CN1158546C - 平面衍射光栅光阀 - Google Patents
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Abstract
衍射光栅光阀调制入射光束。有多个细长部件,每个具有反射表面。细长部件以其各自端部悬浮,基本上共面。交替的细长部件被电耦合,以接收第一偏压。与之成插指状的细长部件电耦合,以接收第二偏压。通过施加第一和第二偏压,所有的反射平面可以保持在第一平面内。当所有细长部件位于第一平面内时,衍射光栅光阀反射该光束。一些预定的细长部件,最好是交替的,可以变形,以在平行于第一平面的第二平面内基本共面。当所述预定的细长部件组位于第二平面内时,衍射光栅光阀衍射光束。
Description
发明领域
本发明涉及光束调制的一种方法和装置。更具体地说,本发明是关于一种基本上为平面的反射表面,该表面具有可选择地变形的部分,以提供衍射光栅。
发明背景
许多的设计者和发明者已经设法开发可以单独使用或与其他调制器一起使用的光调制器。这样的调制器应当:清晰度高,运行速度高(kHz帧速率),灰度级较多,例如100级或可与颜色生成兼容,反差比或调制深度高,有着光学平度,可与VLSI处理技术兼容,易于处理,成本也较低。在试图开发这类系统的过程中,本发明的发明人之一参与发明了美国专利5311360中所述的方法和装置,这里将其全文引为参考。
根据该专利′360的教导,衍射光栅由一个多镀膜带的结构形成,如图1所示。多个可变形带结构100的一种型式是在基片102上以彼此隔开的方式而形成。各带及带之间的基片均涂有反光材料104,例如铝膜。高度差如此设计,使得当各带处于松弛、上端位置时带100上的反光材料104表面与基片102上的反光材料表面的差为λ/2。如果波长为λ的光垂直于基片102表面地照射在该结构上,则来自带100表面的反射光将与基片102的反射光同相。这是因为射在基片上的光比射在带上的光多走λ/2的距离,然后返回时又多λ/2,结果是一个完整的波长λ。这样,当波长λ的光束照射在该结构上时它看起来象是平的镜面。
通过向带100和基片102施加适当的电压,可使带100向基片102弯折,并与之接触,如图2所示。带的厚度设计为λ/4。如果波长λ的光垂直于基片102表面地照射在该结构上,则带100表面的反射光与基片102的反射光将完全不同相。这将导致来自带的光和来自基片的光之间发生干涉,因而该结构将使光衍射。由于衍射,反射光将以与垂直方向成角Θ从结构表面出射。
在形成显示装置时,一个非常重要的指标是黑象素与亮象素之间的反差比。给出较大反差比的最佳方法是确保黑象素没有光。使用上述结构形成显示装置的一种技术是使光源构造成能够提供垂直照射在结构表面的波长为λ的光。可以设置一个光收集装置,例如光透镜,以收集角Θ内的光。如果一个象素的各个带处于上端位置,则所有的光将被反射回光源,收集装置将收集不到光,该象素即呈黑色。如果该象素的带处于下端位置,则光将被衍射到收集装置,该象素呈亮色。
如果用波长并非λ的光照射,那么当各带处于上位置时将仅有部分反射能力。类似地,当各带处于下位置时将仅有部分光被衍射至角度Θ。这样,如果入射光波长并非精确地为λ的话,那么所谓的黑象素将表现出一定的亮色,而所谓的亮象素并不会表现出完全的亮色。使用仅有单一波长的光源,其成本太高。商业可行的光源通常给出分布于一定波长范围内的光。由于单一波长实际上并不可行,因此从基于上述原理的真实显示装置所能得到的反差比与理论结果相比非常差。
出于讨论的需要,假定单一波长的光是可以得到且商业可行的。对于上述装置,为使其工作时的反差比可以接受,要求各个带以及反射层的高度与厚度满足下列条件,即当为上时准确地为λ/2、当为下时为λ/4。由于制造加工的偏差,任意两个装置之间的反差比可以明显不同。由于满足条件即当为上时对比高度准确地为λ/2、当为下时为λ/4的可能性较小,因此反差比将比理论可能值差得多。
上述结构的另一困难在于实际构造的产品。特别是,本发明人发现,一旦处于下位置,带即易于粘到基片上。本发明人获知,使基片表面纹理化有助于克服这一粘结问题。不幸的是,纹理化的表面明显地弱化了表面的反射特性,使得光阀的性能降低。
最后,为使用上述结构获得色彩,′360专利的发明者们展望使用各个带之间的间隔有着不同周期性的三个不同的阀结构。由此该结构需要采用数目很大的带来获得色彩。进而,一个包括红、绿和蓝色成分的光照射在这些结构上,使光衍射,达到所希望的接收器。结果是,由于色彩光的强度有所降低。
′360专利给出了一种替代结构,如图3所示。根据该现有技术结构,在基片200上放置了多个细长部件。第一组细长部件202靠其端部(未示出)悬浮于气隙204上,如同图1和2的实施例所示。第二组细长部件206通过刚性的支撑件208安装于基片200上。支撑件208的高度设计为λ/4。在所有细长部件202和206的表面上覆有反射材料210。
理论上,细长部件202和206设计为当松弛时处于同样高度。这样,当所有细长部件均为上且位于同样高度时,将没有衍射。(实际上,由于细长部件之间隔的周期不连续性,可能存在适度的衍射。但是,该周期是光栅周期的一半,因此其衍射角是所希望衍射光角度的两倍。由于光系统的构成是仅从期望角度收集衍射光,因此该多余的衍射未被捕捉到,从而不会降低反差比。)事实上,如果各细长部件位于同一高度,对用于形成黑象素的照射光波长并没有依赖性。
为了构成图3所示的结构,一层必须由对已知腐蚀剂有着预定灵敏度的第一材料制成。该层的一些部分通过已知技术,例如光刻法和刻蚀法除去。然后,例如通过淀积,将第二材料形成在移去材料的空白处。该第二材料对腐蚀剂有着不同于第一材料的已知的灵敏度。该层由细长部件材料形成。对该结构刻蚀,以形成带状的细长部件。最后,通过刻蚀移去第二材料,以形成悬浮的细长部件202。困难在于如何保持一致地制造该装置,使得第一材料和第二材料共面。另外,用于形成第一和第二材料的可选择移去层的最为通用的技术给出一个支撑件208,它在制造中将膨胀(或缩小)。这使问题进一步恶化,因为这种不连续的周期和所期望光栅的周期相同,由此光系统将捕捉到该多余的衍射光。
尽管没有附图,′360专利暗示构造该结构时可以让所有的部件都保持悬浮。′360专利指出,它有利于控制幅度和相位。不幸的是该专利未就如何寻址、偏置或这种装置的结构作出说明。
所需要的是一个平面衍射光栅系统,它较好地保持了相邻细长部件之间的平面关系。此外,还希望系统并不依赖于预定的光波长。另外,系统不应规定严格的制造加工公差,以满足预定的光波长。
发明内容
衍射光栅光阀对入射光束进行调制。多个细长部件中的每一个均有一个反射表面。这些细长部件从端部被悬浮起来,其相应端基本上共面。细长部件中交错电相连的部分,用于接收第一偏压。另一些细长部件电相连,用于接收第二偏压。通过施加适当的偏压,所有的反射表面可以保持在预定的平面内。应当理解,由于沿细长部件引入了适度的下垂,这些反射平面事实上并非精确地处于一个平面内。不过,沿相邻细长部件的所有相应高度将被偏压至基本上相同的高度,这有效地避免了衍射。当所有的细长部件都位于第一平面内时,衍射光栅光阀将光束反射。一组预定的细长部件,最好是交替的细长部件,可以变形使得与平行于第一平面的第二平面共面。当这些预定的细长部件位于第二平面内时,衍射光栅光阀使光束发生衍射。
附图简述
图1是现有技术衍射光栅光阀的截面图,其中带状部件位于上位置。
图2是图1所示现有技术衍射光栅光阀的截面图,其中带状部件位于下位置。
图3是现有技术衍射光栅光阀另一个实施例的截面图,该衍射光栅光阀有多个平面排列的细长部件,其中一部分由支撑件支撑。
图4是根据优选实施例位于非衍射/上模式的衍射光栅光阀的截面图。
图5是根据优选实施例位于衍射/下模式的图4衍射光栅光阀的截面图。
图6是图4衍射光栅光阀沿90°并跨两个象素所取的截面图。
图7是图5衍射光栅光阀沿90°并跨两个象素所取的截面图。
图8是图4衍射光栅光阀和相邻象素的平面图。
图9是在未施加偏置电压的情况下图4的细长部件之一的光强度相对于在细长部件和基片之间施加的电压的曲线图。
图4是根据优选实施例的位于非衍射/上模式的衍射光栅光阀的截面图。有关制造工艺的详细情况披露于标题为“平面衍射光栅光阀的制造方法和装置”的共有、共同提交、共同未决的序列号08/480459、公开号WO-A-9641226的美国专利申请中,它由相同发明人的至少一个于1995年6月7日同时提交。这里仅披露其代表性材料,而无意作出任何限制。
所提供的基片300可以采用任何合适的材料,例如生长硅。在该基片上形成一个钝化层302,例如氮化硅Si3N4。接着,在钝化层302上形成一个导电层304。导电层304最好由不受后续处理步骤影响的材料制成,例如钨或钨合金。
接着形成一个悬浮部件,该悬浮部件包括一些被一起称作为带318的层。该悬浮部件包括形成于导电层304上方且与导电层304隔开的带层306。带层306的材料优选为氮化硅。带层306上形成一个反射层308,该反射层优选由铝制成。最后,反射层308上形成一个保护薄层310,该薄层优选是PECVD氧化物。在导电层304和带层306之间留有气隙312。
在该上状态,由于可用适当电压将各细长部件驱动至精确的相同高度,因此入射光不会被衍射。当各细长部件共面时,给出真黑的象素。由于各象素的黑状态是与波长无关的,因此其优势是显而易见的。回想到,由于在相邻的细长部件之间的间隙具有周期性,将会存在一定量的衍射。但是,该衍射的周期是衍射光栅周期的一半,因此可以从光学上加以消除。
图5是根据优选实施例位于衍射/下模式的图4衍射光栅光阀的截面图。为避免混淆,在适于表示不同图示中的相同结构的地方采用了相同的参考标号。通过在预定的悬浮部件和导电层之间施加适当的电压,静电引力使这些预定的悬浮件变形并与导电层304接触。在图5中,四个悬浮件中的两个被示意处于下位置。这使得从相邻件反射的光发生衍射。
这里对于衍射光栅光阀仅有适度的波长相关性。相邻细长部件的高度之间的距离优选为λ/4。但是,如果该距离(throw)对绿光是最佳的,那么波长变为红或蓝色所引起的损失将在5%左右。这部分是由于采集光的强度是按波长的正弦平方的函数而变化的。这样,波长的小幅变化将仅引起接收强度的小幅变化。另外,相对于现有技术而言,制造一个移动λ/4的装置也要容易一些。在那里,λ/4的差包括隔离器厚度和细长部件厚度的组合。这要求这两层有着非常严格的制造公差。这里,气隙的厚度决定了设计的波长一致性,细长部件可以是任何厚度。该气隙最好是通过除去牺牲性(sacrificial)氧化物来形成。由于在许多易于控制的条件下氧化物形成是非常特性化的,因此按常规操作即可以制造具有正确尺寸的隔离器。应当明白的是,在装置的正常操作期间气隙的厚度将通过向带或下面的导体施加电压进行调整和控制。
也可以在包含本发明衍射光栅光阀的设备中加入一个光传感器。该传感器测量衍射光,并且调整(下文描述的)偏压,以使检测到的衍射光最大。如此,传感器和偏压调节电路可以驱动细长部件,使得一直处于上位置的细长部件即使在光源波长改变的情况下仍能保持精确的λ/4关系。
因为对于这样的适度的波长变化来说损失较小,所以对反差比的影响较小,这是由于在黑状态下光学系统基本上接收不到光。对于处于开状态100%的光被接收、处于关状态没有光被接收的这样的理想系统,反差比为∞(事实上,任意数除以零均为∞)。黑状态即使是适度的退化,也会显著地影响反差比。例如,在黑状态仅接收到5%的不需要的光,而在开状态仍然收集到100%的光,即会使反差比从∞降到约20。另一方面,如果黑状态继续接收到零的光而开状态收集95%,那么反差比仍将为∞。注意到在该例中显示强度有所下降,而反差比仍然很好。
由于本发明的衍射光栅光阀与相对的波长无关,因此可以形成这样一个系统,它利用简单结构来形成彩色图象。例如,包括红、绿和蓝的三个光源可以照射一个所考虑的象素。为了形成红色,仅须激励红色光源。对于绿色和蓝色,这也同样成立。为了形成其它颜色,该象素可以用这些光源进行时间多路传输而得到(time multiplex)。换句话说,首先用红色光源照射,象素按需要衍射或不衍射,然后是蓝色,最后是绿色。照射的次序并不重要,观看者的眼睛把显示的这些颜色综合在一起,构成所需要的颜色。
图6是图4处于非衍射/上模式的衍射光栅光阀沿90°并跨两个象素所取的截面图。图6仅示意地表示不同结构的大致几何形状。随着处理工艺的不同、材料的选择、层厚度以及环境条件的变化,各个形状和弯曲角度可以发生变化。沿悬浮区域以及支撑点之间形成一个象素314。象素314被悬浮,以允许变形,进而提供如前所述的选择性衍射。支撑点允许象素314之间隔离,同时也为该象素结构提供了在基片300上的机械支撑。
图7是图5处于衍射/下模式的衍射光栅光阀沿90°并跨两个象素所取的截面图。通过在导电层304和反射层308之间施加适度的电压电势,静电引力使该象素弯曲,而与基片接触。应当理解的是,导电层304延伸进入页面,穿出页面并穿过许多象素的下面。类似地,形成该象素的带318越过该图的边界,并跨越许多导电层。象素带和导电层之间的这种相互联系提供了一种独特的寻址(addressing)技术,下文将结合图8和9对此详细描述。
图8是图4衍射光栅光阀和相邻象素的平面图。图8的图示中给出六个象素。应当理解,该有限数目的象素仅为示意用。根据本发明的供商业显示用的衍射光栅光阀将包括至少其它显示技术当前采用的象素数目。这样,对于商用衍射光栅光阀来说,将会有多于两个的许多导电层304和数目多于所示的带318。例如,一个可行的商业显示包括1024行和1280列个象素。除去这些象素外,还示出了将电信号耦合到带318的I/O端口焊盘326。
每个象素320包括四个相邻带318。交替的一组322带318与偏压总线324相连。事实上,对于每个象素320,两个交替带均连接到偏压总线324。该象素320内的另两个带相连,以从焊盘326A接收控制电压。偏压总线324最好与导电层304同时形成。
光被偏转的角度由带318的宽度和相邻带之间的间隔决定。由于在该优选实施例中交替带被栓在一起,因此周期由两个相邻带确定。在该优选实施例中,每个带3.5微米宽,相邻带的间隔为1.5微米。这样,该结构的周期是10微米。应当理解,各带之间的间隔会使光丢失。最好是使该间隔相对于带的宽度最小化。
图9是图4的两对细长部件构成的显示结构的光强度相当于一个细长部件和基片之间施加的电压的曲线图,在此情况下另一些行未加偏压。细长部件呈现出滞后现象。当电压如光强度增大所表示的那样增加时,细长部件开始略微弯曲。当达到弯曲阈值VD时,细长部件迅速下动,与导电层接触。然后可将电压降到该电平之下,而细长部件仍然处于下位置。在某个较低的电压VU处,细长部件松弛,并返回上位置。
使细长部件调整到下位置所需的电压VD在20伏直流电压范围内。由于制造工艺、用于制造这类装置所用的材料以及层的厚度的影响,该电压有可能明显地高于或低于该值。在优选实施例中,细长部件被加以在弯曲电压VD和较低电压VU之间的一个中等范围的偏置电压VB。如此,为使细长部件下动或松弛仅需明显小得多的电压偏差。
从图9可以很明显地看出,偏置电压VB将使细长部件发生中等程度的弯曲。考虑一下开关象素320所需的电压。对于该讨论,有必要同时参考图8和9。在一种寻址方案中,通过将VB加到焊盘326A和导电体324,即可将偏置电压VB加到象素的所有带上。像素320中的所有带将略微弯曲并且保持平面性,使黑状态仍为黑。在优选实施方案中,每另一个带永久地与偏置电压VB相连。增加或减少相应的插指带上的电压,使这些带下动或松弛。
开关带所需的递增电压是ΔVS,如图9所示。如果至少ΔVS被加到施加于焊盘326A的电压上,在连接于该焊盘的行中的所有象素将下跳到衍射状态。换句话说,如果从施加到导电层328(为与图4-7对应,也标记为304)的电压中减去ΔVS,那么该导电层上方的列中所有象素的所有带也将下跳。在这些条件下,这些带将处于下状态,因而这些象素将保持为黑色。为了提供对象素320的寻址,电压ΔVS/2被加到焊盘326A上,同时从导电层328减去电压ΔVS/2。也可以采用其它组合,只要单独的一个电压不会使带下跳,而两者的组合将使带下跳即可。
一旦+ΔVS/2与-ΔVS/2被除去后,由于带的固有滞后性,那些下跳到下位置的带仍然处于下位置,直到反极性的ΔVS被加到同样的元件上。为避免立即删除整行或整列,可以通过向该行或列适当施加+/-ΔVS/2来除去单个的象素320,其极性与使象素320下跳的极性相反。如上所述,可以采用其它的电压组合来删除象素320。
在该优选实施例中,先建立一行数据,并将它送入到该行中。如果导电层304包括这些列,那么通过向其中象素希望为亮色的所有列适当耦合-ΔVS/2,即可把数据送入这些列中。尽管对于每一这样的列中的所有象素来说所有的带将由于电压的该变化略有移动,由于这些带保持共面,所以所显示的图象并未改变。这样,这些带按共同方式运动,因而对任何这样的改变有着共同的抑制方式。换句话说,由于静电引力均等地加到一行中所有的细长部件上,因此这些带一起运动,避免了多余的衍射。应当理解,事实上由于沿细长部件引入了适度的下凹的缘故,反射表面并不精确地位于一个平面内。然而,所有的沿相邻细长部件的所有对应点均被偏压至基本相同高度,这有效地避免了衍射。然后,耦合到在所希望行运动的带的那些焊盘上的电压从VB增加到( VB+ΔVS/2),所有的适当象素将跳变。另一方面,如果数据建立在各个带上然后与下方的导电层跳变,那么响应于ΔVS/2被选择性地加到预定的带上,显示将发生闪烁(twinkle)。
上文采用一个实施例对本发明进行了描述。那些只有在本领域的技术人员阅读了本公开件之后才变得一目了然的改进和修改,仍然属于本申请的精神和范畴。
Claims (10)
1.一个用于调制入射光束的调制器,包括:
a.多个细长部件(318),每个细长部件具有一个第一端和一个第二端以及一个光反射平面表面(308),其中各细长部件被组合成第一组和第二组,使得第一组的各个部件和第二组的各个细长部件成插指状,各个细长部件彼此平行放置;
b.使第一组和第二组的各个细长部件(318)在端部悬置的悬置装置;
c.使第一组的各个细长部件电耦合在一起的装置;
d.使第二组的各个细长部件电耦合在一起的装置;
e.将第一偏置电压加至第一组的偏压施加装置和将第二偏置电压加至第二组的偏压施加装置,使得各光反射平面表面(308)基本上共面且在第一平面内使得入射光束被反射;以及
f.用于选择性地使第一组的各个部件垂直于第一平面向第二平面偏移、使得入射光束被衍射的偏移装置,这里第二平面平行于第一平面。
2.根据权利要求1所述的调制器,其特征在于还包括独立于第一组、垂直于第一平面地调节第二组位置的装置。
3.根据权利要求1所述的调制器,其特征在于相邻的细长部件彼此之间隔开一个间隙,使得每个光反射平面表面的范围比每个间隙大。
4.根据权利要求1所述的调制器,其特征在于第二平面距第一平面大约λ/4,这里λ是入射光束的波长。
5.根据权利要求1所述的调制器,其特征在于当第一偏置电压被移去时各个细长部件(318)并不位于第一平面内。
6.根据权利要求1所述的调制器,其特征在于静电引力是通过将所述第一偏置电压和第二偏置电压作为电势施加在细长部件(318)和位于下方的导体(304)上而形成的。
7.根据权利要求1所述的调制器,其特征在于还包括用于检测衍射光并响应于此而自动地调节所述电偏压的偏压调节装置。
8.根据权利要求1所述的调制器,其特征在于当在所述平面内时所述细长部件(318)与波长无关地反射光。
9.用于显示图象的数字显示系统,包括:
a.多个象素(320),每个象素用于显示图象的一部分,其中所述象素被排列成具有多行和多列的阵列,而且其中每个象素包括:
(1)多个细长部件(318),每个细长部件具有第一端和第二端以及平面反光表面(308),其中所述细长部件(318)被组合成第一组和第二组,使得第一组的各个部件(318)与第二组的各个部件(318)成插指状,所述细长部件(318)彼此平行;以及
(2)将第一组和第二组的细长部件以其端部悬置于一个基片(300)上的悬置装置;
b.将每一行内的第一组的所有细长部件(318)电耦合在一起的电耦合装置;
c.将每一行内的第二组的所有细长部件(318)电耦合在一起的电耦合装置;
d.将第一偏压加至第一组的第一偏压施加装置和将第二偏压加至第二组的第二偏压施加装置,使得平面反射表面(308)基本上共面且位于第一平面内,从而将入射光束反射;以及
e.用于选择性地使第一组的各个细长部件(318)垂直于第一平面向第二平面偏移、使得入射光束被衍射的偏移装置,这里第二平面平行于第一平面。
10.根据权利要求9所述的装置,其特征在于用于选择性地使第一组的所述细长部件(318)偏移的偏移装置包括安装到所述基片(300)上且位于一列中所有细长部件(318)下面的导电层(304)。
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US08/482,188 US5841579A (en) | 1995-06-07 | 1995-06-07 | Flat diffraction grating light valve |
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- 1996-06-05 DK DK96917143T patent/DK0830624T3/da active
- 1996-06-05 DE DE69607960T patent/DE69607960T2/de not_active Expired - Lifetime
- 1996-06-05 KR KR1019970708749A patent/KR100320997B1/ko not_active IP Right Cessation
- 1996-06-05 AU AU59811/96A patent/AU5981196A/en not_active Abandoned
- 1996-06-05 CN CNB961945575A patent/CN1158546C/zh not_active Expired - Lifetime
- 1996-06-05 EP EP96917143A patent/EP0830624B1/en not_active Expired - Lifetime
- 1996-06-05 WO PCT/US1996/008804 patent/WO1996041217A1/en not_active Application Discontinuation
- 1996-06-05 JP JP50129397A patent/JP3164824B2/ja not_active Expired - Lifetime
- 1996-06-05 PT PT96917143T patent/PT830624E/pt unknown
- 1996-06-05 AT AT96917143T patent/ATE192241T1/de not_active IP Right Cessation
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1997
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2000
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Also Published As
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DE69607960D1 (de) | 2000-05-31 |
EP0830624B1 (en) | 2000-04-26 |
AU5981196A (en) | 1996-12-30 |
NO975696L (no) | 1997-12-05 |
EP0830624A1 (en) | 1998-03-25 |
PT830624E (pt) | 2000-08-31 |
US5841579A (en) | 1998-11-24 |
CN1187247A (zh) | 1998-07-08 |
WO1996041217A1 (en) | 1996-12-19 |
DE69607960T2 (de) | 2000-08-17 |
KR19990022270A (ko) | 1999-03-25 |
DK0830624T3 (da) | 2000-09-25 |
JP3164824B2 (ja) | 2001-05-14 |
NO975696D0 (no) | 1997-12-05 |
JPH10510374A (ja) | 1998-10-06 |
KR100320997B1 (ko) | 2002-03-08 |
ATE192241T1 (de) | 2000-05-15 |
ES2147380T3 (es) | 2000-09-01 |
GR3033806T3 (en) | 2000-10-31 |
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