the material of described first mask plate body 1011 and described second mask plate body 1021 comprises at least one in polyimide, polycarbonate, polyetherimide.
Wherein, polyimide have that thermal expansivity is low (can 2 × 10
-5~ 3 × 10
-5/ DEG C between), high temperature resistant (400 DEG C can be reached), and it has the characteristics such as excellent mechanical property, high rigidity.
Polycarbonate to have thermal expansivity low by (3.8 × 10
-5/ DEG C), the heat-drawn wire of 135 DEG C, high strength, the characteristics such as high rigidity.
It is low by (5.6 × 10 that polyetherimide has thermal expansivity
-5/ DEG C), the heat-drawn wire of 200 DEG C, high strength, the characteristics such as high rigidity.
Because temperature in evaporate process generally can not more than 60 DEG C of degree, therefore, above-mentioned materials all can meet in evaporate process, to the demand of described mask plate 10 difficult deformation.
Preferably, as shown in Figure 3, the thickness of described first sub-mask plate 101 and described second sub-mask plate 102 is equal.
Like this, can by identical processing condition, described evaporation hole 1012 is formed in the same way in the same position of described first mask plate body 1011 and described second mask plate body 1021, thus form two piece of first identical sub-mask plate 101 and the second sub-mask plate 102, making processes is more simplified.
Preferred further, the thickness of described first sub-mask plate 101 and described second sub-mask plate 102 is 5 ~ 20 μm.
The mask plate of metallic substance can accomplish the thickness of 70 μm at present, and the embodiment of the present invention adopt there is certain rigidity plastic material as mask plate time, its thickness can be set as 5 ~ 20 μm, this can reduce greatly because the thickness of mask plate causes " shade influence ", thus can improve the homogeneity of evaporation further.
Based on above-mentioned, due to the described first sub-mask plate 101 of plastic material and the surface ratio of the second sub-mask plate 102 more coarse, described first sub-mask plate 101 and the second sub-mask plate 102 are not easy gaplessly to fit together completely, therefore, the embodiment of the present invention is preferably, between described first sub-mask plate 101 and described second sub-mask plate 102, there is spacing, and described spacing is preferably 0 ~ 5 μm.
Like this, both the surface ratio due to the first sub-mask plate 101 and the second sub-mask plate 102 can have been avoided more coarse and the problem that can not fit completely, also can avoid because this spacing is too large and make the deposition material partly entering the evaporation hole 1012 of the first sub-mask plate 101 cannot arrive the second sub-mask plate 101, thus causing the waste of deposition material.
The embodiment of the present invention additionally provides a kind of mask assembly, and this mask assembly comprises above-mentioned mask plate 10 and the mask frame for fixedly evening up described mask plate.
It should be noted that, first, the concrete shape of described mask frame is not limited herein, sub-for first of described mask plate 10 mask plate 101 and the second sub-mask plate 102 can be fixed and evened up, and in use do not make the described evaporation hole 1012 be positioned on described first sub-mask plate 101, with the described evaporation hole 1012 be positioned on described second sub-mask plate 102, relative movement occur.
Second, when there is spacing between the first sub-mask plate 101 and the second sub-mask plate 102 of described mask plate 10, can make, between the first sub-mask plate 101 and the second sub-mask plate 102, there is spacing by the ad hoc structure of described mask frame, specifically set according to practical situation.
Embodiments providing a kind of mask assembly, comprising above-mentioned mask plate 10 and the mask frame for fixedly evening up described mask plate.On the one hand, by the material of mask plate body being chosen to be the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in hinge structure, when can avoid the formation of described evaporation hole 1012, the problem of the angle produced due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by arranging two sub-mask plates and the size in the evaporation hole 1012 of two sub-mask plates being set to equal and completely overlapping, the sub-mask plate 101 of a sub-mask plate such as first away from evaporation substrate can be made to ensure only to make the incident deposition material in larger pitch angle (such as close to vertical angle) to enter and by the evaporation hole 1012 of the second sub-mask plate 102, in the process owing to avoiding the deposition material of all the other small angle inclination angle incidences to the impact of evaporation homogeneity, thus the homogeneity of evaporation can be improved, and then improve display effect.
Optionally, as shown in Figure 4, described mask frame comprises the gripping portion 201 being positioned at relative both sides, and described gripping portion 201 clamps the relative both sides of the edge of described mask plate 10.
Because mask plate all can be made into rectangle under normal circumstances, therefore, in embodiments of the present invention, only need just can even up fixing whole first sub-mask plate 101 and the second sub-mask plate 102 by the gripping portion 201 being positioned at relative both sides of described mask frame, thus make the assembling of the making of described mask frame and mask assembly more easy.
The embodiment of the present invention additionally provides a kind of making method of mask plate 10, and as shown in Figure 5, the method comprises the steps:
S10, using there is the plastic film of redetermined rigidity as the first mask plate body 1011, evening up and being fixed on mask frame.
The described plastic film with redetermined rigidity can be Kapton, or polycarbonate film, or polyetherimide film.
Described mask frame comprises the gripping portion 201 being positioned at relative both sides, and described gripping portion 201 makes described first mask plate body 1011 even up fixing by the relative both sides of the edge clamping described first mask plate body 1011.
S11, described first mask plate body 1011 prospective region formed evaporation hole 1012.
S12, will there is the plastic film of redetermined rigidity as the second mask plate body 1021, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole 1012 being positioned at described first mask plate body 1011, described second mask plate body 1021 forms described evaporation hole 1012.
Wherein, the described evaporation hole 1012 be positioned on described first mask plate body 1011 is completely overlapping with the described evaporation hole 1012 be positioned on described second mask plate body 1021, and the thickness of described first mask plate body 1011 and described second mask plate body 1021 is 5 ~ 150 μm.
Described second mask plate body 1021 is also fixed by the gripping portion 201 of above-mentioned mask frame evens up.
It should be noted that, the first, the method that the mask plate body of described plastic material is formed evaporation hole 1012 is not limited, being as the criterion in the described evaporation hole 1012 of formation fast and accurately.
Second, (can directly not contact the spacing between described first sub-mask plate 101 and described second sub-mask plate 102 herein, also certain spacing can be had) limit, can make evenly to be as the criterion to the organic material layer on substrate by described evaporation hole 1012 evaporation.
Embodiments provide a kind of making method of mask plate 10, comprising: using there is the plastic film of redetermined rigidity as the first mask plate body 1011, evening up and being fixed on mask frame; Evaporation hole 1012 is formed in the prospective region of described first mask plate body 1011; Using the described plastic film with redetermined rigidity as the second mask plate body 1021, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole 1012 being positioned at described first mask plate body 1011, described second mask plate body 1021 forms described evaporation hole 1012; Wherein, the described evaporation hole 1012 be positioned on described first mask plate body 1011 is completely overlapping with the described evaporation hole 1012 be positioned on described second mask plate body 1021, and the thickness of described first mask plate body 1011 and described second mask plate body 1021 is 5 ~ 150 μm.
On the one hand, by the material of the first mask plate body 1011 and the second mask plate body 1021 is chosen to be the plastic material with certain rigidity, and the thickness of the first mask plate body 1011 and the second mask plate body 1021 is rationally set, the mask plate of metallic substance in hinge structure, when can avoid the formation of described evaporation hole 1012, the problem of the angle produced due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by forming two sub-mask plates and the size in the evaporation hole 1012 of two sub-mask plates being set as equal and completely overlapping, the sub-mask plate 101 of a sub-mask plate such as first away from evaporation substrate can be made to ensure only to make the incident deposition material in larger pitch angle (such as close to vertical angle) to enter and by the evaporation hole 1012 of the second sub-mask plate 102, in the process owing to avoiding the deposition material of all the other small angle inclination angle incidences to the impact of evaporation homogeneity, thus the homogeneity of evaporation can be improved, and then improve display effect.
Based on above-mentioned, consider that laser boring has that speed is fast, efficiency is high, tolerance range is high etc. specific, thus, in the embodiment of the present invention, be preferably, by laser technology, form evaporation hole 1012 in the prospective region of described first mask plate body 1011; By laser technology, described second mask plate body 1021 forms described evaporation hole 1012.
Based on above-mentioned description, the embodiment of the present invention is described through by a specific embodiment process that above-mentioned mask plate 10 prepares the luminous organic material of OLED display, specifically comprises:
S101, make wherein a kind of homochromy sub-pixel unit such as red sub-pixel unit contraposition of the evaporation hole 1012 of described mask plate 10 and OLED display good, and carry out the evaporation of luminous organic material.
Wherein, the distribution of described evaporation hole 1012 on mask plate 10 need be identical with the arrangement of the homochromy sub-pixel unit of OLED display.
S102, complete S101 after, make described mask plate 10 move the distance of a sub-pixel unit to adjacent lines relative to described OLED display, then carry out the evaporation of the homochromy sub-pixel unit of the second such as luminous organic material of green sub-pixels unit.
S103, complete S102 after, make described mask plate 10 move the distance of a sub-pixel unit in the same direction to adjacent lines relative to described OLED display, then carry out the evaporation of the third homochromy sub-pixel unit such as luminous organic material of blue subpixels unit.
Certainly, above-mentioned steps S101-S103 only embodies the process of the luminous organic material preparing each sub-pixel unit, for active array type OLED display, also needed to form thin film transistor before step S101, anode, also needs to form negative electrode etc., no longer repeats at this after S103.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (9)
1. a mask plate, is characterized in that, comprising: the first sub-mask plate and the second sub-mask plate;
Described first sub-mask plate and described second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described first sub-mask plate and described second sub-mask plate is equal and completely overlapping;
Wherein, the material of the described mask plate body of described first sub-mask plate and described second sub-mask plate is the plastic material with redetermined rigidity, and the thickness of described first sub-mask plate and described second sub-mask plate is 5 ~ 20 μm.
2. mask plate according to claim 1, is characterized in that, the material of described mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
3. mask plate according to claim 1, is characterized in that, the thickness of described first sub-mask plate and described second sub-mask plate is equal.
4. the mask plate according to any one of claim 1-3, is characterized in that, the spacing between described first sub-mask plate and described second sub-mask plate is 0 ~ 5 μm.
5. a mask assembly, is characterized in that, comprises the mask plate described in any one of Claims 1-4 and the mask frame for fixedly evening up described mask plate.
6. mask assembly according to claim 5, is characterized in that, described mask frame comprises the gripping portion being positioned at relative both sides, and described gripping portion clamps the relative both sides of the edge of described mask plate.
7. a making method for mask plate, is characterized in that, comprising:
Using there is the plastic film of redetermined rigidity as the first mask plate body, evening up and being fixed on mask frame;
Evaporation hole is formed in the prospective region of described first mask plate body;
Using the described plastic film with redetermined rigidity as the second mask plate body, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole being positioned at described first mask plate body, described second mask plate body forms described evaporation hole;
Wherein, the described evaporation hole be positioned on described first mask plate body is completely overlapping with the described evaporation hole be positioned on described second mask plate body, and the thickness of described first mask plate body and described second mask plate body is 5 ~ 20 μm.
8. method according to claim 7, is characterized in that, the described prospective region at described first mask plate body forms evaporation hole, comprising:
By laser technology, form evaporation hole in the prospective region of described first mask plate body;
Describedly on described second mask plate body, form described evaporation hole, comprising:
By laser technology, described second mask plate body forms described evaporation hole.
9. the method according to claim 7 or 8, is characterized in that, the material of described first mask plate body and described second mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191585.XA CN103966548B (en) | 2014-05-07 | 2014-05-07 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
| PCT/CN2014/093819 WO2015169087A1 (en) | 2014-05-07 | 2014-12-15 | Mask plate, manufacturing method therefor and mask assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191585.XA CN103966548B (en) | 2014-05-07 | 2014-05-07 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
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| Publication Number | Publication Date |
|---|---|
| CN103966548A CN103966548A (en) | 2014-08-06 |
| CN103966548B true CN103966548B (en) | 2015-07-01 |
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| CN103966548B (en) * | 2014-05-07 | 2015-07-01 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
| CN108277455B (en) * | 2018-04-25 | 2020-11-17 | 京东方科技集团股份有限公司 | Mask plate assembly and preparation method thereof |
| CN116162893A (en) * | 2023-02-17 | 2023-05-26 | 京东方科技集团股份有限公司 | Mask plate and evaporation device |
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| JPH04341583A (en) * | 1991-05-17 | 1992-11-27 | Matsushita Electric Ind Co Ltd | Formation of pattern for synthetic resin thin film |
| JP2013021165A (en) * | 2011-07-12 | 2013-01-31 | Sony Corp | Mask for vapor deposition, manufacturing method of mask for vapor deposition, electronic element, and manufacturing method of electronic element |
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| CN103668054B (en) * | 2013-11-26 | 2015-10-21 | 北京遥测技术研究所 | A kind of mask frock of quartz micro mechanical sensor electrode evaporation |
| CN103966548B (en) * | 2014-05-07 | 2015-07-01 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
| CN203834005U (en) * | 2014-05-07 | 2014-09-17 | 京东方科技集团股份有限公司 | Mask plate and mask assembly |
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- 2014-05-07 CN CN201410191585.XA patent/CN103966548B/en active Active
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| US20040086639A1 (en) * | 2002-09-24 | 2004-05-06 | Grantham Daniel Harrison | Patterned thin-film deposition using collimating heated mask asembly |
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| CN103966548A (en) | 2014-08-06 |
| WO2015169087A1 (en) | 2015-11-12 |
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