CN104280139A - Dynamic phase measuring device and method - Google Patents
Dynamic phase measuring device and method Download PDFInfo
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- CN104280139A CN104280139A CN201410587262.2A CN201410587262A CN104280139A CN 104280139 A CN104280139 A CN 104280139A CN 201410587262 A CN201410587262 A CN 201410587262A CN 104280139 A CN104280139 A CN 104280139A
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Abstract
The invention discloses a dynamic phase measuring device and method. The dynamic phase measuring device comprises a broadband weak coherent light source, a spectrum analyzer, an optical fiber coupler, an optical isolator, optical fiber polarization controllers, a reference arm optical fiber, a signal arm optical fiber, a first optical fiber probe and a second optical fiber probe. The first optical fiber probe and the second optical fiber probe each comprise an optical collimator, a focusing lens and a broadband coated reflector. After the broadband weak coherent light source is connected with the optical isolator, the broadband weak coherent light source is connected with a first port of the optical fiber coupler. The spectrum analyzer is connected with a second port of the optical fiber coupler. One end of the reference arm optical fiber is connected with a third port of the optical fiber coupler, and the other end of the reference arm optical fiber is connected with the optical collimator of the first optical fiber probe. Each focusing lens is arranged between the corresponding optical collimator and the corresponding broadband coated reflector. One end of the signal arm optical fiber is connected with a fourth port of the optical fiber coupler, and the other end of the signal arm optical fiber is connected with the optical collimator of the second optical fiber probe. The optical fiber polarization controllers are installed on the reference arm optical fiber and the signal arm optical fiber respectively. By the adoption of the dynamic phase measuring device and method, the complexity and the cost of the dynamic phase measuring device are lowered.
Description
Technical field
The present invention relates to the technical field of optical measurement, refer in particular to a kind of dynamic phasing measurement mechanism and method.
Background technology
In recent years, along with the fast development of optics, electronics, computer technology, Signal acquiring and processing technology and digital image processing techniques, phase shift interference measuring technique has been widely used in the various fields such as optical detection, speckle analysis, digital hologram, measuring three-dimensional morphology as the high-precision optical signalling detection means of one.Phase shift interference measurement is the principle of interference based on light, by modulating introducing different phase-shift phases between reference arm and signal arm in measuring process, and gather the multi-frame interferometry figure of testee under different phase-shift phase, the phase information of testee just can be obtained by certain algorithm computing.
In phase shift interference is measured, the method for conventional introducing phase shift modulated has: 1, time domain phase shift modulated method: by using piezoelectric type phase-shifter electrostrictive properties to produce phase shift, modulation accuracy is high, but speed is slower; 2, heterodyne modulation method: make the two-beam of interference produce certain difference on the frequency by using acousto-optic frequency shifters thus produce phase shift, modulation accuracy is comparatively large by frequency shifter stability influence, and light path is more complicated; 3, laser frequency modulation method: using semiconductor laser as measurement light source, changes laser output wavelength by the Injection Current or environment temperature controlling semiconductor laser and realizes phase shift, be difficult to determine phase-shift phase in measuring process; 4, phase-mask method: the phase mask that can produce different phase-shift phase is fixed in the CCD camera of collection interferogram, collects the interferogram that each region has different phase-shift phase in single exposure.
In existing phase shift modulated method, the slow interferometry means of phase shift modulated, are only applicable to the phase measurement of stationary body usually, can not be used for the measurement of the time dependent dynamic phasing object of phase place.Phase-mask method once can record the interferogram that several have different phase-shift phase, can be applied to the measurement of dynamic phasing object, but the manufacturing cost of phase mask is higher, and the lateral resolution of the image obtained also can reduce.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art and shortcoming, there is provided a kind of weak coherent light source, broadband that uses as the dynamic phasing measurement mechanism of measurement light source and method, by using the broadband spectral in weak coherent light source, broadband as phase shift modulated, spectroanalysis instrument is fast adopted to gather interference signal, phase shift modulated speed depends on the sample rate of spectroanalysis instrument, because current fast spectral analysis instrument can reach the high-speed sampling of hundred more than kHz, the moment that interference signal can be completed in phase shift modulated goes on record, after processing interference signal, utilize phase shift algorithm just can extract the phase information of testee.
For achieving the above object, technical scheme provided by the present invention is: a kind of dynamic phasing measurement mechanism includes weak coherent light source, broadband, spectroanalysis instrument, fiber coupler, optoisolator, optical fiber polarization controller, reference arm optical fiber, signal arm optical fiber, first fibre-optical probe, second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator, condenser lens and broadband metallic-membrane plating reflector, after weak coherent light source, described broadband is connected with optoisolator by Fiber connection to the first port of fiber coupler, described spectroanalysis instrument by Fiber connection to the second port of fiber coupler, one end of described reference arm optical fiber is connected to the 3rd port of fiber coupler, its other end connects the optical fiber collimator of the first fibre-optical probe, described condenser lens is located between optical fiber collimator and broadband metallic-membrane plating reflector, and described broadband metallic-membrane plating reflector is positioned on the focal plane of condenser lens, one end of described signal arm optical fiber is connected to the 4th port of fiber coupler, and its other end connects the optical fiber collimator of the second fibre-optical probe, described reference arm optical fiber and signal arm optical fiber are all provided with optical fiber polarization controller, rotate the polarization state that described optical fiber polarization controller can change light beam, when measuring transmission-type phase object, testee is between described optical fiber collimator and condenser lens, and when measuring reflective phase object, testee is positioned on the focal plane of condenser lens.
The interference signal I in t of any point (x, y) on tested phase object
t(x, y) can be expressed as:
I
t(x,y)＝A
t(x,y)+B
t(x,y)cos[φ
t(x,y)] (1)
Wherein, A
t(x, y), B
t(x, y), φ
t(x, y) represents the phase place of the background intensity of interference signal, modulate intensity, testee respectively.(1) formula can be expressed as:
Wherein h
t(x, y) represents that on tested phase object, any point (x, y) is at the light path of t, λ
irepresent the wavelength of measurement light source.In conjunction with phase shift interference measuring principle, (2) formula can be expressed as form:
Wherein λ
0represent the initialization wavelength of wide-band width measurement light source, δ
i(x, y) represents by light wavelength lambda
ithe additional phase shift amount of illumination when penetrating testee, the size of additional phase shift amount depends on λ
0, λ
irelative size, namely
Visible, when measuring the phase place of dynamic object with weak coherent light source, broadband, on the object that measurement obtains, the phase place of any point (x, y) can be regarded as initial wavelength is λ
0monochromatic light exposure object time phase place and additional phase shift amount δ
i(x, y) sum, the size of additional phase shift amount and the inverse of wavelength linear.Therefore, in dynamic phasing measuring process, the spectrum of wideband light source self can both be used to produce phase shift for the measurement of any point any time on testee, thus complete phase shift modulated process, the implementation method of this phase shift modulated method is simple and modulating speed is fast.
Weak coherent light source, described broadband, its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described fiber coupler adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
Described spectroanalysis instrument sample frequency reaches hundred more than kHz, and its spectral response range covers the whole service band in weak coherent light source, broadband.
The light beam exported by weak coherent light source, broadband is divided into two bundles after fiber coupler, wherein light beam is reflected back fiber coupler through metallic-membrane plating reflector after transmitting in reference arm optical fiber, another light beam returns fiber coupler through signal arm optical fiber, the equivalent optical path that two-beam experiences.
The dynamic phasing measuring method of dynamic phasing measurement mechanism of the present invention is as follows:
First, open weak coherent light source, described broadband and spectroanalysis instrument, and place tested phase object, adjust the distance between the optical fiber collimator of described reference arm optical fiber and signal arm optical fiber and condenser lens, make the optical path difference of two-arm equal; Then stop the light signal of described signal arm optical fiber, make described spectroanalysis instrument only detect reference arm light optical fiber signaling, i.e. the spectrum in broadband weak coherent light source, record and preserve this signal; Measure afterwards and preserve the interference signal between signal arm optical fiber and reference arm optical fiber, phase place due to object is dynamic change, therefore the interference signal collected also is dynamic change in time, by carrying out interference signal processing the phase place change information that can obtain dynamic phasing object, its treatment scheme is as follows:
1) interference signal that spectroanalysis instrument collects is normalized, and signal data is transformed into wave number space by wavelength space, carry out interpolation resampling at equal intervals by frequency;
2) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain the interference signal after processing;
3) from the starting point of the interference signal after process, choose phase-shift phase successively to be spaced apart
four data point I
1, I
2, I
3, I
4, utilize four-step phase-shifting algorithm:
calculate the wrapped phase φ being detected this moment some
1;
4) at the Data duplication in all moment, previous step 1 is carried out to sensing point) to step 3) operation, obtain the wrapped phase φ of all moment sensing points
1, the phase place change φ of sensing point after separating parcel, can be obtained.
Compared with prior art, tool has the following advantages and beneficial effect in the present invention:
1, in the present invention, phase shift speed depends on the sample rate of spectroanalysis instrument, far above the modulating speed of phase-shifter conventional at present, the measurement to dynamic phasing object can be realized, be applicable to the phase measurement of live body transparent organism tissue and the monitoring to automobile combustion chamber gasoline combustion situation;
2, the present invention uses weak coherent light source, broadband as measurement light source, and utilize the spectrum of light source to realize phase shift, without the need to extra phase-shifter, reduce complexity and the cost of dynamic phasing measurement mechanism, phase shift modulated can be completed in very short time, be applicable to the interferometry to dynamic phasing object.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of dynamic phasing measurement mechanism of the present invention when measuring transmission-type phase object.
Fig. 2 is the light path schematic diagram of dynamic phasing measurement mechanism of the present invention when measuring reflective phase object.
Fig. 3 is the interference signal figure a bit in t on dynamic phasing object.
Fig. 4 is interference signal figure after treatment.
Fig. 5 is the time domain phase place variation diagram that phase shift algorithm is extracted.
Fig. 6 is preset phase information and the comparison diagram recording phase information.
Embodiment
Below in conjunction with specific embodiment, the invention will be further described.
Dynamic phasing measurement mechanism described in the present embodiment, include weak coherent light source, broadband 1, spectroanalysis instrument 2, fiber coupler 3, optoisolator 4, optical fiber polarization controller 5, reference arm optical fiber 6, signal arm optical fiber 7, first fibre-optical probe, the second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator 8, condenser lens 9 and broadband metallic-membrane plating reflector 10, after weak coherent light source, described broadband 1 is connected with optoisolator 4 by Fiber connection to the first port of fiber coupler 3, the A port namely in Fig. 1 and Fig. 2; Described spectroanalysis instrument 2 by Fiber connection to the second port of fiber coupler 3, the C port namely in Fig. 1 and Fig. 2; One end of described reference arm optical fiber 6 is connected to the 3rd port of fiber coupler 3, namely the B port in Fig. 1 and Fig. 2, its other end connects the optical fiber collimator 8 of the first fibre-optical probe, described condenser lens 9 is located between optical fiber collimator 8 and broadband metallic-membrane plating reflector 10, and described broadband metallic-membrane plating reflector 10 is positioned on the focal plane of condenser lens 9; One end of described signal arm optical fiber 7 is connected to the 4th port of fiber coupler 3, the D port namely in Fig. 1 and Fig. 2, and its other end connects the optical fiber collimator 8 of the second fibre-optical probe; Described reference arm optical fiber 6 and signal arm optical fiber 7 are all provided with optical fiber polarization controller 5, rotate the polarization state that described optical fiber polarization controller 5 can change light beam, thus obtain the better interference fringe of contrast.When measure transmission-type phase object 11 time, testee between described optical fiber collimator 8 and condenser lens 9, as shown in Figure 1; When measuring reflective phase object 12, testee is positioned on the focal plane of condenser lens 9, as shown in Figure 2.In measuring process, the light beam exported by weak coherent light source, broadband 1 is divided into two bundles after fiber coupler 3, wherein light beam is reflected back fiber coupler 3 through metallic-membrane plating reflector after transmitting in reference arm optical fiber 6, another light beam returns fiber coupler 3 through signal arm optical fiber 7, the equivalent optical path that two-beam experiences.
In addition, weak coherent light source, described broadband 1, its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described spectroanalysis instrument 2 sample frequency can reach hundred more than kHz, and its spectral response range covers the whole service band in weak coherent light source, broadband 1; Described fiber coupler 3 adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
Be below the dynamic phasing measuring method of dynamic phasing measurement mechanism described in the present embodiment, its concrete condition is as follows:
First, open weak coherent light source, described broadband and spectroanalysis instrument, and place tested phase object, adjust the distance between the optical fiber collimator of described reference arm optical fiber and signal arm optical fiber and condenser lens, make the optical path difference of two-arm equal, and making interference signal present the interference fringe in 3 ~ 5 cycles, adjustment optical fiber polarization controller, makes the contrast of interference fringe reach maximum; Then stop the light signal of described signal arm optical fiber, make described spectroanalysis instrument only detect reference arm light signal, i.e. the spectrum in broadband weak coherent light source, record and preserve this signal; Measure afterwards and preserve the interference signal between signal arm and reference arm, control by computing machine the interference signal that spectroanalysis instrument gathers dynamic phasing object, data recorded successively and preserve in a computer, a width interference signal wherein as shown in Figure 3; Phase place due to object is dynamic change, and the interference signal therefore collected also is dynamic change in time, and by carrying out interference signal processing the phase place change information that can obtain dynamic phasing object, its treatment scheme is as follows:
1) interference signal collected by spectroanalysis instrument carries out zero-frequency, amplitude normalization process, and is uniformly distributed by wavelength space by signal data and is transformed into wave number space and is uniformly distributed, and carries out interpolation resampling at equal intervals by frequency;
2) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain the interference signal after processing;
3) from the starting point of the interference signal after process, choose phase-shift phase successively to be spaced apart
four data point I
1, I
2, I
3, I
4, utilize four-step phase-shifting algorithm:
calculate the wrapped phase φ being detected this moment some
1;
4) at the Data duplication in all moment, previous step 1 is carried out to sensing point) to step 3) operation, obtain the wrapped phase φ of all moment sensing points
1, finally the phase place change φ that Phase-un-wrapping operation can obtain sensing point is carried out to it.
For verifying the accuracy of measuring method proposed by the invention, We conducted simulation, preset the phase information of tested dynamic phasing object, obtain measurement result by the method that the present invention proposes, contrast with preset value, verify feasibility and the accuracy of measuring method proposed by the invention.On dynamic phasing object, some interference signal in t as shown in Figure 3; Interference signal after treatment as shown in Figure 4; The time domain phase place change of this point utilizing phase shift algorithm to extract as shown in Figure 5, wherein solid line represents default phase information, dotted line represents the phase information utilizing method proposed by the invention to record, difference between the two as shown in Figure 6, the maximal value of the absolute value of measuring error is 0.044rad, reach the measuring accuracy of 1/100 wavelength, thus demonstrate feasibility and the accuracy of the method.
In sum, after the above scheme of employing, the present invention adopts weak coherent light source, broadband as measurement light source, due to the phase differential difference to some extent of each wavelength light in weak coherent light source, broadband, therefore can collect periodically variable interference signal by spectroanalysis instrument, this interference signal can be equivalent to and use wavelength to be λ
0monochromatic source as measurement light source, the interference fringe produced after phase shift modulated, by adopting phase shift algorithm just can extract the phase information of testee to interference signal.Because this method utilizes broadband weak coherent light to be derived from body to produce phase shift, do not need extra phase-shifter, phase shift modulated speed depends on the sample frequency of fast spectral analysis instrument.At present, fast spectral analysis instrument can reach the sample rate of hundred more than kHz, which ensure that phase shift modulated can complete instantaneously, thus realizes the interferometry to dynamic phasing object, is worthy to be popularized.
The examples of implementation of the above are only the preferred embodiment of the present invention, not limit practical range of the present invention with this, therefore the change that all shapes according to the present invention, principle are done, all should be encompassed in protection scope of the present invention.
Claims (5)
1. a dynamic phasing measurement mechanism, it is characterized in that: include weak coherent light source, broadband (1), spectroanalysis instrument (2), fiber coupler (3), optoisolator (4), optical fiber polarization controller (5), reference arm optical fiber (6), signal arm optical fiber (7), first fibre-optical probe, second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator (8), condenser lens (9) and broadband metallic-membrane plating reflector (10), after weak coherent light source, described broadband (1) is connected with optoisolator (4) by Fiber connection to the first port of fiber coupler (3), described spectroanalysis instrument (2) by Fiber connection to the second port of fiber coupler (3), one end of described reference arm optical fiber (6) is connected to the 3rd port of fiber coupler (3), its other end connects the optical fiber collimator (8) of the first fibre-optical probe, described condenser lens (9) is located between optical fiber collimator (8) and broadband metallic-membrane plating reflector (10), and described broadband metallic-membrane plating reflector (10) is positioned on the focal plane of condenser lens (9), one end of described signal arm optical fiber (7) is connected to the 4th port of fiber coupler (3), and its other end connects the optical fiber collimator (8) of the second fibre-optical probe, described reference arm optical fiber (6) and signal arm optical fiber (7) are all provided with optical fiber polarization controller (5), rotate the polarization state that described optical fiber polarization controller (5) can change light beam, when measuring transmission-type phase object, testee is positioned between described optical fiber collimator (8) and condenser lens (9), and when measuring reflective phase object, testee is positioned on the focal plane of condenser lens (9).
2. a kind of dynamic phasing measurement mechanism according to claim 1, it is characterized in that: weak coherent light source, described broadband (1) is near-infrared light source, its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described fiber coupler (3) adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
3. a kind of dynamic phasing measurement mechanism according to claim 1, it is characterized in that: described spectroanalysis instrument (2) sample frequency reaches hundred more than kHz, its spectral response range covers the whole service band in weak coherent light source, broadband (1).
4. a kind of dynamic phasing measurement mechanism according to claim 1, it is characterized in that: the light beam exported by weak coherent light source, broadband (1) is divided into two bundles after fiber coupler (3), wherein light beam is reflected back fiber coupler (3) through metallic-membrane plating reflector after transmission in reference arm optical fiber (6), another light beam returns fiber coupler (3) through signal arm optical fiber (7), the equivalent optical path that two-beam experiences.
5. the dynamic phasing measuring method of dynamic phasing measurement mechanism described in a claim 1, it is characterized in that: first, open weak coherent light source, described broadband and spectroanalysis instrument, and place tested phase object, adjust the distance between the optical fiber collimator of described reference arm optical fiber and signal arm optical fiber and condenser lens, make the optical path difference of two-arm equal; Then stop the light signal of described signal arm optical fiber, make described spectroanalysis instrument only detect reference arm light optical fiber signaling, i.e. the spectrum in broadband weak coherent light source, record and preserve this signal; Measure afterwards and preserve the interference signal between signal arm optical fiber and reference arm optical fiber, phase place due to object is dynamic change, therefore the interference signal collected also is dynamic change in time, by carrying out interference signal processing the phase place change information that can obtain dynamic phasing object, its treatment scheme is as follows:
1) interference signal that spectroanalysis instrument collects is normalized, and signal data is transformed into wave number space by wavelength space, carry out interpolation resampling at equal intervals by frequency;
2) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain the interference signal after processing;
3) from the starting point of the interference signal after process, choose phase-shift phase successively to be spaced apart
four data point I
1, I
2, I
3, I
4, utilize four-step phase-shifting algorithm:
calculate the wrapped phase φ being detected this moment some
1;
4) at the Data duplication in all moment, previous step 1 is carried out to sensing point) to step 3) operation, obtain the wrapped phase φ of all moment sensing points
1, the phase place change φ of sensing point after separating parcel, can be obtained.
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| CN109310328A (en) * | 2016-03-25 | 2019-02-05 | 统雷有限公司 | The swept light source OCT of the adjustable VCSEL driving of MEMS for 3D measurement application |
| CN110823117A (en) * | 2019-10-29 | 2020-02-21 | 广州大学 | Single-step phase-shift electronic speckle interferometry method, system, device and storage medium |
| CN114894106A (en) * | 2022-05-18 | 2022-08-12 | 天津大学 | Opaque sample thickness measurement system and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110823117B (en) * | 2019-10-29 | 2021-06-01 | 广州大学 | Single-step phase-shift electronic speckle interferometry method, system, device and storage medium |
| CN114894106A (en) * | 2022-05-18 | 2022-08-12 | 天津大学 | Opaque sample thickness measurement system and method |
| CN114894106B (en) * | 2022-05-18 | 2023-07-21 | 天津大学 | Opaque sample thickness measurement system and method |
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Application publication date: 20150114 |