CN1310011C - 光计量术中模型和参数的选择 - Google Patents
光计量术中模型和参数的选择 Download PDFInfo
- Publication number
- CN1310011C CN1310011C CNB038177781A CN03817778A CN1310011C CN 1310011 C CN1310011 C CN 1310011C CN B038177781 A CNB038177781 A CN B038177781A CN 03817778 A CN03817778 A CN 03817778A CN 1310011 C CN1310011 C CN 1310011C
- Authority
- CN
- China
- Prior art keywords
- parameters optimization
- skeleton pattern
- optimization
- parameter
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
Abstract
Description
Claims (43)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/206,491 US7330279B2 (en) | 2002-07-25 | 2002-07-25 | Model and parameter selection for optical metrology |
US10/206,491 | 2002-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1672012A CN1672012A (zh) | 2005-09-21 |
CN1310011C true CN1310011C (zh) | 2007-04-11 |
Family
ID=30770300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038177781A Expired - Lifetime CN1310011C (zh) | 2002-07-25 | 2003-07-25 | 光计量术中模型和参数的选择 |
Country Status (8)
Country | Link |
---|---|
US (2) | US7330279B2 (zh) |
JP (2) | JP2005534192A (zh) |
KR (1) | KR101281212B1 (zh) |
CN (1) | CN1310011C (zh) |
AU (1) | AU2003254170A1 (zh) |
DE (1) | DE10392975T5 (zh) |
TW (1) | TWI238884B (zh) |
WO (1) | WO2004013723A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105571484A (zh) * | 2014-10-14 | 2016-05-11 | 睿励科学仪器(上海)有限公司 | 确定测量模式和光学系统参数容差的方法和装置 |
Families Citing this family (112)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7330279B2 (en) * | 2002-07-25 | 2008-02-12 | Timbre Technologies, Inc. | Model and parameter selection for optical metrology |
US20040087042A1 (en) * | 2002-08-12 | 2004-05-06 | Bruno Ghyselen | Method and apparatus for adjusting the thickness of a layer of semiconductor material |
US6842261B2 (en) * | 2002-08-26 | 2005-01-11 | Timbre Technologies, Inc. | Integrated circuit profile value determination |
US20040090629A1 (en) * | 2002-11-08 | 2004-05-13 | Emmanuel Drege | Diffraction order selection for optical metrology simulation |
AU2003302049A1 (en) * | 2002-11-20 | 2004-06-15 | Mehrdad Nikoohahad | System and method for characterizing three-dimensional structures |
US20040181768A1 (en) * | 2003-03-12 | 2004-09-16 | Krukar Richard H. | Model pattern simulation of semiconductor wafer processing steps |
US7394554B2 (en) * | 2003-09-15 | 2008-07-01 | Timbre Technologies, Inc. | Selecting a hypothetical profile to use in optical metrology |
US20050231731A1 (en) * | 2004-02-18 | 2005-10-20 | The Usa As Represented By The Administrator Of The National Aeronautics And Space Administration | Systems and methods for fabricating thin films |
US7523076B2 (en) * | 2004-03-01 | 2009-04-21 | Tokyo Electron Limited | Selecting a profile model for use in optical metrology using a machine learning system |
FR2867588B1 (fr) * | 2004-03-12 | 2006-04-28 | Commissariat Energie Atomique | Procede de caracterisation geometrique de structures et dispositif pour la mise en oeuvre dudit procede |
US7388677B2 (en) * | 2004-03-22 | 2008-06-17 | Timbre Technologies, Inc. | Optical metrology optimization for repetitive structures |
US7065423B2 (en) * | 2004-07-08 | 2006-06-20 | Timbre Technologies, Inc. | Optical metrology model optimization for process control |
US7791727B2 (en) * | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
US20080144036A1 (en) * | 2006-12-19 | 2008-06-19 | Asml Netherlands B.V. | Method of measurement, an inspection apparatus and a lithographic apparatus |
US7566181B2 (en) * | 2004-09-01 | 2009-07-28 | Tokyo Electron Limited | Controlling critical dimensions of structures formed on a wafer in semiconductor processing |
US7171284B2 (en) | 2004-09-21 | 2007-01-30 | Timbre Technologies, Inc. | Optical metrology model optimization based on goals |
US7280229B2 (en) * | 2004-12-03 | 2007-10-09 | Timbre Technologies, Inc. | Examining a structure formed on a semiconductor wafer using machine learning systems |
US7483133B2 (en) * | 2004-12-09 | 2009-01-27 | Kla-Tencor Technologies Corporation. | Multiple angle of incidence spectroscopic scatterometer system |
US20070091325A1 (en) * | 2005-01-07 | 2007-04-26 | Mehrdad Nikoonahad | Multi-channel optical metrology |
US20060187466A1 (en) * | 2005-02-18 | 2006-08-24 | Timbre Technologies, Inc. | Selecting unit cell configuration for repeating structures in optical metrology |
US7421414B2 (en) * | 2005-03-31 | 2008-09-02 | Timbre Technologies, Inc. | Split machine learning systems |
US7496865B2 (en) * | 2005-05-20 | 2009-02-24 | Chung Yuan Christian University | OTA-based high-order filters |
US7649614B2 (en) * | 2005-06-10 | 2010-01-19 | Asml Netherlands B.V. | Method of characterization, method of characterizing a process operation, and device manufacturing method |
US7355728B2 (en) * | 2005-06-16 | 2008-04-08 | Timbre Technologies, Inc. | Optical metrology model optimization for repetitive structures |
US20070012337A1 (en) * | 2005-07-15 | 2007-01-18 | Tokyo Electron Limited | In-line metrology for supercritical fluid processing |
US7523021B2 (en) * | 2006-03-08 | 2009-04-21 | Tokyo Electron Limited | Weighting function to enhance measured diffraction signals in optical metrology |
US7428060B2 (en) * | 2006-03-24 | 2008-09-23 | Timbre Technologies, Inc. | Optimization of diffraction order selection for two-dimensional structures |
US7619731B2 (en) * | 2006-03-30 | 2009-11-17 | Tokyo Electron Limited | Measuring a damaged structure formed on a wafer using optical metrology |
US7324193B2 (en) * | 2006-03-30 | 2008-01-29 | Tokyo Electron Limited | Measuring a damaged structure formed on a wafer using optical metrology |
US7576851B2 (en) * | 2006-03-30 | 2009-08-18 | Tokyo Electron Limited | Creating a library for measuring a damaged structure formed on a wafer using optical metrology |
US7623978B2 (en) * | 2006-03-30 | 2009-11-24 | Tokyo Electron Limited | Damage assessment of a wafer using optical metrology |
US7444196B2 (en) * | 2006-04-21 | 2008-10-28 | Timbre Technologies, Inc. | Optimized characterization of wafers structures for optical metrology |
US7818151B2 (en) * | 2006-05-02 | 2010-10-19 | Asml Masktools B.V. | Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool |
US7526354B2 (en) * | 2006-07-10 | 2009-04-28 | Tokyo Electron Limited | Managing and using metrology data for process and equipment control |
US7525673B2 (en) * | 2006-07-10 | 2009-04-28 | Tokyo Electron Limited | Optimizing selected variables of an optical metrology system |
US7495781B2 (en) * | 2006-07-10 | 2009-02-24 | Tokyo Electron Limited | Optimizing selected variables of an optical metrology model |
US7515283B2 (en) * | 2006-07-11 | 2009-04-07 | Tokyo Electron, Ltd. | Parallel profile determination in optical metrology |
US7469192B2 (en) * | 2006-07-11 | 2008-12-23 | Tokyo Electron Ltd. | Parallel profile determination for an optical metrology system |
US7742888B2 (en) * | 2006-07-25 | 2010-06-22 | Tokyo Electron Limited | Allocating processing units to generate simulated diffraction signals used in optical metrology |
US7765076B2 (en) * | 2006-09-22 | 2010-07-27 | Tokyo Electron Limited | Allocating processing units to processing clusters to generate simulated diffraction signals |
US20080076046A1 (en) * | 2006-09-26 | 2008-03-27 | Tokyo Electron Limited | accuracy of optical metrology measurements |
US20080074677A1 (en) * | 2006-09-26 | 2008-03-27 | Tokyo Electron Limited | accuracy of optical metrology measurements |
US7763404B2 (en) * | 2006-09-26 | 2010-07-27 | Tokyo Electron Limited | Methods and apparatus for changing the optical properties of resists |
US20080074678A1 (en) * | 2006-09-26 | 2008-03-27 | Tokyo Electron Limited | Accuracy of optical metrology measurements |
US7555395B2 (en) * | 2006-09-26 | 2009-06-30 | Tokyo Electron Limited | Methods and apparatus for using an optically tunable soft mask to create a profile library |
US7300730B1 (en) | 2006-09-26 | 2007-11-27 | Tokyo Electron Limited | Creating an optically tunable anti-reflective coating |
US7776748B2 (en) * | 2006-09-29 | 2010-08-17 | Tokyo Electron Limited | Selective-redeposition structures for calibrating a plasma process |
US7749398B2 (en) * | 2006-09-29 | 2010-07-06 | Tokyo Electron Limited | Selective-redeposition sources for calibrating a plasma process |
US8045786B2 (en) | 2006-10-24 | 2011-10-25 | Kla-Tencor Technologies Corp. | Waferless recipe optimization |
US7522295B2 (en) * | 2006-11-07 | 2009-04-21 | Tokyo Electron Limited | Consecutive measurement of structures formed on a semiconductor wafer using a polarized reflectometer |
US7417750B2 (en) * | 2006-11-07 | 2008-08-26 | Tokyo Electron Limited | Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer |
US8798966B1 (en) * | 2007-01-03 | 2014-08-05 | Kla-Tencor Corporation | Measuring critical dimensions of a semiconductor structure |
US7916927B2 (en) * | 2007-01-16 | 2011-03-29 | Asml Netherlands B.V. | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
US7451054B2 (en) * | 2007-01-30 | 2008-11-11 | Tokyo Electron Limited | Method of using a wafer-temperature-dependent profile library |
US7571074B2 (en) * | 2007-01-30 | 2009-08-04 | Tokyo Electron Limited | Method of using a wafer-thickness-dependant profile library |
US7639351B2 (en) * | 2007-03-20 | 2009-12-29 | Tokyo Electron Limited | Automated process control using optical metrology with a photonic nanojet |
US7949618B2 (en) * | 2007-03-28 | 2011-05-24 | Tokyo Electron Limited | Training a machine learning system to determine photoresist parameters |
US7567353B2 (en) * | 2007-03-28 | 2009-07-28 | Tokyo Electron Limited | Automated process control using optical metrology and photoresist parameters |
US7483809B2 (en) * | 2007-04-12 | 2009-01-27 | Tokyo Electron Limited | Optical metrology using support vector machine with profile parameter inputs |
US7372583B1 (en) * | 2007-04-12 | 2008-05-13 | Tokyo Electron Limited | Controlling a fabrication tool using support vector machine |
US7511835B2 (en) * | 2007-04-12 | 2009-03-31 | Tokyo Electron Limited | Optical metrology using a support vector machine with simulated diffraction signal inputs |
KR101437583B1 (ko) * | 2007-07-03 | 2014-09-12 | 삼성전자주식회사 | 리소그라피 장치 및 리소그라피 방법 |
KR101357326B1 (ko) * | 2007-07-26 | 2014-02-03 | 도쿄엘렉트론가부시키가이샤 | 패턴화 구조 검사 시스템 |
KR101461667B1 (ko) * | 2007-07-26 | 2014-11-13 | 도쿄엘렉트론가부시키가이샤 | 패턴화 구조 검사 장치 및 계측 데이터 관리 방법 |
CN101359612B (zh) * | 2007-07-30 | 2012-07-04 | 东京毅力科创株式会社 | 晶片图案结构的检查装置及其计量数据管理方法 |
US7729873B2 (en) * | 2007-08-28 | 2010-06-01 | Tokyo Electron Limited | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology |
US7627392B2 (en) * | 2007-08-30 | 2009-12-01 | Tokyo Electron Limited | Automated process control using parameters determined with approximation and fine diffraction models |
US7949490B2 (en) * | 2007-08-30 | 2011-05-24 | Tokyo Electron Limited | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology |
US8069020B2 (en) * | 2007-09-19 | 2011-11-29 | Tokyo Electron Limited | Generating simulated diffraction signal using a dispersion function relating process parameter to dispersion |
US7912679B2 (en) * | 2007-09-20 | 2011-03-22 | Tokyo Electron Limited | Determining profile parameters of a structure formed on a semiconductor wafer using a dispersion function relating process parameter to dispersion |
NL1036018A1 (nl) * | 2007-10-09 | 2009-04-15 | Asml Netherlands Bv | A method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus. |
JP2009129390A (ja) * | 2007-11-28 | 2009-06-11 | Oki Electric Ind Co Ltd | 媒体鑑別装置 |
US8760649B1 (en) * | 2008-01-28 | 2014-06-24 | Kla-Tencor Corporation | Model-based metrology using tesselation-based discretization |
CL2009000954A1 (es) * | 2008-04-22 | 2010-12-31 | Schering Corp | Compuestos derivados de 2-imino-3-metil pirrolo pirimidinona,inhibidores de bace-1; composicion farmaceutica; y su uso para tratar, prevenir y/o retardar el inicio de una patologia de beta-amiloide seleccionada de enfermedad de alzheimer, enfermedad de parkinson, perdida de la memoria, sindrome de down, entre otras. |
US8090558B1 (en) | 2008-06-09 | 2012-01-03 | Kla-Tencor Corporation | Optical parametric model optimization |
NL2003919A (en) * | 2008-12-24 | 2010-06-28 | Asml Netherlands Bv | An optimization method and a lithographic cell. |
US8024676B2 (en) * | 2009-02-13 | 2011-09-20 | Tokyo Electron Limited | Multi-pitch scatterometry targets |
US8183062B2 (en) * | 2009-02-24 | 2012-05-22 | Tokyo Electron Limited | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences |
NL2005522A (en) * | 2009-10-28 | 2011-05-02 | Asml Netherlands Bv | Pattern selection for full-chip source and mask optimization. |
US9523800B2 (en) * | 2010-05-21 | 2016-12-20 | Kla-Tencor Corporation | Computation efficiency by iterative spatial harmonics order truncation |
NL2006700A (en) * | 2010-06-04 | 2011-12-06 | Asml Netherlands Bv | Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods & apparatus. |
US20140079312A9 (en) * | 2010-06-17 | 2014-03-20 | Nova Measuring Instruments Ltd. | Method and system for optimizing optical inspection of patterned structures |
US8666703B2 (en) * | 2010-07-22 | 2014-03-04 | Tokyo Electron Limited | Method for automated determination of an optimally parameterized scatterometry model |
NL2007577A (en) * | 2010-11-10 | 2012-05-14 | Asml Netherlands Bv | Optimization of source, mask and projection optics. |
US20130110477A1 (en) * | 2011-10-31 | 2013-05-02 | Stilian Pandev | Process variation-based model optimization for metrology |
JP5938201B2 (ja) * | 2011-12-06 | 2016-06-22 | キヤノン株式会社 | 位置姿勢計測装置、その処理方法及びプログラム |
JP5660026B2 (ja) * | 2011-12-28 | 2015-01-28 | 信越半導体株式会社 | 膜厚分布測定方法 |
US10354929B2 (en) * | 2012-05-08 | 2019-07-16 | Kla-Tencor Corporation | Measurement recipe optimization based on spectral sensitivity and process variation |
JP6049052B2 (ja) * | 2012-07-20 | 2016-12-21 | 株式会社日立ハイテクノロジーズ | ウエハ外観検査装置及びウエハ外観検査装置における感度しきい値設定方法 |
CN103811379B (zh) * | 2012-11-01 | 2016-12-28 | 台湾积体电路制造股份有限公司 | 工具优化调节系统和相关方法 |
US10769320B2 (en) * | 2012-12-18 | 2020-09-08 | Kla-Tencor Corporation | Integrated use of model-based metrology and a process model |
US9519285B2 (en) | 2013-01-23 | 2016-12-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Systems and associated methods for tuning processing tools |
BR112015024560A2 (pt) | 2013-05-07 | 2017-08-22 | Halliburton Energy Services Inc | Otimização de sensor óptico e implementação de sistema com estrutura de camada simplificada |
US9518932B2 (en) * | 2013-11-06 | 2016-12-13 | Kla-Tencor Corp. | Metrology optimized inspection |
WO2015089231A1 (en) | 2013-12-11 | 2015-06-18 | Kla-Tencor Corporation | Target and process sensitivity analysis to requirements |
US10671923B2 (en) | 2013-12-20 | 2020-06-02 | Gemtrex Inc. | Genetic method for the tracking of time varying signals |
JP6211194B2 (ja) | 2014-07-11 | 2017-10-11 | 株式会社日立製作所 | シミュレーションシステム、及び、シミュレーション方法 |
CN105571483B (zh) * | 2014-10-14 | 2018-06-26 | 睿励科学仪器(上海)有限公司 | 一种用于优化光学系统参数的方法和装置 |
JP6770958B2 (ja) | 2014-11-25 | 2020-10-21 | ケーエルエー コーポレイション | ランドスケープの解析および利用 |
US9948920B2 (en) * | 2015-02-27 | 2018-04-17 | Qualcomm Incorporated | Systems and methods for error correction in structured light |
JP6707559B2 (ja) * | 2015-03-31 | 2020-06-10 | ビューラー アルツェナウ ゲゼルシャフト ミット ベシュレンクテル ハフツングBuehler Alzenau GmbH | 被覆された基板の製造方法 |
JP6738415B2 (ja) | 2015-10-09 | 2020-08-12 | エーエスエムエル ネザーランズ ビー.ブイ. | 検査及びメトロロジのための方法及び装置 |
DE102015221772A1 (de) * | 2015-11-05 | 2017-05-11 | Carl Zeiss Smt Gmbh | Verfahren und Vorrichtung zur Charakterisierung eines durch wenigstens einen Lithographieschritt strukturierten Wafers |
EP3371657B9 (de) | 2015-11-05 | 2021-12-15 | Carl Zeiss SMT GmbH | Verfahren und vorrichtung zur charakterisierung eines durch wenigstens einen lithographieschritt strukturierten wafers |
CN107345788A (zh) * | 2016-05-04 | 2017-11-14 | 中国科学院福建物质结构研究所 | 一种平行光微光斑光学关键尺寸分析装置及检测方法 |
US10146036B2 (en) | 2016-06-07 | 2018-12-04 | Globalfoundries Inc. | Semiconductor wafer inspection using care area group-specific threshold settings for detecting defects |
US10458912B2 (en) * | 2016-08-31 | 2019-10-29 | Kla-Tencor Corporation | Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity |
KR101885619B1 (ko) * | 2016-12-29 | 2018-08-06 | 한국과학기술원 | 출구 재귀 모델을 이용한 웨이퍼 제조 공정 레벨의 포토리소그래피 클러스터 장치 시뮬레이션을 제공하는 시뮬레이션 장치 및 이를 이용한 시뮬레이션 방법 |
US10580673B2 (en) * | 2018-01-05 | 2020-03-03 | Kla Corporation | Semiconductor metrology and defect classification using electron microscopy |
US11562289B2 (en) * | 2018-12-06 | 2023-01-24 | Kla Corporation | Loosely-coupled inspection and metrology system for high-volume production process monitoring |
US11480868B2 (en) | 2019-03-22 | 2022-10-25 | International Business Machines Corporation | Determination of optical roughness in EUV structures |
JP2023012227A (ja) | 2021-07-13 | 2023-01-25 | キオクシア株式会社 | 形状計測方法、形状計測装置、及びプログラム |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5805290A (en) * | 1996-05-02 | 1998-09-08 | International Business Machines Corporation | Method of optical metrology of unresolved pattern arrays |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326659A (en) | 1992-03-05 | 1994-07-05 | Regents Of The University Of California | Method for making masks |
GB9226552D0 (en) * | 1992-12-21 | 1993-02-17 | Philips Electronics Uk Ltd | A method of determining a given characteristic of a material sample |
US5719796A (en) | 1995-12-04 | 1998-02-17 | Advanced Micro Devices, Inc. | System for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback |
US5963329A (en) * | 1997-10-31 | 1999-10-05 | International Business Machines Corporation | Method and apparatus for measuring the profile of small repeating lines |
JP3535390B2 (ja) | 1998-09-03 | 2004-06-07 | 株式会社東芝 | 露光マスクの検査方法および測長箇所を探索するプログラムを記録した記録媒体 |
US6532428B1 (en) | 1999-10-07 | 2003-03-11 | Advanced Micro Devices, Inc. | Method and apparatus for automatic calibration of critical dimension metrology tool |
US6470230B1 (en) | 2000-01-04 | 2002-10-22 | Advanced Micro Devices, Inc. | Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication |
EP1257781A4 (en) | 2000-01-26 | 2006-12-13 | Timbre Tech Inc | USE OF A MEMORY IN IN-LINE LAYER CALCULATIONS FOR QUICK RIGOROUS ANALYSIS OF COUPLED WAVES |
US6748104B1 (en) | 2000-03-24 | 2004-06-08 | Cognex Corporation | Methods and apparatus for machine vision inspection using single and multiple templates or patterns |
US6622059B1 (en) | 2000-04-13 | 2003-09-16 | Advanced Micro Devices, Inc. | Automated process monitoring and analysis system for semiconductor processing |
US6943900B2 (en) * | 2000-09-15 | 2005-09-13 | Timbre Technologies, Inc. | Generation of a library of periodic grating diffraction signals |
US6768983B1 (en) | 2000-11-28 | 2004-07-27 | Timbre Technologies, Inc. | System and method for real-time library generation of grating profiles |
US6636843B2 (en) | 2000-12-14 | 2003-10-21 | Timbre Technologies, Inc. | System and method for grating profile classification |
US6900892B2 (en) * | 2000-12-19 | 2005-05-31 | Kla-Tencor Technologies Corporation | Parametric profiling using optical spectroscopic systems |
US6704661B1 (en) * | 2001-07-16 | 2004-03-09 | Therma-Wave, Inc. | Real time analysis of periodic structures on semiconductors |
US6785638B2 (en) * | 2001-08-06 | 2004-08-31 | Timbre Technologies, Inc. | Method and system of dynamic learning through a regression-based library generation process |
US6867866B1 (en) | 2001-08-10 | 2005-03-15 | Therma-Wave, Inc. | CD metrology analysis using green's function |
US6609086B1 (en) * | 2002-02-12 | 2003-08-19 | Timbre Technologies, Inc. | Profile refinement for integrated circuit metrology |
US6954911B2 (en) * | 2002-05-01 | 2005-10-11 | Synopsys, Inc. | Method and system for simulating resist and etch edges |
US7216045B2 (en) | 2002-06-03 | 2007-05-08 | Timbre Technologies, Inc. | Selection of wavelengths for integrated circuit optical metrology |
US7092110B2 (en) | 2002-07-25 | 2006-08-15 | Timbre Technologies, Inc. | Optimized model and parameter selection for optical metrology |
US7330279B2 (en) * | 2002-07-25 | 2008-02-12 | Timbre Technologies, Inc. | Model and parameter selection for optical metrology |
US7427521B2 (en) | 2002-10-17 | 2008-09-23 | Timbre Technologies, Inc. | Generating simulated diffraction signals for two-dimensional structures |
US20040267397A1 (en) | 2003-06-27 | 2004-12-30 | Srinivas Doddi | Optical metrology of structures formed on semiconductor wafer using machine learning systems |
US7394554B2 (en) | 2003-09-15 | 2008-07-01 | Timbre Technologies, Inc. | Selecting a hypothetical profile to use in optical metrology |
US7388677B2 (en) | 2004-03-22 | 2008-06-17 | Timbre Technologies, Inc. | Optical metrology optimization for repetitive structures |
US7355728B2 (en) | 2005-06-16 | 2008-04-08 | Timbre Technologies, Inc. | Optical metrology model optimization for repetitive structures |
-
2002
- 2002-07-25 US US10/206,491 patent/US7330279B2/en active Active
-
2003
- 2003-07-21 TW TW092119811A patent/TWI238884B/zh not_active IP Right Cessation
- 2003-07-25 CN CNB038177781A patent/CN1310011C/zh not_active Expired - Lifetime
- 2003-07-25 DE DE10392975T patent/DE10392975T5/de not_active Withdrawn
- 2003-07-25 AU AU2003254170A patent/AU2003254170A1/en not_active Abandoned
- 2003-07-25 JP JP2004526155A patent/JP2005534192A/ja not_active Withdrawn
- 2003-07-25 KR KR1020057001156A patent/KR101281212B1/ko active IP Right Grant
- 2003-07-25 WO PCT/US2003/023281 patent/WO2004013723A2/en active Application Filing
-
2008
- 2008-02-12 US US12/030,166 patent/US7505153B2/en not_active Expired - Lifetime
-
2011
- 2011-08-26 JP JP2011184641A patent/JP5307862B2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5805290A (en) * | 1996-05-02 | 1998-09-08 | International Business Machines Corporation | Method of optical metrology of unresolved pattern arrays |
US6130750A (en) * | 1996-05-02 | 2000-10-10 | International Business Machines Corporation | Optical metrology tool and method of using same |
US6317211B1 (en) * | 1996-05-02 | 2001-11-13 | International Business Machines Corporation | Optical metrology tool and method of using same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105571484A (zh) * | 2014-10-14 | 2016-05-11 | 睿励科学仪器(上海)有限公司 | 确定测量模式和光学系统参数容差的方法和装置 |
CN105571484B (zh) * | 2014-10-14 | 2018-07-06 | 睿励科学仪器(上海)有限公司 | 确定测量模式和光学系统参数容差的方法和装置 |
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DE10392975T5 (de) | 2006-01-19 |
KR20050021549A (ko) | 2005-03-07 |
US7505153B2 (en) | 2009-03-17 |
US20080151269A1 (en) | 2008-06-26 |
JP2005534192A (ja) | 2005-11-10 |
AU2003254170A8 (en) | 2004-02-23 |
US7330279B2 (en) | 2008-02-12 |
JP2012027032A (ja) | 2012-02-09 |
US20040017574A1 (en) | 2004-01-29 |
WO2004013723A3 (en) | 2004-04-29 |
JP5307862B2 (ja) | 2013-10-02 |
TWI238884B (en) | 2005-09-01 |
WO2004013723A2 (en) | 2004-02-12 |
KR101281212B1 (ko) | 2013-07-02 |
CN1672012A (zh) | 2005-09-21 |
AU2003254170A1 (en) | 2004-02-23 |
TW200407527A (en) | 2004-05-16 |
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