CN1470897A - Heat-driven micro reflecting-mirror and electronic apparatus - Google Patents

Heat-driven micro reflecting-mirror and electronic apparatus Download PDF

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Publication number
CN1470897A
CN1470897A CNA031480977A CN03148097A CN1470897A CN 1470897 A CN1470897 A CN 1470897A CN A031480977 A CNA031480977 A CN A031480977A CN 03148097 A CN03148097 A CN 03148097A CN 1470897 A CN1470897 A CN 1470897A
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China
Prior art keywords
arm
zone
mirror surface
heating
conductive layer
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Granted
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CNA031480977A
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Chinese (zh)
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CN1310057C (en
Inventor
����һ
石川博一
横沟宽治
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Sony Corp
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Sony Corp
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Priority claimed from JP2002190606A external-priority patent/JP2004037537A/en
Priority claimed from JP2002193314A external-priority patent/JP3969218B2/en
Application filed by Sony Corp filed Critical Sony Corp
Publication of CN1470897A publication Critical patent/CN1470897A/en
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Publication of CN1310057C publication Critical patent/CN1310057C/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Abstract

A thermally actuated micro mirror includes a mirror surface, and a support structure section having a multilayer structure to support the mirror surface. The support structure section generates heat by the application of electricity thereto, and is deflected by a difference in coefficient of thermal expansion in the multilayer structure, thereby tilting the mirror surface at an arbitrary angle. The support structure section is disposed between the mirror surface and an electrode section for applying electricity. A longitudinal axis of the support structure section is perpendicular to the center axis of the mirror surface, and the longitudinal center of the support structure section is substantially placed on the center axis of the mirror surface. Therefore, the turning axis of the mirror surface is not displaced, and the light reflecting position does not move on the mirror surface.

Description

Micro-reflector and electronic installation that heat drives
Technical field
The present invention relates to the micro-reflector that heat drives, supporting member is partly switched on and produce heat, mirror surface is tilted, the invention still further relates to a kind of electronic installation that this heat drives micro-reflector that has.
Background technology
Heat drives in the optical system that micro-reflector is used in for example optical scanner and printing machine.In heat drives micro-reflector, by partly being switched on, supporting member produces heat, and mirror surface is tilted, laser is reflected on target and scan.
Figure 15 A and 15B illustrate known heat and drive micro-reflector.
Drive micro-reflector 1000 in heat shown in Figure 15 A and the 15B and comprise rectangular mirror surface 1001 and fixed part 1003.Electrode 1004 is formed on this fixed part 1003, and mirror surface 1001 supports with so-called cantilevered fashion by the supporting member part 1005 that heat drives with respect to fixed part 1003.
This supporting member part 1005 just deflects as thermometal by electrode 1004 energisings the time, as shown in figure 16, mirror surface 1,001 1006 is rotated around the shaft, thereby tilt arbitrarily angled θ.Turn in mirror surface 1001 under the state of angle θ, this rotation axis 1006 is positioned at the inboard of supporting arm 1005 and the outside of mirror surface 1001.In fact rotation axis 1006 is unfixed, but when the angle θ of mirror surface 1001 increases, moves along supporting arm 1005, because supporting member part 1005 does not bend to desirable circular shape.
Drive in the micro-reflector 1000 in this known heat, the laser L reflex time when being mapped on the mirror surface 1001 will produce following problem shown in Figure 17 A.When the angle θ of mirror surface 1001 changed, not only the incident angle of laser L changed, and the reflection position 1007 of laser L also will move on mirror surface 1001.
In this case, reflection position 1007 displacements of laser L are quite big, like this, just hindering Design for optical system in some cases.Therefore, as mentioned above, reflection position 1007 moves with the variation of mirror surface 1001 angle θ, because the rotation axis 1006 of mirror surface 1001 moves with the variation of angle θ.
Figure 17 B illustrates the situation that the rotation axis 1010 of mirror surface 1012 overlaps with the reflection position 1014 of laser L.In this case, reflection position 1014 can not move on reflecting surface 1012.
Figure 18 illustrates another kind of known heat and drives micro-reflector 1020.The mirror surface 1024 that heat drives micro-reflector 1020 is supported perpendicular to fixed part 1026 by supporting member part 1030 and supporting member part 1040.This supporting part 1030 and supporting part 1040 all can be switched on and be deflected.Supporting member part 1030 can deflection and mirror surface 1024 is rotated around first axial direction, and supporting member part 1040 can deflection and mirror surface 1024 is rotated around second axial direction.Although it is so-called two-dimentional catoptrons that heat drives micro-reflector 1020, the reflection position of laser on mirror surface moves very big, thereby Design for optical system is very difficult, and it is very big that the area of mirror surface 1024 also must be done.
Drive in the micro-reflector 1000 in the known heat shown in Figure 15 A and the 15B, it is very big that the area of this mirror surface 1001 also must be done.This is because when the angle θ of mirror surface 1001 increased, rotation axis 1006 moved, and the reflection position 1007 of laser L is mobile on mirror surface 1001, as mentioned above.Because it is big to be used in the size of the catoptron among the MEMS (microelectromechanical systems) for example, significantly is disadvantageous so increase the size of this mirror surface 1001.
Above-mentioned known heat drives micro-reflector and also has following problem.
Because mirror surface can be tilted by the energising of supporting member part, so when the temperature of supporting member part itself changes with ambient temperature, this supporting member part will deflect thus.
Mobile phone is used under the working environment very inequality sometimes, for example is used in cold district, and outdoor temperature is lower than-10 ℃, and in summer, temperature reaches about 50 ℃ in the automobile.That is, this 60 ℃ temperature difference will make heat driving micro-reflector produce unnecessary inclination as thermometal.So just expression, the initial angle of the mirror surface of micro-reflector depends on for example temperature of environment temperature, and has increased the difficulty of using micro-reflector.
Following catoptron has been proposed up to now.
Japanese unexamined patent bulletin No.2001-249300 discloses a kind of catoptron, and this catoptron can and have the enhancing groove around its rotating shaft rotation.Japan discloses a kind of structure for unexamined patent application bulletin No.2001-274672, and in this structure, catoptron rotates on the beam as turning axle, and the enhancing rib that strengthens this catoptron extends perpendicular to the beam as rotation axis.
The flat 6-180428 of Japanese unexamined patent bulletin No. discloses a kind of twin shaft gimbal catoptron, and this catoptron is driven by electrostatic force, and this catoptron is rotating as on the rotatable beam of center of rotation.Japanese unexamined patent bulletin No.8-262364 discloses a kind of catoptron, and this catoptron is fixed on the front end of the beam made from marmem with cantilevered fashion, and this catoptron is tilted by this beam deflection.Voltage is very high when driving with electrostatic force, and is difficult to the pitch angle that reaches very big in general.For this reason, utilize resonance to carry out frequency drives.
When adopting resonant method, be difficult to the control angle and be not that sine-shaped bias voltage mode tilts with time-phase relation.Because adopt the above-mentioned catoptron of marmem to fix, so central shaft will move with cantilevered fashion.
Summary of the invention
For addressing the above problem the present invention is proposed, first purpose of the present invention provides a kind of heat and drives micro-reflector, in this catoptron, the center of rotation that can prevent mirror surface is moved, make the light reflection position can on mirror surface, not move, so can reduce the size of mirror surface, first purpose of the present invention also provides a kind of electronic installation that heat drives micro-reflector that has.
Another object of the present invention provides a kind of heat and drives micro-reflector, in this catoptron, can make the center of rotation of mirror surface almost be positioned at the center of mirror surface and be not moved, make the light reflection position can on mirror surface, not move, so can reduce the size of mirror surface, and the angle of mirror surface changes with the variation of environment temperature hardly, of the present invention this in addition purpose a kind of electronic installation that heat drives micro-reflector that has also is provided.
In order to achieve the above object, one aspect of the present invention provides a kind of heat to drive micro-reflector, this micro-reflector comprises mirror surface and supporting member part, this member partly has the sandwich construction of supporting mirror surface, deflection by the supporting member part can make mirror surface tilt, this deflection that causes the supporting member part is because produce heat when supporting member is partly switched on, and thermal expansivity has difference in sandwich construction, this supporting member partly is configured in mirror surface and applies between the electrode part branch of electric current, the longitudinal axis of supporting member part is perpendicular to the central shaft of mirror surface, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.
This supporting member partly is configured in mirror surface and applies between this electrode part branch of electric current.The longitudinal axis of this supporting member part is perpendicular to this central shaft of mirror surface.The longitudinal center of this supporting member part is positioned on this central shaft of mirror surface.
Therefore, when supporting member partly is subjected to heat that galvanization produces and when deflecting as thermometal, even the angle of mirror surface changes, the light reflection position can not move on mirror surface, this is because of the central shaft of supporting member longitudinal axis partly perpendicular to mirror surface, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.So just, can reduce the size of mirror surface as far as possible, thereby reduce the size that heat drives micro-reflector.
This supporting member partly preferably includes first supporting arm and second supporting arm, the electrode part branch comprises first electrode and second electrode, first supporting arm is configured between first end and first electrode of mirror surface, second supporting arm be configured in mirror surface second end and second electrode between, this first end and second end are symmetrical for this mirror surface.
First supporting arm of this supporting structure part is configured between this first end and electrode first electrode partly of mirror surface.Equally, second supporting arm of this supporting member part is configured between this second end and electrode second electrode partly of mirror surface.This first and second end is symmetrical for mirror surface.Therefore can support mirror surface with supporting arm in the both sides of reflecting surface.
Best, supporting structure partly has a supporting arm, and electrode partly has an electrode, and supporting arm is configured between the end and electrode of catoptron.
Supporting structure partly has a supporting arm that is configured between mirror surface one end and the electrode.In this case, mirror surface is supported with so-called cantilevered fashion by a supporting arm.
Best, first supporting arm comprises: first zone of heating; Thereby be configured on the first surface of first zone of heating and the second surface and be used for preventing from first zone of heating, to produce the conductive layer of heat by electric current, first zone of heating does not form thereon on the part of first surface of conductive layer and produces heat, makes the supporting arm deflection of winning.Second supporting arm comprises: second zone of heating; Thereby being configured in the 3rd surface of second zone of heating and the 4th surface goes up and is used to conduct electricity the conductive layer that prevents generation heat on second zone of heating, this second zone of heating will not form thereon on the part on the 3rd surface of conductive layer and will produce heat, make second supporting arm deflect, its yawing moment is identical with the yawing moment of first supporting arm.
First supporting arm comprises first zone of heating and conductive layer.Thereby this conductive layer is configured on the first surface of first zone of heating and the second surface and is used for conduction and prevents that electric current from passing through first zone of heating, makes the zone of heating of winning not produce heat.First zone of heating only produces heat on the part of the first surface that does not form conductive layer, thereby causes the first supporting arm deflection.
Equally, second supporting arm comprises second zone of heating and conductive layer.Thereby this conductive layer is configured in the 3rd surface of second heating and the 4th surface and goes up and be used for conduction and prevent that second zone of heating from passing through electric current, makes second zone of heating not produce heat.Because by electric current, so this part produces heat, so the second supporting arm deflection, yawing moment is identical with the yawing moment of first supporting arm on the part on the 3rd surface of second zone of heating that does not form conductive layer.
Supporting arm preferably includes zone of heating and is configured in surface of zone of heating and another surperficial going up so that thereby conduction prevents to produce the conductive layer of heat on zone of heating, zone of heating produces heat this that does not form conductive layer lip-deep part, makes supporting arm deflection.
This supporting arm comprises zone of heating and conductive layer.This conductive layer is configured in a surface and another surface of this zone of heating and goes up so that thereby conduction prevents that zone of heating from passing through electric current, makes zone of heating not produce heat.Do not form that part of of conductive layer because electric current this by zone of heating is lip-deep, so this part produces heat, result, supporting arm deflection.
Supporting member partly preferably includes the first arm part and second arm portion, the former passes through electric current and deflection, the latter is parallel to the first arm part, the not deflection by electric current, but the change of the variation of environment temperature and residualinternal stress can make its deflection, yawing moment is identical with the first arm part, thereby can compensate the deflection that changes the first arm part that causes because of environment temperature and residualinternal stress, the longitudinal axis of the first arm part and the longitudinal axis of second arm portion are perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part longitudinal center and second arm portion is located substantially on the central shaft of mirror surface.
This supporting member partly comprises the first arm part and second arm portion, and the former can pass through electric current and deflection, and then not because of passing through electric current deflection, second arm portion is parallel to the first arm part.The longitudinal axis of this first arm part and the longitudinal axis of second arm portion are perpendicular to the central shaft of mirror surface.The longitudinal center of the first arm part longitudinal center and second arm portion is located substantially on the central shaft of mirror surface.
When supporting member part when passing through electric current as thermometal deflection, even the angle of mirror surface changes, light reflection position on mirror surface does not move, this be because the longitudinal axis of the longitudinal axis of the first arm part and second arm portion perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft of mirror surface.So just, the size of mirror surface can be reduced as far as possible, thereby the size that heat drives micro-reflector can be reduced.
Supporting member partly comprises the first arm part and second arm portion, and the former is because of energising deflection, and the latter is not because of energising deflection.Therefore when environment temperature increased, the first arm part and second arm portion were subjected to same heating, and along equidirectional deflection.Because the first arm part and second arm portion because of variation of ambient temperature to equidirectional deflection, so can compensate the deflection that the first arm partly causes because of variation of ambient temperature.Therefore, can prevent that the mirror surface initial angle from changing because of environment temperature changes.
An end of the first arm part preferably is connected in the electrode part, the other end of the first arm part is connected in an end of second arm portion, the other end of second arm portion is connected in the first end of mirror surface, this end of the first arm part and the other end of second arm portion are positioned on the straight line, and this straight line parallel is in the central shaft of mirror surface.
Because the other end of the end of the first arm part and second arm portion is positioned at a straight line that is parallel to the mirror surface central shaft, so when first and second arm portions because of variation of ambient temperature during to same direction deflection, no matter how environment temperature changes, and all can keep the mirror surface initial angle constant.
That is to say that when even this arm changes deflection because of environment temperature and residualinternal stress, the anchor portion of arm and the relative position that is connected in the arm end of mirror surface do not change yet.
This supporting member part preferably balanced configuration on first end of mirror surface and each end away from mirror surface second end of this first end.
The first arm partly preferably includes first zone of heating, first conductive layer and high temperature expanding layer, this first conductive layer is configured on the first surface of this zone of heating, be used for conduction, on first zone of heating, produce heat so that prevent, this high temperature expanding layer is configured on the second surface of first zone of heating, first zone of heating produces heat on the part of the first surface that does not form first conductive layer, thereby makes the deflection of the first arm part.This second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer, this second conductive layer is configured in the 3rd surperficial the same side of going up and being positioned at first conductive layer of the first arm part of second zone of heating, this high temperature expanding layer is configured on the 4th surface of second zone of heating, second conductive layer is used for conduction, can prevent to produce heat on second zone of heating.
The first arm partly comprises first zone of heating, first conductive layer and high temperature expanding layer.First conductive layer is configured on the first surface of first zone of heating, and this high temperature expanding layer is configured on the second surface.First conductive layer is used for conduction, can prevent the energising of first zone of heating, thereby prevents that first zone of heating from producing heat.First zone of heating produces heat on the part of that first surface that does not form conductive layer, so the first arm part can cooperating and deflection by bimetallic effect and high temperature expanding layer.
Equally, second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer.Even when second arm portion was switched on, electric current also only flow through second conductive layer, and does not flow through second zone of heating, promptly second zone of heating does not produce heat.Therefore second arm portion is not because of passing through electric current deflection.
Heat drives micro-reflector and preferably also comprises at least one pair of first and second arm portion, and this first arm partly is configured on the odd-numbered position of leaving the electrode part, and second arm portion is configured on the even-numbered position of leaving the electrode part.
According to a further aspect, the invention provides a kind of electronic installation, this electronic installation has heat and drives micro-reflector, this micro-reflector comprises mirror surface and supporting member part, this supporting member partly has the sandwich construction of supporting mirror surface, wherein mirror surface tilts by the deflection of supporting member part, this deflection owing to supporting member partly switch on produce heat and in the sandwich construction thermal expansivity difference cause, this supporting member partly is configured in mirror surface and applies between the electrode part branch of electric current, the longitudinal axis of supporting member part is perpendicular to the central shaft of mirror surface, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.
This supporting member partly is configured in catoptron and applies between the electrode part branch of electric current.The longitudinal axis of this supporting member part is perpendicular to the central shaft of mirror surface.The longitudinal center of this supporting member part is located on the central shaft of mirror surface.
Therefore, when the supporting member part produces heat as thermometal deflection because of energising, even when the angle of mirror surface changes, catoptrical position can not moved on mirror surface, this is because of the central shaft of the supporting member longitudinal axis partly perpendicular to mirror surface, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.So just, can reduce the size of mirror surface as far as possible, thereby reduce the size that heat drives micro-reflector.
This supporting member partly preferably includes first supporting arm and second supporting arm, this electrode part branch comprises first electrode and second electrode, first supporting arm is configured between first end and first electrode of mirror surface, and second supporting arm is configured between second end and second electrode of mirror surface, and first end and second end are symmetrical for mirror surface.
First supporting arm of this supporting member part is configured between first end and electrode first electrode partly of mirror surface.Equally, second supporting arm of this supporting member part is configured between second end and electrode second electrode partly of mirror surface.First end and second end are symmetrical for mirror surface.Therefore, supporting arm will be in its two-side supporting mirror surface.
Best, this supporting member partly has a supporting arm, and electrode partly has an electrode, and this supporting arm is configured between the end and electrode of mirror surface.
This supporting member partly has a supporting arm that is configured between mirror surface end and the electrode.In this case, mirror surface is supported by a supporting arm with so-called cantilevered fashion.
Best, first supporting arm comprises first zone of heating and conductive layer, this conductive layer is configured on the first surface of first zone of heating and the second surface and is used for conduction, produce heat so that prevent first zone of heating, and first zone of heating produces heat on the part of the first surface that does not form conductive layer, makes the supporting arm deflection of winning.Second supporting arm comprises second zone of heating and conductive layer, this conductive layer is configured on the 3rd surface and the 4th surface of second zone of heating, be used for conduction, thereby can prevent from second zone of heating, to produce heat, and second zone of heating produces heat on the part on the 3rd surface that does not form conductive layer, make the second supporting arm deflection, its yawing moment is identical with the yawing moment of first supporting.
First supporting arm comprises first zone of heating and conductive layer, and this conductive layer is positioned on the first surface and second surface of first zone of heating, is used for conduction, thereby prevents that first zone of heating from by electric current, making the zone of heating of winning not produce heat.First zone of heating produces heat on the part of the first surface that does not form conductive layer, the result, and first supporting arm deflects.
Equally, second supporting arm comprises second zone of heating and conductive layer.This conductive layer is positioned on the 3rd surface and the 4th surface of second zone of heating, is used for conduction, prevents that electric current from flowing through second zone of heating, makes second zone of heating not produce heat.Because the part on the 3rd surface of second zone of heating that does not form conductive layer flows through electric current, so this part produces heat, the result, the second supporting arm deflection, its yawing moment is identical with the yawing moment of first supporting arm.
Best, this supporting arm comprises zone of heating and conductive layer, and this conductive layer is configured on the surface and another surface of zone of heating, be used for conduction, preventing that zone of heating from producing heat, and zone of heating produces heat on the part that does not form conductive layer on this surface, so supporting arm deflection.
This supporting arm comprises zone of heating and conductive layer.This conductive layer is configured on the surface and another surface of zone of heating, is used for conduction, to prevent the zone of heating energising, makes zone of heating not produce heat.Because on the part on this surface of the zone of heating that does not form conductive layer, switch on, so this part produces heat, result, supporting arm deflection.
Best, this supporting member part the first arm part and second arm portion, the former is because of energising deflection, and the latter is parallel to the first arm part, not because of energising deflection, but, the variation of environment temperature and residualinternal stress can make its deflection, yawing moment is identical with the yawing moment of the first arm part, thereby can compensate the deflection of the first arm part that causes because of variation of ambient temperature and remaining internal stress, the longitudinal axis of the first arm part and the longitudinal axis of second arm portion are perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft of mirror surface.
This supporting member partly comprises the first arm part and second arm portion, and the former is because of energising deflection, and the latter switches on and not deflection.Second arm portion is parallel to the first arm part.The longitudinal axis of the first arm part and the longitudinal axis of second arm portion are perpendicular to the central shaft of mirror surface.The longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft on the mirror surface.
Therefore when the supporting member part deflects as thermometal because of energising produces heat, even when the angle of mirror surface changes, light reflection position on mirror surface can not move, this be because the longitudinal axis of the longitudinal axis of the first arm part and second arm portion perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft of mirror surface.So just, the size of mirror surface can be reduced as far as possible, thereby the size that heat drives micro-reflector can be reduced.
This supporting member partly comprises the first arm part and second arm portion, and the former switches on and deflection, and the latter can be because of energising deflection.Therefore, when environment temperature increases, the first arm part and second arm portion are subjected to same heating, and to equidirectional deflection, because the first arm part and second arm portion when variation of ambient temperature to equidirectional deflection, so can compensate the first arm deflection partly that causes by variation of ambient temperature.Therefore, can prevent the variation of the mirror surface initial angle that causes because of variation of ambient temperature.
Best, one end of the first arm part is connected in electrode, the other end of the first arm part is connected in an end of second arm portion, the other end of second arm portion is connected in first end of mirror surface, and the other end of this end of the first arm part and second arm portion is positioned on the straight line that is parallel to the mirror surface central shaft.
Because the other end of this end of the first arm part and second arm portion is positioned on the straight line that is parallel to the mirror surface central shaft, so when first and second arm portions during in variation of ambient temperature during to equidirectional deflection, no matter variation of ambient temperature how, the initial angle of this mirror surface will remain unchanged.
Best, this supporting member part balanced configuration is on this mirror surface first end and each end away from mirror surface second end of this first end.
Best, the first arm partly comprises first zone of heating, first conductive layer and high temperature expanding layer, this first conductive layer is configured on the first surface of zone of heating, be used for conduction, to prevent that first zone of heating from producing heat, this high temperature expanding layer is configured on the second surface of first zone of heating, and first zone of heating produces heat on the part of the first surface that does not form first conductive layer, feasible the first arm part deflection.Second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer, the 3rd surface that this second conductive layer is configured in second zone of heating is gone up and is positioned on the same side of first conductive layer of the first arm part, this high temperature expanding layer is configured on the 4th surface of second zone of heating, this second conductive layer is used for conduction, to prevent producing heat at second zone of heating.
This first arm partly comprises first zone of heating, first conductive layer and high temperature expanding layer.This first conductive layer is configured on the first surface of first zone of heating, and this high temperature expands and is configured on the second surface.First conductive layer conduction, thus can prevent that first zone of heating from flowing through electric current, therefore, can prevent that first zone of heating from producing heat.And first zone of heating will produce heat on the part of the first surface that does not form conductive layer, make the first arm part to deflect by bimetallic effect and cooperating of high temperature expanding layer.
Equally, this second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer.Even when second supporting arm was switched on, electric current also only flow through second conductive layer and do not flow through second zone of heating, promptly second zone of heating does not produce heat.Therefore, second arm portion can be because of not deflecting by electric current.
Best, this electronic installation also comprises at least one pair of first and second arm portion, and this first arm partly is configured on the odd-numbered position of leaving the electrode part, and second arm portion is configured on the even-numbered position of leaving the electrode part.
Below with reference to the description of drawings preferred embodiment, from these embodiment, can obviously find out other purpose of the present invention, feature and advantage.
Description of drawings
Fig. 1 is a planimetric map, and the heat that first embodiment of the invention is shown drives micro-reflector;
Fig. 2 is a key diagram, heat shown in Figure 1 is shown drives the state that mirror surface tilts in the micro-reflector;
Fig. 3 A and 3B are the explanation views, and the state of first supporting arm and the cold state of second supporting arm and their energisings is shown respectively;
Fig. 4 is a skeleton view, illustrates heat shown in Figure 1 is driven micro-reflector to be contained in state in the electronic installation;
Fig. 5 is a planimetric map, and the heat that second embodiment of the invention is shown drives micro-reflector;
Fig. 6 is a planimetric map, and the heat that third embodiment of the invention is shown drives micro-reflector;
Fig. 7 is a key diagram, and the tilt state of arbitrarily angled θ of mirror surface that this heat drives micro-reflector is shown;
Fig. 8 is a key diagram, and the state that the initial angle of mirror surface is not influenced by temperature variation etc. is shown;
Fig. 9 A and 9B are the cross-sectional views along the IX-IX line intercepting of Fig. 6, and the sandwich construction of the first arm part is shown;
Figure 10 is the cross-sectional view along the X-X line intercepting of Fig. 6, and the sandwich construction of second arm portion is shown;
Figure 11 is a skeleton view, illustrates the present invention heat is driven micro-reflector to be contained in a example on the electronic installation;
Figure 12 A and 12B are key diagrams, illustrate that the first arm near fixed part is partly switched on and the displacement of mirror surface during deflection;
Figure 13 A and 13B are key diagrams, and the displacement of mirror surface when expanding near the energising of second arm portion of mirror surface is shown;
Figure 14 is a planimetric map, and the heat that fourth embodiment of the invention is shown drives micro-reflector;
Figure 15 A and 15B are respectively planimetric map and the side views that known heat drives micro-reflector;
Figure 16 is a key diagram, and the state that heat shown in Figure 15 B drives the mirror surface inclination of micro-reflector is shown;
Figure 17 A and 17B are key diagrams, and the situation that situation that the rotating shaft of mirror surface is moved and this rotating shaft are not moved is shown respectively; And
Figure 18 is the planimetric map that another known heat drives micro-reflector.
Embodiment
Describe the preferred embodiments of the present invention with reference to the accompanying drawings in detail.
Because the following examples only are the preferred embodiments of the present invention, so they comprise various preferred aspects technically.Yet scope of the present invention is not limited to these embodiment, unless explanation is arranged in the following description in addition.
The heat that Fig. 1 illustrates first embodiment of the invention drives micro-reflector.With reference to figure 1, heat drives micro-reflector 10 and comprises supporting member part 14, mirror surface 20, electrode part 30 and fixed part 40.
Fixed part 40 for example is a plate-shaped member, is made of the semiconductor end liner of for example silicon liner.
This mirror surface 20 and supporting member part 14 are by for example carrying out the method formation of punching processing to fixed part 40.Perforate 43 and 44 is formed between mirror surface 20 and the supporting member part 14.
Drive in the micro-reflector 10 in heat, this mirror surface 20 is supported in so-called Straddle mount mode by supporting member part 14, makes that this supporting part is symmetrical with respect to the vertical central axis LL of fixed part 40.
Mirror surface 20 at first is described below.
Mirror surface 20 shown in Figure 1 is a rectangle for example, is formed on the bottom parts 21.The catoptrical metal of this mirror surface 20 usefulness conduction for example aluminium or gold is made.The shape of this bottom parts 21 also is a rectangle, is a bit larger tham the rectangle of mirror surface 20.This bottom parts 21 forms one with fixed part 40.This bottom parts 21 and mirror surface 20 are placed between perforate 43 and 44.
The following describes electrode part 30.
This electrode part 30 comprises first electrode 31 and second electrode 32, and this first electrode and second electrode 31 and 32 for example are rectangle.This first electrode 31 is configured on the first area 41 of fixed part 40, and second electrode 32 is configured on the second area 42 away from first area 41 of fixed part 40.
The metal of first and second electrodes 31 and 32 usefulness conduction for example aluminium or gold is made, and with respect to the vertical central axis LL balanced configuration of mirror surface 20.Hot drive current is added on first and second electrodes 31 and 32 from the power supply (not shown).
The following describes supporting member part 14.
Supporting member part 14 shown in Figure 1 comprises first supporting arm 51 and second supporting arm 52, is formed between mirror surface 20 and the electrode part 30.Specifically be, first supporting arm 51 is formed between first end 61 and first electrode 31 of mirror surface 20 bottom parts 21, and second supporting 52 is formed between second end 62 and second electrode 32 of bottom parts 21.First electrode 31 and second electrode 32 are also referred to as " electronic pads ".
First supporting arm 51 and second supporting arm 52 are with respect to the vertical central axis LL balanced configuration of mirror surface 20.
Adopt following distinctive feature, make the center of rotation of mirror surface 20 overlap with the center of first supporting arm 51 and second supporting arm 52 basically or fully.
The vertical central axis L2 of the longitudinal axis L1 of first supporting arm 51 second supporting arm 52 perpendicular to the central shaft CL (being also referred to as rotary middle spindle) of mirror surface 20 is also perpendicular to central shaft CL.Therefore, the longitudinal axis L2 of the longitudinal axis L1 of first supporting arm 51 and second supporting arm 52 is parallel to the vertical central axis LL of mirror surface 20.
In addition, longitudinal center's point 82 of the longitudinal center's point 81 of first supporting arm 51 and second supporting arm 52 is positioned on the central shaft CL of mirror surface 20 basically or fully.
Has metal film on diagonal line hatches part, first and second supporting arms 51 and 52 and first and second electrodes 31 and 32 of mirror surface 20.This metal film is that conducting film for example is aluminium film or golden film as mentioned above.
Therefore when electric current is added on first electrode 31 and second electrode 32 from unshowned power supply, on this power flows first supporting arm 51, mirror surface 20 and second supporting arm 52.
Fig. 2 illustrates, when first electrode 31 when electric current is added to heat driving micro-reflector 10 shown in Figure 1 from power supply on and second electrode 32, and the state of the arbitrarily angled θ of mirror surface 20 inclinations.
In this case, first supporting arm 51 and second supporting arm 52 be simultaneously to equidirectional deflection, promptly because energising and to the direction R of Fig. 2 deflection.The central point 81 of first supporting arm 51 and the central point 82 of second supporting arm 52 are positioned on the central shaft CL of mirror surface 20 basically or accurately.
This central shaft CL is also referred to as " rotary middle spindle " or " rotation axis ".
Fig. 2 illustrates, even the central shaft CL (rotation axis) of this mirror surface 20 moves hardly when the angle θ of mirror surface 20 changes.When first supporting arm 51 and second supporting arm 52 when same direction R is deflected into basically desirable circular arc, the rotating shaft of this mirror surface 20 overlaps with central shaft CL.
Because the variation of the distribution of heat and material therefor characteristic, although in fact first supporting arm 51 and second supporting arm 52 are not deflected into desirable circular shape, they seem to be deformed into desirable basically as shown in Figure 2 circular shape.Therefore when the mirror surface actual rotation, the rotation axis of mirror surface 20 will overlap with the geometrical central axis CL of mirror surface 20 basically or fully, and very big departing from can not take place.Therefore, for example when the laser L as a kind of light was mapped to central shaft CL, the reflection position 100 of this laser L can not move on mirror surface 20 basically.
On the contrary, because the reflection position 100 of laser L does not move, so the plane of reflection of mirror surface 20 does not need to do greatlyyer when the hypothesis reflection position can be moved.So just, can reduce the area of mirror surface 20 as far as possible, thereby reduce the size of hot driving micro-reflector 10.
Fig. 3 A and 3B illustrate the example of the sandwich construction of first supporting arm 51 illustrated in figures 1 and 2 and second supporting arm 52, Fig. 3 A illustrates the state of first supporting arm 51 and second supporting arm, 52 obstructed electric currents, and Fig. 3 B illustrates, and first supporting arm 51 and second supporting arm 52 are to the state of equidirectional R deflection during galvanization.
The xsect of first supporting arm 51 shown in Fig. 3 A and second supporting arm 52 is the sectional views along the III-III line intercepting of Fig. 1.
First supporting arm 51 and second supporting arm 52 have similar sandwich construction, and comprise zone of heating 110, conductive layer 111 and high temperature expanding layer 112 (being mainly metal film).
Zone of heating 110 is the resistance of for example making with doping ρ-Si.This conductive layer 111 is formed on the surface 121 of zone of heating 110.This high temperature expanding layer 112 is formed on another surface 122 of zone of heating 110, is insulation course 124 therebetween.
The metal of conductive layer 111 and high temperature expanding layer 112 usefulness conduction for example aluminium or gold is made.This conductive layer 111 is thinner than high temperature expanding layer 112.Conductive layer 111 is not formed on the zone 131 corresponding to a surface 121 of the zone of heating 110 that produces deflection area 130, and therefore this surface 121 is exposed at the outside.In Fig. 1, this zone 131 is along longitudinal axis L1 and the longitudinal axis L2 zone of hatching not.
Form the sandwich construction of first supporting arm 51 and second supporting arm 52, form deflection area 130 thus.
Insulation course 124 adopts for example Si 3N 4Make, be used to make zone of heating 110 and high temperature expanding layer 112 electrical isolations.
When zone of heating 110 energisings, because there is difference in the thermal expansivity between the high temperature expanding layer 112 of aluminum and the zone of heating 110, just deflection area 130 is to direction R deflection, shown in Fig. 3 B.The aluminothermy expansion coefficient of high temperature expanding layer 112 is 2.3 * 10 -6/ k, and the thermal expansivity of the ρ-Si that mixes is 2.3 * 10 -5/ k.These two kinds of material coefficient of thermal expansion coefficient difference one digit numbers.First supporting arm 51 and second supporting arm 52 are owing to the energising of the zone of heating 110 of the ρ-Si that mixes is heated.
The thickness of insulation course 124 is significantly less than the thickness of zone of heating 110 and high temperature expanding layer 112.The reasons are as follows.Because insulation course 124 is similar with the thermal expansivity of zone of heating 110, and when equaling the thickness of high temperature expanding layer 112, the gross thickness of insulation course 124 and zone of heating 110 reaches maximum deflection.In order to reduce the driving voltage of zone of heating 110, the resistance of zone of heating 110 is preferably less, and the thickness of zone of heating 110 is preferably big as far as possible.When zone of heating 110 was thicker, this insulation course 124 must be very thin.Heat can be transferred to high temperature expanding layer 112 very soon when the thickness of insulation course 124 reduces.Yet this condition changes with material.
Shown in Fig. 3 B, electric current I 1 and electric current I 2 flow through conductive layer 111 and high temperature expanding layer 112 respectively, because electric current does not flow through zone of heating 110, so this layer is not heated.
Yet, because electric current 11 flows through the zone that does not cover conductive layer 111 131 of zone of heating 110 in the deflection area 130 that can deflect when energising, thus should be heated in zone 131, to direction R deflection.
Central point 81 and 82 on the longitudinal direction X in zone shown in Fig. 3 A is positioned on the central shaft CL of mirror surface 20, as shown in Figure 1.
Fig. 4 illustrates and heat shown in Figure 1 is driven micro-reflector 10 is contained in example on a kind of electronic installation 200.
This electronic installation 200 for example is a laser printer.LASER Light Source 201 emitted laser L are reflected at the reflection position 100 that heat drives micro-reflector 10 mirror surface 20, and in the photoconductive components 204 enterprising line scannings of barrel tumbler 203.In this case, mirror surface 20 will be with respect to central shaft CL any angle θ that tilts.
The heat that Fig. 5 illustrates second embodiment of the invention drives micro-reflector.Heat shown in Figure 5 drives micro-reflector 310 and is supported with so-called cantilevered fashion, comprises supporting member part 314, mirror surface 420, electrode part 430 and fixed part 440.
Mirror surface 420 is positioned at the perforate 443 that is formed on the fixed part 440.This mirror surface 420 is a rectangle for example, is formed on the bottom parts 421.
Supporting member part 314 is formed between two electrodes 431 and 432 of end 420A of mirror surface 420 and electrode part 430.The supporting arm 315 of supporting member part 314 has sandwich construction, and this structure is identical with the structure of first supporting arm 51 and second supporting arm 52 shown in Fig. 3 A and the 3B.
Two-way conductive layer 111 is formed on the supporting arm 315, and the deflection area 130 that produces deflection is formed on the supporting arm 315.Deflection area 130 is parallel to the vertical central axis LL of mirror surface 420.The central shaft CL of mirror surface 420 is perpendicular to the longitudinal axis L1 of supporting arm 315.In addition, the central point 381 of supporting arm 315 longitudinal axis L 1 is positioned on the central shaft CL of mirror surface 420.
In this structure, supporting arm 314 can be by being added in external power source on electrode 431 and 432, to be similar to mode shown in Fig. 3 A and Fig. 3 B, in deflection area 130 enterprising horizontal deflection.Therefore the actual rotating shaft of mirror surface 420 overlaps with the central shaft CL of mirror surface 420 basically or exactly, as shown in Figure 2.Thereby the reflection position 100 of laser L will can not move because of the variation of mirror surface 20 angle θ.
In this case, the area of mirror surface 420 can be reduced, thereby the size that heat drives micro-reflector 310 can be reduced.
The invention is not restricted to the foregoing description.
The mirror surface 20 and first and second electrodes 31 and 32 that are shown in Fig. 1 not only can be formed from aluminium with the conductive layer 111 and the high temperature expanding layer 112 that are shown in Fig. 3 A and 3B, but also can make with thermal expansivity height, conductive material that reflectivity is high, for example make with gold, silver, magnesium, copper, brass or duralumin.
As shown in Figure 5, this conductive layer 111 is formed on the supporting arm 315 of supporting member part 314, and generation type is identical with the mode of Fig. 3 A and 3B, and comprises that electric current flows to two paths of electrode 431 and 432.In second embodiment shown in Figure 5, the conductive layer 111 and the electrode 431 and 432 of mirror surface 420, supporting arm 315 not only can be formed from aluminium, and can make with metals such as gold.
In first embodiment shown in Figure 1, mirror surface 20 is by first supporting arm 51 that is positioned at its both sides and second supporting arm, 52 symmetries and rotatably support.This structure makes mirror surface 20 stably to rotate.
Even be bearing in cantilevered fashion on the fixed part 440 by supporting member part 314 in mirror surface 420, as shown in Figure 5, it also can promptly almost rotate around it axle and rotate fully around its geometrical central axis CL.
In the above-described embodiments, this conductive layer 111 not forms on the deflection area 130 of supporting arm, thereby can only heat and deflection on deflection area 130.This conductive layer 111 is formed on the zone that does not produce deflection.
First supporting arm 51 shown in Figure 1 and second supporting arm 52 and first supporting arm 315 shown in Figure 5 certainly have two-layer member, the conductive layer that this member is made by aluminium or analog and constitute with the zone of heating that insulating material is made, thus whole zone of heating produces heat when electric current flows through conductive layer.
Fig. 1 and first supporting arm 51, second supporting arm 52 and supporting arm 315 shown in Figure 5 have Mnltilayered structures, and this member is made of marmem, chromium etc., make these arms to deflect when galvanization and become straight.For example, supporting arm can have the sandwich construction by chromium and NiTi alloy composition, make these structures under straight state, to keep shape, and make these arms under normal temperature, carry out deflection, and the heat that energising produces makes it become straight by the difference of utilizing thermal expansivity.
The heat that Fig. 6 illustrates third embodiment of the invention drives micro-reflector.Except first supporting arm 51 and second supporting arm 52, the heat of the 3rd embodiment drives the heat driving micro-reflector 10 that micro-reflector 10 is similar to above-mentioned first embodiment.Represent to be same as the parts of the first embodiment parts below with identical numbering, save its detailed description below.
Describe first supporting arm 51 and second supporting arm 52 of supporting member part 14 shown in Fig. 6 below in detail.
First supporting arm 51 has the first arm part 401 and second arm portion 402.Equally, second supporting arm 52 has the first arm part 501 and second arm portion 502.
The first arm part 401 of first supporting arm 51 is parallel to second arm portion 402, and the first arm part 501 of second arm 51 is parallel to second arm portion 502.The first arm part 401 and 501 and second arm portion 502 are parallel to the vertical central axis LL of mirror surface 20.
Electric current is added on first electrode 31 and second electrode 32 of electrode part 30 from the power supply (not shown), can makes the first arm part 401 and 501 deflections thus.On the contrary, second arm portion 402 and 502 can the deflection because of energising.The longitudinal axis L2 of the first arm part 401 and 501 longitudinal axis L1 and second arm portion 402 and 502 is parallel to the vertical central axis LL of mirror surface 20.
Adopt following characteristic feature, make the center of rotation of mirror surface 20 overlap with the center of first supporting arm 51 and second supporting arm 52 basically or fully.
The longitudinal axis L2 of above-mentioned the first arm part 401 and 501 longitudinal axis L1 and second arm portion 402 and 502 is perpendicular to the central shaft CL (being also referred to as rotary middle spindle) of mirror surface 20.In addition, the center point P 1 of the first arm part 401 and 501 longitudinal axis L1 and the center point P 2 of second arm portion 402 and 502 longitudinal axis L2 are positioned on the central shaft CL of mirror surface 20 basically or fully.
This structure can prevent from also to move as the rotation axis of the mirror surface 20 of central shaft CL, and no matter the angle θ size of mirror surface 20 how.Therefore, when the laser L as a kind of light example is reflected at the reflection position 100 of mirror surface 20, in the time of as shown in Figure 7, how this reflection position 100 not tube angulation θ is not subjected to displacement basically or fully moves.
Though up to now, when moving, the supposition reflection position need make mirror surface do very greatly, but drive in the micro-reflector 10 in present embodiment heat, the size of this mirror surface does not need to do very greatly, therefore can reduce the size that heat drives micro-reflector 10.
In Fig. 6, the diagonal line hatches of mirror surface 20 part, the first arm part 401 and 501, second arm portion 402 and 502 and first and second electrodes 31 and 32 have by conducting metal for example aluminium or the metal film that constitutes of gold.
Therefore, when the electric current that will be used for the heat driving was added on first and second electrodes 31 and 32 from unshowned power supply, this electric current just flow through the first arm part 401, second arm portion 402, mirror surface 20, the first arm part 501 and second arm portion 502 therebetween.
Fig. 7 illustrates, and electric current is added to heat shown in Figure 6 when driving on first electrode 31 on the micro-reflector 10 and second electrode 32 from power supply, the tilt state of arbitrarily angled θ of mirror surface 20.
In this case, the first arm part 501 of the first arm part 401 of first supporting arm 51 and second supporting arm 52 when energising just simultaneously to equidirectional deflection, i.e. direction R deflection in Fig. 9 B.The center point P 1 of the first arm part 401 shown in Figure 6 and the center point P 1 of the first arm part 501 are positioned on the central shaft CL of mirror surface 20 basically or accurately.
This central shaft CL is also referred to as " rotary middle spindle " or " rotation axis ".
Fig. 7 illustrates, and the central shaft CL (rotation axis) of mirror surface 20 is even also move hardly when the angle θ of mirror surface 20 changes.When first supporting arm 51 shown in Figure 6 and second supporting arm 52 during in energising when same direction R is deflected into substantially desirable circular shape, the rotation axis of this mirror surface 20 will overlap with central shaft CL.
As if although in fact in fact the first arm part 501 of the first arm part 401 of first supporting arm 51 and second arm portion 402 and second supporting arm 52 and second arm portion 502 can not be deflected into the shape of desirable circular arc because of the variation of the heat distribution of sandwich construction and material therefor characteristic, first supporting arm 51 can deformation become the shape of desirable circular arc substantially with second supporting arm 52.Therefore when mirror surface 20 actual rotation, the rotation axis of this mirror surface 20 will overlap with geometrical central axis CL basically or fully, can not produce very big departing from.
For example, when the laser L as a kind of example of light is mapped to central shaft CL when going up, the reflection position 100 of laser L is almost unshift on mirror surface 20.
On the contrary, because the reflection position of laser L does not move, so the reflecting surface of mirror surface 20 does not need very big when supposition reflection position 100 is moved.So just, can reduce the area of mirror surface 20 as far as possible, thereby reduce the size of hot driving micro-reflector 10.
The heat of the 3rd embodiment drives micro-reflector 10 and adopts following feature to prevent that the initial position of mirror surface 20 is subjected to the influence of variation of ambient temperature.
The initial position of mirror surface 20 represents that mirror surface 20 is positioned at the position on fixed part 40 planes, as shown in Figure 6.
In heat drives micro-reflector 10, when energising, heated and required the first arm part 401 and 501 and not need second arm portion 402 and 502 of deformation be configured in parallel of deformation, and interconnected in their end.The arm portion that these heat drive is when heating temperature increases, because there is difference in thermal expansivity, thereby as thermometal deformation takes place.For this reason, the effect of the heat that these arm portions not only are subjected to requiring the heat that produces for example to switch on producing, but also be subjected to the effect of variation of ambient temperature.The environment temperature of mobile device from be lower than-10 ℃ change to be higher than+50 ℃.This angle that adds the thermal deformation arm portion that changed with being changed significantly.This means that the variation with environment temperature when no power of the initial angle of catoptron changes, this mirror angle can not remain unchanged exactly.
A measure that overcomes the problems referred to above is by Dc bias being added on the arm portion, setting the initial angle of mirror surface arbitrarily.Though utilize this method as if can overcome the problems referred to above, keep the constant bias current of initial position significantly to increase power consumption, also need the detecting device of detection of reflected mirror surface initial position simultaneously.
Therefore adopt the 3rd embodiment to replace said method, the 3rd embodiment adopts following structure to prevent that the initial position of mirror surface 20 is subjected to the influence of variation of ambient temperature.
Drive in the micro-reflector 10 in heat shown in Figure 6, first supporting arm 51 comprises the first arm part 401 parallel to each other and second arm portion 402, and second supporting arm 52 comprises the first arm part 501 parallel to each other and second arm portion 502.
Because when variation of ambient temperature and deflection, second arm portion 402 will be to same direction deflection, thereby can carry out required compensation to the deflection of the first arm part 401 when the first arm part 401.
Equally, because when variation of ambient temperature and deflection, second arm portion 502 will be to same direction deflection, thereby can carry out required compensation to the deflection of the first arm part 501 when the first arm part 501.
Fig. 8 illustrates the first arm part 401 and 501 and second arm portion 402 and 502 because the variation of the variation of internal stress or environment temperature and to the state of direction T deflection.
The first arm part 401 and 501 and second arm portion 402 and 502 that are shown in Fig. 6 and 8 have sandwich construction.
Fig. 9 A and 9B illustrate the example of the first arm part 401 and 501 sandwich constructions, and Figure 10 illustrates the example of second arm portion 402 and 502 sandwich constructions.
Be connected in electrode 31 on the fixed part 40 with reference to an end 401A of Fig. 8 the first arm part 401.The other end 401B of the first arm part 401 is connected in an end 402A of second arm portion 402, and the other end 402B of second arm portion 402 is connected in the end 61 of mirror surface 20.
Equally, the first arm part 501 end 501A is connected in the electrode 32 on the fixed part 40.The other end 501B of the first arm part 501 is connected in an end 502A of second arm portion 502, and the other end 502B of second arm portion 502 is connected in the end 62 of mirror surface 20.
End 501A of an end 401A of the first arm part 401, the other end 402B of second arm portion 402, the first arm part 501 and the other end 502B of second arm portion 502 are positioned on the straight line 63 that is parallel to mirror surface 20 central shaft CL.
With the example of face with reference to figure 9A and 9B explanation the first arm part 401 and 501 sandwich constructions.
Fig. 9 A and 9B are the cross-sectional structure figure along the first arm part 401 (501) of the IX-IX line intercepting of Fig. 6.Figure 10 is the cross-sectional structure figure along second arm portion 402 (502) of the X-X line intercepting of Fig. 6.
When the first arm part 401 (501) was switched at the state shown in Fig. 9 A, this first arm part 401 (501) will be to the direction R deflection shown in Fig. 9 B.Because the first arm part 401 (501) is to direction R deflection, the arbitrarily angled θ so mirror surface 20 will tilt, as shown in Figure 7.
The first arm part 401 and the first arm part 501 are near the electrode on the fixed part 40, and separate with mirror surface 20, as shown in Figure 6, this first arm part 401 has identical sandwich construction with the first arm part 501, comprises zone of heating 110, conductive layer 111 and high temperature expanding layer 112 respectively.
This zone of heating 110 is the resistance that is formed by the ρ-Si that for example mixes.Quite Bao conductive layer 111 is formed on the surface 121 of zone of heating 110.Quite thick high temperature expanding layer 112 is formed on another surface 122 of zone of heating 110, and insulation course 124 is arranged therebetween.
The metal of conductive layer 111 and high temperature expanding layer 112 usefulness conduction is aluminium or gold formation for example.This conductive layer 111 is thinner than high temperature expanding layer 112.Do not form conductive layer 111 on the zone 131 on a surface 121 of zone of heating 110, this zone 131 is corresponding to the deflection area 130 that produces deflection, and this surface 121 is exposed.This zone 131 does not have hatching along longitudinal axis L1 shown in Figure 6, and is positioned between two parties on the center point P 1.
Form this sandwich construction of first supporting arm 51 and second supporting arm 52, thereby form deflection area 130 corresponding to zone 131.
This insulation course 124 can utilize Si 3N 4Form, and be used to make zone of heating 110 and high temperature expanding layer 112 electrical isolations.
When making conductive layer 111, high temperature expanding layer 112 and zone of heating 110 energisings, this deflection area 130 will be to direction R deflection, because there is the difference of thermal expansivity between conductive layer 111 that aluminium is made and high temperature expanding layer 112 and the zone of heating 110, shown in Fig. 9 B.The thermal expansivity of the aluminium of this conductive layer 111 and high temperature expanding layer 112 is 2.3 * 10 -6/ K, and the thermal expansivity of the ρ-Si that mixes is 2.3 * 10 -5/ K.These two kinds of material coefficient of thermal expansion coefficients differ an order of magnitude.The ρ that mixes-Si zone of heating 110 will heat the first arm part 401 and 501 when switching on.
The thickness of insulation course 124 is significantly less than the thickness of zone of heating 110 and high temperature expanding layer 112.It is the reasons are as follows.Because the thermal expansivity of insulation course 124 and zone of heating 110 is suitable, and when equaling the thickness of high temperature expanding layer 112, the gross thickness of insulation course 124 and zone of heating 110 will reach maximum deflection.In order to reduce the driving voltage of zone of heating 110, the resistance of this zone of heating 110 is preferably lower, and preferably strengthens the thickness of zone of heating 110 as far as possible.When zone of heating 110 thickenings, must reduce the thickness of insulation course 124.When the thickness of insulation course 124 reduced, heat can be sent to high temperature expanding layer 112 very soon.Yet this condition is with changes in material.
Shown in Fig. 9 B, when adding voltage, electric current I 1 flows through conductive layer 111, but does not flow through the zone of heating 110 that forms conductive layer 111 on it.Therefore zone of heating 110 is not heated.
Yet,,, therefore heat this zone 131, so deflection area 130 is to direction R deflection so electric current I 1 will flow through the zone 131 on the deflection area 130 because conductive layer 111 is not formed on the zone 131 of zone of heating 110.
The center point P 1 of the longitudinal direction X in the zone 131 shown in Fig. 9 B is positioned on the central shaft CL of mirror surface 20, as shown in Figure 6.
In contrast, do not form the zone 131 of conductive layer 111 above second arm portion 402 shown in Figure 10 and 502 sandwich construction are not included in, this zone is corresponding to the deflection area 130 shown in Fig. 9 A and the 9B.That is, conduction conducting shell 111 is formed on the whole surface on a surface 121 of zone of heating 110, and high temperature expanding layer 112 is formed on the whole surface on another surface 122 of zone of heating 110, forms insulation course 124 therebetween.
In second arm portion 402 and 502, this high temperature expanding layer 112 is thicker than conductive layer 111.Its reason is as follows.This high temperature expanding layer 112 forms bimetallic effect, and its thickness preferably equals the gross thickness of insulation course 124 and zone of heating 110, promptly is about one micron.In contrast, this conductive layer 111 is used for conduction, and as long as form and have the thickness of about 100 nanometers can be satisfactory for conductive layer 111 usefulness metals.
Figure 11 illustrates, and heat driving micro-reflector 10 shown in Figure 6 is contained in the example on the electronic installation 200.
This electronic installation 200 for example can be laser printer.Be reflected at the reflection position 100 that heat drives the mirror surface 20 of micro-reflector 10 from LASER Light Source 201 emitted laser, and in the photoconductive components 204 enterprising line scannings of barrel tumbler 203.In this case, mirror surface 20 is with respect to the central shaft CL arbitrarily angled θ that tilts.
The following describes initial angle that heat drives the mirror surface 20 of micro-reflector 10 not influenced by variation of ambient temperature and the reason that remains unchanged.
Second arm portion 402 and 502 will produce on the first arm part 401 and 501 of deflection when specially being added on energising. Second arm portion 402 and 502 can prevent that the first arm part 401 and 501 is subjected to the deflection that causes because of variation of ambient temperature, and the result can make mirror surface 20 remain on initial position (initial angle).
The first arm part 401 and 501 has identical sandwich construction, and second arm portion 402 and 502 has another kind of identical sandwich construction, adopt this mode to form second arm portion 402, make it can compensate the first arm part 401 and change the deflection that causes because of environment temperature or residualinternal stress, and form second arm portion 502 like this, make it can compensate the first arm part 501 and change the deflection that causes because of environment temperature or residualinternal stress.
When micro-reflector 10 was heated owing to for example environment temperature increases, a pair of the first arm part 401 and second arm portion 402 and a pair of the first arm part 501 and second arm portion 502 will be to equidirectional T deflections, as shown in Figure 8.Specifically be, because the thermal expansivity of high temperature expanding layer 112 is higher than the thermal expansivity of zone of heating 110, so as shown in Figures 9 and 10, this will be to direction T deflection, as shown in Figure 8 to the first arm part 501 and second arm portion 502 to the first arm part 401 and second arm portion 402 and this.
In this case, the end 501A of an end parts 401A of the first arm part 401, the other end 402B of second arm portion 402, the first arm part 501 and the other end 502B of second arm portion 502 are along straight line 63, as shown in Figure 8, the deflection that causes because of variation of ambient temperature of this first arm part 401 can be by the deflection compensated of second arm portion 402 that causes because of variation of ambient temperature.Simultaneously, the deflection of the first arm part 501 that is caused by variation of ambient temperature can be by the deflection compensated of second arm portion 502 that causes because of variation of ambient temperature.
Therefore, the initial angle of mirror surface 20 is constant basically, no matter environment temperature how.This also makes at these arms owing to when the formation internal stress that sandwich construction produced causes deflection in the first arm part and second arm portion, initial angle is remained unchanged.Since make on mirror surface 20 1 sides the first arm part 401 or 402 and arm portion 501 or 502 time deflect in energising, so mirror angle can change when energising.
As the arbitrarily angled θ of mirror surface 20 actual tilt, as shown in Figure 7, when the first arm part 401 and the first arm part 501 had been added to electric current shown in Fig. 9 B on first electrode 31 and second electrode 32 from power supply, the first arm part 401 and the first arm part 501 will be to direction R deflections.
Can be configured at the arm portion shown in Fig. 6 and 8 that energising deflects on the side of fixed part 40,, perhaps be configured in a side of mirror surface promptly near a side of first electrode 31 and second electrode 32.
Preferably make near the first arm part 401 of first electrode 31 and the first arm part 501 deflection when switching on of close second electrode 32, shown in Fig. 6 and 8.Below with reference to Figure 12 and 13 its reasons of explanation.
Figure 12 A and 12B illustrate, and the first arm part 401 shown in Fig. 6 and 8 and 501 is in energising during deflection, the displacement G1 of the rotation axis of mirror surface 20.In contrast, Figure 13 A and 13B illustrate, when switching on deflections near second arm portion 402 and 502 of mirror surface 20, and the displacement G2 of the rotation axis of mirror surface 20.
That is to say that the first arm part 401 and 501 time deflects in energising among Figure 12 A and the 12B, and deflect when second arm portion 402 in Figure 13 A and 13B and 502 energisings.
In the preferred example shown in Figure 12 B, be 30 ° because environment temperature or internal stress change the deflection angle that causes, and because the deflection angle that energising causes is 30 °, shown in Figure 12 A.That is, 60 ° of the first arm part 401 and 501 deflections, and near 30 ° of second arm portion 402 of mirror surface 20 and 502 deflections.Therefore the angle of mirror surface 20 is 30 °.Suppose that the length of arm and the length of catoptron are 100, then the rotation axis of mirror surface 20 moves 1.18.
In contrast, in the example shown in Figure 13 A, be 30 °, and energising cause that deflection angle is 30 ° because of environment temperature or internal stress change the deflection angle that causes.That is, the first arm part 401 of close fixed part 40 and 501 deflections are 30 °.When deflection was greater than 30 ° during in energising near second arm portion 402 of mirror surface 20 and 502, these arms were with 60 ° of final deflections.The angle of mirror surface 20 is 30 °.In this case, the displacement of the rotation axis of mirror surface 20 is 5.69.
As a result, the displacement of the rotating shaft of mirror surface 20 shown in Figure 13 A (displacement) is slightly less than 5 times of displacement shown in Figure 12 A.For this reason, deflection when the first arm part 401 and 501 of close fixed part 40 is preferably in energising is shown in Figure 12 B.
The heat that Figure 14 illustrates fourth embodiment of the invention drives micro-reflector.
Heat shown in Figure 14 drives micro-reflector 10 and comprises mirror surface 420, supporting member part 414, electrode part 430 and fixed part 440.
The structure of mirror surface 420 structure with the 3rd embodiment mirror surface 20 shown in Figure 6 basically is identical.The fixed part 440 also fixed part 40 with the 3rd embodiment is identical.
This mirror surface 420 is bearing on the electrode 431 of electrode part 430 with so-called cantilevered fashion by supporting member part 414.This supporting member part 414 has a supporting arm 451.In Figure 14, this supporting arm 451 comprises switch on two the first arm parts 401 of deflection and second arm portion 402 of two not deflections of switching on.The first arm part 401 and second arm portion 402 are alternately each other in succession.
As shown in figure 14, the electrode 431 of a close fixed part 440 of arm portion in the first arm part 401, and another is positioned at the centre of two second arm portions 402.Two the first arm parts 401 that energising deflects are configured on the odd-numbered position of leaving electrode 431, and second arm portion 402 is positioned on the even-numbered position of leaving electrode 431.
Although the first arm part 401 among Figure 14 and second arm portion 402 form two pairs, right number can be three or more, can reduce the influence of environment temperature and internal stress variation by the number that increases the first arm part and second arm portion.
For the rotating shaft that prevents mirror surface 420 is subjected to displacement when mirror surface 420 tilts, is configured in when at least one arm portion in the first arm part 401 on the odd-numbered position E1 and E3 is preferably in energising among Figure 14 and deflects.
In the 3rd embodiment shown in Figure 6, mirror surface 20 is by first supporting arm 51 that is configured in its both sides and 52 supportings of second supporting arm, so this catoptron can rotate symmetrically.This structure makes that mirror surface 20 can stable rotation.
Even be bearing in the inside of fixed part 440 by supporting member part 314 with cantilevered fashion in mirror surface 420, as shown in figure 14, this mirror surface also can be rotated around its geometrical central axis CL, and rotate at the center that promptly almost rotate around it.
In the above-described embodiments, conductive layer 111 is not formed on the deflection area 130 of supporting arm, thereby only heats and deflection in deflection area 130.Conductive layer 111 is formed on the zone that does not produce deflection.
The both sides that the first arm part shown in Figure 14 and second arm portion can be configured in mirror surface 60 shown in Figure 6.
First supporting arm 51 shown in Figure 6 and second supporting arm 52 and supporting arm 451 shown in Figure 4 certainly have conductive layer that is made of aluminium etc. and the double-decker of being made up of the zone of heating that insulating material constitutes, and make can produce heat on whole zone of heating when conductive layer is switched on.
First supporting arm 51, second supporting arm 52 and supporting arm 451 shown in Fig. 6 and 14 can have the sandwich construction that is made of marmem, chromium etc., make that these arms can deflection and become straight in when energising.For example, supporting arm can have the sandwich construction that is formed by chromium and NiTi alloy, thereby these arms can keep shape under straightened condition, and make these arms can utilize the difference of thermal expansivity to deflect under normal temperature, and the thermal change that can utilize energising to produce is straight.
Because adopt the heat of the foregoing description to drive micro-reflector, thus the displacement or unshift fully hardly during turning of the rotation axis of mirror surface, and reflected light is the also displacement or unshift fully hardly of reflection position of reflector laser for example.Therefore can easily this heat be driven micro-reflector and for example be contained in laser printer and optical scanner for example in the various optical systems such as laser scanner, perhaps be contained in other electronic installation.
Drive in the micro-reflector in heat of the present invention, the supporting arm of supporting member part is also referred to as hot actuating arm, and this supporting arm can deflect as thermometal when the energising heating.Therefore can change the angle of the mirror surface of supporting arm supporting arbitrarily.In this case, the rotating shaft of mirror surface is unshift basically or unshift fully, so can simplify the structure of optical system.Although the size of optical surface is bigger in prior art, make light for example laser do not lose, but because the rotating shaft displacement or unshift fully hardly in the above-described embodiments of mirror surface, so the size of reflecting surface does not need to do very greatly, can reduce the size that heat drives micro-reflector like this.
In addition, reduced the displacement of the rotation axis of mirror surface, and easily heat has been driven micro-reflector and be contained in the optical system.Because the arm portion of deflection and the arm portion of not deflection when forming energising, so the angle of catoptron changes with the variation of environment temperature hardly, and how drive on the micro-reflector in the material layer internal stress size no matter be deposited on heat, deflection that all can the compensator arm part.
Although with reference to being considered to preferred embodiment explanation the present invention now, should be understood that to the invention is not restricted to these disclosed embodiment.On the contrary, this invention is intended to cover various modification and equivalent device in institute's claims spirit and scope.The scope of following claims is consistent with explanation the most widely, thereby can comprise these modified examples and equivalent device and function.

Claims (20)

1. a heat drives micro-reflector, comprising:
Mirror surface; And
Supporting member part with sandwich construction of supporting mirror surface;
Wherein, utilize the deflection tiltable mirror surface of supporting member, this deflection is because the thermal expansivity of Mnltilayered structures is different and the heat that produces when partly being switched on by supporting member causes;
This supporting member partly is configured in mirror surface and is used to apply between the electrode part branch of electricity;
The longitudinal axis of supporting member part is perpendicular to the central shaft of mirror surface, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.
2. heat drives micro-reflector according to claim 1, it is characterized in that, this supporting member partly comprises first supporting arm and second supporting arm, this electrode part branch comprises first electrode and second electrode, this first supporting arm is configured between first end and first electrode of mirror surface, this second supporting arm is configured between second end and second electrode of mirror surface, and this first end and second end are symmetrical with respect to mirror surface.
3. heat drives micro-reflector according to claim 1, it is characterized in that this supporting member partly has a supporting arm, and this electrode partly has an electrode, and this supporting arm is configured between the end and electrode of mirror surface.
4. drive micro-reflector as heat as described in the claim 2, it is characterized in that, first supporting arm comprises first zone of heating and conductive layer, this conductive layer is configured on the first surface of first zone of heating and the second surface and is used for conduction, on first zone of heating, produce heat so that prevent, and first zone of heating produces heat on the part of the first surface that does not form conductive layer, and the supporting arm of winning is deflected;
Second supporting arm comprises second zone of heating and conductive layer, this conductive layer is configured in the 3rd surface of second zone of heating and the 4th surface and goes up and be used for conducting electricity, on second zone of heating, produce heat so that prevent, this second zone of heating produces heat on the part on the 3rd surface that does not form conductive layer, make second supporting arm deflect, its yawing moment is identical with the yawing moment of first supporting arm.
5. drive micro-reflector as heat as described in the claim 3, it is characterized in that, this supporting arm comprises zone of heating and conductive layer, this conductive layer is configured in surface of zone of heating and another surface and goes up and be used for conduction, so that prevent from zone of heating, to produce heat, zone of heating produces heat on the part on this surface that does not form conductive layer, make this supporting arm deflect.
6. heat drives micro-reflector according to claim 1, it is characterized in that, this supporting member partly comprises the first arm part and second arm portion, the first arm part deflects when energising, second arm portion is parallel to the first arm part, when energising, do not deflect, but under variation of ambient temperature and residualinternal stress effect, will deflect, its yawing moment is identical with the yawing moment of the first arm part, thereby can compensate the first arm part because the deflection that variation of ambient temperature and residualinternal stress effect cause;
The longitudinal axis of the first arm part and the longitudinal axis of second arm portion be perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft of mirror surface.
7. drive micro-reflector as heat as described in the claim 6, it is characterized in that, one end of the first arm part is connected in the electrode part, and the other end of the first arm part is connected in an end of second arm portion, and the other end of second arm portion is connected in first end of mirror surface; And
This end of the first arm part and the other end of second arm portion are positioned on the straight line of a central shaft that is parallel to mirror surface.
8. drive micro-reflector as heat as described in the claim 7, it is characterized in that, this supporting member part balanced configuration is at mirror surface first end and leave on each end in mirror surface second end of first end.
9. drive micro-reflector as heat as described in the claim 7, it is characterized in that, the first arm partly comprises first zone of heating, first conductive layer and high temperature expanding layer, this first conductive layer is configured on the first surface of zone of heating and is used for conduction, to prevent on first zone of heating, producing heat, this high temperature expanding layer is configured on the second surface of first zone of heating, and this first zone of heating produces heat on the part of the first surface that does not form first conductive layer, make the first arm partly deflect;
Second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer, this second conductive layer is configured in the 3rd surperficial the same side of going up and being positioned at first conductive layer on the first arm part of second zone of heating, this high temperature expanding layer is configured on the 4th surface of second zone of heating, this second conductive layer can conduct electricity, thereby prevents that second zone of heating from producing heat.
10. drive micro-reflector as heat as described in the claim 9, it is characterized in that, also comprise at least one pair of first and second arm portion, the first arm partly is configured on the odd-numbered position of leaving the electrode part, and second arm portion is configured on the even-numbered position of leaving the electrode part.
11. one kind has the electronic installation that heat drives micro-reflector, this micro-reflector comprises:
Mirror surface; And
Supporting member part with sandwich construction of supporting mirror surface;
Wherein, can utilize the deflection of supporting member part that mirror surface is tilted, this deflection is because the difference of thermal expansivity and the heat that produces when partly being switched on by supporting member cause in the sandwich construction;
This supporting member partly is configured in mirror surface and is used to apply between the electrode part branch of electricity;
The longitudinal axis of this supporting member part is perpendicular to the mirror surface central shaft, and the longitudinal center of supporting member part is located substantially on the central shaft of mirror surface.
12. electronic installation as claimed in claim 11, it is characterized in that, this supporting member partly comprises first supporting arm and second supporting arm, this electrode part branch comprises first electrode and second electrode, this first supporting arm is configured between first end and first electrode of mirror surface, this second supporting arm is configured between second end and second electrode of mirror surface, and this first end and second end are symmetrical with respect to mirror surface.
13. electronic installation as claimed in claim 11 is characterized in that, this supporting member partly has a supporting arm, and this electrode partly has an electrode, and this supporting arm is configured between the end and electrode of mirror surface.
14. electronic installation as claimed in claim 12, it is characterized in that, this first supporting arm comprises first zone of heating and conductive layer, this conductive layer is configured on the first surface of first zone of heating and the second surface and is used for conduction, on first zone of heating, produce heat so that prevent, this first zone of heating produces heat on the part of the first surface that does not form conductive layer, the supporting arm of winning is deflected;
Second supporting arm comprises second zone of heating and conductive layer, this conductive layer is configured in the 3rd surface of second zone of heating and the 4th surface and goes up and be used for conducting electricity, on second zone of heating, produce heat so that prevent, this second zone of heating produces heat on the part on the 3rd surface that does not form conductive layer, make second supporting arm deflect, its yawing moment is identical with the yawing moment of first supporting arm.
15. electronic installation as claimed in claim 13, it is characterized in that, this supporting arm comprises zone of heating and conductive layer, this conductive layer is configured in surface of this zone of heating and another surface and goes up and be used for conduction, to prevent on zone of heating, producing heat, this zone of heating produces heat on the part on this surface that does not form conductive layer, make supporting arm deflect.
16. electronic installation as claimed in claim 11, it is characterized in that, this supporting member partly comprises the first arm part and second arm portion, the first arm part deflects when energising, second arm portion is parallel to the first arm part, does not deflect when energising, but can deflect under variation of ambient temperature and residualinternal stress effect, its yawing moment is identical with the yawing moment of the first arm part, thereby can compensate the deflection that the first arm part is caused by variation of ambient temperature and residualinternal stress;
The longitudinal axis of the first arm part and the longitudinal axis of second arm portion are perpendicular to the central shaft of mirror surface, and the longitudinal center of the first arm part and the longitudinal center of second arm portion are located substantially on the central shaft of mirror surface.
17. electronic installation as claimed in claim 16 is characterized in that, an end of the first arm part is connected in the electrode part, and the other end of the first arm part is connected in an end of second arm portion, and the other end of second arm portion is connected in first end of mirror surface; And
This end of the first arm part and the other end of second arm portion are positioned on the straight line of a central shaft that is parallel to mirror surface.
18. electronic installation as claimed in claim 17 is characterized in that, this supporting member part balanced configuration mirror surface first end and mirror surface away from each end in second end of first end on.
19. electronic installation as claimed in claim 17, it is characterized in that, the first arm partly comprises first zone of heating, first conductive layer and high temperature expanding layer, this conductive layer is configured on the first surface of zone of heating and is used for conduction, produce heat so that prevent at first zone of heating, this high temperature expanding layer is configured on the second surface of first zone of heating, and this first zone of heating produces heat on the part of the first surface that does not form conductive layer, so the first arm partly deflects;
Second arm portion comprises second zone of heating, second conductive layer and high temperature expanding layer, this second conductive layer is configured in the 3rd surperficial the same side of going up and being positioned at first conductive layer on the first arm part of second zone of heating, this high temperature expanding layer is configured on the 4th surface of second zone of heating, this second conductive layer can conduct electricity, thereby prevents to produce heat at second zone of heating.
20. electronic installation as claimed in claim 19, it is characterized in that, also comprise at least one pair of first and second arm portion, this first arm partly is configured on the odd-numbered position of leaving the electrode part, and second arm portion is configured on the even-numbered position of leaving the electrode part.
CNB031480977A 2002-06-28 2003-06-27 Heat-driven micro reflecting-mirror and electronic apparatus Expired - Fee Related CN1310057C (en)

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JP190606/02 2002-06-28
JP190606/2002 2002-06-28
JP2002190606A JP2004037537A (en) 2002-06-28 2002-06-28 Heat-driven micro mirror and electronic apparatus
JP193314/02 2002-07-02
JP2002193314A JP3969218B2 (en) 2002-07-02 2002-07-02 Thermally driven micromirrors and electronics
JP193314/2002 2002-07-02

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US20040075881A1 (en) 2004-04-22
US6840642B2 (en) 2005-01-11

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