CN1121709C - 批次供给系统和批次供给方法 - Google Patents
批次供给系统和批次供给方法 Download PDFInfo
- Publication number
- CN1121709C CN1121709C CN00107573A CN00107573A CN1121709C CN 1121709 C CN1121709 C CN 1121709C CN 00107573 A CN00107573 A CN 00107573A CN 00107573 A CN00107573 A CN 00107573A CN 1121709 C CN1121709 C CN 1121709C
- Authority
- CN
- China
- Prior art keywords
- unit
- batch
- request
- processing
- sends
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14047899A JP3365551B2 (ja) | 1999-05-20 | 1999-05-20 | ロット供給システム及びロット供給方法 |
JP140478/1999 | 1999-05-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1274948A CN1274948A (zh) | 2000-11-29 |
CN1121709C true CN1121709C (zh) | 2003-09-17 |
Family
ID=15269551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00107573A Expired - Fee Related CN1121709C (zh) | 1999-05-20 | 2000-05-19 | 批次供给系统和批次供给方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6418355B1 (zh) |
JP (1) | JP3365551B2 (zh) |
KR (1) | KR100365768B1 (zh) |
CN (1) | CN1121709C (zh) |
TW (1) | TW452918B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100510066B1 (ko) * | 1999-06-30 | 2005-08-26 | 주식회사 하이닉스반도체 | 반도체 생산라인의 스토커 오류 감시 방법 |
JP2002076087A (ja) * | 2000-08-31 | 2002-03-15 | Mitsubishi Electric Corp | 抜き取り検査管理システム |
US6580967B2 (en) * | 2001-06-26 | 2003-06-17 | Applied Materials, Inc. | Method for providing distributed material management and flow control in an integrated circuit factory |
JP2006277298A (ja) * | 2005-03-29 | 2006-10-12 | Tokyo Electron Ltd | 基板処理装置、履歴情報記録方法、履歴情報記録プログラム及び履歴情報記録システム |
US20070042532A1 (en) * | 2005-08-19 | 2007-02-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and methods for packing in turnkey services |
US8337133B2 (en) * | 2007-06-25 | 2012-12-25 | International Business Machines Corporation | Segregating wafer carrier types in semiconductor storage devices |
CN105303307B (zh) * | 2015-10-16 | 2020-02-14 | 京北方信息技术股份有限公司 | 一种分配工作任务的方法及装置 |
US10043693B1 (en) | 2017-06-06 | 2018-08-07 | Applied Materials, Inc. | Method and apparatus for handling substrates in a processing system having a buffer chamber |
CN110957251B (zh) * | 2019-11-20 | 2022-11-18 | 上海至纯洁净系统科技股份有限公司 | 一种计量晶圆片数的短行程升降装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4571685A (en) | 1982-06-23 | 1986-02-18 | Nec Corporation | Production system for manufacturing semiconductor devices |
JP2753142B2 (ja) * | 1990-11-27 | 1998-05-18 | 株式会社東芝 | 半導体装置の生産システムにおける生産管理方法、生産管理装置および製造装置 |
US5402350A (en) * | 1991-06-28 | 1995-03-28 | Texas Instruments Incorporated | Scheduling for multi-task manufacturing equipment |
US5662048A (en) * | 1993-03-08 | 1997-09-02 | Kralj; Nicholas L. | Integrated reusable pallet having data collection devices and method for using shipping conveyances |
JPH10116875A (ja) | 1996-10-08 | 1998-05-06 | Mitsubishi Electric Corp | 半導体製造システム |
WO1998054632A2 (en) | 1997-05-29 | 1998-12-03 | Castrucci Paul P | Semiconductor wafer processing with defect eradication |
US6061607A (en) * | 1997-07-18 | 2000-05-09 | St. Onge Company | Order pick system |
JPH1159829A (ja) * | 1997-08-08 | 1999-03-02 | Mitsubishi Electric Corp | 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法 |
US6141602A (en) * | 1997-09-25 | 2000-10-31 | Hitachi, Ltd. | Specimen processing system |
US6122566A (en) * | 1998-03-03 | 2000-09-19 | Applied Materials Inc. | Method and apparatus for sequencing wafers in a multiple chamber, semiconductor wafer processing system |
JPH11354397A (ja) | 1998-06-05 | 1999-12-24 | Hitachi Ltd | 被加工物移載装置の制御方法 |
-
1999
- 1999-05-20 JP JP14047899A patent/JP3365551B2/ja not_active Expired - Fee Related
-
2000
- 2000-05-17 TW TW089109434A patent/TW452918B/zh not_active IP Right Cessation
- 2000-05-18 US US09/573,739 patent/US6418355B1/en not_active Expired - Fee Related
- 2000-05-19 KR KR1020000026878A patent/KR100365768B1/ko not_active IP Right Cessation
- 2000-05-19 CN CN00107573A patent/CN1121709C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1274948A (zh) | 2000-11-29 |
US6418355B1 (en) | 2002-07-09 |
JP2000331900A (ja) | 2000-11-30 |
KR100365768B1 (ko) | 2002-12-26 |
KR20010014934A (ko) | 2001-02-26 |
JP3365551B2 (ja) | 2003-01-14 |
TW452918B (en) | 2001-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1121709C (zh) | 批次供给系统和批次供给方法 | |
CN1241074C (zh) | 在半导体制造设备控制系统中控制设备单元状态的方法 | |
JP7120748B2 (ja) | 回転ソータの自動化 | |
CN1135491C (zh) | 集成管理半导体加工数据的方法 | |
CA2151328C (en) | Interactive control system for packaging control | |
CN1221112A (zh) | 测试及老化装置,使用该装置的串联系统,及测试方法 | |
CN1218922A (zh) | 半导体加工设备的实时控制方法 | |
CN1104047C (zh) | 半导体制造系统 | |
CN1208858A (zh) | 操作损耗减小的半导体器件测试系统 | |
US20050216115A1 (en) | Transport management system and method thereorf | |
CN1186739C (zh) | 工件的选择处理系统及其控制方法 | |
CN103811292A (zh) | 硅片加工处理系统及处理方法 | |
CN1473351A (zh) | 用于半导体制造装置的控制系统 | |
JPH10190299A (ja) | 電子部品実装ライン及び電子部品実装方法 | |
US6593154B2 (en) | Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers | |
CN111107324A (zh) | 晶圆传输系统的监控装置及其监控方法 | |
JP2716288B2 (ja) | 半導体回路試験方式 | |
CN1553285A (zh) | 一种网络隔离型工业现场控制控制器及其实现方法 | |
US6769963B2 (en) | IC handler and contact cleaning method | |
CN1196044C (zh) | 处理半导体晶片盒的半导体工厂自动化系统和方法 | |
TWI331707B (zh) | ||
CN102004451A (zh) | 用于在线缺陷扫描的动态统计采样控制方法和装置 | |
CN1852159A (zh) | 一种单板告警查询方法及装置 | |
CN1292337C (zh) | 信息配送装置及信息配送方法 | |
JPH0329309A (ja) | ウェーハ管理方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: NEC ELECTRONICS TAIWAN LTD. Free format text: FORMER OWNER: NIPPON ELECTRIC CO., LTD. Effective date: 20030724 |
|
C14 | Grant of patent or utility model | ||
C41 | Transfer of patent application or patent right or utility model | ||
GR01 | Patent grant | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20030724 Address after: Kanagawa, Japan Applicant after: NEC Corp. Address before: Tokyo, Japan Applicant before: NEC Corp. |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1067402 Country of ref document: HK |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20030917 |