CN105137113A - Double-axis magnetic liquid inertial sensor - Google Patents

Double-axis magnetic liquid inertial sensor Download PDF

Info

Publication number
CN105137113A
CN105137113A CN201510358000.3A CN201510358000A CN105137113A CN 105137113 A CN105137113 A CN 105137113A CN 201510358000 A CN201510358000 A CN 201510358000A CN 105137113 A CN105137113 A CN 105137113A
Authority
CN
China
Prior art keywords
sensing chip
permanent magnet
magnetic liquid
housing
inertial sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510358000.3A
Other languages
Chinese (zh)
Other versions
CN105137113B (en
Inventor
李德才
姚杰
吴少峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Jiaotong University
Original Assignee
Beijing Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Jiaotong University filed Critical Beijing Jiaotong University
Priority to CN201510358000.3A priority Critical patent/CN105137113B/en
Publication of CN105137113A publication Critical patent/CN105137113A/en
Application granted granted Critical
Publication of CN105137113B publication Critical patent/CN105137113B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

A double-axis magnetic liquid inertial sensor belongs to the field of mechanical engineering measurement, and solves the problem that a present magnetic liquid inertial sensor cannot be applied to practical engineering. The double-axis magnetic liquid inertial sensor comprises a casing (1), a first induction sheet (2), pads (3), a first permanent magnet (4), a magnetic liquid (5), a second induction sheet (6), a second permanent magnet (7), a third induction sheet (8) and an fourth induction sheet (9). When vibration occurs outside, the first permanent magnet (4) and the second permanent magnet (7) move relative to the casing (1); the first, second, third and fourth induction sheets cut a magnetic induction line at certain speed to generate inductive electromotive force; and an external circuit at eight foot stands of the induction sheets is used to output a voltage signal. The speed is in linear relation with the output voltage, the linearity degree is high, and the flexibility is high.

Description

A kind of biaxial magnetic liquid inertial sensor
Technical field
The present invention relates to mechanical engineering fields of measurement.
Background technology
Inertial sensor can develop into speed pickup, acceleration transducer, displacement transducer and obliquity sensor etc., has a wide range of applications in every field such as the vehicles, biomedicine, oil exploitation, war industrys.Along with the development of science and technology, people constantly increase the demand with highly sensitive, that reliability is high, resolution is high and the linearity is good speed pickup.Because the susceptibility of magnetic liquid inertial sensor to inertial force is higher, then have that structure is simple, volume is little, mechanical loss and an advantage such as the life-span is long.But existing magnetic liquid inertial sensor cannot be applied due to various structures problem in engineering reality, there is the patent of problem as described in application number CN103149384A and application number CN103675351A, device described in this patent adopts the second order law of buoyancy of magnetic liquid, and mass is permanent magnet.These two patents are and make use of permanent magnet and move in enclosure interior, make the inductance value in coil different, thus output signal detected.But because the relative permeability of permanent magnet is very little, cause signal not strong, external noise is very serious to the interference of sensor, and the linearity is not high simultaneously.Therefore, must redesign the structure of existing magnetic liquid inertial sensor, can be applied in practice.
Summary of the invention
The situations such as this reality technical matters to be addressed by invention is, existing magnetic liquid inertial sensor cannot be applied due to various structures problem in engineering reality, and as not high in the linearity and signal is weak.Spy provides a kind of biaxial magnetic liquid inertial sensor.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of biaxial magnetic liquid inertial sensor of the present invention, comprises housing, the first sensing chip, pad, the first permanent magnet, magnetic liquid, the second sensing chip, the second permanent magnet, the 3rd sensing chip, the 4th sensing chip.
The lower surface of the upper surface of four pads with the first permanent magnet is fixedly connected with, four pads are made to be symmetrically distributed in four uniform positions of the first permanent magnet lower surface, the lower surface of the upper surface of the second permanent magnet with four pads is fixedly connected with, after the first permanent magnet and the second permanent magnet being separated by four pads, form a space, thus form moving assembly.Described first permanent magnet and the second permanent magnet size, shape are identical, and be right cylinder, two adjacent face polarity are contrary, and namely the lower surface of the first permanent magnet is N (S) pole, and the upper surface of the second permanent magnet is S (N) pole.In this way, make to form a uniform magnetic field between the first permanent magnet and the second permanent magnet.
Two inclined-planes of the first sensing chip end are fixedly connected with the inclined-plane, left side of the 4th sensing chip end with the inclined-plane, left side of the 3rd sensing chip end respectively, simultaneously, by the second sensing chip end two inclined-planes be fixedly connected with the inclined-plane, right side of the 4th sensing chip end with the inclined-plane, right side of the 3rd sensing chip end respectively, make the first sensing chip, the second sensing chip, the 3rd sensing chip and the 4th sensing chip surperficial concordant and be uniformly distributed in 90 degree, thus forming detection components.Described first sensing chip, the second sensing chip, the 3rd sensing chip, the 4th sensing chip size shape are identical, for the non-magnetic flake structure that electric conductivity is good, be made up of two foot rests and two cant beams, shape is " recessed " font at band V angle, and surface scribbles insullac or by wrapped with insulation; After described first sensing chip, the second sensing chip, the 3rd sensing chip, the 4th sensing chip are fixedly connected with, shape is in " cross " type, and four foot rest ends of the first sensing chip, the second sensing chip, the 3rd sensing chip, the 4th sensing chip are connected with external circuit respectively.Detection components is inserted in the space of moving assembly, then moving assembly is loaded in housing together with detection components, the left end of detection components is fixedly connected with the left surface of housing, the right-hand member of detection components is fixedly connected with the right flank of housing; The front end of detection components is fixedly connected with the leading flank of housing; The rear end of detection components is fixedly connected with the trailing flank of housing; Inject magnetic liquid respectively at the upper surface of the first permanent magnet and the lower surface of the second permanent magnet, moving assembly is suspended in the housing.The material preferably copper of the first sensing chip, the second sensing chip, the 3rd sensing chip, the 4th sensing chip, gold, silver or aluminium, its thickness should be too not thin, otherwise thermal losses is too large, usually 0.5mm is greater than, simultaneously should be too not thick yet, otherwise make the space between the first permanent magnet and the second permanent magnet excessive, thus cannot uniform magnetic field be provided, make linearly degree not strong, therefore usually select to be less than 1.5mm.First sensing chip, the second sensing chip, the 3rd sensing chip, the 4th sensing chip also can be separated, thus do not form " cross " type, that is, be independently arranged on housing one end respectively, and the other end is unsettled.But due to the impact of sensing chip self gravitation, certain amount of deflection can be produced, make it bend, thus easily scratch with the first permanent magnet or the second permanent magnet, affect measuring accuracy.Therefore, preferably four sensing chips be fixedly connected with and form " cross " type.According to induction electromotive force, E=d (BS)/dt=Blv (magnetic induction density between B first permanent magnet and the second permanent magnet, S is the first sensing chip or second, three, the area of four sensing chips in magnetic field, l is the first sensing chip or second, three, the width of four sensing chips, v is the movement velocity of the first permanent magnet and the second permanent magnet), when there is vibration in the external world, first, two, three, four sensing chips and produce relative velocity between the first permanent magnet and the second permanent magnet, thus can be left at housing, right wall and front, the output terminal of rear surface produces electromotive force E1, E2 and E3, E4, by detecting E1, E2 and E3, the stool and urine of E4 can detect rate signal, and first, two, three, it is " cross " type after four sensing chips are fixedly connected with, then can guarantee the linear relationship between output voltage signal and rate signal.Owing to carrying out integration to speed, then can obtain the signal of displacement, carry out differential then can obtain acceleration signal to speed, therefore this inertial sensor can detect speed, displacement and acceleration signal.
Described case top is a pyramidal structure, the size of bevel angle is 60 ~ 175 °, bottom is a column type groove, two through hole c1 and d1 are processed with at the left side wall of column type groove, two through hole a1 and b1 are processed with at the right side wall of column type groove, two through hole c and d are processed with at the front side wall of column type groove, two through hole a and b are processed with at the rear side wall of column type groove, by the first sensing chip, second sensing chip, 3rd sensing chip, eight foot rest ends of the 4th sensing chip penetrate in four through holes of shell wall side respectively, the material of housing is the good non-permeable material of insulating property.Described pad is the good non-permeable material of insulating property, and thickness is greater than the thickness of sensing chip.The pyramidal structure of housing provides a centering power to the moving assembly be made up of pad, the first permanent magnet and the second permanent magnet, make its under without the state of external vibration can stable suspersion in housing center.For preventing short circuit or signal disturbing, magnetic liquid, housing and pad must have insulating property, therefore, require that the base load liquid of magnetic liquid must have insulating property, and magnetic-particle is also necessary for iron oxide structure, and in order to prevent, interference being produced to the magnetic field of the first permanent magnet and the second permanent magnet, housing and pad are also necessary for nonmagnetic substance.Because the first permanent magnet and the second permanent magnet rely on the second order suspending power of magnetic liquid to suspend, therefore the hoverheight of moving assembly should be tested in a pre-installation, carry out hole a, b, c, d and a1, b1, c1, d1 of processing shell wall side again, guarantee in the space that first, second, third and fourth sensing chip can be placed between the first permanent magnet and the second permanent magnet, and do not scratch.Hole a, b, c, d and a1, b1, c1, d1 not only in order to fix first, second, third and fourth sensing chip, additionally provide the interface channel of first, second, third and fourth sensing chip and external circuitry simultaneously.
The present invention compares had excellent effect with prior art: (1) utilizes the principle of induction electromotive force, by the change of magnetic flux between sensing chip, thus rate signal detected, thus make sensor have the extremely high linearity, in addition, because output signal depends on sensing chip speed, therefore make sensor under static state export and be always zero, there is not residual voltage at zero; (2) the taper angle of case top provides restoring force for sensor, makes it can be in housing center in a stationary situation; (3) by pad, the first permanent magnet and the second permanent magnet are separated, create a uniform magnetic field, first, second, third and fourth sensing chip is arranged on detection signal in this gap, greatly improve the linearity of sensor.
Accompanying drawing explanation
A kind of biaxial magnetic liquid inertial sensor of Fig. 1;
Fig. 2 first sensing chip or second and third, the three-dimensional plot of four sensing chips;
A kind of biaxial magnetic liquid inertial sensor of Fig. 3 three-dimensional plot.
In Fig. 1: housing 1, first sensing chip 2, pad 3, first permanent magnet 4, magnetic liquid 5, second sensing chip 6, second permanent magnet 7, the 3rd sensing chip 8, the 4th sensing chip 9.
Embodiment
Be that the invention will be further described for embodiment with accompanying drawing:
A kind of biaxial magnetic liquid inertial sensor, as Fig. 1, this device comprises: housing 1, first sensing chip 2, pad 3, first permanent magnet 4, magnetic liquid 5, second sensing chip 6, second permanent magnet 7, the 3rd sensing chip 8, the 4th sensing chip 9.
First the lower surface of the upper surface of four pads 3 with the first permanent magnet 4 is fixedly connected with, four pads 3 are made to be symmetrically distributed in four uniform positions of the first permanent magnet 4 lower surface, the upper surface of the second permanent magnet 7 is fixedly connected with the lower surface of four pads 3, after first permanent magnet 4 and the second permanent magnet 7 being separated by four pads 3, form a space, thus form moving assembly.
Right-hand member two inclined-plane of the first sensing chip 2 is fixedly connected with two inclined-planes of the 3rd sensing chip 8, the 4th sensing chip 9 respectively, simultaneously, also left end two inclined-plane of the second sensing chip 6 is fixedly connected with two other inclined-plane of the 3rd sensing chip 8, the 4th sensing chip 9 respectively, and the first sensing chip 2 and the second sensing chip 6, the 3rd sensing chip 8 and the 4th sensing chip 9 are all centrosymmetric and distribute, thus make the surface of four sensing chips concordant, thus form detection components.
Detection components is inserted in the space of moving assembly, then moving assembly is loaded together with detection components in housing 1, the left surface of the left end of detection components with housing 1 is fixedly connected with, namely, two foot rests of the first sensing chip 2 are inserted in hole c1 and d1 of the left wall of housing 1, the right flank of the right-hand member of detection components with housing 1 is fixedly connected with, namely, two foot rests of the second sensing chip 6 are inserted hole a1 and b1 of the right wall of housing 1, the trailing flank of the rear end of detection components with housing 1 is fixedly connected with, namely, two foot rests of the 3rd sensing chip 8 are inserted in hole a and b of the left wall of housing 1, the leading flank of the front end of detection components with housing 1 is fixedly connected with, namely, two foot rests of the 4th sensing chip 9 are inserted hole c and d of housing 1 front face, inject magnetic liquid 5 respectively at the upper surface of the first permanent magnet 4 and the lower surface of the second permanent magnet 7, moving assembly is suspended within the case 1.
After installation, by external circuit access aperture a, b, c, d and a1, b1, c1, d1, be connected with the end of the first sensing chip 2, second sensing chip 6, the 3rd sensing chip 8, the 4th sensing chip 9 respectively.
When stationary state, the moving assembly be made up of the first permanent magnet 4 and the second permanent magnet 7 is under the impact of housing bevel angle, be bound in the center of housing 1, now due to the change without magnetic flux in first, second, third and fourth sensing chip, therefore output signal is zero.When there is vibration in the external world, detection components will move along with housing 1, due to the viscous effect of magnetic liquid 5, velocity contrast will be there is between detection components and moving assembly, thus the magnetic flux in first, second, third and fourth sensing chip changes, the magnitude of voltage of first, second, third and fourth sensing chip is detected by external circuit, thus output signal.

Claims (5)

1. a biaxial magnetic liquid inertial sensor, is characterized in that: comprise housing (1), the first sensing chip (2), pad (3), the first permanent magnet (4), magnetic liquid (5), the second sensing chip (6), the second permanent magnet (7), the 3rd sensing chip (8), the 4th sensing chip (9);
The upper surface of four pads (3) is fixedly connected with the first permanent magnet (4) lower surface, four pads (3) are made to be symmetrically distributed in four uniform positions of the first permanent magnet (4) lower surface, the lower surface of the upper surface of the second permanent magnet (7) with four pads (3) is fixedly connected with, make the first permanent magnet (4) and the second permanent magnet (7) separate rear formation space by four pads (3), thus form moving assembly;
Two inclined-planes of the first sensing chip (2) end are fixedly connected with the inclined-plane, left side of the 4th sensing chip (9) end with the inclined-plane, left side of the 3rd sensing chip (8) end respectively, simultaneously, by the second sensing chip (6) end two inclined-planes be fixedly connected with the inclined-plane, right side of the 4th sensing chip (9) end with the inclined-plane, right side of the 3rd sensing chip (8) end respectively, make the first sensing chip (2), second sensing chip (6), 3rd sensing chip (8) is concordant with the 4th sensing chip (9) surface and be uniformly distributed in 90 degree, thus formation detection components,
Detection components is inserted in the space of moving assembly, then moving assembly is loaded together with detection components in housing (1), end foot rest and housing (1) wall of detection components is fixedly connected with; Inject magnetic liquid (5) respectively at the upper surface of the first permanent magnet (4) and the lower surface of the second permanent magnet (7), moving assembly is suspended in housing (1).
2. a kind of biaxial magnetic liquid inertial sensor according to claim 1, is characterized in that:
Described first sensing chip (2), the second sensing chip (6), the 3rd sensing chip (8), the 4th sensing chip (9) size shape are identical, for the non-magnetic flake structure that electric conductivity is good, be made up of two foot rests and two V-arrangement cant beams, shape is " recessed " font at band V angle, and surface scribbles insullac or by wrapped with insulation; After described first sensing chip (2), the second sensing chip (6), the 3rd sensing chip (8) are fixedly connected with the 4th sensing chip (9), shape is in " cross " type, and the first sensing chip (2), the second sensing chip (6), the 3rd sensing chip (8) are connected with external circuit respectively with four foot rest ends of the 4th sensing chip (9).
3. a kind of biaxial magnetic liquid inertial sensor according to claim 1, is characterized in that:
Described housing (1) top is a pyramidal structure, the size of bevel angle is 60 ~ 175 °, bottom is a column type groove, two through hole c1 and d1 are processed with at the left side wall of column type groove, two through hole a1 and b1 are processed with at the right side wall of column type groove, two through hole c and d are processed with at the front side wall of column type groove, two through hole a and b are processed with at the rear side wall of column type groove, by the first sensing chip (2), second sensing chip (6), 3rd sensing chip (8), eight foot rest ends of the 4th sensing chip (9) penetrate in four through holes of housing (1) wall respectively, the material of housing (1) is the good non-permeable material of insulating property.
4. a kind of biaxial magnetic liquid inertial sensor according to claim 1, is characterized in that:
Described first permanent magnet (4) and the second permanent magnet (7) size, shape are identical, for right cylinder, two adjacent face polarity are contrary, namely the lower surface of the first permanent magnet (4) is N (S) pole, and the upper surface of the second permanent magnet (7) is S (N) pole.
5. a kind of biaxial magnetic liquid inertial sensor according to claim 1, is characterized in that:
Described pad (3) is the good non-permeable material of insulating property, and thickness is greater than the thickness of the first sensing chip (2).
CN201510358000.3A 2015-06-25 2015-06-25 A kind of biaxial magnetic liquid inertial sensor Expired - Fee Related CN105137113B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510358000.3A CN105137113B (en) 2015-06-25 2015-06-25 A kind of biaxial magnetic liquid inertial sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510358000.3A CN105137113B (en) 2015-06-25 2015-06-25 A kind of biaxial magnetic liquid inertial sensor

Publications (2)

Publication Number Publication Date
CN105137113A true CN105137113A (en) 2015-12-09
CN105137113B CN105137113B (en) 2018-02-16

Family

ID=54722536

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510358000.3A Expired - Fee Related CN105137113B (en) 2015-06-25 2015-06-25 A kind of biaxial magnetic liquid inertial sensor

Country Status (1)

Country Link
CN (1) CN105137113B (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4991438A (en) * 1988-03-15 1991-02-12 Baroid Technology, Inc. Magnetic fluid rebalance accelerometers
EP0293784B1 (en) * 1987-05-30 1994-11-30 Nippon Soken, Inc. Acceleration sensor
CN2269593Y (en) * 1996-05-21 1997-12-03 桂昱 D shape magnetic liquid suspension accelerometer
US6062081A (en) * 1995-09-05 2000-05-16 Texas Components Corporation Extended range accelerometer
US7296469B2 (en) * 2000-02-24 2007-11-20 Innalabs Technologies, Inc. Magnetofluidic accelerometer with active suspension
CN103149384A (en) * 2013-02-07 2013-06-12 北京交通大学 Magnetic liquid acceleration sensor
CN103675351A (en) * 2013-12-26 2014-03-26 北京交通大学 Novel inductive magnetic liquid acceleration sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0293784B1 (en) * 1987-05-30 1994-11-30 Nippon Soken, Inc. Acceleration sensor
US4991438A (en) * 1988-03-15 1991-02-12 Baroid Technology, Inc. Magnetic fluid rebalance accelerometers
US6062081A (en) * 1995-09-05 2000-05-16 Texas Components Corporation Extended range accelerometer
CN2269593Y (en) * 1996-05-21 1997-12-03 桂昱 D shape magnetic liquid suspension accelerometer
US7296469B2 (en) * 2000-02-24 2007-11-20 Innalabs Technologies, Inc. Magnetofluidic accelerometer with active suspension
CN103149384A (en) * 2013-02-07 2013-06-12 北京交通大学 Magnetic liquid acceleration sensor
CN103675351A (en) * 2013-12-26 2014-03-26 北京交通大学 Novel inductive magnetic liquid acceleration sensor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
何新智等: "磁性液体在传感器中的应用", 《电子测量与仪器学报》 *
李强等: "磁性液体惯性传感器的研究综述", 《湖北民族学院学报(自然科学版)》 *
钱乐平等: "新型磁性液体惯性传感器的理论与实验研究", 《仪器仪表学报》 *

Also Published As

Publication number Publication date
CN105137113B (en) 2018-02-16

Similar Documents

Publication Publication Date Title
CN102968845A (en) Magnetic-bias currency detecting magnetic head with sensitive direction parallel to detection face
KR20160065809A (en) Multicomponent magnetic field sensor
CN104964786B (en) Magnetic liquid micropressure sensor using Hall detection method
CN203224930U (en) Chip type weak magnetism detection sensor
CN103454597A (en) Current-induction measuring device and method and sensitivity adjusting method
CN104142482B (en) Measuring system
CN101398318B (en) Momentum type effusion meter based on magnetic thrust and flow measurement method
CN103499271A (en) Thickness measurement device
CN101699227A (en) Capacitance-type electromagnetic flow transducer with rectangular cross section structure
CN203038357U (en) Magnetically-biased currency-detection magnetic head with sensitive direction parallel to detection surface
CN202033405U (en) Current measuring device
CN111412831B (en) Impact-resistant magnetic liquid touch sensor
CN103971444A (en) Magnetic sensor for magnetic detection
CN103196503B (en) Flow meter
CN105137113A (en) Double-axis magnetic liquid inertial sensor
CN105137112B (en) A kind of uniaxial magnetic liquid inertia sensor
Yao et al. A novel accelerometer based on the first kind of ferrofluid levitation principle
CN105158510B (en) A kind of cylindricality single order buoyancy magnetic liquid acceleration sensor
CN203490758U (en) Sensor used for identifying magnetic medium
CN104471355A (en) Chip-type magnetic sensor
CN204331047U (en) A kind of reluctance type seismoreceiver
Yao et al. Research on the linearity of a magnetic fluid micro-pressure sensor
CN1693837A (en) Magnetic displacement sensor
CN207742217U (en) A kind of self-powered 3-axis acceleration sensor
CN203550904U (en) Thickness measurement device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180216

Termination date: 20210625