CN106517083A - Micro-channel array and preparation method thereof - Google Patents
Micro-channel array and preparation method thereof Download PDFInfo
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- CN106517083A CN106517083A CN201610998732.3A CN201610998732A CN106517083A CN 106517083 A CN106517083 A CN 106517083A CN 201610998732 A CN201610998732 A CN 201610998732A CN 106517083 A CN106517083 A CN 106517083A
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- multifilament
- rod
- channel array
- micro channel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
- B81B1/002—Holes characterised by their shape, in either longitudinal or sectional plane
- B81B1/004—Through-holes, i.e. extending from one face to the other face of the wafer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
Abstract
The invention relates to a micro-channel array and a preparation method thereof. The preparation method comprises the steps of carrying out first wire drawing, carrying out first rod discharge, carrying out second wire drawing, carrying out second rod discharge, carrying out third wire drawing and carrying out forming. Pore diameters of micro-channels in a micro-channel array are calculated according to the reduction times Z<1> of the third wire drawing. Arrangement sequences of first multifilaments and second multifilaments in a third multifilament rod are calculated according to the reduction times Z<2> of the third wire drawing. The calculation method is that the reduction times of the third wire drawing is Z<2>, the opposite side distance Y<3> of each regular hexagon in a micro-channel array green body is equal to Y<2>/Z<2>; pore intervals d<1> are X times of the Y<3>, two adjacent first multifilaments in the third multifilament rod are isolated by the second multifilaments, the X is a positive integer, and the X-1 is a natural number obtained by subtracting 1 through the integer part of the X. According to the preparation method provided by the invention, the micro-channel array with controllable micro-pore diameters and pore intervals is prepared, and the method is more applied to industrial production.
Description
Technical field
The present invention relates to a kind of microchannel, more particularly to a kind of micro channel array and preparation method thereof.
Background technology
With the development of microfabrication and nanometer science and technology, with geomery, operational size it is little be characterized it is micro- logical
Road processing has become people and has recognized the world and a kind of new and high technology transformed the objective world in microscopic fields.
Show in Aero-Space, electronics, instrument, atomic energy, chemical fibre, optical fiberss and business automation equipment, image
The industrial circles such as device, medical apparatus and instruments, metering, the use of the parts with microchannel as key structure are more and more frequent, microchannel
Size is less and less, required precision more and more higher, or even microchannel reaches micron order, and pass precision reaches 0.1 micron.
As microflow control technique is in the application and development of the multiple fields such as biology, machinery, chemical industry, medicine, by microchannel
Array is controlled in microscopic dimensions to micro liquid or sample and the technology that processes is subject to most attention both domestic and external.Utilize
Microchannel can not only prepare the bio-separation medium that monodispersity is good, particle diameter and form are controllable, submicron catalyst particles
Grain and bioenergy conversion immobilization carrier etc..
The processing of micron order microchannel typically adopts micro EDM, Electrolyzed Processing, Ultrasonic machining, Laser Processing, electricity
Beamlet processing etc..
In theory above-mentioned various methods can processing micron level micro channel array, but there is different application in distinct methods
There is benefit and limitation in field.
The ultimate principle of micro EDM is based on the galvano-cautery between instrument and workpiece during pulse feature spark discharge
Phenomenon losing excess metal, to reach the processing request of the size to part, shape.It is characterized in that machinable microchannel is straight
Footpath is little, high precision；Its limitation is process velocity slowly and can only process conductive material.
Electrolyzed Processing is that the principle of electrochemical reaction for producing anodic solution in the electrolytic solution using metal is entered to metal material
A kind of process of row processing and forming.Be characterized in can processed complex workpiece shapes, be suitable to batch machining, crudy
It is good；Its limitation machining accuracy and stability are poor, can only process metal material.
Ultrasonic machining is that the transducer drive machining tool encouraged using supersonic generator makees supersonic vibration, impacts workpiece
Abrasive material is clamp-oned the surface of fragile material by the abrasive material on surface, makes material surface produce micro-crack, then to be formed cracks can spread little
Chip and peel off, so as to reach remove material purpose.Its feature can process various hard brittle materials, workpiece surface quality after processing
It is good, without residual stress；Its limitation is not easy to process accurate high microchannel.
Laser Processing be by the use of high-energy-density laser as thermal source, make machined material be processed point produce local
TRANSIENT HIGH TEMPERATURE, make melt material or gasification and be removed.It is characterized in that workpiece requirement is low, process velocity is fast；Its limitation adds
The microchannel precision that work goes out is low, easily forms loudspeaker or spindle, and apparatus expensive.
During electron beam process under vacuum, using the electron beam of focus energy very high density, rushed with high speed
Hit on the minimum area of surface of the work, in very short time, its energy major part changes into heat energy, make to be impacted the workpiece of part
Material reaches more than thousand of degrees Celsius of high temperature, so as to the local for causing material is gasified, is taken away by vacuum system.Its feature can be with
Any metal and nonmetallic materials are processed, fine curved hole, but apparatus expensive can be processed.
It is micro- logical disclosed in CN01109003.2 (Lu Zuhong, He Nongyue, compound micro path array chip and preparation method)
Channel array chip and preparation method, are the specializations in advance needed for the micro-through-hole or capillary inner surface for arranging is mounted and coated
Study point, the short arrangement of passages of two-dimensional directional is caused by being cut longitudinally to form one piece of thin slice, it is characterised in that some micro-
Small through hole or capillary tube bonding bunchy, it is larger in manufacture difficulty, while microchannel size is more than 100 microns, it is difficult to make
Micro channel array less than 10 microns.
Microchannel disclosed in (200710093246.8 Jiang Jiahuan, Jia Yuefei et al. construction method of micro point array in microchannel)
Interior microdot array by the key step such as arrange, pour by the microfilament array solidification of cloth cross-contact in the polymer, Ran Houtong
Cross the demoulding, except microdot or array in the integrally-formed microchannel of the steps such as silk.Which is only capable of making 1 millimeter, and 50 millimeters of spacing is left
Right micro channel array.
Above-mentioned micro channel array preparation method is in dimensional accuracy, or channels uniformity, or is not easily accomplished scale making,
Or small lot cost of manufacture is limited the problems such as high, there is certain limitation
Microchannel plate is, with glass flake as base, microchannels up to a million, microchannel plate diameter to be formed on glass flake
Typically in a few micrometers to tens microns, pitch of holes is more bigger than micro-pore diameter.
There is certain advantage, but pitch of holes and microchannel diameter in aperture size precision etc. in above-mentioned method for manufacturing micro-channel plate
It is related, it is impossible to carry out micro channel array design.
The content of the invention
Present invention is primarily targeted at, there is provided a kind of micro channel array and preparation method thereof, technology to be solved are asked
Topic is according to the pitch of holes and microchannel for being actually needed control micro channel array, thus more suitable for practicality.
The object of the invention to solve the technical problems employs the following technical solutions to realize.
According to a kind of preparation method of micro channel array proposed by the present invention, including preparing Glass rod：By the first material system
Into the first Glass rod, the second material is made into the second Glass rod and glass tubing, the first described material is acid-soluble materials, described
The second material be acid resistant material；The internal diameter of described glass tubing 0.1-0.5mm bigger than the diameter of the first described Glass rod；
Wire drawing：The first described Glass rod is added in described glass tubing, wire drawing obtains the first monofilament, by the second described glass
Glass rod wire drawing, obtains the second monofilament, and the first described monofilament is identical with the diameter of the second monofilament, is Y1；Rod is arranged once：Will be above-mentioned
Monofilament lines up regular hexagon, obtains the side of the first multifilament rod and the second multifilament rod, the first described multifilament rod and the second multifilament rod by M
Root monofilament is constituted, and opposite side distance is (1.732 × (M-1) -1) * Y1, by 3M2- 3M+1 roots monofilament is constituted；The first described multifilament rod
Center be first monofilament, other be the second monofilament；The second described multifilament rod is constituted by the second monofilament；Secondary drawing
Silk：By the first described multifilament rod and the second multifilament rod wire drawing, the first multifilament and the second multifilament are respectively obtained, described first is multiple
Silk and the second multifilament are opposite side distance for Y2Regular hexagon；Secondary row's rod：The first described multifilament and/or the second multifilament are arranged
It is listed in orthohexagonal mould, obtains the 3rd multifilament rod；Three wire drawings：By the 3rd described multifilament rod wire drawing, it is obtained micro- logical
Channel array base substrate；Described micro channel array base substrate is cut, polishing, acid are molten, and required micro channel array is obtained.
Preferably, according to a kind of aforesaid preparation method of micro channel array, wherein described pitch of holes is d1It is micro- logical
The preparation method of channel array is：According to the minification Z of third time wire drawing2, calculate the first multifilament and second in the 3rd multifilament rod
Multifilament puts in order, and the method for described calculating is that the minification of third time wire drawing is Z2, then described micro channel array
Each orthohexagonal opposite side distance Y in base substrate3Equal to Y2/Z2, described pitch of holes d1For Y3X times, then the 3rd described multifilament
Two neighboring first multifilament in rod is separated by X-1 the second multifilament, and described X is positive integer, including integer part and decimal
Part, the natural number that described X-1 subtracts 1 for the integer part of X and obtains.
Preferably, the preparation method of aforesaid a kind of micro channel array, wherein the first described material and described second
The thermodynamic property of material matches.
The concrete meaning that matches of the present invention is：Because the present invention is simultaneously by acid resistant material and acid-soluble material
Material carries out wire drawing, and its two viscosity in drawing process approximately should so be conducive to stablizing for fibre diameter；Acid-soluble material
The linear expansion coefficient more slightly higher than acid resistant material 2～5 × 10 of material-71/ DEG C, the intensity and toughness of glass fibre is conducive to carry
Height, beneficial to the carrying out of drawing process.The softening point of acid-soluble glass material (about 30～100 DEG C) higher than acid resistant material, favorably
In the filling of micro channel array roundness and drawing process void.
Preferably, the preparation method of aforesaid a kind of micro channel array, adjusts diameter and the institute of the first described Glass rod
The ratio of the glass tubing pipe thickness stated, so that described X is positive integer.
When X of the present invention is positive integer, can just meet design requirement, the present invention is by adjusting the straight of the first Glass rod
The ratio of footpath and described glass tubing pipe thickness, so that described X is positive integer.
Preferably, the preparation method of aforesaid a kind of micro channel array, wherein a diameter of 20- of the second described Glass rod
30mm。
Preferably, the preparation method of aforesaid a kind of micro channel array, wherein the first described multifilament rod or the second multifilament
A diameter of 20-50mm of rod.
Preferably, the preparation method of aforesaid a kind of micro channel array, wherein a diameter of 20- of the 3rd described multifilament
70mm。
The object of the invention to solve the technical problems is realized also using following technical scheme.
According to a kind of micro channel array proposed by the present invention, it is prepared from by said method.
By above-mentioned technical proposal, a kind of micro channel array of the invention and preparation method thereof at least has following advantages：
1st, the invention provides a kind of preparation method of the adjustable micro channel array of pitch of holes.
According to the preparation method of micro channel array proposed by the present invention, while prepare micropore and pitch of holes, using wire drawing and
Arrangement, controls the opposite side distance of multifilament rod, while by different arrangement regulations, controlling the distance of adjacent two micropore.Therefore, this
The bright micro channel array that different pitchs of holes as needed, can be prepared, also, the preparation side of micro channel array of the present invention
Method, is suitable to industrial-scale production, is more worth with actual production.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of description, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Description of the drawings
Fig. 1 is 1 two row's rod schematic diagrams of embodiment.
Fig. 2 is 2 two row's rod schematic diagrams of embodiment.
Fig. 3 is 3 two row's rod schematic diagrams of embodiment.
Specific embodiment
Further to illustrate the present invention to reach technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Accompanying drawing and preferred embodiment, to according to a kind of micro channel array proposed by the present invention and preparation method thereof its specific embodiment,
Structure, feature and its effect, describe in detail as after.In the following description, different " embodiment " or " embodiment " refers to not
It must be same embodiment.Additionally, the special characteristic, structure or feature in one or more embodiments can be by any suitable form group
Close.
Embodiment 1
The present embodiment proposes diameter 5mm, thickness 1mm, 500 μm of (d of pitch of holes1), 5 μm of micropore numbers of bore dia be 19 it is micro-
The preparation method of channel array, manufacturing step are specific as follows：
1st, using two kinds of glass materials, one of which acid resistance, wall thickness 3.1mm, the glass tubing of internal diameter 27.7mm are fabricated to；
Diameter 30mm Glass rods are made using identical material.Second glass material is with good sour molten speed Glass rod, outside rod
Footpath 27.3mm.
2nd, a wire drawing：Two kinds of monofilament are drawn respectively, and wherein the first monofilament (monofilament A) employing will be with good sour molten speed
Rate Glass rod is put in glass tubing, then this assembly clamping is drawn on wire drawing machine, is drawn into diameter Y1The list of=0.6mm
Silk (monofilament A)；Acid resistance Glass rod clamping is drawn on wire drawing machine by second monofilament (monofilament B), diameter, is drawn into 0.6mm
Monofilament B.
3rd, once arrange rod：With every side M1=24 are arranged in monofilament in the mould of orthohexagonal cross section, except bosom
Using beyond monofilament A (diameter 0.6mm), remaining whole enters monofilament B to monofilament.Then it is tied up with certain spacing with cotton thread
Get up, two ends are tied up with the copper cash of not easy burn-out, are arranged in multifilament rod C of orthohexagonal；Separately with 24 monofilament B
(0.6mm) it is arranged in a multifilament rod D.
4th, secondary wire drawing：Draw in high accuracy wire drawing machine, orthohexagonal multifilament rod a C and D are drawn into into Y respectively2=
Multifilament an E and F of 0.95mm, Y in this technique2=Z2×d1/X。
5th, secondary row's rod：With every side M2Multifilament is carried out being arranged in the mould of orthohexagonal cross section by Fig. 1 by=15
In tool, then it is stopped up with certain spacing with cotton thread, two ends are tied up with the copper cash of not easy burn-out, are arranged in positive six
A square multifilament rod, (1.732 × (M in this technique2-1)-1)*Y1=d2×Z2。
6th, wire-drawing shape：Draw on high accuracy wire drawing machine, secondary rod is drawn into into d2(diameter group is 5mm to=6.35mm
The bigger positive six side contrast of inscribed circle size) base substrate, then round as a ball to cut into a diameter of 5mm, thickness is 1mm semi-finished product, polishing
Process in dilute nitric acid solution afterwards, obtain diameter 5mm, thickness 1mm, 500 μm of pitch of holes, 5 μm of micro channel arrays of bore dia.
Embodiment 2
The present embodiment proposes diameter 5mm, thickness 1mm, 750 μm of pitch of holes, 5 μm of micro channel arrays of bore dia, micropore number
For the preparation method in 37 holes, compared with Example 1, the preparation method of the present embodiment is arranged by Fig. 2 except will arrange secondary rod
Outside different from embodiment 1, other step operation modes are identical.
Embodiment 3
The present embodiment proposes diameter 5mm, thickness 1mm, 400 μm of pitch of holes, 3.4 μm of micro channel arrays of bore dia, micropore
Preparation method of the number for 7 holes, compared with Example 1, the monofilament radical for arranging a rod is changed to 28 by 24；Arrange the root of secondary rod
Number is changed to 19 by 15, and is arranged according to Fig. 3；Outside secondary rod is drawn into the base substrate difference of 6.45mm, other steps
Rapid mode of operation is identical.
The above, is only presently preferred embodiments of the present invention, not makees any pro forma restriction to the present invention, according to
According to any simple modification, equivalent variations and modification that the technical spirit of the present invention is made to above example, this is still fallen within
In the range of bright technical scheme.
Claims (9)
1. a kind of preparation method of micro channel array, it is characterised in that：Including,
Prepare Glass rod：First material is made into the first Glass rod, the second material is made into the second Glass rod and glass tubing, it is described
The first material be acid-soluble materials, described the second material is acid resistant material；The internal diameter of described glass tubing is than described
The big 0.1-0.5mm of diameter of the first Glass rod；
Wire drawing：Described the first Glass rod is added in described glass tubing, wire drawing obtains the first monofilament, by described the
Two Glass rod wire drawings, obtain the second monofilament, and the first described monofilament is identical with the diameter of the second monofilament, is Y1；
Rod is arranged once：Above-mentioned monofilament is lined up into regular hexagon, the first multifilament rod and the second multifilament rod, the first described multifilament rod is obtained
It is made up of M root monofilament with the side of the second multifilament rod, opposite side distance is (1.732 × (M-1) -1) * Y1, by 3M2- 3M+1 root monofilament groups
Into；The center of the first described multifilament rod is first monofilament, and other are the second monofilament；The second described multifilament rod is by
Two monofilament are constituted；
Secondary wire drawing：By the first described multifilament rod and the second multifilament rod wire drawing, the first multifilament and the second multifilament, institute are respectively obtained
The first multifilament and the second multifilament stated is opposite side distance for Y2Regular hexagon；
Secondary row's rod：The first described multifilament and/or the second multifilament are arranged in orthohexagonal mould, the 3rd multifilament is obtained
Rod；
Three wire drawings：By the 3rd described multifilament rod wire drawing, micro channel array base substrate is obtained；
Described micro channel array base substrate is cut, polishing, acid are molten, and required micro channel array is obtained.
2. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that
Pitch of holes is d1The preparation method of micro channel array be：
According to the minification Z of third time wire drawing2, calculate putting in order for the first multifilament and the second multifilament in the 3rd multifilament rod, institute
The method of the calculating stated is that the minification of third time wire drawing is Z2, then each positive six side in described micro channel array base substrate
Opposite side distance Y of shape3Equal to Y2/Z2, described pitch of holes d1For Y3X times, then two neighboring in the 3rd described multifilament rod
One multifilament is separated by X-1 the second multifilament, and described X is positive integer, including integer part and fractional part, and described X-1 is X
The integer part natural number that subtracts 1 and obtain.
3. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that：
The first described material is matched with the thermodynamic property of the second described material.
4. the preparation method of a kind of micro channel array according to claim 1 and 2, it is characterised in that：
The diameter of the first described Glass rod and the ratio of described glass tubing pipe thickness are adjusted, so that described X is for just
Integer.
5. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that：
A diameter of 20-30mm of the second described Glass rod.
6. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that：
The diameter of the first described Glass rod is 8-10: 1 with the ratio of described glass tubing pipe thickness.
7. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that：
A diameter of 20-50mm of the first described multifilament rod or the second multifilament rod.
8. the preparation method of a kind of micro channel array according to claim 1, it is characterised in that：
A diameter of 20-70mm of the 3rd described multifilament.
9. a kind of micro channel array, it is characterised in that：
Described micro channel array is prepared from by any one of claim 1-8.
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Cited By (5)
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| CN108453567A (en) * | 2018-04-18 | 2018-08-28 | 中国建筑材料科学研究总院有限公司 | The method of hexagon microchannel plate centering processing |
| CN108821565A (en) * | 2018-05-24 | 2018-11-16 | 中国科学院西安光学精密机械研究所 | The preparation method of microchannel plate substrate for microarray |
| CN109437092A (en) * | 2018-10-23 | 2019-03-08 | 中国工程物理研究院激光聚变研究中心 | A kind of encoding array structural composite material and preparation method thereof |
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN114591001A (en) * | 2022-03-15 | 2022-06-07 | 中国建筑材料科学研究总院有限公司 | Microporous glass plate and preparation method and application thereof |
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| CN114591001A (en) * | 2022-03-15 | 2022-06-07 | 中国建筑材料科学研究总院有限公司 | Microporous glass plate and preparation method and application thereof |
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