CN104457726A - Three-axis micro-electromechanical gyroscope - Google Patents
Three-axis micro-electromechanical gyroscope Download PDFInfo
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- CN104457726A CN104457726A CN201410710065.5A CN201410710065A CN104457726A CN 104457726 A CN104457726 A CN 104457726A CN 201410710065 A CN201410710065 A CN 201410710065A CN 104457726 A CN104457726 A CN 104457726A
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- 238000001514 detection method Methods 0.000 claims abstract description 61
- 239000000758 substrate Substances 0.000 claims description 34
- 238000009826 distribution Methods 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 abstract description 11
- 238000013461 design Methods 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000010923 batch production Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract 1
- 238000010276 construction Methods 0.000 description 13
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- 230000003321 amplification Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
Abstract
The invention relates to a tree-axis micro-electromechanical gyroscope which comprises a ring-shaped detection capacitor, two groups of drive capacitors, two groups of second detection capacitors and a linkage part, wherein the ring-shaped detection capacitor is positioned in the center; the two groups of drive capacitors are positioned at the outer side of the ring-shaped detection capacitor and are symmetrically distributed at the two sides of the original point of a y axis; the two groups of second detection capacitors are positioned at the outer side of the ring-shaped detection capacitor and are symmetrically distributed at the two sides of the original point of an x axis; the linkage part is respectively connected with a movable drive electrode, a movable detection electrode and the outer edge of a ring-shaped upper pole plate. The tree-axis micro-electromechanical gyroscope adopts a single-structure design, capacitive electrostatic drive and differential capacitance detection, is simple in driving way, compact in structure, conductive to reducing the gyroscope volume and suitable for batch production technologically, and is capable of realizing good measurement accuracy and sensitivity.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, be specifically related to a kind of single structure three axis microelectromechanicdevice gyroscope with Decoupling Characteristics.
Background technology
Microelectromechanical systems (Micro Electro Mechanical System), being called for short MEMS, is the emerge science technology integrating micromachine, microsensor, microactrator, signal transacting, Based Intelligent Control grown up on microelectric technique basis.
Micro-electro-mechanical gyroscope is the inertia device based on MEMS technology, for measuring the angular velocity of object of which movement.It is little that it has volume, and reliability is high, with low cost, is applicable to the feature produced in enormous quantities, therefore has wide market outlook, can be applicable to the wide spectrum comprising consumer electronics, Aero-Space, automobile, Medical Devices and weapon.
Microelectromechanicgyroscope gyroscope instrument system generally includes drive part and detecting portion, and its design has certain complicacy, when especially relating to the micro-electro-mechanical gyroscope that three axles measure simultaneously.Current three-axis gyroscope is mainly through realizing by three single axis gyroscopes or by the design that a Z axis gyroscope and plane monitoring-network gyroscope carry out orthogonal configuration, but the mode of this combination is unfavorable for the miniaturization of device, the three-axis gyroscope therefore developing single structure has become the important directions of the research and development of micro-electro-mechanical gyroscope design now.
Summary of the invention
The object of the present invention is to provide a kind of three axis microelectromechanicdevice gyroscopes of single structure design of good performance, for achieving the above object, the present invention adopts following technical scheme:
A kind of three axis microelectromechanicdevice gyroscopes, comprising:
Substrate;
Be positioned at the annular Detection capacitance of substrate center position, its center is initial point;
Described annular Detection capacitance comprises and is fixed on four bottom crowns on substrate and just to described four bottom crowns and the annular top crown be suspended in above described bottom crown; Described four bottom crowns are divided into two groups: first group of bottom crown to distribute along the symmetria bilateralis of x-axis at initial point, and described first group of bottom crown matches with the annular top crown of its corresponding part formation one group of first Detection capacitance; Second group of bottom crown distributes along the symmetria bilateralis of y-axis at initial point, and described second group of bottom crown matches with the annular top crown of its corresponding part and form another and organize the first Detection capacitance; Described annular top crown is fixed on substrate at initial point place by the first anchor point;
Two groups drive electric capacity, are positioned at the outside of described annular Detection capacitance and distribute along the symmetria bilateralis of y-axis at initial point; Often organize described driving electric capacity and all comprise the movable drive electrode and fixed drive electrode of working in coordination;
Two group of second Detection capacitance, is positioned at the outside of described annular Detection capacitance and distributes along the symmetria bilateralis of x-axis at initial point; Often organize described second Detection capacitance and all comprise the movable detecting electrode and fixed test electrode of working in coordination;
Linkage portion, is connected with the outer of described movable drive electrode, described movable detecting electrode and described annular top crown respectively; Wherein, described driving electric capacity for providing driving force along the y-axis direction, and drives described movable detecting electrode to do line motion along the y-axis direction by described linkage portion and drives described annular top crown to rotate motion around described first anchor point.
Preferred technical scheme further, described movable drive electrode and fixed drive electrode are comb-like electrode.
Preferred technical scheme further, described movable detecting electrode and fixed test electrode are comb-like electrode.
Preferred technical scheme further, described annular top crown is toroidal or square ring-shaped.
Preferred technical scheme further, two bottom crown shapes in described first group of bottom crown group are identical, and two bottom crown shapes in described second group of bottom crown group are identical.
Preferred technical scheme further, described linkage portion comprises rectangular outer frame and is positioned at the first linkage portion of described rectangular outer frame inside; Described rectangular outer frame surrounds described annular Detection capacitance, and described rectangular outer frame is connected with the outer of described annular top crown by the first linkage portion; Described two groups of driving electric capacity are symmetrically distributed in the both sides that described rectangular outer frame is parallel to x-axis, and the side that described movable drive electrode and described rectangular outer frame are parallel to x-axis is connected; Described two group of second Detection capacitance is symmetrically distributed in the both sides that described rectangular outer frame is parallel to y-axis, and the side that described movable detecting electrode and described rectangular outer frame are parallel to y-axis is connected; Wherein, described driving electric capacity drives described rectangular outer frame to do line motion along the y-axis direction, and the rectangular outer frame doing line motion along the y-axis direction drives described annular top crown to rotate motion around described first anchor point by described first linkage portion.
Preferred technical scheme further, described first linkage portion comprises the first interlock beam, two articles of lever beams, two article of second interlock beam, the 3rd interlock beam; Described first interlock beam and described second interlock beam are all parallel to y-axis and arrange, and described lever beam and the 3rd interlock beam are all parallel to x-axis and arrange; Described two lever beams beam that links with described first is respectively connected frame structure to form one end open, and described annular Detection capacitance is between described two lever beams; Described second interlock beam is about x-axis symmetry and between described lever beam and described rectangular outer frame, one end of described second interlock beam connects a contiguous lever beam, and the other end connects described rectangular outer frame; One end of described 3rd interlock beam connects the middle part of described first interlock beam, and the other end is connected with the outer of described annular top crown.
Further preferred technical scheme, described lever beam one end that beam is connected of not linking with described first is support end, and the support end of described two lever beams is respectively fixed on described substrate by one second anchor point.
Preferred technical scheme further, described first linkage portion also comprises two brace summers, and described two brace summers are all parallel to y-axis and arrange; Described two brace summers are about x-axis symmetry and between described frame structure and described annular Detection capacitance, one end connects a contiguous lever beam, and the other end is respectively fixed on described substrate by one the 3rd anchor point.
Preferred technical scheme further, the link position of described second interlock beam and lever beam is positioned in the middle of the support end of lever beam and the tie point of lever beam and brace summer.
Preferred technical scheme further, described first linkage portion also comprises rectangular inner frames and the second linkage portion; Described rectangular inner frames is positioned at described rectangular outer frame and surrounds described frame structure, and described rectangular outer frame is connected with described rectangular inner frames by the second linkage portion; Described second interlock beam is between described lever beam and described rectangular inner frames, and described second interlock beam is connected with described rectangular outer frame by described rectangular inner frames; Wherein, the rectangular outer frame doing line motion along the y-axis direction drives described rectangular inner frames to do line motion along the y-axis direction by the second linkage portion.
Further preferred technical scheme, described second linkage portion is Z-type decoupling zero beam, and one end of described Z-type decoupling zero beam connects the side that described rectangular inner frames is parallel to y-axis, and the other end connects the side that described rectangular outer frame is parallel to y-axis.
Further preferred technical scheme, described Z-type decoupling zero beam is four, around four angles being distributed in described rectangular inner frames respectively.
Preferred technical scheme, also comprises brace summer group further; Described brace summer group is positioned at described annular Detection capacitance annular distance and with described annular top crown along being connected, described brace summer group is fixed on substrate by described first anchor point at initial point place.
Further preferred technical scheme, described brace summer group comprises concentric interior annulus and outer toroid, two inner ring brace summers, two inner and outer ring tie-beams and four outer shroud tie-beams; One end of described four outer shroud tie-beams is connected with outer toroid respectively, and the other end is connected with edge in described annular top crown respectively; Described outer shroud tie-beam is divided into two one group, and wherein one group distributes along x-axis, and another group distributes along y-axis; One end of described two inner ring brace summers is connected with interior annulus respectively, and the other end is fixed on described substrate by described first anchor point; One end of described two inner and outer ring tie-beams is connected with interior annulus respectively, and the other end is connected with outer toroid respectively; Described inner ring brace summer along y-axis distribution and described inner and outer ring tie-beam distribute along x-axis, or, described inner ring brace summer along x-axis distribution and described inner and outer ring tie-beam distribute along y-axis.
Three axis microelectromechanicdevice gyroscopes of the present invention adopt single structure design, and condenser type electrostatic drives and differential capacitor detects, and type of drive is simple, compact conformation, be conducive to reducing gyroscope volume, technique be applicable to batch production, and good measuring accuracy and sensitivity can be realized.
Accompanying drawing explanation
Fig. 1,2 is the schematic perspective view of the present invention three axis microelectromechanicdevice gyroscope first embodiment.
Fig. 3,4 is the floor map of the present invention three axis microelectromechanicdevice gyroscope first embodiment.
Fig. 5 is the structural representation of brace summer group first embodiment of the present invention.
Fig. 6 is the structural representation of brace summer group second embodiment of the present invention.
Fig. 7 is the structural representation of brace summer group the 3rd embodiment of the present invention.
Fig. 8 is the structural representation of linkage portion embodiment of the present invention
Fig. 9 is the floor map of the present invention three axis microelectromechanicdevice gyroscope second embodiment.
Figure 10 is the floor map of the present invention three axis microelectromechanicdevice gyroscope the 3rd embodiment.
Figure 11 is the floor map of the present invention three axis microelectromechanicdevice gyroscope the 4th embodiment.
Description of reference numerals
1 substrate;
8 annular top crowns, 6a first group of bottom crown, 6b second group of bottom crown;
16 movable drive electrodes, 4 fixed drive electrodes;
17 movable detecting electrodes, 3 fixed test electrodes;
13 rectangular inner frames, 14 rectangular outer frame, 15 Z-type decoupling zero beams, 18 brace summer groups;
9 first interlock beams, 10 lever beams, 11 second interlock beams, 12 brace summers, 24 the 3rd interlock beams;
Annulus, 20 outer toroid, 21 inner ring brace summers, 22 inner and outer ring tie-beams, 23 outer shroud tie-beams in 19;
101 tie-beams, 102 brace summers, 103 annulus;
5a first anchor point, 5b second anchor point, 5c the 3rd anchor point.
Embodiment
Shown in Fig. 1 ~ 11, describe embodiments of the invention in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
Be gyrostatic first embodiment of the present invention three axis microelectromechanicdevice see Fig. 1-Fig. 4, comprise:
Substrate 1, substrate 1 central position has an annular Detection capacitance, defines with the center of annular Detection capacitance for initial point O, and substrate 1 place plane is the rectangular coordinate system in space of xy plane, the z-axis of rectangular coordinate system in space perpendicular to substrate 1, as shown in Figure 1.
Shown in figure 3 and Fig. 5, annular Detection capacitance comprises and is fixed on four bottom crowns on substrate and just to four bottom crowns and the annular top crown 8 be suspended in above bottom crown, the shape of bottom crown arrangement composition and the mating shapes of annular top crown 8.
Four bottom crowns can be divided into two groups: first group of bottom crown 6a identical along two the bottom crown shapes of x-axis in the symmetria bilateralis distribution of initial point and in group, and first group of bottom crown 6a matches with the annular top crown of its corresponding part formation one group of first Detection capacitance A; Second group of bottom crown 6b is identical along two the bottom crown shapes of y-axis in the symmetria bilateralis distribution of initial point and in group, and second group of bottom crown 6b matches with the annular top crown of its corresponding part formation first Detection capacitance B.
Annular top crown 8 is suspended in the top of bottom crown by supporting construction, supporting construction is positioned at the annular distance of annular Detection capacitance and is connected with annular top crown 8 edge, supporting construction is fixed on substrate at initial point place by the first anchor point 5a, because supporting construction is only fixed at center, therefore annular top crown 8 can do angular oscillation around any axle of xyz under external force.
With reference to the first embodiment that Figure 5 shows that supporting construction, supporting construction comprises an annulus 103, three tie-beams 101 and a brace summer 102; Wherein, two tie-beams 101 are along y-axis distribution, and the 3rd tie-beam 101 distributes along x-axis and is positioned at the positive dirction of x-axis, and one end of tie-beam 101 is connected with annulus 103, and the other end is interior along being connected with annular top crown 8; Brace summer 102 distributes along x-axis and is positioned at the negative direction of x-axis, and one end connects annulus 103, and the other end is fixed on substrate by the first anchor point 5a at initial point place.Certainly, also can be that Article 3 tie-beam 101 is positioned at the negative direction of x-axis and brace summer 102 is positioned at the positive dirction of x-axis.
With reference to the second embodiment that Figure 6 shows that supporting construction, supporting construction comprises annulus 103, two tie-beam 101 and two brace summers 102; Wherein, two tie-beams 101 are along y-axis distribution, and one end of tie-beam 101 is connected with annulus 103, and the other end is interior along being connected with annular top crown 8; Article two, brace summer 102 is along x-axis distribution, and one end connects annulus 103, and the other end is fixed on substrate by the first anchor point 5a at initial point place.
Be depicted as the 3rd embodiment of supporting construction with reference to figure 4 and 7, supporting construction is brace summer group 18, comprises concentric interior annulus 19 and outer toroid 20, two inner ring brace summers 21, two inner and outer ring tie-beams 22 and four outer shroud tie-beams 23; Article four, one end of outer shroud tie-beam 23 is connected with outer toroid 20 respectively, and the other end is connected with edge in annular top crown 8 respectively; Outer shroud tie-beam 23 is divided into two one group, and wherein one group distributes along x-axis, and another group distributes along y-axis, the periphery of four outer shroud tie-beam 23 even partition outer toroid 20; Article two, one end of inner ring brace summer 21 is connected with interior annulus 19 respectively, and the other end is fixed on substrate 1 by the first anchor point 5a; Article two, one end of inner and outer ring tie-beam 22 is connected with interior annulus 19 respectively, and the other end is connected with outer toroid 20 respectively; Inner ring brace summer 21 along y-axis distribution and inner and outer ring tie-beam 22 distribute along x-axis.In other embodiments, inner and outer ring tie-beam 22 distributes along y-axis along x-axis distribution also can to arrange inner ring brace summer 21.
Can find out from the cross sectional portion of Fig. 2, the annular interior edge of top crown 8 is connected with the brace summer group 18 in annular distance, brace summer group 18 is fixed on substrate at initial point place by the first anchor point 5a, and annular top crown 8 relies on the support of the first anchor point 5a to be suspended in above bottom crown.Fix due to brace summer Zu Jin center and very thinly have certain elasticity, therefore annular top crown 8 can do angular oscillation around any axle of xyz under external force.
Wherein, in the annular in above embodiment, step 8 is toroidal, but it should be noted that the present invention is not limited to toroidal.In the present invention, pertusate structure is established at " annular " center of referring to; all circular toroidal along outer such as; interior be all square square ring-shaped along outer, outer be circular and interior edge be square shape, the cross-like shape of to be square and interior edge be in outer circular shape, center drilling etc., these all belong to equivalent embodiment in protection scope of the present invention.
Wherein, annular top crown 8 and supporting construction can directly be structure as a whole, such as, be integrated composition after etching and formed.
Wherein, the annular variable capacitance be made up of annular Detection capacitance and supporting construction: first group of bottom crown 6a distributes along the symmetria bilateralis of x-axis at initial point, second group of bottom crown 6b distributes along the symmetria bilateralis of y-axis at initial point, thus respectively forming one group of Detection capacitance with annular top crown, annular top crown is fixed by the anchor point of center and is suspended and makes himself to do angular oscillation around any axle of xyz.This variable capacitance design can measure the distortion in both direction, and when also having a distortion, the little and advantage that deformation space is large of resistance, can realize good measuring accuracy and sensitivity simultaneously.Annular variable capacitor structure of the present invention is simply compact, is conducive to the volume reducing MEMS (micro electro mechanical system), technique is applicable to batch production, except being applied on three-axis gyroscope of the present invention, can also be used for making plane double shaft gyroscope, z-axis gyroscope and micro-actuator part, as microswitch etc.
Shown in figure 8, as the micro electronmechanical deformable structure of linkage portion, comprising: rectangular inner frames 13, rectangular outer frame 14, four articles of Z-type decoupling zero beams 15, first interlock beams, 9, two articles of lever beams, 10, two article of second interlock beam 11, two articles of brace summers 12, the 3rd interlock beam 24.
Rectangular outer frame 14 area-encasing rectangle inner frame 13, the center of rectangular outer frame 14 and the center of rectangular inner frames 13 just to initial point,
Rectangular inner frames 13 is connected with rectangular outer frame 14 by 4 Z-type decoupling zero beams 15, is symmetrically distributed in the both sides that rectangular inner frames 13 is parallel to y-axis around four angles that Z-type decoupling zero beam 15 is distributed in rectangular inner frames 13 respectively; One end connection rectangular inner frames 13 of Z-type decoupling zero beam 15 is parallel to the side of y-axis, and the other end connects the side that rectangular outer frame 14 is parallel to y-axis.
Wherein, it should be noted that, Z-type decoupling zero beam 15 can be other quantity, and only need one end of Z-type decoupling zero beam 15 connection rectangular inner frames 13 to be parallel to the side of y-axis, the other end connects the side that rectangular outer frame 14 is parallel to y-axis.Preferably, Z-type decoupling zero beam is divided into two groups, is symmetrically distributed in the both sides that rectangular inner frames 13 is parallel to y-axis.
First interlock beam 9, second interlock beam 11, brace summer 12 are all parallel to y-axis and arrange, and lever beam 10 and the 3rd interlock beam 24 are parallel to x-axis and arrange.
Article two, lever beam 10 is symmetrical about x-axis, and the beam 9 that links with first is respectively connected to be formed the frame structure of one end open, and it is inner that frame structure is positioned at rectangular inner frames 13, and annular Detection capacitance is between two lever beams 10;
Second interlock beam 11 is symmetrical and between lever beam 10 and rectangular inner frames 13 about x-axis, one end of second interlock beam 11 connects a contiguous lever beam 10, the other end is connected to rectangular inner frames 13, thus is connected with rectangular outer frame 14 by rectangular inner frames 13;
One end of 3rd interlock beam 24 connects the middle part of the first interlock beam 9, and the other end is connected with the outer of annular top crown 8.
Article two, brace summer 12 is symmetrical and between frame structure and annular Detection capacitance, one end connects a contiguous lever beam 10, and the other end is respectively fixed on substrate 1 by one the 3rd anchor point 5c about x-axis.
Wherein, lever beam 10 one end that beam 9 is connected of not linking with first is support end, and the support end of two lever beams 10 is respectively fixed on substrate 1 by one second anchor point 5b.
Wherein, the second interlock beam 11 and the link position of lever beam 10 are positioned in the middle of the support end of lever beam 10 and the tie point of lever beam 10 and brace summer 12.
Wherein, two the second anchor point 5b are symmetrical arranged about x-axis, and two the 3rd anchor point 5c are symmetrical arranged about x-axis, and the setting that this symmetry is fixed makes rectangle internal and external frame stressed more even.
Micro electronmechanical deformable structure of the present invention, when being subject to External Force Acting, outside framework, inner frame and frame structure all can produce the effect distorted, and also have the advantage that deformation resistance small deformation space is large simultaneously, thus can realize good measuring accuracy and sensitivity.Micro electronmechanical deformable structure of the present invention is simply compact, is conducive to the volume reducing MEMS (micro electro mechanical system), technique is applicable to batch production.Except being applied on three-axis gyroscope of the present invention, the amplification of micro-displacement can also be realized in physical construction aspect, being conducive to the detection sensitivity and the signal to noise ratio (S/N ratio) that improve sensor, and reducing the requirement of sensitive structure to Circuits System.
Two groups drive electric capacity, are symmetrically distributed in the both sides that rectangular outer frame 14 is parallel to x-axis; Often group drives electric capacity all to comprise the movable drive electrode 16 and fixed drive electrode 4 of working in coordination, and the side that movable drive electrode 16 and rectangular outer frame 14 are parallel to x-axis is connected, and fixed drive electrode 4 is fixed on substrate 1.
Two group of second Detection capacitance, is symmetrically distributed in the both sides that rectangular outer frame 14 is parallel to y-axis; Often organize the second Detection capacitance and all comprise the movable detecting electrode 17 and fixed test electrode 3 of working in coordination, the side that movable detecting electrode 17 and rectangular outer frame 14 are parallel to y-axis is connected, and fixed test electrode 3 is fixed on substrate 1.
Wherein, the movable drive electrode 16 in the present embodiment and fixed drive electrode 4, and movably detecting electrode 17 and fixed test electrode 3 are comb-like electrode.
The principle of work of the present invention three axis microelectromechanicdevice gyroscope first embodiment is as follows:
Described driving electric capacity is for providing driving force along the y-axis direction, when being subject to extraneous driving, rectangular outer frame 14, movable drive electrode 16 and movable detecting electrode 17 do line motion along the y-axis direction, Z-shaped decoupling zero beam 15 drives rectangular inner frames 13 to do line motion along the y-axis direction, second interlock beam 11 drags lever beam 10 and does line motion along the y-axis direction simultaneously, lever beam 10 is equivalent to lever, therefore the first interlock beam 9 can be driven in y-axis direction to do line motion, and wherein direction of motion and second beam 11 that links of the first interlock beam 9 is contrary.Because the first interlock beam 9 is connected with the outer of annular top crown 8 by the 3rd interlock beam 24, and annular top crown 8 is fixed on substrate 1 by brace summer group 18 at initial point place first anchor point 5a, therefore annular top crown 8 can rotate around the first anchor point 5a under the dragging of the first interlock beam 9, namely does angular oscillation around z-axis.Therefore actuation movement comprises the line motion along the y-axis direction of rectangle internal and external frame and annular top crown 8 around the angular oscillation of z-axis.
When gyroscope rotates around x-axis, due to the effect of coriolis force, annular top crown 8 can do angular oscillation around y-axis, cause the change of the spacing of first group of bottom crown 6a and substrate 1 thus, cause the change of the first Detection capacitance A, the angular velocity that this capacitance variations is rotated around x-axis to gyroscope is directly proportional, and therefore can be used for measuring x-axis angular velocity.Now the first Detection capacitance B and the second Detection capacitance unaffected, or impact very littlely can be ignored.
When gyroscope rotates around y-axis, due to the effect of coriolis force, annular top crown 8 can do angular oscillation around x-axis, cause the change of the spacing of second group of bottom crown 6b and substrate 1 thus, cause the change of the first Detection capacitance B, the angular velocity that this capacitance variations is rotated around y-axis to gyroscope is directly proportional, and therefore can be used for measuring y-axis angular velocity.Now the first Detection capacitance A and the second Detection capacitance unaffected, or impact very littlely can be ignored.
When gyroscope rotates around z-axis, the annular top crown 8 itself doing angular oscillation around z-axis is unaffected.Due to the effect of coriolis force, rectangular outer frame 14 and rectangular inner frames 13 are subject to the acting force in x-axis direction, but because lever beam 10 is rigidity and one end is securing, so rectangular inner frames 13 is limited in the motion in x-axis direction, also can not have influence on annular top crown 8, therefore annular Detection capacitance is unaffected.Due to the decoupling function of Z-shaped decoupling zero beam 15, connect rectangle internal and external frame Z-shaped decoupling zero beam 15 can not to rectangular outer frame 14 x-axis to motion cause restriction, therefore, rectangular outer frame 14 can be moved by line along the x-axis direction, cause the change of the second Detection capacitance (being made up of movable detecting electrode 17 and fixed test electrode 3), namely this capacitance variations reflects the angular velocity of gyroscope around z-axis, therefore may be used for detecting z-axis angular velocity.
In the present embodiment, lever beam 10 except with first interlock beam 9, outside second interlock beam 11 is connected with brace summer 12, also fixing on substrate 1 (i.e. the second anchor point 5b place) by support end, and the second interlock beam 11 and the link position of lever beam 10 are positioned in the middle of the support end of lever beam 10 and the tie point of lever beam 10 and brace summer 12, the motion of this situation to rectangle internal and external frame is good, this is because: after lever beam 10 free end is originally fixed as support end, lever beam 10 between the second anchor point 5b and brace summer 12 is equivalent to beam on two supports, the deformation pattern of this section of lever beam 10 is the form that intermediate drum two ends are fixed, its state perpendicular to y-axis can not become, if at this moment the second interlock beam 11 is in intermediate position, then the second interlock beam 11 can not be subject to moment of torsion and then cause rotating, therefore can ensure that rectangular inner frames 13 only does the motion of y-axis line further, if and depart from centre position, lever beam 10 then can change perpendicular to the state of y-axis, this deflection can affect the mode of motion of rectangle internal and external frame.
See the floor map of Fig. 9 the present invention three axis microelectromechanicdevice gyroscope second embodiment, as can be seen from the figure, and the difference of the first embodiment is mainly the difference of linkage portion, eliminates rectangular inner frames specifically.
See the floor map that Figure 10 is the present invention three axis microelectromechanicdevice gyroscope the 3rd embodiment, as can be seen from the figure, mainly be that driving electric capacity is different with the structure of the second Detection capacitance with the difference of the second embodiment: drive electric capacity and the second Detection capacitance to be comb teeth-shaped electric capacity in the second embodiment, detect based on the change of overlapping length between pole plate; Drive electric capacity and the second Detection capacitance to be special-shaped tabular electric capacity in 3rd embodiment, detect based on the change in gap between pole plate.
With reference to the floor map that Figure 11 is the present invention three axis microelectromechanicdevice gyroscope the 4th embodiment, as can be seen from the figure, the difference of the with three embodiment is mainly that the structure of linkage portion is different: drive electric capacity to rely on a rectangular outer frame that driving force is passed to the second Detection capacitance in the 3rd embodiment; Electric capacity is driven to rely on an octagon outside framework that driving force is passed to the second Detection capacitance in 4th embodiment.
As can be seen from gyrostatic the second to four embodiment of three axis microelectromechanicdevices, driving electric capacity of the present invention and the second Detection capacitance are not limited to comb teeth-shaped electric capacity, and the structure of linkage portion is also not limited to the concrete structure in embodiment.For the present invention; when driving electric capacity to drive along the y-axis direction; as long as can realize driving movable detecting electrode to do line motion along the y-axis direction by linkage portion and driving annular top crown to rotate around the first anchor point moves, the linkage portion design that can realize this function all should belong in protection scope of the present invention.
Three axis microelectromechanicdevice gyroscopes of the present invention adopt single structure design, and condenser type electrostatic drives and differential capacitor detects, and type of drive is simple, compact conformation, be conducive to reducing gyroscope volume, technique be applicable to batch production, and good measuring accuracy and sensitivity can be realized.
Structure of the present invention, feature and action effect is described in detail above according to graphic shown embodiment; these are only preferred embodiment of the present invention; but the present invention does not limit practical range with shown in drawing; every change done according to conception of the present invention; or be revised as the Equivalent embodiments of equivalent variations; do not exceed yet instructions with diagram contain spiritual time, all should in protection scope of the present invention.
Claims (15)
1. three axis microelectromechanicdevice gyroscopes, is characterized in that, comprising:
Substrate;
Be positioned at the annular Detection capacitance of substrate center position, its center is initial point;
Described annular Detection capacitance comprises and is fixed on four bottom crowns on substrate and just to described four bottom crowns and the annular top crown be suspended in above described bottom crown; Described four bottom crowns are divided into two groups: first group of bottom crown to distribute along the symmetria bilateralis of x-axis at initial point, and described first group of bottom crown matches with the annular top crown of its corresponding part formation one group of first Detection capacitance; Second group of bottom crown distributes along the symmetria bilateralis of y-axis at initial point, and described second group of bottom crown matches with the annular top crown of its corresponding part and form another and organize the first Detection capacitance; Described annular top crown is fixed on substrate at initial point place by the first anchor point;
Two groups drive electric capacity, are positioned at the outside of described annular Detection capacitance and distribute along the symmetria bilateralis of y-axis at initial point; Often organize described driving electric capacity and all comprise the movable drive electrode and fixed drive electrode of working in coordination;
Two group of second Detection capacitance, is positioned at the outside of described annular Detection capacitance and distributes along the symmetria bilateralis of x-axis at initial point; Often organize described second Detection capacitance and all comprise the movable detecting electrode and fixed test electrode of working in coordination;
Linkage portion, is connected with the outer of described movable drive electrode, described movable detecting electrode and described annular top crown respectively; Wherein, described driving electric capacity for providing driving force along the y-axis direction, and drives described movable detecting electrode to do line motion along the y-axis direction by described linkage portion and drives described annular top crown to rotate motion around described first anchor point.
2. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Described movable drive electrode and fixed drive electrode are comb-like electrode.
3. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Described movable detecting electrode and fixed test electrode are comb-like electrode.
4. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Described annular top crown is toroidal or square ring-shaped.
5. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Two bottom crown shapes in described first group of bottom crown group are identical, and two bottom crown shapes in described second group of bottom crown group are identical.
6. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Described linkage portion comprises rectangular outer frame and is positioned at the first linkage portion of described rectangular outer frame inside;
Described rectangular outer frame surrounds described annular Detection capacitance, and described rectangular outer frame is connected with the outer of described annular top crown by the first linkage portion;
Described two groups of driving electric capacity are symmetrically distributed in the both sides that described rectangular outer frame is parallel to x-axis, and the side that described movable drive electrode and described rectangular outer frame are parallel to x-axis is connected;
Described two group of second Detection capacitance is symmetrically distributed in the both sides that described rectangular outer frame is parallel to y-axis, and the side that described movable detecting electrode and described rectangular outer frame are parallel to y-axis is connected;
Wherein, described driving electric capacity drives described rectangular outer frame to do line motion along the y-axis direction, and the rectangular outer frame doing line motion along the y-axis direction drives described annular top crown to rotate motion around described first anchor point by described first linkage portion.
7. three axis microelectromechanicdevice gyroscopes as claimed in claim 6, is characterized in that:
Described first linkage portion comprises the first interlock beam, two articles of lever beams, two article of second interlock beam, the 3rd interlock beam;
Described first interlock beam and described second interlock beam are all parallel to y-axis and arrange, and described lever beam and the 3rd interlock beam are all parallel to x-axis and arrange;
Described two lever beams beam that links with described first is respectively connected frame structure to form one end open, and described annular Detection capacitance is between described two lever beams;
Described second interlock beam is about x-axis symmetry and between described lever beam and described rectangular outer frame, one end of described second interlock beam connects a contiguous lever beam, and the other end connects described rectangular outer frame;
One end of described 3rd interlock beam connects the middle part of described first interlock beam, and the other end is connected with the outer of described annular top crown.
8. three axis microelectromechanicdevice gyroscopes as claimed in claim 7, is characterized in that:
Described lever beam one end that beam is connected of not linking with described first is support end, and the support end of described two lever beams is respectively fixed on described substrate by one second anchor point.
9. three axis microelectromechanicdevice gyroscopes as claimed in claim 7, is characterized in that:
Described first linkage portion also comprises two brace summers, and described two brace summers are all parallel to y-axis and arrange;
Described two brace summers are about x-axis symmetry and between described frame structure and described annular Detection capacitance, one end connects a contiguous lever beam, and the other end is respectively fixed on described substrate by one the 3rd anchor point.
10. three axis microelectromechanicdevice gyroscopes as claimed in claim 9, is characterized in that:
Described lever beam one end that beam is connected of not linking with described first is support end, described two lever beam support ends be respectively fixed on described substrate by one second anchor point;
The link position of described second interlock beam and lever beam is positioned in the middle of the support end of lever beam and the tie point of lever beam and brace summer.
11. three axis microelectromechanicdevice gyroscopes as claimed in claim 7, is characterized in that:
Described first linkage portion also comprises rectangular inner frames and the second linkage portion;
Described rectangular inner frames is positioned at described rectangular outer frame and surrounds described frame structure, and described rectangular outer frame is connected with described rectangular inner frames by the second linkage portion;
Described second interlock beam is between described lever beam and described rectangular inner frames, and described second interlock beam is connected with described rectangular outer frame by described rectangular inner frames;
Wherein, the rectangular outer frame doing line motion along the y-axis direction drives described rectangular inner frames to do line motion along the y-axis direction by the second linkage portion.
12. three axis microelectromechanicdevice gyroscopes as claimed in claim 11, is characterized in that:
Described second linkage portion is Z-type decoupling zero beam, and one end of described Z-type decoupling zero beam connects the side that described rectangular inner frames is parallel to y-axis, and the other end connects the side that described rectangular outer frame is parallel to y-axis.
13. three axis microelectromechanicdevice gyroscopes as claimed in claim 12, is characterized in that:
Described Z-type decoupling zero beam is four, around four angles being distributed in described rectangular inner frames respectively.
14. three axis microelectromechanicdevice gyroscopes as claimed in claim 1, is characterized in that:
Also comprise brace summer group;
Described brace summer group is positioned at described annular Detection capacitance annular distance and with described annular top crown along being connected, described brace summer group is fixed on substrate by described first anchor point at initial point place.
15. three axis microelectromechanicdevice gyroscopes as claimed in claim 14, is characterized in that:
Described brace summer group comprises concentric interior annulus and outer toroid, two inner ring brace summers, two inner and outer ring tie-beams and four outer shroud tie-beams;
One end of described four outer shroud tie-beams is connected with outer toroid respectively, and the other end is connected with edge in described annular top crown respectively; Described outer shroud tie-beam is divided into two one group, and wherein one group distributes along x-axis, and another group distributes along y-axis;
One end of described two inner ring brace summers is connected with interior annulus respectively, and the other end is fixed on described substrate by described first anchor point;
One end of described two inner and outer ring tie-beams is connected with interior annulus respectively, and the other end is connected with outer toroid respectively;
Described inner ring brace summer along y-axis distribution and described inner and outer ring tie-beam distribute along x-axis, or, described inner ring brace summer along x-axis distribution and described inner and outer ring tie-beam distribute along y-axis.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410710065.5A CN104457726B (en) | 2014-11-27 | 2014-11-27 | A kind of three axis microelectromechanicdevice gyroscopes |
| EP15863686.0A EP3217146B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| EP19180147.1A EP3561451B1 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
| JP2017528429A JP6448793B2 (en) | 2014-11-27 | 2015-07-23 | 3-axis MEMS gyro |
| KR1020177014294A KR101927647B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| PCT/CN2015/084973 WO2016082571A1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| US15/529,491 US10330471B2 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
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| CN201410710065.5A CN104457726B (en) | 2014-11-27 | 2014-11-27 | A kind of three axis microelectromechanicdevice gyroscopes |
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