CN104049361A - In-plane MEMS drive motion device - Google Patents
In-plane MEMS drive motion device Download PDFInfo
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- CN104049361A CN104049361A CN201410247514.7A CN201410247514A CN104049361A CN 104049361 A CN104049361 A CN 104049361A CN 201410247514 A CN201410247514 A CN 201410247514A CN 104049361 A CN104049361 A CN 104049361A
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- base frame
- electrothermal drive
- driving stem
- type electrothermal
- stock
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Abstract
The invention relates to an in-plane MEMS drive motion device. Two V-shaped electric heating drive arms (7) are adopted in cooperation with the lever principle, so that in-plane rotary operation is achieved more conveniently. The in-plane MEMS drive motion device is simple in structure, the rotating angle in a control plane can be more conveniently operated actually in the actual application process, and work efficiency is improved.
Description
Technical field
The present invention relates to a kind of interior MEMS actuation movement device.
Background technology
Variable optical attenuator is widely used in controlling or regulating the light intensity in optical communication system.For example, in optical communication net lasing light emitter, need to carry out regulation output light intensity by variable optical attenuator.Variable optical attenuator can be based on different technology, comprise waveguide index variation, beam blocking or deflection etc.In the variable optical attenuator of Micro Electro Mechanical System (MEMS), device based on static is modal method, by applying voltage, produce enough driving forces, this principle needs large size and high packaging cost, and patent " a kind of electrostatic drive MEMS distorting lens based on lever amplification principle " CN 101515065 B utilize four static actuating arms to drive the leverage outside its joint face to form two-dimentional MEMS scanning mirror.In variable optical attenuator, also there is minority to use electrothermal drive.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of based on electrothermal drive mode, adopts lever principle, realizes MEMS actuation movement device in the face that rotates control in face.
The present invention is in order to solve the problems of the technologies described above by the following technical solutions: the present invention has designed a kind of interior MEMS actuation movement device, comprises base frame, is arranged on the lip-deep power pad of base frame and is arranged on the motion framework in base frame; Motion framework comprises the first driving stem, the second driving stem, dwang, stock and two V-type electrothermal drive arms; Relatively and contrary being located at respectively on two limits relative on base frame of direction of motion, wherein, the two ends of each root V-type electrothermal drive arm are fixedly connected on respectively on base frame, and are electrically connected to power pad respectively for two V-type electrothermal drive arm summits; One end of the first driving stem and the wherein summit of a V-type electrothermal drive arm flexibly connect, the other end of the first driving stem and one end of dwang flexibly connect, the summit of one end of the second driving stem and another root V-type electrothermal drive arm flexibly connects, the other end of the second driving stem and the shaft of dwang flexibly connect, and the other end of dwang is fixedly connected with one end of stock.
As a preferred technical solution of the present invention: also comprise current isolating layer, current isolating layer is arranged between base frame and motion framework, and is arranged between base frame surface and power pad.
As a preferred technical solution of the present invention: the both sides of described V-type electrothermal drive arm comprise respectively at least one electrothermal drive beam being arranged side by side, after each root electrothermal drive beam series connection, be connected with described power pad.
As a preferred technical solution of the present invention: described stock is rigidity stock.
A kind of interior MEMS actuation movement device of the present invention adopts above technical scheme compared with prior art, has following technique effect:
(1) MEMS actuation movement device in the face of the present invention's design, adopt two V-type electrothermal drive arms to coordinate lever principle, convenient realization rotating operation in face, and in design surface of the present invention, MEMS actuation movement apparatus structure is simple, in actual application, the angle of being more convenient to the rotation in practical operation chain of command, work efficiency is improved;
(2) in the interior MEMS actuation movement device of the face of the present invention's design, also designed at the current isolating layer between base frame and motion framework, between base frame surface and power pad, for stopping that supply current flows into the structure of base frame, the control of impact to V-type electrothermal drive arm, further guaranteed, for the accurate control of rotating in face, work efficiency to be further improved;
(3) in the interior MEMS actuation movement device of the face of the present invention's design, for the both sides of V-type electrothermal drive arm, adopt and be arranged side by side at least one electrothermal drive beam, in actual application, can effectively improve the real-time control action of V-type electrothermal drive arm and efficiency;
(4) in the interior MEMS actuation movement device of the face of the present invention's design, for stock, adopt rigidity stock, there is certain rigidity, in rotation process, can there is not just rigid motion, do not deform, guaranteed the real-time of rotational action in face, and the serviceable life of device.
Accompanying drawing explanation
Fig. 1 is the floor map of MEMS actuation movement device in the face that designs of the present invention;
Fig. 2 is the perspective view of MEMS actuation movement device in the face that designs of the present invention;
Fig. 3 is the floor map of motion framework in MEMS actuation movement device in the face that designs of the present invention.
Wherein, 1. base frame, 2. power pad, 3. the first driving stem, 4. the second driving stem, 5. dwang, 6. stock, 7. V-type electrothermal drive arm.
Embodiment
Below in conjunction with Figure of description, the specific embodiment of the present invention is described in further detail.
As depicted in figs. 1 and 2, the present invention has designed a kind of interior MEMS actuation movement device, comprises base frame 1, is arranged on the lip-deep power pad 2 of base frame 1 and is arranged on the motion framework in base frame 1; Motion framework comprises the first driving stem 3, the second driving stem 4, dwang 5, stock 6 and two V-type electrothermal drive arms 7; Relatively and contrary being located at respectively on two limits relative on base frame 1 of direction of motion, wherein, the two ends of each root V-type electrothermal drive arm 7 are fixedly connected on respectively on base frame 1, and are electrically connected to power pad 2 respectively for two V-type electrothermal drive arm 7 summits; One end of the first driving stem 3 and the wherein summit of a V-type electrothermal drive arm 7 flexibly connect, one end of the other end of the first driving stem 3 and dwang 5 flexibly connects, the summit of one end of the second driving stem 4 and another root V-type electrothermal drive arm 7 flexibly connects, the shaft of the other end of the second driving stem 4 and dwang 5 flexibly connects, and the other end of dwang 5 is fixedly connected with one end of stock 6.MEMS actuation movement device in the face of the present invention's design, adopt two V-type electrothermal drive arms 7 to coordinate lever principle, convenient realization rotating operation in face, and in design surface of the present invention, MEMS actuation movement apparatus structure is simple, in actual application, the angle of being more convenient to the rotation in practical operation chain of command, work efficiency is improved.
On the basis of above technical scheme: also comprise current isolating layer, current isolating layer is arranged between base frame 1 and motion framework, and be arranged between base frame 1 surface and power pad 2, for stopping that supply current flows into the structure of base frame 1, the control of impact to V-type electrothermal drive arm 7, further guaranteed, for the accurate control of rotating in face, work efficiency to be further improved; And the both sides of described V-type electrothermal drive arm 7 comprise respectively at least one electrothermal drive beam being arranged side by side, after each root electrothermal drive beam series connection, be connected with described power pad 2, in actual application, can effectively improve the real-time control action of V-type electrothermal drive arm 7 and efficiency; Moreover, described stock 6 is rigidity stock 6, has certain rigidity, and just rigid motion can not occur in rotation process, does not deform, and has guaranteed the real-time of rotational action in face, and the serviceable life of device.
In the face of the present invention's design, MEMS actuation movement device is in actual application, design base frame 1, be arranged on the lip-deep power pad 2 of base frame 1 and current isolating layer and motion framework, motion framework is arranged in base frame 1, current isolating layer is arranged between base frame 1 and motion framework, base frame 1 adopts middle part hollow out design, there is good temperature conductivity, and in practical application, there is certain thickness, be generally greater than 200um, wherein, motion framework comprises the first driving stem 3, the second driving stem 4, dwang 5, stock 6 and two V-type electrothermal drive arms 7, two V-type electrothermal drive arm 7 summits are relative, and what direction of motion was contrary is located at respectively on two limits relative on base frame 1, as the summit of a V-type electrothermal drive arm 7 moves upward under the effect of actuating arm, the summit of another root V-type electrothermal drive arm 7 moves downward under the effect of actuating arm, wherein, the two ends of each root V-type electrothermal drive arm 7 are fixedly connected on respectively on base frame 1, and be electrically connected to power pad 2 respectively, wherein, the both sides of described V-type electrothermal drive arm 7 comprise respectively at least one electrothermal drive beam being arranged side by side, after each root electrothermal drive beam series connection, be connected with described power pad 2, one end of the first driving stem 3 and the wherein summit of a V-type electrothermal drive arm 7 flexibly connect, one end of the other end of the first driving stem 3 and dwang 5 flexibly connects, the summit of one end of the second driving stem 4 and another root V-type electrothermal drive arm 7 flexibly connects, the shaft of the other end of the second driving stem 4 and dwang 5 flexibly connects, the other end of dwang 5 is fixedly connected with one end of stock 6, described stock 6 adopts rigidity stock 6, in practical application, the other end of stock 6 can connect lens or MEMS micro mirror or catoptron.
In the face of the present invention's design, MEMS actuation movement device is in actual operation process, by power pad 2, provide electric current for two V-type electrothermal drive arms 7, and control size of current, the in the situation that of producing power consumption on V-type electrothermal drive arm 7, the temperature of V-type electrothermal drive arm 7 raises, its structure is subjected to displacement on axis, because two V-type electrothermal drive arm 7 summits are relative, and the setting that direction of motion is contrary, therefore, one of the direction of motion on two V-type electrothermal drive arm 7 summits makes progress, one downwards, and two V-type electrothermal drive arm 7 summits and the first driving stem 3, the second driving stem 4, and first driving stem 3, between the second driving stem 4 and dwang 5, adopt and flexibly connect, so motion on the reverse direction on two V-type electrothermal drive arm 7 summits, make the first driving stem 3, the second driving stem 4 and dwang 5 are out of shape under thrust at flexible connection mode, the rotation being driven in stock 6 generating planes that are attached thereto by dwang 5, be arranged on like this lens or MEMS micro mirror or the also interior rotation of generating plane thereupon of catoptron of stock 6 other ends, realize the final effect of MEMS actuation movement device in design surface of the present invention.
In the face of the present invention's design, MEMS actuation movement device is in actual operation process, as shown in Figure 3, can adjust as required the length of the first driving stem 3, the length of the second driving stem 4 and dwang 5 connect one end of the first driving stem 3 and the distance between the second driving stem 4 connection of rotating bar 5 positions, can adjust as required the length of L1, L2, L3 and L4, and then realize and control the angle that stock 6 rotates in face; Wherein, reduce dwang 5 and connect one end of the first driving stem 3 and the distance between the second driving stem 4 connection of rotating bar 5 positions, can improve the rotational angle of stock 6; And by increasing the length of stock 6, can directly increase the displacement that stock 6 connects one end of lens or MEMS micro mirror or catoptron.Except with upper type, by the electric current of the V-type electrothermal drive arm 7 of increasing supply, can realize equally the effect that improves stock 6 rotational angles.
To sum up, MEMS actuation movement device in the face of the present invention's design, adopt two V-type electrothermal drive arms 7 to coordinate lever principle, convenient realization rotating operation in face, and in design surface of the present invention, MEMS actuation movement apparatus structure is simple, in actual application, be more convenient to the angle of the rotation in practical operation chain of command, work efficiency is improved; On this basis, also designed at the current isolating layer between base frame 1 and motion framework, between base frame 1 surface and power pad 2, both sides for V-type electrothermal drive arm 7, employing is arranged side by side at least one electrothermal drive beam, be all the accurate control further having guaranteed for rotating in face, work efficiency is further improved.
By reference to the accompanying drawings embodiments of the present invention are explained in detail above, but the present invention is not limited to above-mentioned embodiment, in the ken possessing those of ordinary skills, can also under the prerequisite that does not depart from aim of the present invention, makes a variety of changes.
Claims (4)
1. a MEMS actuation movement device in face, comprises base frame (1), is arranged on the lip-deep power pad of base frame (1) (2) and is arranged on the motion framework in base frame (1); It is characterized in that: motion framework comprises the first driving stem (3), the second driving stem (4), dwang (5), stock (6) and two V-type electrothermal drive arms (7); What two V-type electrothermal drive arms (7) summit was relative and direction of motion is contrary is located at respectively on upper two the relative limits of base frame (1), wherein, it is upper that the two ends of each root V-type electrothermal drive arm (7) are fixedly connected on respectively base frame (1), and be electrically connected to power pad (2) respectively; One end of the first driving stem (3) and the wherein summit of a V-type electrothermal drive arm (7) flexibly connect, one end of the other end of the first driving stem (3) and dwang (5) flexibly connects, the summit of one end of the second driving stem (4) and another root V-type electrothermal drive arm (7) flexibly connects, the shaft of the other end of the second driving stem (4) and dwang (5) flexibly connects, and the other end of dwang (5) is fixedly connected with one end of stock (6).
2. a kind of interior MEMS actuation movement device according to claim 1, it is characterized in that: also comprise current isolating layer, current isolating layer is arranged between base frame (1) and motion framework, and is arranged between base frame (1) surface and power pad (2).
3. a kind of interior MEMS actuation movement device according to claim 1, it is characterized in that: the both sides of described V-type electrothermal drive arm (7) comprise respectively at least one electrothermal drive beam being arranged side by side, after each root electrothermal drive beam series connection, be connected with described power pad (2).
4. a kind of interior MEMS actuation movement device according to claim 1, is characterized in that: described stock (6) is rigidity stock (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410247514.7A CN104049361A (en) | 2014-06-06 | 2014-06-06 | In-plane MEMS drive motion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410247514.7A CN104049361A (en) | 2014-06-06 | 2014-06-06 | In-plane MEMS drive motion device |
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| CN104049361A true CN104049361A (en) | 2014-09-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201410247514.7A Pending CN104049361A (en) | 2014-06-06 | 2014-06-06 | In-plane MEMS drive motion device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109725413A (en) * | 2017-10-27 | 2019-05-07 | 华为技术有限公司 | Micro-mirror structure and micro mirror array chip |
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| CN1996088A (en) * | 2006-01-05 | 2007-07-11 | 精工爱普生株式会社 | Optical device, optical scanner and image forming device |
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| US20100207411A1 (en) * | 2006-06-23 | 2010-08-19 | Yu Sun | Mems-based micro and nano grippers with two-axis force sensors |
| CN102243371A (en) * | 2007-01-10 | 2011-11-16 | 精工爱普生株式会社 | Actuator, optical scanner and image forming device |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN203930209U (en) * | 2014-06-06 | 2014-11-05 | 无锡微奥科技有限公司 | A kind of interior MEMS actuation movement device |
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2014
- 2014-06-06 CN CN201410247514.7A patent/CN104049361A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6675578B1 (en) * | 2000-05-22 | 2004-01-13 | Microsoft Corporation | Thermal buckle-beam actuator |
| US20040074234A1 (en) * | 2000-06-19 | 2004-04-22 | Howell Larry L | Thermomechanical in-plane microactuator |
| CN1470897A (en) * | 2002-06-28 | 2004-01-28 | ���ṫ˾ | Heat-driven micro reflecting-mirror and electronic apparatus |
| US6877316B1 (en) * | 2003-11-21 | 2005-04-12 | Zyvex Corporation | Electro-thermal scratch drive actuator |
| US20050280879A1 (en) * | 2004-02-09 | 2005-12-22 | Gibson Gregory T | Method and apparatus for scanning a beam of light |
| CN1996088A (en) * | 2006-01-05 | 2007-07-11 | 精工爱普生株式会社 | Optical device, optical scanner and image forming device |
| US20100207411A1 (en) * | 2006-06-23 | 2010-08-19 | Yu Sun | Mems-based micro and nano grippers with two-axis force sensors |
| CN102243371A (en) * | 2007-01-10 | 2011-11-16 | 精工爱普生株式会社 | Actuator, optical scanner and image forming device |
| CN101694895A (en) * | 2009-10-30 | 2010-04-14 | 上海交通大学 | Series radio-frequency micro-electromechanical switch amplified on basis of heat driving and preparation method of same |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109725413A (en) * | 2017-10-27 | 2019-05-07 | 华为技术有限公司 | Micro-mirror structure and micro mirror array chip |
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Application publication date: 20140917 |
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