CN104517868B - Electronic unit, device and method - Google Patents

Electronic unit, device and method Download PDF

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Publication number
CN104517868B
CN104517868B CN201410522858.4A CN201410522858A CN104517868B CN 104517868 B CN104517868 B CN 104517868B CN 201410522858 A CN201410522858 A CN 201410522858A CN 104517868 B CN104517868 B CN 104517868B
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China
Prior art keywords
electronic unit
conductive layers
semiconductor devices
redistribution
conductive
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CN201410522858.4A
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Chinese (zh)
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CN104517868A (en
Inventor
R·奥特雷姆巴
J·赫格劳尔
K·希斯
X·施勒格尔
J·施雷德尔
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Infineon Technologies Austria AG
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Infineon Technologies Austria AG
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
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    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
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    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
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    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K1/14—Structural association of two or more printed circuits
    • H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
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    • H01L2224/732—Location after the connecting process
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    • H01L2224/732—Location after the connecting process
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    • H01L2224/73267—Layer and HDI connectors
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    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
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    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/12—Passive devices, e.g. 2 terminal devices
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    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
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    • H05K2201/0919—Exposing inner circuit layers or metal planes at the side edge of the PCB or at the walls of large holes
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Abstract

This application discloses a kind of electronic unit, it includes at least one semiconductor devices and redistribution plate, and redistribution plate includes at least two non-conductive layers and conduction redistribution structure.In semiconductor devices insertion redistribution plate, and redistribution structure is electrically coupled to, and the side of the redistribution plate has step.The outer contact pad of redistribution structure is disposed on the step.

Description

Electronic unit, device and method
Background technology
Semiconductor chip can be provided in the form of electronic unit, and it, which includes having, is used to the electronic unit being arranged on electricity The package of outside contact part on road plate (such as printed circuit board (PCB)).Package can include epoxy resin and from semiconductor chip to outer The inside electrical connection of contact site interior section, epoxy resin covering semiconductor chip, protects it from being environmentally isolated.Package it is external Contact portion can have various forms, such as pin, pad or soldered ball.
The content of the invention
Electronic unit includes at least one semiconductor devices and redistribution plate, and redistribution plate includes at least two non-biographies Conducting shell and conduction redistribution structure.In semiconductor devices insertion redistribution plate, and redistribution structure is electrically coupled to, and And the side of the redistribution plate has step.The outer contact pad of redistribution structure is disposed on the step.
Device include circuit board, its have multiple non-conductive layers, redistribution structure and at least one include the chamber of step, The step includes engagement pad, and it is coupled to redistribution structure and electronic device, and the electronic device is included in redistribution plate At least one embedded semiconductor devices, the side of the redistribution plate has step and the outer contact pad being arranged on step. The electronic device is installed in chamber, and the outer contact pad of electronic unit is installed in the engagement pad of circuit board.
A kind of method, including electronic unit is provided, it includes at least one semiconductor devices in embedded redistribution plate, The redistribution plate includes at least two non-conductive sandwich layers and at least one conducting shell, and this method also includes the periphery for removing sandwich layer Part and the part for exposing the conducting shell on another sandwich layer, and be electronic device formation outer contact pad.
Those skilled in the art are reading following detailed description and when checking accompanying drawing, it will be recognized that it is extra the characteristics of and Advantage.
Brief description of the drawings
The key element of figure need not be drawn to scale relative to each other.Identical reference specifies corresponding like.Respectively Planting the feature of the embodiment of explanation can combine, unless it repels each other.Embodiment is described in the drawings and in description below It is middle to be described in detail.
Fig. 1 shows the electronic unit according to first embodiment.
Fig. 2 shows electronic unit and the circuit board including chamber.
Fig. 3 shows the electronic unit according to second embodiment and the circuit board including chamber.
Fig. 4 shows the electronic unit according to 3rd embodiment.
Fig. 5 shows to include the arrangement of two electronic units.
Fig. 6 shows the electronic unit according to fourth embodiment.
Fig. 7 shows the electronic unit according to the 5th embodiment.
Fig. 8 shows the perspective view of a part of circuit board.
Fig. 9 shows to include the perspective view of a part of circuit board of conductive trace.
Figure 10 shows to include the perspective view of a part of circuit board of conductive trace.
Figure 11 shows the flow chart of the method according to sixth embodiment.
Figure 12 shows the flow chart of the method according to the 7th embodiment.
Embodiment
In being described in detail below, refer to the attached drawing, its formed the present invention and part, and in the accompanying drawings by explanation show The specific embodiment of the present invention can be put into practice by going out.At this point, direction term, such as " top ", " bottom ", "front", "rear", " head ", " tail ", " on ", " under " etc., used with reference to the orientation of the figure of description.Because the part of embodiment can be taken with many differences To placement, so use direction term is in order to illustrative and not limiting.It should be understood that, it is possible to use other embodiment, and can To make structure or logic change, without departing from protection scope of the present invention.It is not taken in a limiting sense under the present invention Row are described in detail, and protection scope of the present invention is defined by the claims.
It is explained below many embodiments.In this situation, consistent construction feature passes through identical or similar attached in figure Figure marker recognition.In the context of this description, " transverse direction " or " horizontal direction " should be understood that direction or scope, and its is usual Parallel to extending laterally for semi-conducting material or semiconductor carrier.Therefore, horizontal direction is typically parallel to these surfaces or side It is parallel.In contrast, term " vertical " or " vertical direction " are understood to mean that being typically normal to these surfaces or side prolongs Stretch, thus be typically normal to transverse direction.Therefore, vertical direction extends in the thickness direction of semi-conducting material or semiconductor carrier.
As employed in this specification, term " coupling " and/or " being electrically coupled " do not imply that element must direct coupling It is combined --- intervening elements can be provided between " coupling " or " being electrically coupled " element.
As used herein, " high pressure " and " high tension apparatus ", such as high-pressure depletion transistor npn npn, it is used to be optimised The electronic device applied in high-voltage switch gear.That is, when the transistor turns off, it being capable of blocking anticyclone, about such as 300V Or higher, about 600V or higher, or about 1200V or higher, and when the transistor turns on, it has sufficiently low conducting Resistance (RON) is used to use its application, that is to say, that when substantial electric current passes through the device, its experience is sufficiently low Conduction loss.High tension apparatus can at least stop equal to the voltage of high voltage power supply or using the maximum voltage in its circuit.It is high Voltage device can stop 300V, 600V, 1200V, or this applies other required suitable stop voltages.
As used herein, " low-voltage device ", such as low-voltage enhancement-mode transistor, be can stop such as in 0V and VlowBetween low pressure electronic device, but it can not stop higher than VlowVoltage.VlowCan be about 10V, about 20V, About 30V, about 40V or between about 5V and 50V, such as between about 10V and 30V.
As used herein, conduct to be conducted on electricity, and it is non-conductive to be electric non-conductive.
Fig. 1 shows the electronic unit 100 according to first embodiment, and it includes semiconductor devices 101 and redistribution plate 102.Redistributing plate 102 includes at least two non-conductive layers.In this embodiment illustrated, plate is redistributed 102 include four non-conductive layers 103,104,105,106 and conduction redistribution structure 107.Semiconductor devices 101 is embedded into weight In new distribution grid 102, and it is electrically coupled with redistribution structure 107.Redistributing the side 108 of plate 102 has step 109. The outer contact pad of redistribution structure 107 is disposed on step 109.
Four non-conductive layers 103,104,105,106 are arranged with lamination, so that the redistribution plate 102 is considered Multilayer redistributes plate.Non-conductive layers 103,104,105,106 can include sandwich layer and so-called prepreg layer.Sandwich layer can include fibre Tie up reinforced composite, such as glass fibrereinforced epoxy.Prepreg layer is used as adhesive layer in the fabrication process, and wraps Include can two stage solidifications thermosetting resin.In partially cured state, thermosetting resin can be represented as B state material Material.In this partially cured state, the first prepreg layer can be used for metal foil being adhered to sandwich layer, and the second preimpregnation (pre-preg) layer can be used for other sandwich layer being applied to metal foil, to set up the sandwich construction of redistribution plate 102.Should Redistributing structure includes the conducting shell and conduction through hole of such as metal level.The metal level can include copper, and can be by structure Make is to include one or more conductive traces.
The step 109 is formed by the outburst area of non-conductive layers 105, its protruded from neighbouring conducting shell 104 and from this Conducting shell 104 exposes.The lateral extent of non-conductive layers 105,106 is more than the lateral extent of non-conductive layers 103,104, to provide platform Rank 109.
The step 109 in 108 can the extension on the whole width of side 108 sideways.Engagement pad 110 can be put Put in the only only a part of outburst area that step 109 is provided, or can be on the whole outburst area of step 109 is formed Fang Yanshen.In the embodiment that outer contact pad 110 is placed on only only a part step 109, other outer contact pad can be with It is placed at each interval on step 109.The material of non-conductive layers 105 provides the electric insulation between outer contact pad.
Redistributing structure 107 includes multiple conducting shells 111,112,113, and wherein conducting shell 111 is placed on non-conductive Between layer 103,104, conducting shell 112 is placed between non-conductive layers 104,105, and conducting shell 113 is placed on non-biography Between conducting shell 105,106.Conducting shell 111,112,113 each may be constructed such that the one or more conductive traces of offer.Again Distributed architecture 107 also includes conduction through hole 114, and it extends through the thickness of non-conductive layers 105, and by non-conductive layers 105 The trace of conducting shell 113 on lower surface is electrically coupled to the trace of the conducting shell 112 on the upper surface of non-conductive layers 105.Contact The exposed region for the conducting shell 112 that pad 110 is formed by being placed on the upper surface of the non-conductive layers 105 of step 109 is formed.
The semiconductor devices 101 is embedded into the inside of redistribution plate 102, is especially built into non-conductive layers 104,105 In.The upper surface 115 of semiconductor devices 101 includes electrode 116, and it directly contacts and made electrical contact with conducting shell 111.Semiconductor device The opposed bottom face 117 of part 101 includes one or more interior engagement pads 118.Lower surface 117 is placed in non-conductive layers 105. The redistribution plate also includes at least one conduction through hole 119, and it extends between electrode 118 and conducting shell 113.Interior engagement pad 118 are electrically connected to one or more outer contact pads 110 by redistributing structure 107, especially by conduction through hole 119, Conducting shell 113 and conduction through hole 114.
The horizontal area of interior engagement pad 118 and conduction through hole 119 can be less than the area of outer contact pad 110.Due to external The area of touch pad 110 is more than interior engagement pad 118, and is distributed on the horizontal area of the horizontal area more than semiconductor devices 101, So electronic unit 100 can be considered to have (fan-out) arrangement of scattering.
The step 109 includes tread 120 and rise 121.Tread 120 and 121 are risen perpendicular to arranging each other.In this reality Apply in example, outer contact pad 110 is positioned only on tread 120.Step 109 can also be considered as from redistribution plate 102 Sideways 108 protrude ledge.
Redistributing plate 102 includes upper surface 122, and its lateral extent is less than the lateral extent of lower surface 123.Upper surface 122 and lower surface 123 it is parallel to each other.The correspondence upper surface 122 of width 124 of step 109 in 108 and lower surface 123 sideways The difference of lateral dimension.The tread 120 of step 109 is arranged in parallel with upper surface 122 and lower surface 123, and perpendicular in tread The rise extended between 120 upper surface 125 and the upper surface 122 for redistributing plate 102
121.Tread 120 is also perpendicularly in the upper surface 125 of tread 120 and redistributed between the lower surface 123 of plate 102 The rise 126 of extension.
Fig. 2 shows a kind of arrangement 130, and it includes the electronic unit 100 and circuit board 131 shown in Fig. 1.Circuit board 131 Including multiple non-conductive layers 132,133,134,135, redistribution structure 136 and chamber 137 including step 138.Step 138 is dashed forward Go out in the bottom to chamber 137, to be more than the lower area of the chamber 137 defined by step 138 in the upper lateral of chamber 137.Electricity The redistribution structure 136 of road plate 131 is to conduct, and the outer contacting including being disposed on the step 138 of circuit board 131 Pad 139.When electronic unit 100 is placed in chamber 137, engagement pad 139 is configured as the outer contacting of correspondence electronic unit 100 The position of pad 110.
Electronic unit 100 is arranged so as to, so that the less upper surface 122 of its lateral extent is towards chamber 137, and laterally model Enclose dorsad chamber 137 of lower surface 123 more than upper surface 122.Electronic unit can be with this orientation insertion chamber 137.
When electronic unit 100 is placed in chamber 137, step 109 and circuit in the side 108 of electronic unit 100 Step 138 in the chamber 137 of plate 131 is engaged and is supported on thereon.Electronic unit 100 passes through outer contact pad 110 and circuit Conduction connection 141 between the engagement pad 139 of plate 131 is electrically coupled to the redistribution structure 136 of circuit board 131.
In fig. 2 in the part of shown circuit board 131, the side 140 of chamber 137 includes step 138, its shapes and sizes Match the step 109 of electronic unit 100.In certain embodiments, the step of circuit board can be more than the step of electronic unit, example It is such as slightly wide or slightly deep.The clearance of a certain degree is also desirable that, to help electronic unit to the insertion in chamber 137.
The redistribution structure 136 of circuit board 131 includes multiple conductive layers 142, and it is disposed in non-conductive layers 133,135 Outer surface on, and in the interface of non-conductive layers 132 and 133,133 and 134 and 134 and 135.Conducting shell 142 is each It can be configured to provide one or more conductive traces.Redistributing structure 136 also includes one or more conduction through holes 143, it extends between the conductive trace of different conducting shells 142 and by the conductive trace of different conducting shells 142 thermocouple each other Close.Engagement pad 139 is provided by the expose portion of conducting shell 142, remaining to be embedded in circuit board 131, and especially non-conductive Between layer 133,134.
Outer contact pad 110 can be connected to engagement pad 139 by welding or electroconductive binder connection.By electronic unit Conduction connection 141 between 100 inside redistribution structure 107, electronic unit 100 and circuit board 131, semiconductor devices 101 are electrically coupled to the redistribution structure 136 of circuit board 131, and are coupled on circuit board 131 or in circuit board 131 Other part not shown in Fig. 2 of installation view.
The conducting shell 142 of circuit board 131 and the trace dimensions of conduction through hole 143 are far longer than the through hole of electronic unit 100 114 and the conductive trace of conducting shell 111,112,113.This makes it possible for the simpler manufacture for being suitable for large-scale production Method makes the redistribution structure 136 of circuit board 131.This is useful, because the usual magnitude of circuit board 131 is more than electronics Part 100.
The conductive trace and conduction through hole of the redistribution structure of electronic unit 100 are more fine and possible in rank Manufacture more complicated.It is suitable for by providing structure of scattering for electronic unit 100 so as to the electric region of its outer contact pad 110 Simple installation of the electronic unit 100 in the engagement pad 139 of circuit board 131, can limit more complicated use or expensive system Process is made the need for electronic unit 100 is used only for.
The double-layer structure panel 102 of the redistribution plate 102 of electronic unit 100 also enables redistribution structure 107 to exist Additional function is provided in electronic unit 100.For example, the semiconductor chip that can be embedded as transistor device by being placed on is non- There is provided the current sensing function for transistor device for conductive trace between conducting shell.In this embodiment, at least one The redistribution structure that dividing is used for providing current sense is placed adjacent to redistribute the side of the transistor in plate 102.
Fig. 3 shows the electronic unit 150 according to second embodiment.Electronic unit 150 is including semiconductor devices 151 and again Distribution grid 152, redistribution plate 152 have four non-conductive layers 153,154,155,156 and including three conducting shells 158, 159th, 160 conduction redistribution structure 157.However, redistribution plate 152 is not limited to this arrangement, and example can be included Such as more or less conduction and/or non-conductive layers.Respectively, conducting shell 158 is disposed between non-conductive layers 153,154, Conducting shell 159 is disposed between non-conductive layers 154,155, and conducting shell 160 be disposed in non-conductive layers 155,156 it Between.Redistributing structure 157 also includes conductive through hole 161, conductive trace and conduction of the conductive through hole 161 in conducting shell 159 Extend between conductive trace in layer 160.
The semiconductor devices 151 be vertical transistor device, its first galvanic electrode 162 on the first main surface 163, and And second galvanic electrode 164 on opposite main surface 165.Term vertical transistor device represent drift path be it is vertical and And with the transistor of two main surface normals.
The height of semiconductor devices 151 is more than each of the non-conductive layers 153,154,155,156 of redistribution plate 152 Thickness.Semiconductor devices 151 is arranged in embedded redistribution plate 152, and its first main surface 163 is arranged on non-conductive layers 153rd, on the conductive trace of the conducting shell 158 of the interface between 154.Opposite main surface 165 is located in non-conductive layers 155, And the conductive trace for the conducting shell 160 placed between non-conductive layers 155,156 is electrically coupled to by multiple conduction through holes 166.
Electronic unit 150 has the primary principal plane 168 and secondary principal plane 169 of electronic unit 150, and it substantially puts down each other OK.The lateral extent of primary principal plane 168 is more than secondary principal plane 169.Led in side 167 on the first main surface 168 and second In the arrangement extended between surface 169, the electronic unit 150 is different from the electronic unit of first embodiment.
167 include multiple steps from secondary principal plane 169 to primary principal plane 168 sideways.Non-conductive layers 154 is passed non- The top of side 170 of conducting shell 153 is prominent.Non-conductive layers 155 extends in the top of side 171 of non-conductive layers 154, and non-conductive Layer 156 extends in the top of side 172 of non-conductive layers 155.Non-conductive layers 153,154,155 respective outburst areas 174,175, 176 each include the outer contact pad 177,178,179 of the redistribution structure 157 of electronic unit 150.
Outer contact pad 177 provides the first galvanic contact pad for the first galvanic electrode 162 of semiconductor devices 151.Engagement pad 179 provide the second galvanic contact pad for the second galvanic electrode 164 of semiconductor devices 151.Engagement pad 178 is electronic unit 150 Current sense is provided.Redistributing structure 157 includes through hole 161, and it is being coupled to the first electric current electricity of semiconductor devices 151 Extend between the conductive trace of the conducting shell 160 of pole 162 and the conductive trace 173 that engagement pad 177 is provided.Conduction through hole 161 is wrapped The material of the resistivity of the material with higher than conductive trace is included, therefore allows to carry out current sense via engagement pad 177.
Fig. 3 also shows that circuit board 180, and it includes the chamber 181 for being used to receive electronic unit 150.The chamber 181 has side 182, it includes three steps 183,184,185, these three steps be configured as bind electronic components 150 outburst area 174, 175th, 176 and these outburst areas are supported.The circuit board 180 include arranged with lamination five non-conductive layers 186,187,188, 189 and 190 and redistribution structure 191.However, the circuit board 180 is not limited to this arrangement, and can have more Non-conductive and conducting shell.Chamber 181 is opened on a main surface of circuit board, to receive electronic unit 150.Minimum is non-conductive Layer 186 forms the closed base of chamber 181, for accommodating electronic unit 150.
Circuit board 180 includes redistribution structure 191, and it includes being arranged in non-conductive layers and conducted on through hole 193 and it Between conductive trace 192, the conduction through hole extends through one or more layers of thickness, to provide three-dimensional distributed architecture again 191。
Chamber 181 has lateral extent and in-profile, and it generally corresponds to the lateral extent and outer wheels of electronic unit 150 It is wide.The chamber 181 that the less secondary principal plane 169 of lateral area is faced downwardly circuit board 180 arranges, the first larger master of lateral area Plane 168 is up and dorsad circuit board 180.Because chamber 181 is formed in four non-conductive layers of circuit board 180, and Electronic unit 150 is also formed by four non-conductive layers, the non-conductive layers of the thickness corresponding circuits plate 180 of each non-conductive layers Thickness, the height of the depth correspondence electronic unit 150 of chamber 181.
Width extension of the outburst area 174,175,176 of electronic unit 150 along the side 167 of electronic unit 150.Class As, the step 183,184,185 of chamber 181 extends sideways along the whole of chamber 181.
Three steps 183,184,185 of circuit board 180 each include engagement pad 194,195,196, and it is electrically coupled to The redistribution structure 191 of circuit board 180.Electronic unit 150 is installed in chamber 181, so that outer contact pad 177 is installed in In the engagement pad 194 of non-conductive layers 187 and the engagement pad 194 is electrically coupled to, the outer contact pad 178 of electronic unit 150 is pacified In the engagement pad 195 of circuit board 180 and this is electrically coupled to, and the outer contact pad 179 of electronic unit 150 is installed in electricity In the engagement pad 196 placed in the non-conductive layers 189 of road plate 180 and it is electrically coupled to this.
Circuit board 180 can be significantly greater than electronic unit 150.For example, the electronic unit 150 can include single transistor Device, such as MOSFET, IGBT, HEMT (HEMT), and can have the horizontal stroke of about several millimeter magnitudes To area.Circuit board 180 can have the horizontal area of about square metre magnitude.
The each horizontal area of outer contact pad 177,178,179 of electronic unit 150 is both greater than the horizontal face of interior engagement pad Product, and the conduction particularly greater than extended between the redistribution structure 157 and semiconductor devices 151 of electronic unit 150 The horizontal area of through hole 161.For example, the size of interior contact area can be about tens microns of magnitude, but outer contact pad 177th, 178,179 area can be about the magnitude of square millimeter.The large-size of outer contact pad 177,178,179 causes outer Engagement pad 177,178,179 can be directly installed on the step 183,185,186 of chamber 181 by solder flux, electroconductive binder etc. Engagement pad 194,195,196 on.
Fig. 4 shows the electronic unit 200 according to 3rd embodiment.Electronic unit 200 is including semiconductor chip 201 and again Distribution grid 202, redistribution plate 202 includes the conduction redistribution structure 203 with conductive trace and conduction through hole.Again divide Fabric swatch 202 can have two or more non-conductive layers, and in the third embodiment, including four non-conductive layers 204,205, 206、207。
The part of electronic unit 150 that electronic unit 200 is different from second embodiment is to redistribute the outside of plate 202 The form of profile.At least one step is provided in two or more sides of redistribution plate 202.
Redistribution plate 202 includes the upper major surface and lower main face 209 being generally parallel to one another.Upper major surface It is more than lower main face 209 in 208 transverse directions.Two opposite flanks 210,211 of redistribution plate 202 are each included from bottom Three steps 212,213,214 of upper major surface 208 are arrived on main surface 209.
Step 212 is extended or prominent peripheral region by non-conductive layers 205 above the lateral extent of adjacent non-conductive layers 204 Domain is formed.Similarly, the step 213 on two opposite flanks 210,211 of electronic unit 200 by non-conductive layers 206 adjacent Prominent neighboring area is formed above the lateral extent of non-conductive layers 205, and step 214 by non-conductive layers 207 adjacent non- The neighboring area generation of the top of conducting shell 206 extension.
Step 212,213,214 can be by removing two phases of the non-conductive layers 204,205,206 in redistribution plate 202 Peripheral part on side is provided.The width w of non-conductive layers 206 peripheral part, and conducting shell below can be removed Part be exposed for provide outer contact pad.The width 2w of non-conductive layers 205 peripheral part can be removed, and is conducted below The part of layer is exposed to provide outer contact pad.The width 3w of non-conductive layers 204 peripheral part can be removed, and is passed below The part of conducting shell is exposed to provide outer contact pad.
Electronic unit 200 includes multiple outer contact pads 215, and it is disposed in form the non-conductive of step 212,213,214 On the neighboring area of the protrusion of layer 205,206,207.These outer contact pads 215 by electronic unit 200 redistribution structure 203 Expose portion provide, and cause semiconductor chip 201 to be capable of being electrically coupled other part outside electronic unit 200.
In an illustrated embodiment, two opposite flanks 210,211 have similar profile, so as to the electronic unit 200 With minute surface symmetrical profiles.In other embodiments, three of electronic unit or four sides can also have identical structure. All four of redistribution plate are sideways in the embodiment with identical ledge structure, and electronic unit 200 can be described as tool There is pyramidal in shape.
Electronic unit 200 can be installed in the chamber 221 of circuit board 220, the size electricity corresponding with Internal periphery of the chamber The outline of subassembly 200.Chamber 221 includes side 222,223 relative to each other, each of which all have three steps 224,225, 226, three steps 212,213,214 of two opposite flanks 210,211 of these three steps correspondence electronic unit 200.
Circuit board 220 also includes redistribution structure 227, and it includes being arranged in non-conductive layers 229 and conduction through hole 230 Or between conducting shell 228, the conduction of conducting shell 228 that conduction through hole 230 is arranged on the either side of a non-conductive layers 229 Extend between trace 231.The peripheral part of non-conductive layers 229 provides step 224,225,226.
Circuit board 220 also includes the engagement pad 232 for the exposure being located on step 224,225,226, the contact of these exposures Pad 232 is formed by the exposed region of conducting shell 228, especially redistributes the conductive trace 231 of the conducting shell 228 of structure 227 Distal end.Engagement pad 232, which is disposed in the upper horizontal surface of step 224,225,226, corresponds to the external of electronic unit 200 At the position of touch pad 215, so that the outer contact pad 215 of electronic unit 200 may be electrically coupled to the redistribution knot of circuit board 220 Structure 227.
Outer contact pad 232 can be disposed in one of chamber 221, one or more steps on two or more sides 212nd, on 213,214.When electronic unit 200 is inserted into chamber 221, the arrangement correspondence electronics of the engagement pad 232 of circuit board 220 The arrangement of part 200.
The step 224,225,226 of chamber 221 is by stretching into week of the non-conductive layers 229 of the stacking of the circuit board 220 of chamber 221 Rim portion is provided.Minimum non-conductive layers 233 is farthest extended in chamber 221, and is provided for accommodating a part of electronic unit Depression 234, the particularly minimum electronic unit 200 of lateral extent non-conductive layers 204.The adjacent non-conductive layers 235 of lamination A segment distance in chamber 221 is extended to, the distance is less than foot conducting shell 233, but be greater than being located at the top of non-conductive layers 233 Adjacent non-conductive layers 235.Similarly, the highest non-conductive layers 236 of lamination is disposed in non-conductive layers 235, is passed so as to non- The peripheral part of conducting shell 235 is uncovered.One or more engagement pads 232 can be disposed in the peripheral part of these exposures On.
Chamber 221 can be formed by removing the part of prefabricated laminated circuit board in circuit board 220.Chamber 221 can also Formed during the manufacture of circuit board 220 by constructing each layer when being added to lamination for every layer.Non-conductive layers can be carried It is provided with cut-off parts and is stacked, provides the chamber 221 with desired Internal periphery.
The non-conductive layers 205 of electronic unit 200 is disposed in the depression 237 formed by the non-conductive layers 235 of circuit board 220 In.The non-conductive layers 206 of electronic unit 200 is disposed in the depression 238 formed by the non-conductive layers 236 of circuit board 220, and And the non-conductive layers 207 of electronic unit 200 is disposed in the depression 239 formed by the non-conductive layers 236 of circuit board 220.
Fig. 5 shows to include the arrangement 250 of two electronic units 200 ', 200 ".The correspondence of electronic unit 200 ', 200 " ministry of electronics industry Part 200, and with one and another inverted arrangement.
Electronic unit 200 ' is arranged with towards the maximum main surface 208 of a direction (such as downward), and another Individual electronic unit 200 " is oppositely arranged, and its maximum main surface 209 is towards opposite direction (such as upward).This causes the second electronics Step 212 ", 213 ", 214 " on part 200 " can be mounted respectively and be supported on the step of another electronic unit 200 ' On 212 ', 214 ', 213 ' " '.Two electronic units 200 ', 200 " pass through each outer contact pad of electronic unit 200 ', 200 " 215 are electrically coupled to one another.
The arrangement 250 can be used for forming circuit by two or more electronic units.If for example, by by two electronics Part 200 ', 200 " is installed together, and electronic unit 200 ', 200 " each includes transistor device, then can manufacture half Bridge circuit.When electronic unit 200 ', 200 " is installed together, the conduction redistribution structure of electronic unit 200 ', 200 " 203 ', 203 " can be different, to provide required circuit.In Figure 5 in shown arrangement 250, electronic unit 200 ' has There is the engagement pad 215 ' of the exposure on step 212, the step is installed in the engagement pad 215 " of electronic unit 200 ", and The source electrode 252 of transistor 201 ' is connected to the drain electrode 253 of transistor 201 ", and therefore forms the node of half-bridge circuit.
Can by the appropriate conducting structure in the redistribution plate 202 ', 202 " of two electronic units 200 ', 200 ", The gate electrode of such as HEMT the first transistor is electrically coupled to the source electrode of such as MOSFET second transistor, to form level Join circuit.
In Figure 5 in shown embodiment, two electronic units link together.However, many electronic units can connect Tie together, to form desired circuit or form submodule.Electronic unit can also include different semiconductor devices, for example One electronic unit can include transistor, and the second electronic unit can include the gate drivers for transistor.
Multiple electronic units or submodule including preassembled multiple electronic units can be installed in circuit board In chamber, the chamber has the lateral dimension and profile for the combination for being suitable for receiving electronic unit.The combination of part can be by electricity The engagement pad placed on the step of the outermost surfaces of subassembly and the step formed in the side of chamber is electrically connected to circuit The redistribution structure of plate.However, contact site can also be formed by other method, such as closing line, metal tape and metal clip Deng.
One or more steps of electronic unit can not include engagement pad.As for engagement pad to be installed into circuit board Engagement pad, these steps of electronic unit can be installed in the step of chamber by non-conductive adhesive or conductive adhesive On.Alternatively, any step without engagement pad can still without adhesive and with the respective step of circuit board its He connects.In this embodiment, the mechanical splice between electronic unit and circuit board is only by the external of electronic unit Connection between touch pad and the engagement pad of circuit board is formed.
In the embodiment being previously shown, each electronic unit includes single semiconductor devices, such as single transistor Device.It is however also possible to provide electronic unit, it is included in two or more semiconductor devices embedded in redistribution plate, The redistribution plate is included in one or more of one or more sides step.
Fig. 6 shows electronic unit 260, and it includes two semiconductor devices 261,262, in this particular embodiment portable, its For transistor device.Two semiconductor devices 261,262 are arranged in redistribution plate 263 with stack arrangement.
Redistributing plate 263 includes four non-conductive layers 264,265,266,267 and conduction redistribution structure 268, passes Lead redistribution structure 268 include be located at non-conductive layers 267,266 between conductive trace 269, non-conductive layers 266,265 it Between the conductive trace 270 arranged, the conductive trace 271 arranged between non-conductive layers 265,264 and under non-conductive layers 264 The conductive trace 272 arranged on surface.Redistribution structure 157 is also included within the conduction extended between conductive trace 270 and 271 Through hole 273 and the conduction through hole 274 extended between conductive trace 271 and 272.
Semiconductor devices 261 includes the lower surface installed in conductive trace 271, and with such height, so as to half The opposing upper 275 of conductor device 261 is located in the thickness of non-conductive layers 266.Redistributing structure 268 is included in addition Multiple conduction through holes 276, it is extended to positioned in non-conductive layers 266 and 267 from the upper surface 275 of the first semiconductor devices 261 Between conductive trace 269.
Second semiconductor devices 262 is located to be contacted in the first non-conductive layers 264, and with conductive trace 271 and 272.
Similar to the electronic unit of the second and third embodiments shown in Fig. 3 to 5, at least the one of redistribution plate 263 Individual side 277 is included by removing multiple steps 278 that the adjacent non-conductive layers of a part is manufactured.Non-conductive layers 265 is non-conductive The top of layer 264 extends and prominent.Non-conductive layers 266 extends in the top of non-conductive layers 265 and protruded from non-conductive layers 265, non-to pass Conducting shell 267 extends in the top of non-conductive layers 266 and protruded from non-conductive layers 266.It is external that each step 278 includes at least one Touch pad 279.Each outer contact pad 279 is formed by the expose portion of conductive trace, the conductive trace be non-conductive layers 265,266, The conductive trace for the conductive trace 269,270,271 placed on 267 periferal ledge.
Embodiment shown in Fig. 6 provides half-bridge circuit.Second semiconductor devices of the bottom transistor of lamination is provided 262 are arranged with draining in lower configuration, and its drain electrode is electrically coupled to the outer contact pad 281 placed in non-conductive layers 265 and passed Lead trace 272.Source electrode 283 is located to be electrically coupled on the upper surface of semiconductor devices 262, and with conductive trace 285, is conducted Trace 285 is electrically coupled to the outer contact pad 280 placed in non-conductive layers 266.Gate electrode 290 is disposed in semiconductor devices On 262 upper surface, and it is electrically coupled to the conductive trace 291 of redistribution structure 268.
Semiconductor devices 261 is arranged with draining in lower configuration.Drain electrode 286 is installed on conductive trace 285, and And coupled via conductive trace 285 with the source electrode of bottom transistor 262, and therefore it is coupled to outer contact pad 280.Outer contact pad 280 are provided to the path of the node of half-bridge structure.
The source electrode 287 and gate electrode 288 being placed on the upper surface 289 of the first semiconductor devices 261 are electrically coupled To conductive trace 269, and extend to the engagement pad 279 placed in non-conductive layers 267.
Electronic unit 260 can be installed on circuit board 180 in the way of similar to the embodiment shown in Fig. 3, electricity Road plate 180 includes chamber 181 and redistribution structure 191.For example, electronic unit 260 can be inserted into the chamber of a circuit board 180 In 181, so as to engagement pad 279,280 and 281 and the placement on the step 183,184,185 of circuit board 180 placed on step 278 Engagement pad 194,195,196 engage.
Fig. 7 shows the electronic unit 300 according to the 5th embodiment.Electronic unit 300 includes being arranged in redistribution plate 304 Two semiconductor devices 301,302 in interior common cavity 303.Redistributing plate 304 includes multiple non-conductive layers and multiple biographies Conducting shell.In the figure 7 in shown embodiment, redistribution plate 304 includes four non-conductive layers 305,306,307,308 and difference The conducting shell 309 arranged between non-conductive layers 305,306, the and of conducting shell 310 arranged between non-conductive layers 306,307 The conducting shell 311 arranged between non-conductive 307,308.However, redistribution plate 152 is not limited to the non-conductive layers of this quantity And conducting shell, and can have the non-conductive layers and conducting shell of more or less numbers.
Chamber 303 is placed in non-conductive layers 306,307, and size may adapt to accommodate two or more semiconductors Device.Semiconductor devices can be placed on intracavitary by all, or extend to the upper surface of chamber.For example, semiconductor devices can To be the semiconductor chip of non-package, so-called nude film, or can be package device.Semiconductor devices may be electrically coupled to Form the rewiring structure 308 placed on the base portion and/or wall of chamber 303.
The redistribution plate 304 of electronic unit 300 includes at least one side 309, and the side includes at least one At least one outer contact pad 311 of the redistribution structure 312 of rank 310 and the redistribution plate 304 exposed on step 310. In the figure 7 in shown embodiment, side 309 includes three steps 310, and each step includes electronic unit 300 at least One outer contact pad 311.
Electronic unit 300 can be installed on circuit board 180, and circuit board 180 includes chamber 181 and redistribution structure 191.For example, electronic unit 300 can be inserted into the chamber 181 in the surface of circuit board 180 or depression, to be put on step 310 The engagement pad 311 put is engaged with the engagement pad 194,195,196 placed on the step 183,184,185 of circuit board 180.
Fig. 8 illustrates a part for circuit board 330, especially includes the top surface of the chamber 332 for receiving electronic unit 331.Chamber 332 has substantially square pyramid, and it has the larger depression 333 in top, medial recess 334 and undercut 355, The horizontal area of medial recess 334 is between upper recess 333 and undercut 335.Upper recess 333 and intermediate recess 334 Including peripheral ledge or step 337, disposed thereon is the expose portion of the conductive trace 336 of multilayer redistribution structure.Pass The expose portion for leading trace 336 provides engagement pad 339.Redistribution structure includes being disposed in other on top surface 331 Conductive trace 338 and in fig. 8 unshowned conduction through hole, the conduction through hole extend through the thickness of one or more non-conductive layers Degree.
Chamber 332 can be used for receiving with the pros similar with the step in four sides in the upper shed of surface 331 Pyramidal electronic unit.However, electronic unit can have one or more on than four sides only few side Rank, and can be installed on the side of pyramidal than the four few one side or the multi-laterals in side and less than the three of chamber 332 In individual depression 333,334,335.
Step 337 in chamber 332 is provided by the part of the non-conductive layers of circuit board 330.The height correspondence of step 337 is non-to be passed The thickness of conducting shell.
Fig. 9 illustrates the further view of circuit board 330, and there is shown with sudden and violent from first in the upper recess 333 of chamber 332 Dew part 341 extend conductive trace 340 and arranged from upper recess 333 the second expose portion 343 extension second The position of conductive trace 342.First conductive trace 340 and the second conductive trace 342 are shown by a dotted line, it is placed in Fig. 9 In the main body of circuit board 330, especially highest non-conductive layers and its it is adjacent below non-conductive layers between.These non-biographies The thickness of conducting shell determines the thickness of the depression 333,334,335 of chamber 332.
First conductive trace 340 is low pressure conductive trace, and the second conductive trace 342 is high pressure conductive trace.Low pressure is conducted Trace 340 and high pressure conductive trace 342 are arranged in the circuit board, so that its is underlapped.Low pressure conductive trace 340 is configured as It is coupled to the low-field electrode for the electronic unit installed in chamber 332.For example, low-field electrode includes the letter of N-type mosfet transistor Number electrode, grounding electrode and source electrode.High pressure conductive trace 342 is configured as being coupled to the electronic unit installed in chamber 332 High-field electrode.For example, high-field electrode can be the drain electrode of N-type mosfet transistor.Low pressure conductive trace and high pressure conduction The not arranged superposed of trace can help to reduce electric leakage.
As used herein, leakage distance is defined as along the isolation body surface being placed between two conductive materials Shortest path between two conductive materials of planar survey.Minimum leakage distance is kept to help to reduce over time and go out The risk of existing failure.Due to applying the generation for the conducting path along slider surface that high pressure is caused in long-time, that is, leak Electricity, it is relevant with RMS value, and the material property of the environmental condition and slider described by dustiness can also be depended on.
Low pressure conductive trace 340 may be directly coupled to the source electrode of transistor, and high pressure trace 342 can be connected It is connected to the high-field electrode of the transistor of such as drain electrode.
In fig .9 in shown embodiment, low pressure conductive trace 340 and high pressure conductive trace 342 are disposed in multilayer electricity In the same layer of road plate.
Figure 10 illustrates the embodiment of circuit board 330, and its mesolow trace 340 and high pressure trace 342 are disposed in multilayer In different layers in circuit board 330.For example, all high pressure traces 342 can be disposed in first layer 345, and it is all low Impression line 340 can be disposed in the second layer 346, and the second layer 346 is with first layer 345 by the one or more of circuit board 330 Non-conductive layers 347 is spaced apart.This arrangement can also help to reduce electric leakage, because compared with high pressure trace 342 and low pressure trace 340 It is disposed in the arrangement in common layer, leakage distance increase.
Conduction through hole 344 can be provided, to determine that trace 348 is tied from adjacent layer 349 to redistribution is wherein placed with The route of the plane of the respective traces of structure.For example, the conduction that the low pressure trace 348 in lower floor can be arranged by neighbouring chamber 332 Through hole 344 is coupled to the low pressure trace 340 in the second layer 346.
It is disposed in high pressure trace 342 in the embodiment with the different layers of low pressure trace 340, low pressure trace 340 and high pressure Trace 342 can also be arranged such that they are underlapped.
Method is described referring now to flow chart.Each of flow chart 350 and 360 in Figure 11 and 12 describes basis respectively The step of one embodiment for the method for making electronic unit, the electronic unit has to be included at least one side Embedded semiconductor devices in the redistribution plate of at least one step.It should be noted that flow chart 350,360 is some to ability The obvious details of field technique personnel and feature have been ignored.For example, as known in the art, step can include one or Many sub-steps can be related to special equipment or material.Although the step 351 to 353 shown in flow chart 350 and 360 and 361 to 369 are enough to describe one embodiment, but other embodiment can utilize and be different from what is shown in flow chart 350,360 Step.
Since the step 351 of flow chart 350, step 351 includes providing electronic unit, and the electronic unit includes dividing again Fabric swatch, the redistribution plate includes at least the first non-conductive layers, the second non-conductive layers and rewiring structure, rewiring structure Including the conducting shell between the first and second non-conductive layers.Semiconductor devices 101 is embedded into redistribution plate, and with Conducting shell is electrically coupled.
Continue step 352, for example, the peripheral part of a non-conductive layers is removed by laser ablation.
Continue step 352, expose the conduction being previously embedded to below the removed peripheral part of a non-conductive layers A part for layer.The expose portion of conducting shell is placed in the protrusion non-conductive layers with stepped form.Can be in the ministry of electronics industry The neighboring area of the first non-conductive layers is removed above the whole length of one or more sides of part.
Figure 12 shows the flow chart 360 of the method for making electronic unit.Since step 361, carried in the form of piece For sandwich layer, it includes the non-conductive materials of such as glass fibrereinforced epoxy.Continue step 362, adhesive is for example presoaked Layer be applied to sandwich layer.Continue step 363, the conducting shell of the metal foil of such as copper foil is applied to adhesive layer, and optional Ground is configured to generate one or more conductive traces.Continue step 364, adhesive phase is applied to conducting shell.Continue step 365, including the sandwich layer of cutout unit is applied to adhesive phase, and in step 366, semiconductor devices is put into cutout unit In.Continue step 367, apply other adhesive phase, and in step 368, apply conducting shell.Section's selection of land, can apply Other layer is to build multilayer module.Continue step 369, then multilayer module is heat-treated (under alternatively pressurizeing), with Just by redistribute plate each layer be engaged with each other, and by semiconductor devices be electrically coupled to conducting shell there is provided redistribution plate Redistribution structure, and by semiconductor devices insertion redistribution plate in.
In order to form step in the side of electronic unit, the peripheral part of an outside non-conductive layers can be removed, With the following conductive trace of exposure, the conductive trace provides outer contact pad for electronic unit.It is, for example, possible to use by Figure 11's The method that flow chart 350 is described.
Generally, many electronic devices will be manufactured on single panel, and the panel is divided or singulation, to form list Only electronic unit.Before or after singulation process, peripheral part can be removed, to manufacture the exposed area of conducting shell and outer Contact site region.
For the ease of description, using the space such as " lower section ", " following ", " bottom ", " top ", " top " with respect to art Language, to explain positioning of the element relative to the second element.Except different from the orientation shown in figure, these terms are intended to contain Lid device is differently directed.
Further, the term of " first ", " second " etc. also be used to describe various elements, region, segmentation etc., and Nor being intended to limitation.Through description, identical term refers to identical element.
As used herein, term " having ", " containing ", " comprising ", "comprising" etc. are open term, and it is indicated The presence of the element or feature, but it is not excluded for additional element and feature.Unless context is clearly dictated otherwise, article " one ", " one " and "the" are intended for including plural number and odd number.
It should be appreciated that unless otherwise expressly stated, the feature of various embodiments specifically described herein can be bonded to each other.
Although having been shown herein and describing specific embodiment, it should be appreciated to those skilled in the art that various replace Shown and described specific embodiment can be replaced by changing example and/or equivalent implementations, without departing from protection scope of the present invention. It is intended to cover any reorganization or change of specific embodiment discussed herein.Accordingly, it is desirable to which the present invention is only Limited by appended claims and their equivalents.

Claims (18)

1. a kind of electronic unit, including：
At least one semiconductor devices；And
Plate, including at least two non-conductive layers and the redistribution structure of conduction are redistributed,
Wherein, the semiconductor devices is embedded in the redistribution plate, and is electrically coupled to the redistribution of the conduction Structure, and the redistribution plate has side, and the side is on the direction parallel with least two non-conductive layers Separate in said direction away from the semiconductor devices and with the semiconductor devices, wherein the side has platform Rank, and
The outer contact pad of the redistribution structure of wherein described conduction is disposed on the step.
2. electronic unit according to claim 1, wherein the step extends the length of the side.
3. electronic unit according to claim 1, in addition to：
First non-conductive layers and the second non-conductive layers, first non-conductive layers are stretched out simultaneously from the side of second non-conductive layers And the step is provided.
4. electronic unit according to claim 1, wherein the step includes tread and rise, and the outer contact pad It is disposed on the tread.
5. electronic unit according to claim 1, is additionally included in the additional stations in the second side of the redistribution plate Rank.
6. electronic unit according to claim 1, wherein the redistribution structure of the conduction is included out of at least one Scatter distribution of the engagement pad to the outer contact pad.
7. electronic unit according to claim 1, wherein the redistribution structure of the conduction includes at least one through hole, The through hole extends through the thickness of at least one non-conductive layers.
8. electronic unit according to claim 1, wherein the semiconductor devices is transistor device.
9. electronic unit according to claim 1, in addition to the additional redistribution structure for current sense.
10. electronic unit according to claim 9, wherein the additional redistribution structure includes at least one conduction and led to Hole, the conductive through hole includes the material of the resistivity of conductive trace of the resistivity more than the redistribution structure of the conduction.
11. electronic unit according to claim 1, in addition to：
First semiconductor devices, including the first transistor；With
Second semiconductor devices, including second transistor, the second transistor are configured to the first transistor in half At least one of bridge configuration and cascade configuration.
12. electronic unit according to claim 1, wherein the semiconductor devices is package semiconductor devices, and institute State in the chamber that package semiconductor devices is installed in the redistribution plate.
13. electronic unit according to claim 1, wherein the semiconductor devices is disposed in multiple non-conductive layers.
14. electronic unit according to claim 1, in addition at least two semiconductor chips of stack arrangement.
15. electronic unit according to claim 1, wherein the main surface of the semiconductor devices is disposed in the first plane In, and the conductive trace being electrically coupled in the interface being disposed between two non-conductive layers, the interface be different from Second plane of first plane.
16. a kind of electronic installation, including：
Circuit board, including multiple non-conductive layers, redistribution structure and at least one chamber, at least one described chamber include step, The step includes being electrically coupled to the engagement pad of the redistribution structure；With
Electronic unit, including redistribute plate and at least one semiconductor devices being embedded in the redistribution plate, institute Stating redistribution plate has the side with step and the outer contact pad being arranged on the step,
Wherein described electronic unit is installed in the chamber, and the outer contact pad of the electronic unit is installed in the electricity In the engagement pad of road plate.
17. device according to claim 16, wherein the outer contact pad of the electronic unit passes through solder flux and conductive adhesion One in agent be electrically coupled to the circuit board engagement pad.
18. device according to claim 16, wherein the circuit board is included on non-overlapping direction from the electronics The high pressure conductive trace and low pressure conductive trace of part extension.
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US9196554B2 (en) 2015-11-24
DE102014113519B4 (en) 2021-09-16

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