CN106194734A - Twin-stage dry vacuum pump - Google Patents
Twin-stage dry vacuum pump Download PDFInfo
- Publication number
- CN106194734A CN106194734A CN201510323386.4A CN201510323386A CN106194734A CN 106194734 A CN106194734 A CN 106194734A CN 201510323386 A CN201510323386 A CN 201510323386A CN 106194734 A CN106194734 A CN 106194734A
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2210/00—Fluid
- F04C2210/22—Fluid gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Abstract
A kind of twin-stage dry vacuum pump, including: pump housing cylinder, there are interior accommodating space, both sides to have suction and discharge port；1,2 grades of cylinders, in interior accommodating space；A pair pump shaft, through 1,2 grades of parallel installations of cylinder；A pair Roots type rotor, synchronous backward rotates and engages with the pump shaft through 1 grade of cylinder；A pair screw type rotor, synchronous backward rotates and engages with the pump shaft through 2 grades of cylinders；Motor, rotates any one in pump shaft；A pair gear, engages so that its synchronous axial system with pump shaft；1 level suction passage, by suction ports and 1 grade of cylinder interconnection；Exhaust conveyance channel, by 1,2 grades of cylinder interconnection；1, level exhaust passage, 2 grades of exhaust passages, interconnects exhaust conveyance channel and 2 grades of cylinder rear ends with exhaust port respectively；1,2 grades of air bleeding valve level air bleeding valves, are carried out opening and closing by 1,2 grades of exhaust passage expellant gas pressure respectively；And cooling jacket, cooling water is divided at least cooling down the bearing support of 2 grades of cylinders or pump shaft by its circulation.
Description
Technical field
The present invention relates to vacuum pump, it particularly relates to twin-stage dry vacuum pump, this vacuum pump includes two
Cylinder, wherein, different Roots type rotors and screw type rotor combination get up, thereby, it is ensured that simplify structure and increasing
Condition of high vacuum degree on the basis of big exhaust velocity.
Background technology
In general, vacuum equipment is that it is configured to low except the device of gas molecule at sealing container internal diabetes
Low pressure in atmospheric pressure is aspirated and compresses, and compressed gas is discharged in air, thus improves container
Interior vacuum.So vacuum pump can be classified as oil-sealed rotary pump and diffusion pump, and they are designed respectively
For dry type and wet type.Diffusion pump is wet type, and it uses oil to guarantee high vacuum, and oil-sealed rotary pump
Being dry type, it does not use oil, and is able to ensure that at a fairly low vacuum, but oil-sealed rotary pump has simply
Structure and high ruggedness, and there is stable vacuum, then, oil-sealed rotary pump is widely used to respectively
Planting industrial circle, and have an advantage in that, user can easily operate and maintenance cost is relatively low.
In this, vacuum technique makes rapid progress, and its scope of application extends to semiconductor deposition, electronics
Industry, metal field, chemical field, medical science and medicine supply, atomic energy industry etc..
Additionally, the kind of vacuum pump forming vacuum have close water type, rotary-type, Roots type based on oil,
Oil diffused, physical absorption, chemical absorbing type etc., and vacuum pump usually can be categorized as wet type and dry type.
But, water seal closed form or the rotary-type wet type (water or oil are input in vacuum pump) of oil base, the most partly leading
Do not employ in the industrial circle of body, food, chemistry, medical science and medicine supply etc..Therefore,
Dry vacuum pump (water or oil are not input in vacuum pump) has been used widely.Especially,
In semiconductor fabrication, generally use the dry vacuum pump of oil-free, to prevent oil molecule from leaking into process
In chamber.
But, in the situation of the dry vacuum pump of positive displacement, owing to being difficult with the dry vacuum of positive displacement
Pump, in the hope of only using a pump to guarantee less than 1 × 10-3The gas suction of the condition of high vacuum degree of Bristol, Roots
Dry vacuum pump that type is multistage or screw type dry vacuum pump or claw shape dry type vacuum pump are generally used a lot, its
In, in Roots type multi-stage dry vacuum pump, multiple pumps can be connected in series, i.e. in multistage structure,
In the hope of improving the efficiency of discharge representative gases, thus, it is ensured that high vacuum.
1. Roots type multi-stage dry vacuum pump
It needs the compression ratio of about 100000:1, in order under atmospheric pressure can be 10-3Operate under Bristol
End pressure.In order to ensure compression ratio so, need multi-stage cylinder, usually, need Pyatyi or six grades.
Cylinder provides the most, and pump structure becomes the most complicated, and the length of axle increases, and the volume of pump the most also increases.
If the length of axle increases, then oscillating motion can occur in axle rotation process.Because the temperature of pump improves,
It may happen that expand/shrink.In cylinder rotate rotor between gap and between rotor and cylinder
Gap is it may happen that interfere, and then, in the centre of rotating operation, pump may stop suddenly.
Additionally, due to by the work process gas of the suction ports suction of pump by multistage discharge, i.e. six
Level cylinder, so, the length that gas passes through structurally increases, and brings maintenance and repair frequently simultaneously.
Additionally, due to need to assemble many levels (cylinder), so, all parts should critically process, should
By the technician being skilled in technique to assemble pump.Since it is desired that the package technique of precision, during so spending the longest
Between.After pump assembles, stop in the centre that pump runs at pump testing continually.
In the situation of six grades of cylinders being configured to ensure that condition of high vacuum degree, when six grades of cylinders are engaged to an axle
Time upper, it is desirable to have accurate technology.In this case, manufacture each by three grades of two pumps formed and in series
Connect, therefore, complete a pump.To this, the cumulative volume of pump becomes the hugest, causes two pump valencys simultaneously
Lattice improve, and then, manufacturing cost increases.By the length of the process gas movable passageway that suction ports is aspirated
Increasing, therefore safeguarding needs great amount of cost.
2. screw type dry vacuum pump
Screw type dry vacuum pump is generally used for such work process, and wherein, under atmospheric pressure, pump is
End pressure is 10-2Bristol and it needs to big energy, in order to use a cylinder, use to be arranged in multiple rows of interior
Screw motor carry out compression process gas, the consumption of electric energy is huge.Compared with Roots type method, its
Only it is only possible to guarantee the characteristic identical with Roots type method in three times of quick situations.Feelings in high-speed rotation
In shape, leakage is likely to occur in the sealing office of axle unit, and bearing lubrication is likely to be of problem, can
Noise problem can occur.
In overheated situation, because the heat produced in the middle of process gas compression, the gap location between rotor
It may happen that folder is dead, then, pump may stop suddenly, in order to solve the problems referred to above, if gap is made relatively
Greatly, then pump characteristics may reduce.
3. claw shape dry type vacuum pump
Claw shape dry type vacuum pump is generally used for such work process, wherein, under atmospheric pressure, and pump final
Pressure is 10-2Bristol and it needs to level Four cylinder.Additionally, compared with typical Roots type dry pump, claw type
Dry vacuum pump has fairly slow mass rate of emission, because the on-state rate of suction ports (entrance on-state rate) is very
Little.
Owing to pawl itself plays the effect of valve, claw type is characterised by, suction ports is closed after opening lentamente,
And there is low on-state rate, and Roots type dry vacuum pump has relatively large on-state rate, then, even if
Low pressure situation can also ensure that high mass rate of emission.
In above-mentioned vacuum pump structure, owing to all claw type motor orient in same direction, so, gas
Body is discharged into the suction ports of 2 grades of cylinders, then, disadvantageously, Mei Geqi from 1 grade of cylinder discharge port
The vapor path length of cylinder level (intergrade) is the longest.
Summary of the invention
Therefore, the proposition of the present invention is intended to solve the problems referred to above of typical dry vacuum pump.
It is an object of the invention to provide twin-stage dry vacuum pump, it is characterised in that condition of high vacuum degree region can be obtained
Vacuum, compared with typical pump, under low pressure, mass rate of emission is fast, uses the simple knot of 2 grades of cylinders
Structure, can obtain high vacuum, and the passage of exhaust process is uncomplicated the longest, thus, it is possible to make to flow through
The gas transmission speed of pump reaches maximum.
In order to achieve the above object, it is provided that twin-stage dry vacuum pump, comprising: pump housing cylinder, pump housing cylinder includes
Interior accommodating space, and in its side, there is suction ports, and at opposite side, there is discharge port；1 grade of gas
Cylinder and 2 grades of cylinders, they are arranged in the interior accommodating space of pump housing cylinder；Pump shaft in pairs, they pass 1
Level cylinder and 2 grades of cylinders are installed abreast；Roots type rotor in pairs, they are mounted under synchronous regime instead
To rotation, wherein, Roots type rotor engages with the pump shaft through 1 grade of cylinder；Screw type rotor in pairs, it
Be mounted to rotate backward under synchronous regime, wherein, screw type rotor is nibbled with by the pump shaft of 2 grades of cylinders
Close；Motor, it is configured to rotate into any one in pump shaft；Mated gear, they are nibbled with pump shaft
Close, so that a pair pump shaft synchronously rotates；1 level suction passage, its interconnection suction ports and 1 grade of cylinder；
Exhaust conveyance channel, its 1 grade of cylinder of interconnection and 2 grades of cylinders；1 grade of exhaust passage, it interconnects exhaust conveyance
Passage and exhaust port；2 grades of exhaust passages, the rear end of its 2 grades of cylinders of interconnection and exhaust port；1 grade of row
Air valve, it is opened and closed by by 1 grade of exhaust passage expellant gas pressure；2 grades of air bleeding valves, its
Opened and closed by by 2 grades of exhaust passage expellant gas pressure；And cooling jacket, cooling water leads to
Cross the circulation of this cooling jacket, thus the bearing support at least cooling down 2 grades of cylinders or pump shaft divides.
According to the exemplary embodiment of the present invention, 1 grade and 2 grades of air bleeding valves are formed by metal ball, and they are configured to
Floated from valve seat by the pressure higher than the discharge gas of predeterminated level, and be opened, and at discharge gas
Pressure less than predeterminated level time, by the deadweight of metal ball, be closely contacted with valve seat.
According to the exemplary embodiment of the present invention, 1 grade of discharge-channel and 2 grades of discharge-channels by with discharge port
The connection space of contact is integrated in a structure.
Favourable effect
It is a feature of the present invention that the form of twin-stage made by dry vacuum pump structure, 1 grade of cylinder includes Roots
Type rotor, and 2 grades of cylinders include screw type rotor, then, after 1 grade of cylinder-suction and compression, first
The residual gas not first being discharged is sucked, compresses, and is secondly discharged by 2 grades of cylinders, thereby, it is possible to obtain
High vacuum (10-3～10-8Bristol) (typical dry vacuum pump is categorized as claw type, Roots type and screw rod
Type, they are configured to single structure and manufacture, and wherein, the final pressure of these pumps is middle vacuum
Degree 1 × 10-3Bristol).Therefore, even if in low vacuum work process, by being connected to 1 grade of cylinder
The gas in overpressure of first row air valve compression of exhaust passage also can discharge continuously, wherein, discharge capacity is very big,
Therefore solve due to the most thermally-induced problem of pump.Additionally, a pump housing includes and 1 grade of cylinder and 2 grades of gas
The integral part of structure of cylinder, then, pump configuration can simplify, in material cost, processing cost and be assembled into
Present aspect, can save manufacturing cost.
Accompanying drawing explanation
The present invention be will become better understood with reference to the accompanying drawings, and accompanying drawing is the most illustratively given, therefore,
The present invention is not limited, in accompanying drawing:
Fig. 1 is the front cross-section view of 2 grades of dry vacuum pumps according to the present invention；
Fig. 2 is the section plan of the line A-A intercepting along 2 grades of dry vacuum pumps according to the present invention；
Fig. 3 is the side view cutaway drawing of the line B-B intercepting along 2 grades of dry vacuum pumps according to the present invention；
Fig. 4 is the side view cutaway drawing of the line C-C intercepting along 2 grades of dry vacuum pumps according to the present invention；
Fig. 5 is the side view cutaway drawing of the line D-D intercepting along 2 grades of dry vacuum pumps according to the present invention.
Detailed description of the invention
The present invention can be more specifically implemented together with following exemplary embodiment.Following exemplary embodiment is provided
For illustrative purposes only, it is not intended to limit the scope of the present invention as claimed in claim.Therefore,
It will be apparent that the present invention is not limited by disclosed example embodiment, it should annotation is for including retouching according to following
State obtainable part and all of amendment.
2 grade dry vacuum pumps according to of the present invention example embodiment be will now be described.
As shown in Fig. 1 and 2 or Fig. 5, including pump housing cylinder 1 according to the vacuum pump apparatus of the present invention, it is formed should
The main body of device.Top cover is coupled to the top of pump housing cylinder 1.At the side of top cover 12, it is provided with suction
Port 15, at the opposite side of top cover 12, is provided with discharge port 21.In the inner space surrounded,
Respectively be formed as 1 grade of cylinder 2 of peanut shell-shaped and 2 grades of cylinder 3 arranged in series adjacent to each other.Parallel peace
Dress two pump shafts 4 and 5 horizontally through 1 grade of cylinder 2 and the space of the peanut shell-shaped of 2 grades of cylinders 3,
Any one in two pump shafts 4 and 5 is drive shaft 4, and motor 34 engages with drive shaft 4, and another
Individual is driven shaft 5, and it, along rotating backward, interlocks with previous axle.
A pair Roots type rotor 6 and 7 is mounted also along rotating backward, owing to Roots type rotor 6 and 7 is in
Synchronous regime, in a state, Roots type rotor 6 and 7 engages with the pump shaft through 1 grade of cylinder 2, and one
Screw type rotor 8 and 9 is engaged with the pump shaft 4 and 5 through 2 grades of cylinders 3, and along reverse mutual synchronised
Ground rotates.
Screw type rotor 8 and 9 is preferably formed by single screw rod or multiple rows of screw rod.Each pump shaft (4: drive shaft)
One end of (5: driven shaft) side is supported by the plate 13 of motor side, makes bearing 30 be inserted in it
Between, drive shaft 4 is connected to motor 34 by shaft coupling 32 and 33, this shaft coupling 32 and 33
It is arranged in the motor flange shell 14 being connected to side surface plate 13 side.Each pump shaft 4 and 5 another
One end of side is supported by gear side surface plate 11, and this gear side surface plate 11 forms the side of 2 grades of cylinders 3
Surface, makes bearing 29 be disposed there between.In the end through gear side surface plate 11, drive for a pair
Moving axis gear 26 and driven shaft gear side surface plate 11 gear 27 are meshed, and they are engaged with each other and have
Identical size.A pair gear 26 and 27 is protected by gear-box 10, and is not exposed to outside,
Gear-box 10 is fixed to the side surface of gear side surface plate 11.
Additionally, form 1 level suction passage 16, it connects the suction ports 15 and 1 grade of cylinder 2 communicated with each other.
Arranging exhaust conveyance channel 17,2 grades of cylinders 3 are connected to the bottom of 1 grade of cylinder 2 corresponding thereto by it.
Exhaust conveyance channel 17 is connected with 2 grades of cylinders 3 by 2 grades of cylinder-suction ports 22 of exhaust conveyance channel,
Exhaust conveyance channel 17 and exhaust port 21 are connected by 1 grade of exhaust passage 18.
Additionally, 2 grades of exhaust passages 23 are formed through gear side surface plate 11, to connect 2 grades of cylinders 3
Rear end and 21,2 grades of exhaust passages 23 of exhaust port are connected to be formed at 2 grades of exhaust passages of pump housing cylinder 1
24.1 grade of air bleeding valve 19 is formed at the end of 1 grade of exhaust passage 18, in order to by means of 1 grade of row
Gas passage 18 expellant gas pressure opens and closes valve seat 19a.Similarly, by means of 2 grades of rows
2 grades of air bleeding valves 25 that gas passage 23 and 24 expellant gas pressure is opened and closed are configured to open
With closedown valve seat 25b.
Air bleeding valve 19 and 25 is formed by metal ball, and metal ball has predetermined deadweight, it is characterised in that when
Flow through the exhaust gas of exhaust conveyance channel 17 and exceed predetermined when pressure is set, by 1 grade of exhaust passage
18 deadweights being applied to 1 grade of air bleeding valve 19 increase, more than the deadweight of metal ball, and this 1 grade of air bleeding valve 19
Separate with valve seat 19a and float.In this open mode, the exhaust gas part being sent to 2 grades of cylinders 3 is led to
Cross exhaust port 21 and be discharged into outside, discharged from 2 grades of cylinders 3 by 2 grades of exhaust passages 23 and 24
Discharge gas, use its pressure at expulsion to open 2 grades of air bleeding valves 25.
At 11,2 grades of cylinders 3 of gear side surface plate and motor side surface plate 13, arrange cooling jacket 35,
36 and 37, for the heat produced at cooling bearing 29 and 30 and 2 grades of cylinders 3, therefore, by circulation
It is overheated to prevent from the cooling water of pump (not shown) feeding.In the present invention, cooling jacket is not arranged in 1
At level cylinder 2, in order to guarantee and the thermal balance of 2 grades of cylinders 3.Due to the relatively cool gas produced at vacuum equipment
Body is input in 1 grade of cylinder, and any overheated probability is the lowest, if cooling is abundant not, then due to
2 grades of cylinders 3 of high compression ratio can have hot combustion phenomena, so cooling is necessary.Now, due to 2 grades
Cylinder 3 is cooling, so, it can be ensured that the thermal balance of 1 grade of cylinder 2, it is therefore prevented that because uneven heat is born
Uneven and contingent distortion in the device that lotus causes.
Additionally, 1 grade of exhaust passage 18 and 2 grades of exhaust passages 24 are by the company contacted with exhaust port 21
Connect space 20 to be integrated in a structure.
Reference 28 and 31 represents bearing cap, and reference 38 and 39 represents containment member, and they are used
Carry out the leakage along pump shaft 4 and 5 of the locking exhaust gas.
Now the operation of the present invention will be described.
In suction ports 15 is connected to the state of vacuum equipment (not shown), when motor 34 is driven
Time, drive shaft 4 rotates, when rotatory force is by a pair gear 26 and 27 transmission, and the rotation of drive shaft 4
Allow driven shaft 5 along rotating backward.As it is shown on figure 3, the Roots type rotor 6 and 7 of pair of meshing rotates,
With above operation interlocking.Therefore, gas is sucked into 1 grade of cylinder 2 from vacuum equipment, along with continuing of rotating
Continue the most by compression, and promote along discharge directions, i.e. promote towards direction, downside.Low originally
In vacuum state, the aspiration (that is, discharge capacity) pumped out from vacuum equipment is the biggest.
The discharge Transfer pipe 17 being connected to 2 grades of cylinders 3 is arranged at the bottom of 1 grade of cylinder 2, then, and gas
Exhaust conveyance channel 17 can be forced through towards that side of 2 grades of cylinders 3.
Now, owing to a large amount of gases are discharged when the gas pressure from vacuum equipment is higher than predeterminated level,
That is, when the starting stage of aerofluxus, when pressure is more than the deadweight of 1 grade of air bleeding valve 19,1 grade of air bleeding valve
19 open, and the gas of fractional transmission can be discharged by 1 grade of exhaust passage 18 and the exhaust port 21 opened,
The gas part that pressure declines is input in 2 grades of cylinders 3 by 2 grades of cylinder suction ports 22.
By the release overvoltage by compression with from 1 grade of drain valve 19 expellant gas, it is possible to resolve the mistake of pump installation
Heat problem.Hereafter, the gas being input in 2 grades of cylinders 3 be pumped in screw type rotor 8 and 9 screw thread it
Between, and flow with by compression along screw thread towards exhaust port in the middle of rotating.On gas the most by compression
Push away 2 grades of air bleeding valves 25, flow through 2 grades of exhaust passages 23 and 24 simultaneously, thus, open passage, and compress
Gas can be discharged into outside by exhaust port 21.
2 grades of above-mentioned dry vacuum pumps relate to such pump configuration, and wherein, Kernel-based methods obtains high
Vacuum (10-3～10-8Bristol), wherein, the remaining gas of 1 grade of cylinder is sucked, compresses and discharges.Tool
For body, the form of 2 grades made by dry vacuum pump structure, 1 grade of cylinder suction, compress and discharged
Undischarged residual gas in journey, is removed in suction, compression and the discharge process of 2 grades of cylinders, then may be used
Obtain high vacuum.Now, 1 grade is formed by Roots type rotor, and 2 grades are formed by screw type rotor,
Thus, based on various types of favourable combinations, the characteristic of vacuum is considerably improved.That is, the present invention
It is characterised by, by discharging the exhaust passage being connected to 1 grade of cylinder in the work process of rough vacuum continuously
1 grade of air bleeding valve at the excess pressure of compressed gas, just can solve the most thermally-induced problem due to pump, its
In, displacement volume is very big, and meanwhile, be not discharged in suction, compression and the discharge process of 1 grade of cylinder is surplus
Residual air body, can be removed in the suction of 2 grades of cylinders, compression and discharge process, thus, it is ensured that high vacuum
Degree.Therefore, in initial vacuum work process, taken out by the suction ports of 1 grade of cylinder at work process gas
In the situation inhaled, wherein it is desired to the gas under the atmospheric pressure state of quick drain speed is processed, pass through sieve
Thatch type rotor rotation pressurized contracts and moves to most of gas of discharge port, opens 1 grade of air bleeding valve and discharges
To outside, the gas flow aspirated by suction ports along with vacuum work process progress is reduced, and then, passes through
The air bleeding valve expellant gas amount of 1 grade of cylinder also reduces.Finally, discharge capacity reduces, then, and the residue of 1 grade of cylinder
Gas is not discharged by 1 grade of air bleeding valve.
Therefore, the present invention provides the structure of simplification, and wherein, 1 grade of cylinder and 2 grades of cylinders are integrated in a pump housing
In, then, pump configuration can become more to simplify, in terms of material cost, processing cost and assembly cost,
Manufacturing cost can be saved.
Owing to the present invention can implement with the most several forms, without departing from the spirit or essential attributes of the present invention,
So, it should also be understood that examples detailed above is not limited by any details described above, unless otherwise prescribed,
But it is contrary, it should to think within being incorporated in the spirit and scope of the invention limited such as claims widely,
Therefore, within all changes and amendment fall into requirement and the boundary of claims, or so require and boundary
Equivalent therefore will be by included by appended claims.
Reference
1 pump housing cylinder
21 grades of cylinders
32 grades of cylinders
4 drive shafts
5 driven shafts
61 grades of Roots type rotors
71 grades of Roots type rotors
82 grades of screw type rotors
92 grades of screw type rotors
10 gear-boxes
11 gear side surface plate
12 top covers
13 motor side surface plate
14 motor flange shells
15 suction ports
16 1 level suction passages
17 exhaust conveyance channel
18 1 grades of exhaust passages
19 1 grades of air bleeding valves
20 exhaust port connection space
21 exhaust ports
22 2 grades of cylinder-suction ports
23 2 grades of exhaust passages
24 2 grades of exhaust passages
25 2 grades of air bleeding valves
26 axle shaft gears
27 driven shaft gears
28 bearing caps
29 bearings
30 bearings
31 bearing caps
32 pump shaft couplings
33 motor couplings
34 motor
35 cooling jackets
36 cooling jackets
37 cooling jackets
38 containment members
39 containment members
Claims (3)
1. a twin-stage dry vacuum pump, including:
Pump housing cylinder, described pump housing cylinder includes interior accommodating space, and has suction in described pump housing cylinder side
Port, and at opposite side, there is discharge port；
1 grade of cylinder and 2 grades of cylinders, described 1 grade of cylinder and described 2 grades of cylinders are arranged on described pump housing cylinder
Described interior accommodating space in；
A pair pump shaft, pump shaft is installed abreast by this through described 1 grade of cylinder and described 2 grades of cylinders；
A pair Roots type rotor, Roots type rotor is mounted to rotate backward under synchronous regime by this, wherein,
Described Roots type rotor engages with the described pump shaft through described 1 grade of cylinder；
A pair screw type rotor, screw type rotor is mounted to rotate backward under synchronous regime by this, wherein,
Described screw type rotor engages with the pump shaft through described 2 grades of cylinders；
Motor, described motor drive mechanism causes any one rotated in the pair of pump shaft；
A pair gear, gear is engaged by this with described pump shaft, so that the pair of pump shaft synchronously rotates；
1 level suction passage, this 1 level suction passage is by described suction ports and described 1 grade of cylinder interconnection；
Exhaust conveyance channel, this exhaust conveyance channel is by described 1 grade of cylinder and described 2 grades of cylinders interconnection；
1 grade of exhaust passage, this 1 grade of exhaust passage is by mutual to described exhaust conveyance channel and described exhaust port
Even；
2 grades of exhaust passages, these 2 grades of exhaust passages are by the rear end of described 2 grades of cylinders and described exhaust port
Interconnection；
1 grade of air bleeding valve, this 1 grade of air bleeding valve is by the described gas pressure discharged by described 1 grade of exhaust passage
Power opens and closes；
2 grades of air bleeding valves, these 2 grades of air bleeding valves are by the described gas pressure discharged by described 2 grades of exhaust passages
Power opens and closes；And
Cooling jacket, cooling water circulates through described cooling jacket, thus at least cools down described 2 grades of cylinders
Or the bearing support of described pump shaft divides.
2. pump as claimed in claim 1, it is characterised in that described 1 grade and 2 grades of air bleeding valves are by metal ball
Being formed, described metal ball is configured by the pressure of the discharge gas higher than predeterminated level and floats from valve seat,
And be opened, and when the described pressure of described discharge gas is less than predeterminated level, by described metal ball
Deadweight, is closely contacted with described valve seat.
3. the pump as described in claim 1 or claim 2, it is characterised in that described 1 grade of discharge-channel
It is integrated in a structure by the connection space contacted with described discharge port with described 2 grades of discharge-channels.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140119019A KR101613161B1 (en) | 2014-09-05 | 2014-09-05 | Two stages type's dry vacuum pump |
| KR10-2014-119019 | 2014-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106194734A true CN106194734A (en) | 2016-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510323386.4A Pending CN106194734A (en) | 2014-09-05 | 2015-06-12 | Twin-stage dry vacuum pump |
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| Country | Link |
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| KR (1) | KR101613161B1 (en) |
| CN (1) | CN106194734A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108825496A (en) * | 2018-06-25 | 2018-11-16 | 上海拓绅汽车电子有限公司 | A kind of double-screw type new-energy automobile vacuum pump |
| CN109026707A (en) * | 2018-08-22 | 2018-12-18 | 中北大学 | The combination pump that claw pumps are combined with slide valve pump |
| CN111120324A (en) * | 2019-12-30 | 2020-05-08 | 浙江思科瑞真空技术有限公司 | Screw vacuum pump with multiple suction cavities and exhaust ports |
| CN112780563A (en) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | Two-stage dry vacuum pump |
| CN114412788A (en) * | 2022-03-02 | 2022-04-29 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
| CN114607609A (en) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | Dry vacuum pump with new combination form |
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| US5549463A (en) * | 1994-11-24 | 1996-08-27 | Kashiyama Industry Co., Ltd. | Composite dry vacuum pump having roots and screw rotors |
| US20040247465A1 (en) * | 2001-09-27 | 2004-12-09 | Masashi Yoshimura | Screw type vacuum pump |
| CN1755120A (en) * | 2004-10-01 | 2006-04-05 | LOTVacuum株式会社 | Composite dry vacuum pump having roots rotor and screw rotor |
| CN101158353A (en) * | 2006-07-28 | 2008-04-09 | Lot真空股份有限公司 | Composite dry vacuum pump having roots and screw rotor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108825496A (en) * | 2018-06-25 | 2018-11-16 | 上海拓绅汽车电子有限公司 | A kind of double-screw type new-energy automobile vacuum pump |
| CN109026707A (en) * | 2018-08-22 | 2018-12-18 | 中北大学 | The combination pump that claw pumps are combined with slide valve pump |
| CN112780563A (en) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | Two-stage dry vacuum pump |
| CN111120324A (en) * | 2019-12-30 | 2020-05-08 | 浙江思科瑞真空技术有限公司 | Screw vacuum pump with multiple suction cavities and exhaust ports |
| CN114607609A (en) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | Dry vacuum pump with new combination form |
| CN114412788A (en) * | 2022-03-02 | 2022-04-29 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
| CN114412788B (en) * | 2022-03-02 | 2024-03-22 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160029453A (en) | 2016-03-15 |
| KR101613161B1 (en) | 2016-04-18 |
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Application publication date: 20161207 |