CN1926658B

CN1926658B - High-intensity electromagnetic radiation device and method

Info

Publication number: CN1926658B
Application number: CN2004800415926A
Authority: CN
Inventors: 大卫·玛尔科穆·卡穆; 陈志成; 里克·杜兰; 托尼·休伊特; 阿恩·克约韦尔; 托尼·科马萨; 迈克·克拉斯尼希; 史蒂夫·麦科伊; 约瑟夫·雷耶斯; 伊戈·鲁迪克; 卢德米拉·舍佩列夫; 格雷戈·斯图尔特; 蒂尔曼·斯鲁姆; 阿历克斯·维埃尔
Original assignee: Mattson Technology Canada Inc
Current assignee: Beijing E Town Semiconductor Technology Co Ltd; Mattson Technology Inc
Priority date: 2004-02-12
Filing date: 2004-02-12
Publication date: 2012-10-10
Anticipated expiration: 2024-02-12
Also published as: CN1926658A; JP5074039B2; WO2005078762A2; JP2007522624A; WO2005078762A3

Abstract

An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.

Description

High-intensity electromagnetic radiation device and method

Technical field

The present invention relates to irradiation, relate in particular to the method and apparatus that is used to produce electromagnetic radiation.

Background technology

Arc lamp has been used to multiple purpose and has produced electromagnetic radiation.Usually, arc lamp comprises the photoflash lamp that is used to produce the continuous or dc arc light modulation of continuous irradiation and is used to produce irradiance flash.

Continuously or the dc arc light modulation be used for from day analogy use to the semiconductor wafer quick heat treatment.Typical traditional dc arc light modulation comprises two electrodes that are installed in the quartz envelope (quartz envelope) that is filled with such as the inert gas of xenon or argon, that is, and and negative electrode and anode.There is an electrical power to supply with and is used to keep the continuumpiston arc between the electrode.In plasma arcs, plasma through particle encounter by high current flow heats to high temperature and with corresponding to the current's intensity emission electromagnetic radiation of electrode, flowing.

Photoflash lamp is being similar to the continuous arc light modulation aspect some, but different in others.Be not to use constant electric current to produce continuous radiation output, but capacitor group or other pulse power discharge suddenly through electrode, so that between electrode, produce the high-energy discharge of electricity pulse of plasma arc form.The same with the continuous arc light modulation, plasma is by the big current flow heats of discharge pulse and launch the luminous energy of unexpected flash of light form, and duration of this flash of light suddenly is corresponding to the duration of discharge of electricity pulse.For example, the duration of some flashes of light can be about one millisecond, although other duration also can realize.Do not resemble the continuous arc light modulation of typically under quasistatic pressure and temperature condition, working, the characteristic feature of photoflash lamp is the big and unexpected variation of pressure and temperature in the flash of light process.

In history, a kind of main application of high-power flash lamp is laser pumping.As a kind of example closer the time, the high-power flash lamp is used for making annealing semiconductor wafer through the about one millisecond pulse duration of power irradiation wafer surface with about five megawatts.

The cooling of conventional flash lamp typically comprises the outer surface that only cools off big envelope, rather than inner surface.Although utilizing the simple convection cooling of surrounding air is enough for low power applications, high power applications usually needs the outside of big envelope through forced ventilation or other gas cooled, perhaps for more high-power application, through water or other liquid cools.

This traditional high-power flash lamp trends towards suffering multiple difficult point and shortcoming.Trend towards limiting the mechanical strength that factor is a quartz envelope in the life-span of this lamp, its thickness typically is about 1mm, and thickness seldom surpasses 2.5mm.In this respect, increased its mechanical strength although increase the thickness of quartz envelope, additional quartz material provides the insulation that increases between at the outer surface of the cooling of big envelope with by the big envelope inner surface of plasma arcs heating.Therefore, Guan Yuehou, external coolant just more difficult inner surface belt from big envelope is walked heat.Therefore, the inner surface of thick more big envelope is heated to high more temperature, causes thermal gradient high more in the big envelope, and this trends towards causing thermal stress to break, and finally causes the big envelope fault.Therefore, in conventional flash lamp, the thickness of big envelope and thus its mechanical strength be limited.This can limit big envelope opposing again since in the big envelope air pressure change the ability of the mechanical stress that causes significantly fast, wherein changing significantly fast of air pressure is because in the flash of light process the quick increase of arc temperature and diameter causes.

Another difficult point of conventional lights relates to the ablation (ablation) of quartz envelope, mainly is owing to the evaporation of quartz material from the big envelope inner surface of heating.This ablation trends towards making arc gas by oxygen contamination.Because most of commercial arc lamp is sealing system rather than recirculation, therefore the accumulation of this pollutant in arc gas trends towards causing the radiation output of lamp to descend in time.This variation of photoflash lamp radiation output possibly not expected for many application, as needing the semiconductor annealing of reproducibility strongly.The accumulation of these pollutants also trends towards making the difficult startup of lamp.

Another shortcoming of conventional flash lamp is that said electrode is typically processed by tungsten or tungsten alloy owing to the sputter of material from electrode causes.In this respect, the unexpected emission of electronics and consequent arc can be from the materials of cathodic sputtering or emission significant quantity.With lesser extent, the unexpected electron bombard and the heat of arc can cause the partial melting of anode tip, also can cause the release of anode material.Therefore, the deposit of sputter trends towards on the inner surface of big envelope, accumulating, and reduces the radiation output of lamp thus, and causes its radiation mode to become more and more inhomogeneous in time.In addition, this deposit on the big envelope inner surface trends towards the heating of being glistened, and increases the localized heat stress in the big envelope thus, and this possibly finally cause breaking and fault of big envelope.This loss of material has also reduced the life-span of electrode.

Another shortcoming of conventional flash lamp is the reproducibility of relative mistake of the radiated emission of arc itself.Some conventional lights is kept the continuous direct-current discharge of low current between the electrode between flash of light, be called idle current or ferment electric current (simmer current).The purpose of fermenting electric current in the conventional lights mainly is abundant heated cathode, in case the beginning emitting electrons, although ferment certain preionization at least that electric current also provides gas, the life-span that this has reduced sputter and has increased lamp thus.Ferment electric current typically less than one ampere, and in conventional flash lamp, can not under the situation that does not cause electrode overheating and sputter, significantly increase usually.Therefore, the inventor observed in the conventional flash lamp from the big tendency of changes that ferments the arc current that electric current takes place to the transition of peak value flashing current in taking place with inconsistent relatively mode, thereby cause the flash of light reproducibility characteristic of difference.

Therefore, need improved photoflash lamp and method.

Summary of the invention

When solving above demand, the inventor after deliberation continuously or the modification of dc arc light modulation, wherein the inner surface of big envelope is by the cooling of vortex flow of liquid, as for example at common all United States Patent(USP) No.s 6; 621,199,4,937; 490 and 4,700,102 reach U.S. Patent number 4 more early; In 027,185 disclosed those, whole disclosures of these patents are incorporated into this by reference.Combined the pulse power to serve as the modification use of photoflash lamp although one of inventor has before described this waterwall continuous arc light modulation, thought typically usually that this waterwall arc lamp was unfavorable for flash application.In this respect, the very big increase of arc temperature and diameter possibly have appreciable impact to the stream of the liquids and gases in the big envelope in the flash of light process.If the boiling of internal coolant body also produces steam, the increase meeting that then pressure is big and unexpected in the big envelope further increases, further thus increase pressure, thus possibly cause the big envelope fault.

This identical unexpected increase of pressure can make vortex liquid wall facing to the inner surface of big envelope and be pushed, thus with liquid along away from the rightabout at lamp center axially to extrapolation, towards electrode and through electrode.This can cause unexpected the returning of liquid to splash on the electrode, thereby may expulsion of arc be gone out, and may reduce the life-span of electrode.

In addition, with regard to this pressure increase pushed back liquid towards negative electrode with regard to, the back pressure on this direction (back-pressure) was resisted the pressure of pump, and possibly weaken the mechanical connection of whirlpool flow of liquid generator part.

In addition, the inventor finds, as the work of this waterwall arc lamp of photoflash lamp trend towards producing with by lamp of the same type at the different particle contamination of pollutant continuous or that DC mode work is caused.Especially, the inventor finds that little to 0.5 to 2 micron tungsten particle trends towards being discharged under flash mode by electrode, and is typically comprised by the particle contamination that lamp of the same type is caused when continuous or DC mode are worked and to be not less than 5 microns particle.Existing waterwall arc lamp filtration system typically is inappropriate for removal particularly because the less particle contamination that flash mode work is caused.The inventor recognizes, the accumulation of this little particle contamination trends towards in time and changes the power output and the spectrum of lamp in the liquid coolant, does not desirably reduce the reproducibility of the flash of light that is produced by lamp thus.

The inventor also recognizes the application for some ultra high power, need to adopt very approaching each other a plurality of photoflash lamps, so that allow this lamp simultaneously or glisten together the same period.But typically existing waterwall arc lamp has the nonisulated metal flow generator part that is installed in outside the big envelope radial distance.Except their conductivity, the metal flow generator part is typically also with accomplishing the electrical connection of negative electrode, so that effectively negative electrode is connected to the negative terminal of capacitor group or other pulse power.Therefore, in the flash of light process, the flow-generator parts are in the negative potential identical with negative electrode.Therefore; The conductive component of each lamp; As the reflector of its ground connection for example, must keep enough far away, to prevent the starting the arc of passing through surrounding air from the flow-generator of a lamp to ground connection reflector or other conductive component of adjacent lamps with the flow-generator of each adjacent lamps.This trends towards between adjacent lamps, forcing the big minimum spacing of not expecting.

According to an aspect of the present invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises and is configured to generate the flow-generator along the flow of liquid of big envelope inner surface, and is configured in big envelope, generate electric arc so that produce first and second electrodes of electromagnetic radiation.This device also comprises the drain chamber (exhaust chamber) that extends outwardly beyond an electrode, is configured to hold a part of flow of liquid.

Have been found that this drain chamber all is favourable for photoflash lamp and the application of continuous arc light modulation.In this respect, the existence of drain chamber trends towards increasing the distance between the position that arc and flow of liquid begin to collapse.Therefore, drain chamber trends towards reducing because the turbulent flow that flow of liquid collapse causes to the influence of arc, improves the stability of arc thus.Therefore, for continuous and flash application, drain chamber all trends towards improving the stability and the reproducibility of arc lamp radiation output.

Flow of liquid along the big envelope inner surface also is favourable.For example, this flow of liquid has significantly reduced the thermal gradient between the big envelope surfaces externally and internally, has reduced the thermal stress on the big envelope thus, and this all is favourable for continuous and flash application.This allows to use the big envelope than thick in the conventional flash lamp again, allows thus to use the big envelope with higher mechanical strength, so that the abrupt pressure of resisting more easily in the flash of light process increases.Increase big envelope thickness and allow to adopt larger-diameter pipe again, allow big stronger arc thus, and can not surpass the stress tolerance limit of big envelope.Also suppress or prevent in the flash of light process or the ablation of big envelope inner surface in the continuous operation process along the flow of liquid of big envelope inner surface.In addition and since the material of any sputter all trend towards by flow of liquid be flushed to outside the big envelope rather than resemble in the conventional flash lamp be accumulated on the inner surface, therefore this flow of liquid has also reduced because the problem that the electrode sputter causes.Therefore, the irradiance flash or the continuous irradiation output that are produced by this device trend towards more can reproducing consistent with in time than irradiance flash that is produced by conventional flash lamp or continuous arc light modulation or continuous irradiation output respectively.

Drain chamber can stretch out enough far vertically, surpasses an electrode, so that this electrode and the turbulent flow that collapse caused owing to flow of liquid in the drain chamber are isolated.

Flow-generator can be configured to generate from the radially inner gas stream of flow of liquid, and drain chamber can be extended enough far in this case, surpasses a said electrode, so that this electrode is isolated with the turbulent flow of mixing to be caused that flows owing to liquids and gases.

Electrode can be configured to generate the discharge of electricity pulse so that produce irradiance flash, in this case drain chamber preferably have enough capacity hold through since the pressure pulse that the discharge of electricity pulse causes to the liquid of a volume of extrapolation.This drain chamber is particularly advantageous for flash application, because it has increased effective internal capacity of device, and helps thus to reduce because the peak value internal pressure that flash of light causes generates with contingent any related boiling and steam.Therefore, reduced mechanical stress on big envelope and other parts.In addition, this drain chamber allows through the pressure of the increase of flash of light axially the electrode that continues to flow through of the water to extrapolation, reduces this water thus and returns the trend that splashes on the electrode.Splash the possibility on the electrode through reducing liquid, drain chamber trends towards increasing electrode life and reduces arc cancellation or the possibility extinguished.

Second electrode can comprise anode, and drain chamber can axially stretch out, and surpasses this anode.

Flow-generator can electric insulation.For example, said device can comprise the electric insulation around flow-generator, and flow-generator can comprise conductor.The electric insulation of flow-generator allow device than trouble free service, and do not worry the starting the arc between flow-generator and the external conductor, and allow the nearer spacing of adjacent lamps in the multi-lamp syste.Availability as the conductor of flow-generator is favourable; Because it allows flow-generator to have benefited from the mechanical strength of metal so that resist pressure liquid stream and the back pressure in the flash of light process, but also allows flow-generator to serve as the electric connector that negative electrode is connected to power supply.

First electrode can comprise negative electrode, and electric insulation can be around this negative electrode and the electrical connection of arriving this negative electrode.This execution mode trends towards further strengthening the fail safe of single lamp system and reducing the minimum spacing between the adjacent lamps in the multi-lamp syste.

This device can also comprise electrical connection, wherein is electrically connected can comprise flow-generator again.Therefore, flow-generator itself can advantageously serve as the part that is electrically connected between the negative terminal of negative electrode and capacitor group or other pulse power.

Electric insulation around flow-generator can comprise big envelope.Electric insulation around flow-generator can also comprise insulating cover.In this execution mode, insulating cover can center on part big envelope at least.

Advantageously, comprise that in big envelope and insulating cover flow-generator allows flow-generator to be arranged on the position of approaching very much assembly axis, this allows again to be positioned at the stronger screw thread of the outer waterwall arc lamp of big envelope and the mechanical connection of bolt than previous flow-generator parts.This helps the mechanical stress of flow-generator opposing flash of light again, and wherein the mechanical stress of flash of light trends towards the axis of orientation that some liquid edges and flow-generator is in the opposite direction to extrapolation.

Said electric insulation can also comprise the Compressed Gas in the space between the said part of insulating cover and big envelope.

Big envelope can comprise the transparent column pipe.This pipe can have at least four millimeters thickness.In this respect, the flow of liquid on the big envelope inner surface has reduced the thermal gradient in the big envelope, and therefore allows the pipe than the employed thickness of pipe in the conventional flash lamp, and the big higher mechanical strength that increases suddenly of pressure in the opposing flash of light process is provided to big envelope thus.

Said pipe can comprise the right boring cylindrical tube, and this trends towards improving the validity of the sealing that engages with big envelope, but also trends towards improving the performance along the flow of liquid of big envelope inner surface.

Insulating cover can comprise at least a in plastics and the pottery.

First and second electrodes can comprise negative electrode and anode, and negative electrode can have the length shorter than anode.In this respect, the negative electrode of shortening trends towards having higher mechanical strength, and this is for preventing that the negative electrode vibration of continuous arc light modulation in using from being favourable, and this changes for unexpected pressure in the opposing flash of light process and stress also is favourable.

First electrode can comprise the negative electrode with outstanding length, and it is inside vertically in big envelope, outstanding towards the center of said device that length should be given prominence in the negative electrode edge, above the inferior penetralia spare that installs in the big envelope.Outstanding length can be less than the twice of negative electrode diameter.Therefore, with respect to its thickness, negative electrode can be shorter than typical conventional cathode, improves its mechanical strength thus and provide abrupt pressure in vibration or the flash of light process in the opposing continuous operation to change and the bigger ability of stress to it.

But on the contrary, outstanding length is long enough preferably, so that prevent the generation of electric arc between the flow-generator and second electrode.This length is that conductor and the execution mode that forms the part that is electrically connected between negative electrode and the pulse power are preferred for flow-generator wherein, because flow-generator is in the current potential identical with negative electrode in this execution mode.Thus, in this execution mode, need guarantee the negative electrode long enough, set up arc between anode and the flow-generator rather than between anode and the negative electrode so that prevent.

According to a further aspect in the invention, a kind of system that comprises a plurality of said apparatus that are configured to irradiation one common target is provided.For example, this multiple arrangement can be configured to the irradiation semiconductor wafer.

This multiple arrangement can be configured to be connected in parallel to each other.If like this; Then each in this multiple arrangement device preferably be arranged in this multiple arrangement in the relative direction of neighboring devices on, make that the anode of negative electrode and the said neighboring devices in this multiple arrangement of said each device in this multiple arrangement is adjacent.Therefore, no matter be continuously or in the flash of light work, the high-intensity magnetic field that is produced by plasma arcs all trends towards cancelling each other out, particularly in the device that has even number to arrange like this.

This system can also comprise that the flow-generator of each device that is configured in multiple arrangement provides the single recycle unit of liquid.In this execution mode,, more effective system is provided through eliminating demand to the independent loops equipment that is used for each device.

It is outer and from extending near the electrically-conductive reflector second electrode near first electrode that this device can also be included in big envelope.

This device can also comprise a plurality of power circuits of getting in touch with electrode electricity.If like this, then this device preferably includes another the isolator at least at least one and a plurality of power circuit that is configured to isolate in a plurality of power circuits.

Each electrode can comprise the coolant channel that is used to hold the cooling agent stream through wherein.In addition, at least one electrode can comprise that the tungsten with at least one centimetre of thickness is most advanced and sophisticated.

Advantageously, kind electrode trends towards having the life-span longer than traditional electrode, especially uses for flash of light, although also be like this for continuous operation.In this respect; Although in the middle of flash of light process itself; Especially the duration is about one millisecond or shorter quick flash of light; The heating of electrode surface trends towards taking place quickly from the electrode heat extraction through coolant channel than cooling agent, but liquid cools trends towards reducing the trend of electrode melting, sputter or releasable material.In the flash of light process, the big thickness of comparing eletrode tip with traditional electrode provides bigger thermal capacity to eletrode tip, and this trends towards alleviating the heating effect of flash of light, and reduce thus most advanced and sophisticatedly trend towards melting, the speed of sputter or loss material.Still can be with regard to electrode with the rate loss material that reduces, thick more tip is that electrode provides many more materials that can lose, and has further prolonged the life-span of electrode thus.Flow of liquid along the big envelope inner surface is removed the material of this fusing or loss from system, rather than allows on its inner surface that is accumulated in big envelope, has prolonged the frequency spectrum of big envelope life-span and holding device radiation output and the consistency and the reproducibility of power thus.

Electrode can be configured to generate the discharge of electricity pulse, so that produce irradiance flash, and device can also comprise the idle current circuit that is configured between first and second electrodes, generate idle current.This idle current circuit can be configured in the time period before the discharge of electricity pulse, generate idle current, and this time period is longer through the time (fluid transit time) through the required fluid of big envelope than flow of liquid.For example, pass through in the execution mode of big envelope with about 30 milliseconds in flow of liquid, the idle current circuit can be configured to produce about at least 30 milliseconds idle current.

The idle current circuit can be configured to generate about at least 1 * 10 ²The electric current of ampere is as idle current.In this respect, coolant channel in the electrode allows than much higher idle of conventional flash lamp or ferments electric current, and does not have the serious fusing or the sputter that will trend towards taking place when traditional electrode suffers this high idle current.The inventor has been found that high more idle current provides more consistent, the good entry condition that limits for flash of light.More particularly, higher idle current is used to limit ionization passage heat, wide between the electrode, is ready to receive the discharge of electricity pulse.Effectively, higher idle current is used for being right after and before flash of light, reduces the initial resistance (although the peak impedance of flash of light process itself can remain unchanged to a great extent) between the electrode.The inventor has been found that the bigger consistency and the reproducibility of the flash of light that this advantageously causes device and is produced, but also trends towards reducing the loss of electrode material, causes longer electrode life thus.

The idle current circuit can be configured to about at least 1 * 10 ²Generate about at least 4 * 10 in the millisecond ²The electric current of ampere is as idle current.

According to a further aspect in the invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises and is used to generate the device along the flow of liquid of big envelope inner surface, also comprises being used for generating electric arc so that produce the device of electromagnetic radiation at big envelope.This device also comprises the device that is used to hold a part of flow of liquid, and this device that is used to hold stretches out, and surpasses the device that is used to generate.

According to a further aspect in the invention, a kind of method that produces electromagnetic radiation is provided.This method comprises the flow of liquid of generation along the big envelope inner surface, and between first and second electrodes, in big envelope, generates electric arc so that produce electromagnetic radiation.This method also is included in holds a part of flow of liquid in the drain chamber that extends outwardly beyond an electrode.

Hold and to comprise a said electrode and the turbulent flow isolation that causes owing to flow of liquid collapse in the drain chamber.

This method can also comprise generation from the radially inner gas stream of flow of liquid, and hold can comprise with an electrode with since the turbulent flow that liquids and gases stream collapse causes isolate.

Generate electric arc and can comprise and generate the discharge of electricity pulse so that produce irradiance flash, and hold can comprise hold through since the pressure pulse that the discharge of electricity pulse causes to the liquid of a volume of extrapolation.

Generate flow of liquid and can comprise that the flow-generator that utilizes electric insulation generates flow of liquid.

According to a further aspect in the invention, provide a kind of a plurality of said devices of control that comprise to come the method for irradiation like a common target of for example semiconductor wafer.

Control can comprise each device that makes in the said multiple arrangement generate with said multiple arrangement in each neighboring devices in electric arc direction in the opposite direction on electric arc.

This method can also comprise another isolation at least at least one and the said a plurality of power circuit in a plurality of power circuits.

This method can also comprise cooling first and second electrodes.Cooling can comprise that the corresponding coolant channel through first and second electrodes comes the circulating fluid cooling agent.

Generate electric arc and can comprise and generate the discharge of electricity pulse, so that produce irradiance flash, and this method can also be included between first and second electrodes and generates idle current.Generate idle current and can be included in generation idle current in the discharge of electricity pulse time period before, this time period is longer through the time through the required fluid of big envelope than flow of liquid.This can comprise generation about at least 1 * 10 ²The electric current of ampere is as idle current.More particularly, this can be included in about at least 1 * 10 ²Generate about at least 4 * 10 in the millisecond ²The electric current of ampere is as idle current.

According to a further aspect in the invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises the flow-generator that is configured to generate along the electric insulation of the flow of liquid of big envelope inner surface.This device also comprises and is configured in big envelope to generate electric arc so that produce first and second electrodes of electromagnetic radiation.

Advantageously, discuss as top, flow of liquid has reduced the thermal stress in the big envelope, allows to use thicker big envelope, suppresses or has prevented the ablation of big envelope, and reduced the problem that is caused by the electrode sputter.Therefore, no matter be to use for photoflash lamp or continuous irradiation, the irradiation output of this device all trends towards more one making peace and can reproducing in time than conventional lights.Simultaneously, the fact of flow-generator electric insulation allow device than trouble free service, and do not worry the starting the arc between flow-generator and the external conductor, and in multi-lamp syste, allow the nearer spacing of adjacent lamps.

This device preferably includes the electric insulation that surrounds flow-generator, and therefore, if desired, then flow-generator can comprise conductor, and in this case, flow-generator still obtains electric insulation through electric insulation.Advantageously; Discuss as top; Mechanical strength as the availability of the conductor of flow-generator makes flow-generator have benefited from metal is resisted pressure liquid stream and back pressure in the flash of light process, but also allows flow-generator to serve as the electric connector that negative electrode is connected to power supply.

In a preferred embodiment, first electrode comprises negative electrode, and the electrical connection that electric insulation centers on this negative electrode and arrives this negative electrode.This execution mode trends towards further strengthening the fail safe of single lamp system and reducing the minimum spacing between the adjacent lamps in the multi-lamp syste.

This device can also comprise electrical connection, and this electrical connection can comprise flow-generator again.Therefore, flow-generator itself can advantageously serve as being electrically connected between the negative terminal of negative electrode and capacitor group or other pulse power.

Electric insulation around flow-generator can comprise big envelope.

Electric insulation around flow-generator can also comprise insulating cover.In this execution mode, insulating cover can be around at least a portion of big envelope.

Advantageously, discuss as top, comprise that in big envelope and insulating cover flow-generator allows flow-generator to be arranged on the position of approaching very much assembly axis, this allows stronger mechanical connection again, helps the mechanical stress of flow-generator opposing flash of light thus.

Electric insulation can also comprise the gas in the space between insulating cover and the big envelope part.Gas can comprise the insulating gas like for example nitrogen.In this execution mode, device can also comprise with the inner surface of insulating cover and the outer surface of big envelope part and cooperating so that seal a pair of sealing that separates each other of the gas in the said space.Gas preferably compresses more than atmospheric pressure.

Big envelope can comprise the transparent column pipe.

Said pipe can have at least four millimeters thickness.More particularly, said pipe can have at least five millimeters thickness.As noted above; Flow of liquid has reduced the thermal gradient in the big envelope; And therefore allow pipe with corresponding bigger mechanical strength than employed those Guan Genghou in the conventional flash lamp, the big bigger ability that increases suddenly of pressure in the opposing flash of light process is provided to big envelope thus.

Said pipe can comprise the right boring cylindrical tube.If like this, then right boring cylindrical tube can have low at least to 5 * 10 ^-2The yardstick tolerance of millimeter.As pointed, the use of this right boring has improved the validity of the sealing that engages with big envelope, but also has improved along the performance of the flow of liquid of big envelope inner surface.

Said pipe can comprise quartz.For example, said pipe can comprise pure quartz, like synthetic quartz.Alternatively, said pipe can comprise and for example mixes the cerium quartz.Pure quartz or mix the quartzy use of cerium and needs is because these materials trend towards not receiving influence (because the quartzy variable color that the UV of quartzy intermediate ion impurity absorption causes of solarization; Pure quartz lacks this impurity, and the cerium oxide alloy absorbs harmful UV and before it can be absorbed by other impurity in the quartz, its energy is emitted as visible fluorescence again).This execution mode is used like for example semiconductor annealing for the application advantageous particularly that wherein needs constant in time, reproducible flash of light frequency spectrum.

Alternatively, said pipe can comprise sapphire.Alternatively, other suitable transparent material also can replace.

The insulating cover of device can comprise at least a in plastics and the pottery.For example, insulating cover can comprise ULTEM ( ^TM) plastics.

First and second electrodes can comprise negative electrode and anode, and negative electrode can have the length shorter than anode.In this respect, the negative electrode of shortening trends towards having that abrupt pressure in the opposing flash of light process changes and the higher mechanical strength of stress.

First electrode can comprise the negative electrode with outstanding length, negative electrode along should outstanding length in big envelope vertically inwardly, outstanding towards the center of device, surpass the inferior penetralia spare that installs in the big envelope.

Outstanding length can be less than the twice of negative electrode diameter.Therefore, with respect to its thickness, negative electrode can be shorter than typical conventional cathode, improves its mechanical strength thus.

But on the contrary, outstanding length is long enough preferably, so that prevent the generation of electric arc between the flow-generator and second electrode.This length is that conductor and the execution mode that forms the part that is electrically connected between negative electrode and the pulse power are preferred for flow-generator wherein, because flow-generator is in the current potential identical with negative electrode in this execution mode.Therefore, in this execution mode, need guarantee the negative electrode long enough, to prevent setting up arc between anode and the flow-generator rather than between anode and the negative electrode.

Outstanding length can be at least 35 centimetres.

Flow-generator can comprise time interior parts.The outstanding length of negative electrode that surpasses flow-generator can be less than five centimetres.

According to a further aspect in the invention, a kind of system that comprises a plurality of said apparatus that are configured to irradiation one common target is provided.This common objective can comprise semiconductor wafer.

Multiple arrangement can be configured to be connected in parallel to each other.If like this, then each in this multiple arrangement device preferably be arranged in this multiple arrangement in the relative direction of neighboring devices on.Therefore, the anode of the negative electrode of each device in this multiple arrangement and the neighboring devices in this multiple arrangement is adjacent.Advantageously, as noted above, the high-intensity magnetic field that is produced by plasma arcs trends towards cancelling each other out, particularly when having the even number device to arrange like this.

Axis between first and second electrodes of each device in this multiple arrangement can and this multiple arrangement in first and second electrodes of neighboring devices between axis separate less than 1 * 10 ^-11 meter.Be easy to this very near spacing and in single multi-lamp syste, allow the lamp of larger amt to be arranged side by side owing to the fact of flow-generator electric insulation becomes.

This system can also comprise that the flow-generator of each device that is configured in multiple arrangement provides the single recycle unit of liquid.If like this, then this single recycle unit can be configured to the discharge port reception liquids and gases of each device from multiple arrangement.This single recycle unit can comprise the separator that is configured to separating liquid and gas, and can comprise the filter of from liquid, removing particle contamination.

This single recycle unit can be configured to provide to flow-generator to have less than about 1 * 10 ^-5The water of the conductivity that Siemens is every centimetre is as liquid.In this respect, the water with low conductivity like this trends towards serving as good insulator, is favourable for the use in the highfield that in big envelope, produces therefore.

It is outer and from extending near the electrically-conductive reflector second electrode near first electrode that this device can also be included in big envelope.If like this, then this electrically-conductive reflector can ground connection.

This device can also comprise the drain chamber that extends outwardly beyond an electrode, is configured to hold a part of flow of liquid.Advantageously, discuss as top, through reducing the influence of turbulent flow to arc, to using with flash of light continuously, drain chamber all trends towards improving the stability and the reproducibility of device radiation output.

For example, drain chamber can stretch out enough far vertically, surpasses a said electrode, so that itself and the turbulent flow that is caused owing to the collapse of the flow of liquid in the drain chamber are isolated.

Flow-generator can be configured to generate from the radially inner gas stream of flow of liquid.In this execution mode, drain chamber can be extended enough far, surpasses a said electrode, so as with its with because liquids and gases stream mixes the turbulent flow isolation that is caused.

Electrode can be configured to generate betwixt the discharge of electricity pulse, so that produce irradiance flash.In this execution mode, drain chamber preferably have enough volumes hold through since the pressure pulse that causes of discharge of electricity pulse to the liquid of a volume of extrapolation.Advantageously; Discuss as top; This drain chamber helps to reduce because the peak value internal pressure that flash of light causes, and reduces the mechanical stress on big envelope and other parts thus, and also allow the increase through flash of light pressure and vertically to the water of the extrapolation electrode that continues to flow through; Reduce this water thus to returning the trend on the electrode that splashes, this trends towards the possibility that increases electrode life and reduce the electric arc cancellation or extinguish again.

This device can also comprise a plurality of power circuits of getting in touch with electrode electricity.For example, a plurality of power circuits can comprise and are configured between first and second electrodes to generate the discharge of electricity pulse so that produce the pulse supply circuit of irradiance flash.A plurality of power circuits can also comprise the idle current circuit that is configured between first and second electrodes, generate idle current.A plurality of power circuits can also comprise the start-up circuit that is configured between first and second electrodes, generate starting current.A plurality of power circuits can also additionally comprise and are configured between first and second electrodes to generate the holding circuit of keeping electric current.

In this execution mode, said device preferably includes another the isolator at least at least one and a plurality of power circuit that is configured to isolate in a plurality of power circuits.Isolator can comprise mechanical switch.Alternatively or additionally, isolator can comprise diode.

Each electrode can comprise the coolant channel that is used to receive the cooling agent stream through wherein.

In addition, at least one electrode can comprise that the tungsten with at least one centimetre of thickness is most advanced and sophisticated.

Advantageously, from the reason of being discussed in this paper front, kind electrode trends towards having the life-span longer than traditional electrode.

Electrode can be configured to generate the discharge of electricity pulse, so that produce irradiance flash.In this execution mode, device can also comprise the idle current circuit that is configured between first and second electrodes, generate idle current.This idle current circuit can be configured in the time period before the discharge of electricity pulse, generate idle current, and this time period is longer through the time through the required fluid of big envelope than flow of liquid.For example, in flow of liquid 3 * 10 ¹Through in the execution mode of big envelope, the idle current circuit arrangement becomes to generate at least 3 * 10 in the millisecond ¹The idle current of millisecond.

The idle current circuit can be configured to generate about at least 1 * 10 ²The electric current of ampere is as idle current.In this respect, as noted above, coolant channel in the electrode allows than much higher idle of conventional flash lamp or ferments electric current, and does not have the fusing or the sputter that will trend towards taking place when traditional electrode suffers this high idle current.From the reason discussed in this paper front, the higher consistency and the reproducibility of the flash of light that this high idle current advantageously causes device and produced, but also trend towards reducing the loss of electrode material, cause long electrode life thus.

Alternatively, for application-specific, idle current that other is suitable and duration also can replace.

According to a further aspect in the invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises the device that is used to generate along the electric insulation of the flow of liquid of big envelope inner surface.This device also comprises and is used for generating electric arc so that produce the device of electromagnetic radiation at big envelope.

According to a further aspect in the invention, a kind of method that produces electromagnetic radiation is provided.This method comprises that the flow-generator that utilizes electric insulation generates the flow of liquid along the big envelope inner surface.This method also is included in and generates electric arc between first and second electrodes so that produce electromagnetic radiation.

According to a further aspect in the invention, provide a kind of a plurality of said devices of control that comprise so that the method for irradiation one common target.This common objective can comprise for example semiconductor wafer.

Control can comprise each device that makes in the said multiple arrangement generate with said multiple arrangement in the electric arc of neighboring devices direction in the opposite direction on electric arc.Advantageously, discuss as top, this configuration allows to be cancelled each other out basically by the high-intensity magnetic field that adjacent arcs generate.

This method can be included in holds a part of flow of liquid in the drain chamber that extends outwardly beyond an electrode.This can comprise isolates a said electrode and the turbulent flow that collapse caused owing to flow of liquid in the drain chamber.

This method can comprise generation from the radially inner gas stream of flow of liquid, and hold can comprise with a said electrode with since the turbulent flow that collapse caused of liquids and gases stream isolate.

Generate electric arc and can comprise and generate the discharge of electricity pulse so that produce irradiance flash, and hold can comprise hold through since the pressure pulse that the discharge of electricity pulse is caused to the liquid of a volume of extrapolation.Advantageously, discuss as top, through reducing the mechanical stress on the big envelope and reduce liquid and return the possibility that splashes on the electrode, this trends towards increasing the life-span of big envelope and electrode.

This method can also comprise other power circuit at least one and a plurality of power circuit of isolating in a plurality of power circuits.

Generate electric arc and can comprise and generate the discharge of electricity pulse, so that produce irradiance flash, and this method can also be included between first and second electrodes and generates idle current.This can be included in and generate idle current in the time period before the discharge of electricity pulse, and this time period is longer through the time through the required fluid of big envelope than flow of liquid.For example, this can comprise generation at least 3 * 10 ¹The idle current of millisecond.Generation can comprise generation about at least 1 * 10 ²The electric current of ampere is as idle current.For example, this can be included in about at least 1 * 10 ²Generate about at least 4 * 10 in the millisecond ²The electric current of ampere is as idle current.Discuss as top, compare with conventional flash lamp, this big idle current trends towards strengthening the consistency and the reproducibility of flash of light.

According to a further aspect in the invention, a kind of device that is used to produce irradiance flash is provided.This device comprises and is configured to generate the flow-generator along the flow of liquid of big envelope inner surface.This device comprises also and is configured in big envelope to generate the discharge of electricity pulse so that produce first and second electrodes of irradiance flash that this pulse makes the different particle contamination of particle contamination that electrode discharges and electrode is discharged in its continuous operation process.This device also comprises the removal equipment that is configured to from liquid, remove particle contamination.

Therefore, advantageously, contrast with the direct current waterwall arc lamp continuously that is not configured to remove this particle contamination, this device can prevent that this particle contamination is accumulated in the flow of liquid, thus the consistency of holding device power output and frequency spectrum.

Removal equipment can comprise the filter that is configured to filtered particles pollutant from liquid.For example, filter can be configured to filter little particle to two microns.More particularly, filter can be configured to filter little particle to a micron.Again especially, filter can be configured to filter the little particle that arrives half micron.

Alternatively or additionally, removal equipment can comprise the disposal valve (disposal valve) of fluid circulating system, this disposal valve can operate in case at the fluid required of flow of liquid at least through big envelope through liquid disposal stream in the time.For example; If typically needing 30 milliseconds, flow of liquid comes through device; Then disposing valve can or open with the flash of light while same period; And can stay open in through the time (being 30 milliseconds in this example) at fluid at least, when flash of light, be present in the possible contaminated liquids in the big envelope so that dispose.

According to a further aspect in the invention, a kind of device that is used to produce irradiance flash is provided.This device comprises and is used to generate the device along the flow of liquid of big envelope inner surface.This device comprises also and is used for generating the discharge of electricity pulse so that produce the device of irradiance flash at big envelope that the device that pulse is used in generation discharges the different particle contamination of particle contamination that is discharged in its continuous operation process with this device that is used for generating.This device also comprises the device that is used for removing from liquid particle contamination.

According to a further aspect in the invention, a kind of method that produces irradiance flash is provided.This method comprises the flow of liquid of generation along the big envelope inner surface.This method also is included in and generates the discharge of electricity pulse between first and second electrodes, in big envelope so that produce irradiance flash, and said pulse makes electrode discharge the different particle contamination of particle contamination that in its continuous operation process, is discharged with electrode.This method also comprises removes particle contamination from liquid.

Removal can comprise filtered particles pollutant from liquid.Filtration can comprise filters little particle to two microns.For example, filtration can comprise and filters little particle to a micron.More particularly, filtration can comprise the little particle that arrives half micron of filtration.

Alternatively or additionally, removal can be included in flow of liquid at least through the required fluid of big envelope through liquid disposal stream in the time.

According to an aspect of the present invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises: a) flow-generator is configured to generate the flow of liquid along the big envelope inner surface; B) first and second electrodes are configured in big envelope, generate electric arc, so that produce electromagnetic radiation; And c) drain chamber; Axially extend outwardly beyond a said electrode; Be configured to hold a part of said flow of liquid; Wherein said drain chamber axially stretches out enough far, surpasses a said said electrode, so that with a said said electrode and because the turbulent flow isolation that the collapse of flow of liquid causes described in the said drain chamber.

According to a further aspect in the invention, a kind of multi-lamp syste is provided.This multi-lamp syste comprises a plurality of said devices, is configured to irradiation one common target.

According to a further aspect in the invention, a kind of device that is used to produce electromagnetic radiation is provided.This device comprises: a) be used to generate the device along the flow of liquid of big envelope inner surface; B) be used for generating electric arc so that produce the device of electromagnetic radiation at big envelope, the wherein said device that is used to generate electric arc comprises first and second electrodes; And c) is used to hold the device of a part of said flow of liquid; The said assembly axis that is used to hold is to extending outwardly beyond a said electrode, and the wherein said device that is used to hold comprises and being used for the device of a said said electrode with the turbulent flow isolation that causes owing to the collapse of flow of liquid described in the said device that is used to hold.

According to a further aspect in the invention, a kind of method that produces electromagnetic radiation is provided.This method comprises: a) generate along the flow of liquid of the inner surface of big envelope; B) between first and second electrodes, in big envelope, generate electric arc, so that produce electromagnetic radiation; And c) in drain chamber, hold a part of said flow of liquid, said drain chamber axially extends outwardly beyond a said electrode, wherein holds to comprise a said said electrode and the turbulent flow isolation that causes owing to the collapse of flow of liquid described in the said drain chamber.

According to a further aspect in the invention, provide a kind of a plurality of said devices of control that comprise to come the method for irradiation one common target.

Although under the situation of the preferred embodiment for the present invention, various features illustrates and describes in this combination, should be appreciated that if desired, and many this characteristics can adopt independently of one another.

To the review of the following description of specific implementations of the present invention, others of the present invention and characteristic will become obvious to those of ordinary skills in conjunction with the drawings.

Description of drawings

In the accompanying drawing of explanation embodiment of the present invention:

Fig. 1 is the front view of device that is used to produce electromagnetic radiation according to first embodiment of the invention;

Fig. 2 show have power-supply system, Fig. 1 device of the block representation of fluid circulating system and control computer;

Fig. 3 is the segmentation sectional view of the cathode portion of device shown in Figure 1;

Fig. 4 is the sectional view details of cathode portion shown in Figure 3;

Fig. 5 is the decomposition section of cathode portion shown in Figure 3;

Fig. 6 is the decomposition diagram of cathode portion shown in Figure 3;

Fig. 7 is the segmentation sectional view of the anode part of device shown in Figure 1;

Fig. 8 looks sideways in the big envelope of device shown in Figure 1, the front view of the second plate shade assembly of anode part shown in Figure 7;

Fig. 9 is the decomposition section of anode part shown in Figure 7;

Figure 10 is the decomposition diagram of anode part shown in Figure 7;

Figure 11 is the end view of anode insert of the anode of anode part shown in Figure 7;

Figure 12 is the end view of anode tip of the anode of anode part shown in Figure 7;

Figure 13 is the bottom view of the inner surface of anode tip shown in Figure 12;

Figure 14 is the perspective view of the electrically-conductive reflector of device shown in Figure 1;

Figure 15 is the circuit diagram of power supply shown in Figure 2; And

Figure 16 is the front view of system that is used to produce irradiance flash that comprises a plurality of devices that are similar to device shown in Figure 1 and single circulation of fluid equipment.

Embodiment

With reference to figure 1, the device that is used to produce electromagnetic radiation according to first embodiment of the invention totally illustrates with 100.In this execution mode, device 100 comprises and is configured to generate the flow-generator (not shown in Fig. 1) along inner surface 102 flow of liquid of big envelope 104.Device 100 comprises first and second electrodes, and it comprises negative electrode 106 and anode 108 respectively in this execution mode.Negative electrode becomes in big envelope 104 with anode arrangement to generate electric arc, so that produce electromagnetic radiation.In this execution mode, device 100 also comprises the drain chamber that totally illustrates with 110, and this drain chamber extends outwardly beyond an electrode and is configured to hold a part of flow of liquid.

More particularly, in this execution mode, drain chamber 110 extends outwardly beyond anode 108 vertically.In this execution mode, drain chamber 110 stretches out enough far vertically, surpasses anode 108, so that anode 108 and the turbulent flow that is caused owing to flow of liquid collapse in the drain chamber 110 are isolated.

In this execution mode, electrode, or more particularly negative electrode 106 and anode 108 are configured to generate the discharge of electricity pulse, so that produce irradiance flash.Still in this execution mode, drain chamber 110 have enough volumes hold through since the pressure pulse that the discharge of electricity pulse causes to the liquid of a volume of extrapolation.Thus, advantageously, discuss as top, through reducing the mechanical stress on the big envelope and reduce liquid and return the possibility that splashes on the electrode, drain chamber 110 trends towards increasing the life-span of big envelope 104 and electrode.

In this execution mode, device 100 comprises with 112 cathode sides that totally illustrate with 114 anode-side that totally illustrate.The reflector that in this execution mode, comprises electrically-conductive reflector 116 connects together negative electrode with anode-side.In this execution mode, electrically-conductive reflector 116 electrical ground.

In this execution mode, cathode side 112 comprises insulating cover 118, and insulating cover 118 bolts (bolt) are to electrically-conductive reflector 116 in this execution mode.Anode-side 114 comprises the first and second anode cap assemblies 120 and 122 that are connected between reflector 116 and the drain chamber 110.

With reference to figure 2, device 100 be shown with the 130 power-supply system electrical communication that totally illustrate and be communicated with the 140 fluid circulating system fluids that totally illustrate.

In this execution mode, device 100 is included among Fig. 2 with the flow-generator shown in 150.In this execution mode, flow-generator is an electric insulation.

In this execution mode, flow-generator 150 is included in the cathode side 112 of device 100.The flow-generator 150 of this execution mode comprises the electric connector 152 that is used for flow-generator 150 is connected to power-supply system 130.Flow-generator 150 also comprises the liquid inlet port 154 and gas ingress port 156 that is respectively applied for from fluid circulating system 140 reception liquids and gases.Flow-generator 150 also comprises the liquid outlet port one 58 that is used for the negative electrode coolant liquid is turned back to fluid circulating system.

In this execution mode, fluid circulating system 140 comprises with described in the United States Patent (USP) mentioned above those and similarly separating and cleaning system 142.As at this with described in the above-mentioned United States Patent (USP); Generally speaking; Separate with cleaning system 142 receiving liquid and gas, separating liquid and gas, cooling liquid and gas, filtration also decontaminating liquid and gas and liquids and gases recirculation got back to flow-generator 150, so that the form that flows with the whirlpool liquids and gases is through installing 100 and recirculation is returned from installing 100 drain chamber 110.In addition, in this execution mode, separate with cleaning system receiving liquid coolant from negative electrode 106 and through drain chamber 110 from anode 108 through liquid outlet port one 58.The liquid coolant that is received is cooled off similarly and is purified, and turns back to flow-generator 150 and second plate shade assembly 122 then, so that recirculation is through the internal cooling channel (not shown in Fig. 2) of negative electrode and anode.

In this execution mode, the discharge of electricity pulse that being used for of in big envelope 104, between first and second electrodes, generating produces irradiance flash makes the different particle contamination of particle contamination that electrode discharges and electrode is discharged in its continuous operation process.More particularly; The inventor finds to contrast with continuous DC operation; This discharge of electricity pulse makes negative electrode 106 and anode 108 discharge the particle contamination of the particle that comprises the little 0.5-2.0 μ m of arriving, and the particle contamination that in continuous DC operation, is discharged by negative electrode and anode does not typically comprise the particle less than 5 μ m.

Therefore, in this execution mode, device 100 comprises that at least one is configured to from the liquid that is received from drain chamber 110 to remove the removal equipment of this different particle contamination.More particularly, in this execution mode, the fluid circulating system 140 of device 100 comprises two this removal equipment, that is, and and filter 144 in separation and the cleaning system 142 and disposal valve 160.

Dispose valve 160 and comprise inlet port one 62, it receives liquids and gases through this ingress port 162 from installing 100 drain chamber 110.Dispose valve and also comprise recirculation outlet port 164, it is transferred to the liquids and gases that receive through this recirculation outlet port 164 separates and cleaning system 142.Dispose valve 160 and also comprise disposal outlet port 166, when needs, it disposes the liquids and gases that receive through this disposal outlet port 166.Default ground, recirculation outlet port 164 is opened, and closes and dispose outlet port 166.But, in this execution mode, dispose valve and can operate at the fluid required of flow of liquid at least and dispose the flow of liquid that receives from drain chamber 110 in through the time through big envelope 104.More particularly, in this execution mode, the time of passing through of the whirlpool flow of liquid through big envelope 104 is about 30 milliseconds.Therefore, after each discharge of electricity pulse, all controlled being made as of disposal valve 160 closed recirculation outlet port 164 and opened 166 at least 30 milliseconds of disposal outlet ports.More particularly; In this execution mode; Dispose controlled being made as of valve and each discharge of electricity pulse after, keep recirculation outlet port 164 and close and dispose outlet port 166 and open 100ms at least, so that all liq that is present in the big envelope 104 when allowing time enough by the discharge of electricity pulse obtains disposal.

In this execution mode, the excitation of disposing valve 160 is by master controller 170 controls, master controller 170 also with power-supply system 130, separate with cleaning system 142 and with the various transducer (not shown) that install 100 and communicate by letter.In this execution mode, master controller 170 comprises the control computer, and this control computer comprises processor circuit 172, and processor circuit 172 comprises microprocessor in this execution mode.Processor circuit 172 is carried out said functionally by being stored in various elements that executable code on the computer-readable medium 174 is configured to control this execution mode, and computer-readable medium 174 comprises hard disk drive in this execution mode.Alternatively, other approach that other suitable system controller, other computer-readable medium or generation are included in the signal in communication media or the carrier wave also can replace, and wherein the signal indicating controller is carried out said functional.

In this execution mode, filter 144 is configured to filtered particles pollutant from liquid.Therefore, in this execution mode, filter deployment becomes from liquid, to filter little particle to two microns.More particularly, in this execution mode, filter deployment becomes from liquid, to be filtered to when young one micron particle.Again especially, in this execution mode, filter deployment becomes from liquid filtering to when young to half micron particle.

In this execution mode; The separation of fluid circulating system 140 and cleaning system 142 comprise the main liquid outlet port one 80 that is used for liquid is sent to the liquid inlet port 154 of flow-generator 150, so that provide along the required liquid of the whirlpool flow of liquid of the inner surface 102 of big envelope 104 and be used for the cooling agent of negative electrode 106.Separate with cleaning system 142 also comprise be used for gas be sent to flow-generator 150 gas access port one 56 gas vent port 182 and be used for the anode coolant liquid being sent to the second liquid outlet port one 84 of anode 108 through second plate shade assembly 122.System 142 comprises that also the liquid outlet port one 58 that is used for through flow-generator 150 receives the coolant entrance port one 86 of liquid coolants and is used for through disposing valve 160 receives liquids and gases from drain chamber 110 main-inlet port one 88 from negative electrode 106.System 142 also comprises and is used to receive the additional supply of liquids and gases so that replace after each flash of light by additional input port 190 of the liquid of the amount of disposing valve 160 disposal and gas make-up input port 192.

In this execution mode, liquid replenishes input port 190 and is communicated with the supply of purifying waste water, and purifies waste water and not only serves as the liquid that is used for the whirlpool flow of liquid but also serve as the electrode cooling agent.More particularly, in this execution mode, purifying waste water has the conductivity less than every centimetre of about ten little Siemens.Again especially, in this execution mode, purify electrical conductivity of water between every centimetre of about five to about ten little Siemens.The water of this low conductivity serves as good electric insulation, is favourable for the use in this execution mode therefore, and wherein water will suffer the highfield in the big envelope 104.Alternatively, if desired, then for application-specific, other suitable liquid also can replace.

In this execution mode, gas make-up input port 192 is connected with the supply that is the inert gas of argon in this execution mode.In this execution mode, owing to compare low relatively cost with other inert gas such as xenon or krypton, so argon is preferred.But alternatively, if desired, then other suitable gas or admixture of gas also can replace.

In this execution mode, power-supply system 130 comprises negative terminal 132 of getting in touch with negative electrode 106 and the plus end 134 of getting in touch with anode 108.More particularly, in this execution mode, negative terminal 132 is connected to the electric connector 152 of flow-generator 150, in this execution mode flow-generator 150 comprise conductor and with negative electrode 106 electrical communication.Similarly, in this execution mode, plus end 134 is connected to second plate shade assembly 122, second plate shade assembly 122 also comprise conductor and with anode 108 electrical communication.In this execution mode, plus end 134 electrical ground, and any required voltage all generates through the current potential that the plus end 134 with respect to ground connection reduces negative terminals 132.Therefore, in this execution mode, the conductive component of the outer exposed of device 100 like second plate shade assembly 122 and reflector 116, maintains identical (ground connection) current potential.

Cathode side

With reference to figure 1-3, in Fig. 3, more specifically show the cathode side 112 of device 100.In this execution mode, cathode side 112 comprises flow-generator 150, flow-generator 150 electric insulations and be configured to generate the flow of liquid along big envelope 104 inner surfaces 102 in this execution mode.

In this execution mode, the flow-generator 150 of electric insulation comprises conductor.More particularly, in this execution mode, flow-generator 150 is made up of brass.In this respect; Brass have opposing because the suitable mechanical intensity of the mechanical stress that causes of flash of light and serve as negative electrode 106 and power supply 130 between the electrically conductive, electrically path; The negative terminal 132 of power supply 130 is connected to flow-generator 150 (electric connector 152 shown in Figure 2 is not shown in Fig. 3 with liquid outlet port one 58, because they are not in the plane of sectional view shown in Figure 3) at its electric connector 152.Therefore, in this execution mode, except the eddy-currents like the following generation liquids and gases of more specifically describing, the electrical connection that flow-generator 150 and electric connector 152 thereof also serve as negative electrode 106.Alternatively, except brass, flow-generator 150 can comprise one or more other suitable conductor.

Perhaps; As alternative dispensing means; Center on except being insulated material resembling in this execution mode, flow-generator 150 can rely on by electrical insulating material to be formed or comprises that electrical insulating material comes electric insulation, in this case; If desired, then can provide through additional wiring to the electrical connection of negative electrode.

Flow-generator 150 is in this execution mode of conductor therein, and cathode side 112 comprises the electric insulation around flow-generator 150.More particularly, in this execution mode, the electric insulation that centers on flow-generator 150 comprises big envelope 104, also comprises insulating cover 118.As shown in Figure 3, in this execution mode, insulating cover 118 centers on part big envelope 104 at least, or more particularly, the end 300 of big envelope 104.

In this execution mode, insulating cover 118 comprises at least a in plastics and the pottery.More particularly, in this execution mode, insulating cover 118 by ULTEM ( ^TM) the plastics composition.Alternatively, other suitable insulation material like for example other plastics or pottery, also can replace.

In this execution mode, big envelope 104 comprises the transparent column pipe.In this execution mode, said pipe has at least four millimeters thickness.More particularly, in this execution mode, said pipe has at least five millimeters thickness.Again especially, in this execution mode, said pipe has at least five millimeters thickness and has 45 millimeters interior diameter and 55 millimeters overall diameter.Like what discussed, because the thermal gradient that produces between the outer surface of the inner surface of the heated by plasma of in conventional flash lamp, managing and cooling is to be understood that it is inappropriate that the pipe thicker than 3mm it has been generally acknowledged that flash application in this paper front.Whirlpool flow of liquid along the inner surface 102 of big envelope 104 has reduced this thermal gradient, allows the thicker effective big envelope 104 of doing thus.Therefore, in this execution mode, because its bigger thickness, so big envelope 104 has than mechanical strength higher in the conventional flash lamp the related mechanical stress of rapid pressure variation that therefore can resist better and cause owing to glistening.

In this execution mode, big envelope 104 comprises smart thorax cylindrical tube.More particularly, in this execution mode, smart thorax cylindrical tube has the yardstick tolerance of hanging down at least to 0.05 millimeter.In this respect, this smart thorax trends towards providing sealing more reliably to resist big envelope Intermediate High Pressure in the flash of light process.In addition, the smoothness that the big envelope inner surface strengthens trends towards improving the performance along the mobile whirlpool flow of liquid of big envelope inner surface, also trends towards reducing electrode corrosion.

In this execution mode, big envelope 104, or more particularly smart thorax cylindrical tube comprise quartz ampoule.Again especially, in this execution mode, quartz ampoule is to mix the cerium quartz ampoule, is mixed with cerium oxide to avoid solarization described above/variable color difficult point.Therefore, in this execution mode,, improved the consistency and the reproducibility of the output spectrum of the flash of light that produces by device 100 through avoiding this solarization/variable color.Alternatively, big envelope 104 can comprise pure quartz, and like for example synthetic quartz, this also trends towards being avoided solarization/variable color shortcoming.But alternatively, if inessential for the consistency and the reproducibility of application-specific frequency spectrum, then big envelope 104 can comprise the material that suffers solarization, like for example common transparent vitreosil.More generally, if desired, then depend on required machinery of application-specific and hot robustness, also can replace like for example sapphire other transparent material.

In this execution mode, electric insulation, or more particularly big envelope 104 and insulating cover 118 are around negative electrode 106 with to the electrical connection of negative electrode 106.As noted above; In this execution mode; Electrical connection to negative electrode 106 comprises flow-generator 150 and electric connector 152 (not shown in the plane of Fig. 3 sectional view), is electrically connected negative terminal 132 electrical communication of negative electrode 106 and power-supply system 130 shown in Figure 2 through this.

In this execution mode, the electric insulation that centers on flow-generator 150 also comprises the gas in the space between insulating cover 118 and the big envelope end 300.More particularly, in this execution mode, device 100 comprises a pair of sealing that separates each other 302 and 304, and they cooperate with the inner surface 306 of insulating cover 118 and the outer surface 308 of big envelope 104 ends 300, so that seal the gas in the said space.In this execution mode, gas compresses.More particularly, in this execution mode, gas is the nitrogen of compression.For N with compression ₂To

surface

306 and 308 and seal the space pressurization between 302 and 304, insulating cover 118 comprises inlet valve 310 and outlet valve 312.In this execution mode, the nitrogen pressure between the sealing 302 and 304 maintains the pressure higher than the typical pressure in the big envelope 104.More particularly, in this execution mode, the pressure in the big envelope typically is in about 2 atmospheric magnitudes, and the nitrogen pressure between the sealing maintains three times of about this pressure, or in other words, about 6 atmospheric magnitudes.Have been found that this pressurization insulation in the space between the sealing 302 and 304 that keeps the space clean dry helps to provide the desirable entry condition collection of arc.

Although alternatively, other suitable sealing also can replace, and in this execution mode, sealing 302 and 304 comprises the O ring.

With reference to figure 2,3,4 and 5, except the flow of liquid on the inner surface 102 that generates big envelope 104, in this execution mode, flow-generator 150 also is configured to generate from the radially inner gas stream of flow of liquid.Therefore, in this execution mode, drain chamber 110 is extended enough far, surpasses anode 108, so as with anode 108 with since in the drain chamber 110 liquids and gases stream mix the turbulent flow isolation that causes.

With reference to figure 3,4 and 5, in order to generate liquids and gases stream, in this execution mode, flow-generator 150 comprises the flow-generator core 320 that is threaded onto gas eddy generator 322 and liquid eddy generator 324.In this execution mode, gas and liquid eddy generator are having screw thread with the opposite direction of whirlpool liquids and gases flow path direction, make that the reaction pressure that flows from liquids and gases is to trend towards making the direction of rotation that change is tight rather than fluff that is threaded.Alternatively, other suitable method that gas and liquid eddy generator is connected to said core also can replace.

In this execution mode, lock ring 321 prevents that the flow-generator core 320 in the insulating cover 118 from fluffing.The sealing 326 that in this execution mode, comprises the O ring provides tight seal between the inner surface 102 of flow-generator core 320 and big envelope 104.

In addition, in this execution mode, packing ring 329 is inserted between the outward flange and insulating cover 118 of big envelope 104.Although alternatively, other suitable material also can replace, and in this execution mode, packing ring 329 comprises teflon.

Another sealing 330 provides tight seal between flow-generator core 320 and liquid eddy generator 324.

Referring to figs. 2 to 5, in this execution mode,, receive through its liquid inlet port 154 at flow-generator 150 from the fluid under pressure of fluid circulating system 140 for the whirlpool flow of liquid on the inner surface 102 that generates big envelope 104.The liquid admission passage 340 of fluid under pressure through in flow-generator core 320, limiting.Some liquid are compelled to through a plurality of holes; As in 342 and 344 shown those holes, these holes extend in the manifold space (manifold space) 346 that is limited between flow-generator core 320 and the liquid eddy generator 324 through the body of flow-generator core 320.From manifold space 346; Liquid is compelled to through a plurality of holes; As in 348 and 350 shown those holes, these holes extend through the body (hole 350 is not in the plane of Fig. 3-5 sectional view, but its part can be seen through the manifold space 346 of Fig. 4) of liquid eddy generator 324.It all is angled that hole 348 and 350 reaches through each hole in other similar hole of liquid eddy generator 324 bodies; Therefore when liquid is compelled to through the hole; It not only obtains the velocity component with respect to the radial and axial direction of big envelope, but also the tangent velocity component of circumference of acquisition and big envelope inner surface 102.Therefore, when fluid under pressure left hole 348,350 and other similar hole, its formed whirlpool liquid wall, when it on the axial direction towards anode 108 inner surface 102 around big envelope 104 during through big envelope.

In this execution mode, each electrode all comprises the coolant channel that is used to hold the cooling agent stream through wherein.More particularly; In this execution mode; Get into liquid except leaving liquid admission passage 340 through

hole

342 and 344 as stated so that form the part of whirlpool flow of liquid, the remainder of the liquid of the liquid admission passage 340 of flowing through is pushed into negative electrode coolant channel 360 and serves as the cooling agent that cools off negative electrode 106.

In this execution mode, it is the hollow cathode pipeline 362 of brass that negative electrode 106 is included in this execution mode.The open outer end of cathode pipe 362 is screwed in the hole that limits through flow-generator core 320, has a sealing 363 between cathode pipe and flow-generator core, tight seal to be provided.Also the inner that the negative electrode plug-in unit 364 of brass is threaded onto cathode pipe 362 in this execution mode.Negative electrode 106 also comprises the cathode 376 around cathode pipe 362.The cathode 376 that is brass in this execution mode is screwed in the wider portion in the hole that limits through flow-generator core 320, has a sealing 377 between cathode and flow-generator core, tight seal to be provided.In this execution mode, negative electrode 106 also comprises the cathode taps 370 that is threaded onto cathode 376 and centers on negative electrode plug-in unit 364.Cathode point 372 is installed to cathode taps 370.In this execution mode, cathode taps 370 all is a conductor with cathode point 372.More particularly, in this execution mode, cathode taps 370 comprises copper, and cathode point 372 comprises tungsten.Therefore; With reference to figure 2-4; With understand negative terminal 132 from power-supply system 130, through electric connector 152 and flow-generator core 320, through cathode 376 and cathode taps 370, formed electric pathway to cathode point 372; Allow electronics to flow to cathode point 372 thus, so that between negative electrode 106 and anode 108, set up arc from negative terminal 132.

If desired, the connection of other suitable type also can replace various being threaded.For example, if desired, then cathode taps 370 can be soldered or welded to cathode 376.

In this execution mode, negative electrode coolant channel 360 is defined in the cathode pipe 362 of hollow.Coolant liquid continues to get into the negative electrode plug-in unit 364 of hollow through coolant channel 360.Coolant liquid also gets into the space 368 that between negative electrode plug-in unit 364 and cathode taps 370, limits through the hole 366 that limits through negative electrode plug-in unit 364, and cathode point 372 is installed to cathode taps 370.Therefore, when coolant liquid during through space 368, it is from cathode taps 370 and remove heats from cathode point 372 indirectly thus.Like what specifically discuss below in conjunction with the first watch of similar anode 108, in this execution mode, the inner surface (not shown) of cathode taps 370 has a plurality of parallel groove (not shown), is used for along required direction guiding liquids cooling agent.Coolant liquid through space 368, gets into the space 374 that between cathode pipe 362 and cathode 376, limits by said groove guiding then.Coolant liquid gets into the cooling agent that flow-generator core 320, limits and leaves passage (not shown in the plane of the sectional view of Fig. 3-5) from space 374; It leads to liquid outlet port one 58 shown in Figure 2, turns back to the separation of fluid circulating system 140 and the coolant entrance port one 86 of cleaning system 142 through these outlet port 158 coolant liquids.

In this execution mode, tungsten cathode most advanced and sophisticated 372 has at least one centimetre thickness.Therefore, advantageously, like what discussed in this paper front, the combining of the liquid cools of above-mentioned negative electrode 106 and thick relatively tungsten cathode most advanced and sophisticated 372 trends towards to negative electrode 106 being provided the life-span longer than traditional electrode.

In this execution mode, to be similar to the mode that aforesaid liquid eddy generator 324 generates the whirlpool flow of liquid, gas eddy generator 322 generates the whirlpool gas stream.In this execution mode, port one 56 receives from the gas vent port 182 of separation with cleaning system 142 gas-pressurized in the gas access of flow-generator 150.The gas admission passage 380 of gas-pressurized through in flow-generator core 320, limiting; Finally through as leaving the gas admission passage in a plurality of holes shown in 382; These holes extend through the body (hole 382 not in the plane of Fig. 3-5 sectional view, but can in Fig. 4, see) of gas eddy generator 322.Gas-pressurized leaves through hole 382 and similar hole, and the inner surface 384 of bump liquid eddy generator 324.Resemble the hole 348 and 350 of liquid eddy generator 324; Hole 382 and other similar hole of gas eddy generator 322 are angled; Make the gas leave not only have with respect to big envelope axially and the velocity component of radial direction, and have with the tangent direction of the inner periphery of the inner surface 384 of liquid eddy generator 324 on velocity component.Therefore, when gas was released through hole 382 and other similar hole, its formed whirlpool gas stream, when it axial direction during through big envelope 104 around circumferencial direction.In this execution mode; The hole 382 of gas eddy generator 322 and the angle in other similar hole be with the hole 348 of liquid eddy generator 324 and 350 and the identical direction in similar hole on angled; Therefore when their process big envelopes, liquids and gases are in identical direction rotation.

Return with reference to figure 3 and 4, in this execution mode, negative electrode 106 has outstanding length, and it is axially inside in big envelope 104, outstanding towards the center of installing 100 that length should be given prominence in its edge, above the inferior penetralia spare that installs in the big envelope.In this execution mode, this time penetralia spare is a flow-generator, perhaps more particularly, is its liquid eddy generator 324.

In this execution mode, the outstanding length of negative electrode is less than the twice of negative electrode 106 diameters.Therefore, with respect to its diameter, negative electrode 106 is shorter than conventional cathode, and this resists and the related big abrupt pressure change of glistening for its higher rigidity and mechanical strength.Say that utterly in this execution mode, the outstanding length of negative electrode that surpasses flow-generator is less than five centimetres.

But simultaneously, in this execution mode, the outstanding length long enough of negative electrode 106 takes place between flow-generator 150 and anode 108 rather than between negative electrode and anode to prevent the discharge of electricity pulse.More particularly, in this execution mode, outstanding length is at least 35 centimetres.

In this execution mode, the cathode point 372 of negative electrode 106 has at least one centimetre thickness.Therefore, advantageously, like what discussed in this paper front, the combination of the liquid cools of following negative electrode 106 and thick relatively tungsten cathode most advanced and sophisticated 372 trends towards to negative electrode 106 being provided the life-span longer than traditional electrode.

Anode-side

With reference to figure 2 and 7-10, in Fig. 7, more specifically show the anode-side 114 of device 100.Generally speaking, in this execution mode, anode-side 114 comprises anode 108, reflector 116, the first and second anode cap assemblies 120 and 122 and drain chamber 110.

In this execution mode, drain chamber 110 has inner surface 700, and this inner surface has the shape of truncated cone in this execution mode, when axially stretching out through anode 108, radially inwardly is tapered.But alternatively, this inner surface can be a cylinder, perhaps can outwards rather than inwardly be tapered.Preferably; The inner surface 700 of drain chamber 110 is configured to allow flow of liquid after leaving big envelope 104, to continue whirlpool along inner surface 700; Make that whirlpool liquid continues to separate with the whirlpool gas stream in drain chamber 110, (rather than mixture of gas and water) is able to return in the big envelope 104 because this makes gas when arc is set up.

In this execution mode, drain chamber 110 is connected to accessory 702, and accessory 702 is the stainless steel accessory in this execution mode.The sealing 703 that in this execution mode, comprises O ring provides tight seal between the inner surface 700 of drain chamber 110 and accessory 702.Accessory 702 is connected to flexible pipe, through this flexible pipe, leaves the liquids and gases eddy-currents Returning fluid circulatory system 140 of drain chamber 110.

Although negative electrode 106 has the length than anode 108 weak points in this execution mode, with reference to figure 7 and 8, in this execution mode, anode 108 is similar to negative electrode 106 to a certain extent.More particularly, in this execution mode, anode 108 comprises anode pipe 704, and its outer end is screwed in the hole that limits through second plate shade assembly 122.Sealing 706 provides tight seal between the outer end of anode pipe 704 and second plate shade assembly 122.Anode 108 also comprises anode bodies 708, and it is screwed onto in the wider portion in the hole that limits through second plate shade assembly 122, has a sealing 710 between anode bodies 708 and second plate cover 122, tight seal to be provided.Anode pipe 704 is threaded onto anode insert 712, and anode bodies 708 is threaded onto anode head 714, and anode tip 716 is installed to anode head 714.Anode bodies 708 centers on anode pipe 704 and anode insert 712 with anode head 714.Equally, the same with negative electrode, if desired, the then connection of other suitable type like welding or welding, can replace above-mentioned being threaded.

In this execution mode, anode pipe 704, anode bodies 708 and anode insert 712 are processed by brass, and anode head 714 is made of copper, and anode tip 716 is processed by tungsten.Alternatively, if desired, then other suitable material can replace.In this execution mode, tungsten anode tip 716 has at least one centimetre thickness.Therefore, advantageously, like what discussed in this paper front, the combining of the liquid cools of following anode 108 and thick relatively tungsten anode tip 716 trends towards to anode 108 being provided the life-span longer than traditional electrode.

With reference to figure 2,7,8 and 11-13, for anode 108 provides liquid coolant flow, in this execution mode, the anode-side 114 of device 100 comprises the liquid inlet that is installed to second plate cover 122 720 shown in Figure 7.Liquid inlet 720 receives the liquid coolant of pressurization from the liquid outlet port one 84 of separation shown in Figure 2 and cleaning system 142.Liquid coolant is sent to the coolant conduit 722 that in second plate cover 122, limits through liquid inlet 720.Coolant conduit 722 is sent to liquid in the space 732 that between the inner surface of the outer surface of anode pipe 704 and anode bodies 708, limits.The first of the fluid under pressure cooling agent of the first through space 732 shown in Fig. 3 the latter half gets into the space 728 that between anode insert 712 and anode head 714, limits.When liquid passed through space 728, it was from anode head 714 and remove heats from anode tip 716 thus.Shown in figure 13, in this execution mode, the inner surface 730 of anode head 714 comprises a plurality of parallel grooves, is used for guiding liquids cooling agent on required direction.As shown in Figure 7, near the hole 726 that limits through anode insert 712, said groove will be directed to the second portion in space 732 shown in Fig. 3 the first half from the first of the liquid coolant in space 728.The second portion of fluid under pressure cooling agent from coolant conduit 722 along the space 732 second portion directly arrive hole 726 near.Then, two parts of fluid under pressure cooling agent all pass through hole 726 and get at the anode pipe 704 inner coolant channels 724 that limit.Liquid coolant continues outwards to advance through coolant channel 724, up to getting into drain chamber 110.

With reference to figure 2 and 7-10, except the aforesaid liquid coolant channel is provided, in this execution mode, second plate shade assembly 122 also provides the electrical connection between anode 108 and the power-supply system 130.In this execution mode, second plate shade assembly 122 comprises conductor.More particularly, in this execution mode, second plate shade assembly 122 is processed by brass.Through the electric connector 900 shown in Fig. 9 and 10, second plate shade assembly 122 is connected to (ground connection in this execution mode) plus end 134 of power-supply system 130.Although alternatively, the electric connector of other suitable type also can replace, and in this execution mode, electric connector 900 comprises four extrusion pressing type lug plate connectors (compression-style lug connector).Therefore, second plate shade assembly 122 is accomplished and is electrically connected, and allows electronics from anode tip 716, through anode head 714 and through anode bodies 708, flows into and flow to through second plate shade assembly 122 and electric connector 900 thereof the plus end 134 of power-supply system 130.

With reference to figure 2,9 and 10, in this execution mode, second plate shade assembly 122 comprises pressure transducer port 902, is used for holding therein pressure converter 904.Pressure converter is communicated by letter with controller 170 shown in Figure 2, and it sends the signal of indicating pressure in the big envelope 104 to controller 170.

With reference to figure 7 and 9, in this execution mode, big envelope 104 holds through reflector 116 and the respective aperture in the first anode shade assembly 120, and is contained in closely in the second plate shade assembly 122.The sealing 740 that in this execution mode, comprises O ring provides tight seal between the outer surface of big envelope 104 and second plate shade assembly 122.The packing ring 742 that in this execution mode, comprises teflon washer is inserted between the outer end and second plate shade assembly 122 of big envelope 104.

With reference to figure 7 and 8, another view of second plate shade assembly 122 has been shown in Fig. 8.The core 802 of second plate shade assembly 122 is installed in the center in the hole 804 that limits through second plate shade assembly 122, and anode bodies 708 is connected to this core 802.Antelabium 806 core 802 is connected to the remainder of second plate shade assembly 122 and in hole 804 centre of support part 802, and supporting anodes 108 thus.Coolant conduit 722 extends to the hole that limits through core 802 through antelabium 806.

In the course of the work, the liquids and gases eddy-currents that is generated by the flow-generator shown in Fig. 2 and 3 is through hole 804 and get into drain chamber 110, is just partly interrupted by antelabium 806.In this respect; It is enough big that the size of antelabium 806 is preferably wanted; So that being provided, enough mechanical strengths support the great machinery stress that anode 108 opposings cause in each flash of light process; Preferably as far as possible little but then, so that minimize interference to the liquid eddy-currents on the inner surface 102 of big envelope 104.

In this execution mode, first anode shade assembly 120 comprises plastics, or more particularly, be ULTEM ( ^TM) plastics.Alternatively, also can replace like for example other suitable material of pottery.In this execution mode of the sub-ground connection of power positive end that has connected second plate shade assembly 122, in order to eliminate earth-return, insulator is preferred for first anode shade assembly 120, but optional.Therefore, alternatively, if desired, then first anode shade assembly can comprise conductor.

Reflector

With reference to figure 2 and 14, in Figure 14, more specifically show the reflector 116 of conduction.In this execution mode, reflector comprises conductor, or more particularly, is aluminium.Alternatively, other suitable material also can replace with configuration.As pointed, in this execution mode, reflector 116 ground connection.In this execution mode, reflector outside big envelope 104 from extend near the negative electrode 106 anode 108 near.

Power supply

With reference to figure 2 and 15, power-supply system 130 more specifically illustrates in Figure 15.In this execution mode, power-supply system 130 comprises and electrode, or more particularly with negative electrode 106 and anode 108, a plurality of power circuits of electrical communication.

Again especially; In this execution mode, a plurality of power circuits comprise and are configured at the pulse supply circuit 1500 that generates the discharge of electricity pulse between first and second electrodes, are configured at the idle current circuit 1502 that generates idle current between first and second electrodes, are configured to generating the start-up circuit 1504 of starting current between first and second electrodes and be configured between first and second electrodes, generate the holding circuit 1506 of keeping electric current.

In this execution mode, power-supply system 130 comprises that at least one is configured to isolate another the isolator at least at least one and a plurality of power circuit in a plurality of power circuits.More particularly, in this execution mode, first isolator comprises mechanical switch 1510, and when breaking off, this switch is used for the negative terminal of the negative terminal of idle current circuit 1502 and holding circuit 1506 and start-up circuit 1504 is isolated.Still in this execution mode, second isolator comprises isolating diode 1512, is configured to idle current circuit 1502 and holding circuit 1506 and pulse supply circuit 1500 are isolated.In this execution mode, mechanical switch 1510 comprises ROSS type GD60-P60-800-2C-40 mechanical switch and can respond from the control signal of controller 170 shown in Figure 2 and electric excitation.In this execution mode, isolating diode 1512 comprises 6kV _RRMDiode.Alternatively, other suitable isolator also can replace.

In this execution mode, each all receives AC power idle current circuit 1502, start-up circuit 1504 and holding circuit 1506, or more particularly, the three phase power of 480V, 60Hz.Similarly, pulse supply circuit 1500 also comprises DC power supply 1514, and it receives similar 480V/60Hz power, is described below, and it becomes direct voltage with this power transfer, so that give the capacitor charging of pulse supply circuit.In this execution mode, DC power supply 1514 scalable are so that produce the required DC charging voltage up to 4kV.Shown in figure 15, in this execution mode, the 480V/60Hz AC power also is used to supply with miscellaneous equipment, the main pump (not shown) of fluid circulating system 140 as shown in Figure 2.Similarly, in this execution mode, 480V/60Hz power also offers a plurality of transformers, and transformer provides 110V AC power to the clarifier (not shown) of controller shown in Figure 2 170 and fluid circulating system 140 again.If desired, 220V power also can obtain from the 480V power that gets into.

In this execution mode, the 480V AC power that 1502 rectifications of idle current circuit get into also produces the controlled direct current up to 600A.In this execution mode, therefore the plus end of idle current circuit 1502, generates direct voltage through the current potential that reduces negative terminal with respect to ground electrical ground.

In this execution mode, idle current circuit 1502 is communicated by letter with controller 170 shown in Figure 2.When mechanical switch 1510 was closed, idle current circuit 1502 received the digital command of the required idle current of appointment that slave controllers 170 receive, and it makes appointment in response to this order idle current flows between the negative electrode 106 of device 100 and anode 108.In this execution mode; Idle current circuit 1502 comprises can be from the branch company of Massachusetts, USA SatCon Technology CorporationofCambridge, the SatCon type HCSR-480-1000 DC power supply circuit that Ontario, Canada SatCon Power System ofBurlington obtains.Alternatively, the idle current circuit of any other suitable type can replace.

In this execution mode, 1504 of start-up circuits are used between negative electrode 106 and anode 108, setting up arc at first.In order to achieve this end, in this execution mode, start-up circuit 1504 receives the 480V/60Hz AC powers, and it is with its rectification and be used for to a plurality of internal capacitor (not shown) chargings.When the internal electric source of its rising reaches predetermined threshold for example during 30kV, start-up circuit 1504 send current impulse (for example, 10A) so that between negative electrode 106 and anode 108, set up arc.

In this execution mode, holding circuit 1506 uses thereafter when starting and and then, so that keep the arc between negative electrode 106 and the anode 108.In this execution mode, holding circuit receives the 480V/60Hz AC power, and it is with its rectification, so that produce the constant current direct current output of 15A.The plus end 134 of the plus end of holding circuit 1506 and power-supply system 130 is got in touch, and gets in touch with anode 108 thus.The negative terminal of holding circuit 1506 can be arranged to through start-up circuit 1504 indirectly or through closed mechanical switch 1510 directly with negative electrode 106 electrical communication, the latter's direct connection permission electronics from the negative terminal of holding circuit 1506 through core inductor 1508, through isolating diode 1512, flow to negative electrode 106 through switch 1510 and the negative terminal 132 through power supply.Although alternatively, other suitable inductance also can replace, and in this execution mode, core inductor 1508 has the inductance of 50 milihenries.

In this execution mode, pulse supply circuit 1500 is used between negative electrode 106 and anode 108, generating the discharge of electricity pulse that produces required irradiance flash.In order to achieve this end, pulse supply circuit 1500 receives the 480V/60Hz AC power, so that produce direct voltage, this direct voltage is used for this power to a plurality of capacitor chargings by DC power supply 1514 rectifications.More particularly, in this execution mode, capacitor comprises first and second capacitors 1520 and 1522 that are connected in parallel.Although alternatively, other suitable capacitor also can replace, and in this execution mode, each in first and second capacitors all has the electric capacity of 7900 μ F.In this execution mode, pulse supply circuit 1500 also comprises diode 1524 and 1526, resistor 1528,1530,1532 and 1534 and dump relay (dump relay) 1536, and all are all shown in figure 15 and dispose.In this execution mode, resistor 1528,1530,1532 and 1534 has the resistance of 60 Ω, 5 Ω, 20k Ω and 20k Ω respectively.

In this execution mode, to capacitor discharge and the pulse of generation discharge of electricity, pulse supply circuit 1500 comprises discharge switch for when needed.More particularly, in this execution mode, discharge switch comprises the silicon controlled rectifier (SCR) 1540 of getting in touch with controller 170 shown in Figure 2.As will understand, SCR1540 is applied to SCR1540 up to gate voltage by controller 170 with not conducting, in response to this, as long as SCR1540 will begin conducting and its electric current of flowing through surpasses the intrinsic holding current of SCR, just continues conducting.Therefore, SCR1540 does not allow the capacitor discharge of pulse supply circuit 1500, is applied to SCR1540 up to gate voltage by controller 170, and as response, the capacitor of pulse supply circuit is allowed to discharge.In this execution mode, through the inductor 1542 that in this execution mode, has 4.6 microhenry inductance.Alternatively, the discharge switch of other suitable type also can replace.

Work

With reference to figure 2 and 15; In this execution mode; Controller 170, or its processor circuit 172 more particularly are configured to communicate by letter with the associated components of power-supply system 130 with fluid circulating system 140 by the routine that comprises executable instruction code that is stored in the computer-readable medium 174; So that operative installations 100 produces irradiance flash, more specifically describe as following.

More specifically describe like above combination Fig. 3-5, processor circuit 172 at first point to fluid circulating system 140 send signals in case beginning circulating fluid and gas through device, thereby the eddy-currents of generation liquids and gases.In this execution mode, the whirlpool flow of liquid is sent to liquid eddy generator 324 with the pressure of about 17-20 atmospheric level.Advantageously, this high pressure trends towards reducing the possibility of big envelope exposure (envelope exposure) in the flash of light process that is produced.

Then; Processor circuit 172 points to each components communicate with power-supply system 130; Carry out following sequence so that make these parts: between negative electrode 106 and anode 108, start arc, keep this arc, before flash of light, idle current be set, generate the discharge of electricity pulse then so that produce irradiance flash.

More particularly, when initial the startup, mechanical switch 1510 is in open position.Processor circuit 172 points to start-up circuit 1504, holding circuit 1506 and pulse supply circuit 1500 and sends enabling signal, so that connect each in these equipment.Therefore, the capacitor in start-up circuit 1504 and the pulse supply circuit 1500 begins charging.Holding circuit 1506 does not produce enough voltage so that between negative electrode 106 and anode 108, set up arc, therefore is not required, after arc is set up.Idle current is supplied with 1502 and is not also produced electric current, and waits for from processor circuit 172 reception appropriate control signals.

In case the internal capacitor in the start-up circuit 1504 reaches the threshold voltage of arcing (foundation), in this execution mode, be up to 30kV, capacitor is just sent the electric current up to 10 amperes, so that between negative electrode 106 and anode 108, set up arc.In case arc is able to set up, holding circuit 1506 just can be kept this arc through the start-up circuit 1504 indirect electric currents of keeping that transmit 15A.The current sensor (not shown) of device 100 sends the signal that the stable arc of indication has been set up to processor circuit 172.When receiving sort signal; Processor circuit 172 points to send to start-up circuit 1504 and turn-offs its oneself signal; The electrical driver that also points to mechanical switch 1510 transmits control signal, so that make mechanical switch closed, allows holding circuit 1506 to walk around start-up circuit 1504 thus.In other words, the closure of switch 1510 makes the negative terminal of holding circuit 1506 get in touch with negative electrode 106 through core inductor 1508, isolating diode 1512 and switch 1510.Therefore, when switch 1510 closures, holding circuit 1506 continues to make the electric current of keeping of 15A between negative electrode 106 and anode 108, to flow.

When needs glistened, the processor circuit 172 of controller 170 pointed at first and sends signal so that suitable idle current is provided to idle current circuit 1502, and controller sends signal so that generate the discharge of electricity pulse to pulse supply circuit 1500 then.

More particularly, in this execution mode, idle current circuit 1502 is configured to generate idle current in the time period before the discharge of electricity pulse, and this time period is longer through the time through the required fluids of big envelope 104 than flow of liquid.Therefore, in fluid through the time was about 30 milliseconds this execution mode, the idle current circuit arrangement became to generate idle current 30ms at least.

Like what discussed in this paper front, in this execution mode, idle current circuit 1502 is configured to generate the idle current more much bigger than conventional flash lamp, and idle current typically is 1A or littler in conventional flash lamp.Like what discussed in this paper front, this high idle current is favourable, because they have significantly improved the consistency and the reproducibility of the irradiance flash that is produced.More particularly, in this execution mode, the idle current circuit arrangement becomes to generate about at least 100 amperes idle current.

Again especially, in this execution mode, the idle current circuit arrangement becomes in the duration of about at least 100ms, to generate effectively at least approximately idle current of 400A.In order to achieve this end, in this execution mode, processor circuit 172 points to the digital signal of sending the required electric current output of specifying 385A to idle current circuit 1502.In response to this digital signal, idle current circuit 1502 begins to apply the electric current of specified 385A, and in the time of on being added to the 15A that is provided by holding circuit 1506, this electric current produces required 400A electric current between negative electrode 106 and anode 108.

Approximately after the 100ms; Processor circuit 172 points to and applies gate voltage to SCR1540; The capacitor that allows pulse supply circuit 1500 thus generates required discharge of electricity pulse thus and produces required irradiance flash thus through inductor 1542 and closed mechanical switch 1510 discharges between negative electrode 106 and anode 108.In this execution mode, the output of the emittance of device 100 is about 50kJ in the flash of light process.

When pulse supply circuit 1500 discharged in the above described manner, isolating diode 1512 protection holding circuits 1506 can not discharge from the pulse supply circuit with idle current circuit 1502.Need be as the start-up circuit 1504 of high voltage installation to the protection of this discharge because at this time point, start-up circuit 1504 be turn-off and by mechanical switch 1510 protections.

Approximate and gate voltage is applied to SCR1540 so that produce flash of light simultaneously; Processor circuit also points to disposing valve 160 and transmits control signal; Export port 166 so that make to dispose valve closing recirculation outlet port 164 and open to dispose, so that when flash of light, begin to dispose the liquids and gases in the big envelope 104.Processor circuit 172 also points to separating with cleaning system 142 and sends signal so that begin to receive liquid make-up and gas through additional input port 190 of liquid and gas make-up input port 192, so that change the liquids and gases of discharging through disposal outlet port 166.(approximately 100ms in this execution mode after short time; This significantly is longer than through the typical fluid of big envelope 104 and passes through the time); Processor circuit 172 points to disposing valve transmission signal and disposes outlet port 166 so that open recirculation outlet port 164 again with closing, and points to similarly to separation and cleaning system 142 and send signals so that closing liquid and gas make-up input port 190 and 192.Therefore, all liq during flash of light in big envelope 104 obtains disposing basically, and these liquid possibly polluted by tiny particulate material, keeps simultaneously from the remaining liq of system and gas so that recirculation.

Although pulse supply circuit 1500 is unwanted, in this execution mode, device 100 continuously or DC operation with to a certain extent similarly mode take place.Discuss as top, arc is set up and kept to start-up circuit 1504 cooperatively with holding circuit 1506.Then, idle current circuit 1502 can be with the main dc power supply circuit that acts on device 100 continuous operations.Discuss as top, controller 170 sends the digital signal of specifying required electric current output to idle current circuit 1502.The combination current output of idle current circuit 1502 and holding circuit 1506 is provided between negative electrode 106 and the anode 108, so that generate required continuous current, produces required continuous irradiation power output thus.

Possibility

Although said device 100 can be as photoflash lamp or as the dual work of continuous arc light modulation, alternatively, if desired, a kind of during execution mode of the present invention can be used to these customizes or is special.

Although above-mentioned execution mode relates to the single waterwall that on the inner surface 102 of big envelope 104, flows; But alternatively; The present invention can implement in biliquid wall arc lamp, like common all United States Patent(USP) No.s 6,621 of for example mentioning in the above; Disclosed in 199, so that biliquid wall arc lamp is modified as as said photoflash lamp.

With reference to figure 2 and 16, comprise that the system of the multiple arrangement that is similar to device 100 totally illustrates with 1600 in Figure 16.More particularly, in this execution mode, system 1600 comprises the first, second, third and the 4th device 1602,1604,1606 and 1608, and each all is similar to device shown in Figure 2 100.Device 1602,1604,1606 and 1608 is configured to produce a plurality of corresponding irradiance flash that incide on the common target.

In this execution mode, device 1602,1604,1606 and 1608 is configured to be connected in parallel to each other.More particularly, in this execution mode, device each device in 1602,1604,1606 and 1608 all be arranged in this multiple arrangement in the relative direction of neighboring devices on.Therefore, in this execution mode, the negative electrode of each device in the multiple arrangement is adjacent with the anode of the neighboring devices in the multiple arrangement.Therefore, advantageously, be used to produce flash of light simultaneously if install 1602,1604,1606 and 1608, then since the big magnetic field that the discharge of electricity pulse of four lamps causes cancel out each other to a great extent.

In this execution mode, reach the nearly spacing of the electric insulation permission neighboring devices of the electrical connection of arriving it around flow-generator, negative electrode.Therefore, in this execution mode, the axis in axis in the multiple arrangement 1602,1604,1606 and 1608 between first and second electrodes of each and the multiple arrangement between adjacent one first and second electrodes separates each other less than 10 centimetres.

In this execution mode, system 1600 also comprises single recycle unit 1620, is configured to that the flow-generator of each provides liquid in multiple arrangement.Recycle unit 1620 is similar to fluid circulating system shown in Figure 2 140 generally, and has combined to be similar to the disposal valve 1622 of disposal valve 160 shown in Figure 2.In this execution mode, the discharge port that single recycle unit 1620 is configured to from multiple arrangement each receives liquids and gases, also comprises the separator 1624 that is configured to separating liquid and gas.Equally, in this execution mode, single recycle unit 1620 comprises the filter 1626 that is used for removing from liquid particle contamination, and it is similar to filter shown in Figure 2 144 in this execution mode.Similarly, in this execution mode, single recycle unit 1620 comprises among Figure 16 unshowned addition entry point and outlet port, be similar to described in conjunction with Figure 2 those, comprise that disposing outlet port, gas make-up ingress port and liquid replenishes ingress port.Resemble in the execution mode in front, comprise low conductivity water purification, high-insulation through the liquid that liquid replenishes the ingress port reception by recycle unit 1620.Therefore, in this execution mode, single recycle unit 1620 is configured to the flow-generator of each device the water with the conductivity that is lower than every centimetre of about 10 little Siemens is provided.

If desired, then install 1602,1604,1606 and 1608 and can be configured to produce a plurality of corresponding irradiance flash that incide semiconductor wafer.Therefore; For example, system 1600 can replace at common all United States Patent(USP) No.s 6,594; 446 or the open No.US2002/0102098A1 of all jointly U.S. Patent application in disclosed photoflash lamp so that fast the device-side of semiconductor wafer is heated to required annealing temperature.If desired, the flash of light that is then produced by lamp can be simultaneously.

Perhaps, return with reference to figure 2, if desired, then single assembly 100 is not a replacement system 1600, but can replace disclosed photoflash lamp among above-mentioned common all United States Patent(USP) No.s 6,594,446 or the open No.US2002/0102098A1.

Similarly, if desired, the multiple arrangement that then is similar to device 100 can shown in figure 16ly be arranged, but can utilize continuous direct current to operate, so that continuous radiation output is provided.If desired, then this device combination perhaps is single assembly 100 alternatively, can replace above-mentioned common all United States Patent(USP) No.s 6,594,446 or disclose the continuous arc light modulation that is used as pre-heating device among the No.US2002/0102098A1.

More generally, although specific implementations of the present invention has obtained describing and explanation, this execution mode should be regarded just the present invention that explanation of the present invention rather than restriction are constituted according to accompanying claims as.

Claims

1. device that is used to produce electromagnetic radiation, this device comprises:

A) flow-generator is configured to generate the flow of liquid along the big envelope inner surface;

B) first and second electrodes are configured in big envelope, generate electric arc, so that produce electromagnetic radiation; And

C) drain chamber; Axially extend outwardly beyond a said electrode; Be configured to hold a part of said flow of liquid; Wherein said drain chamber axially stretches out enough far, surpasses a said said electrode, so that with a said said electrode and because the turbulent flow isolation that the collapse of flow of liquid causes described in the said drain chamber.

2. device as claimed in claim 1; Wherein said flow-generator is configured to generate from the radially inner gas stream of said flow of liquid; And wherein said drain chamber is extended enough far; Surpass a said said electrode, so that a said said electrode is isolated with the turbulent flow of mixing to cause owing to said flow of liquid and gas stream.

3. device as claimed in claim 1; Wherein said electrode is configured to generate the discharge of electricity pulse; So that the generation irradiance flash, and wherein said drain chamber have enough volumes hold through since the pressure pulse that said discharge of electricity pulse causes to the said flow of liquid of a volume of extrapolation.

4. device as claimed in claim 1, wherein said second electrode comprises anode, and wherein said drain chamber axially extends outwardly beyond said anode.

5. device as claimed in claim 1, wherein said flow-generator is an electric insulation.

6. device as claimed in claim 5 also comprises the electric insulation around said flow-generator.

7. device as claimed in claim 6, wherein said flow-generator comprises conductor.

8. device as claimed in claim 6, wherein said first electrode comprises negative electrode, and wherein said electric insulation reaches the electrical connection of this negative electrode around said negative electrode.

9. device as claimed in claim 8 also comprises said electrical connection, and wherein said electrical connection comprises said flow-generator.

10. device as claimed in claim 6, wherein the said electric insulation around said flow-generator comprises said big envelope.

11. device as claimed in claim 10, wherein the said electric insulation around said flow-generator also comprises insulating cover.

12. device as claimed in claim 11, wherein said insulating cover centers on the said big envelope of part at least.

13. device as claimed in claim 12, wherein said electric insulation also comprise the Compressed Gas in the space between the said part of said insulating cover and said big envelope.

14. device as claimed in claim 10, wherein said big envelope comprises the transparent column pipe.

15. device as claimed in claim 14, wherein said pipe has at least four millimeters thickness.

16. device as claimed in claim 14, wherein said pipe comprise smart thorax cylindrical tube.

17. device as claimed in claim 11, wherein said insulating cover comprise at least a in plastics and the pottery.

18. device as claimed in claim 5, wherein said first and second electrodes comprise negative electrode and anode, and said negative electrode has the length shorter than said anode.

19. device as claimed in claim 5; Wherein said first electrode comprises the negative electrode with outstanding length; It is axially inside, outstanding towards the center of device along giving prominence to length; Surpass the inferior penetralia spare that installs in the big envelope, and wherein said outstanding length is less than the twice of the diameter of said negative electrode.

20. device as claimed in claim 19, wherein said outstanding length long enough takes place between said flow-generator and said second electrode so that prevent said electric arc.

21. device as claimed in claim 5 also is included in outside the said big envelope and from extending near the electrically-conductive reflector of said second electrode near said first electrode.

22. device as claimed in claim 5 also comprises a plurality of power circuits of getting in touch with said electrode electricity.

23. device as claimed in claim 22 also comprises the isolator that is configured to another isolation at least at least one and the said a plurality of power circuit in said a plurality of power circuits.

24. device as claimed in claim 5, wherein each said electrode comprises the coolant channel that is used to hold the cooling agent stream through wherein.

25. device as claimed in claim 24, wherein at least one said electrode comprises that the tungsten with at least one centimetre of thickness is most advanced and sophisticated.

26. device as claimed in claim 24, wherein said electrode is configured to generate the discharge of electricity pulse, so that produce irradiance flash, but also comprises the idle current circuit that is configured between said first and second electrodes, generate idle current.

In the time period before the said discharge of electricity pulse, generate said idle current 27. device as claimed in claim 26, wherein said idle current circuit arrangement become, the said time period is longer through the time through the required fluid of said big envelope than said flow of liquid.

28. device as claimed in claim 26, wherein said idle current circuit arrangement becomes to generate at least 1 * 10 ²The electric current of ampere is as said idle current.

29. device as claimed in claim 26, wherein said idle current circuit arrangement becomes at least 1 * 10 ²Generate at least 4 * 10 in the millisecond ²The electric current of ampere is as said idle current.

30. a multi-lamp syste comprises a plurality ofly like the device that claim 5 limited, and is configured to irradiation one common target.

31. system as claimed in claim 30, wherein said multiple arrangement is configured to the radiation-emitting semi-conductor wafer.

32. system as claimed in claim 30, wherein said multiple arrangement is configured to be connected in parallel to each other.

33. system as claimed in claim 32; Each device in the wherein said multiple arrangement be arranged in said multiple arrangement in the relative direction of neighboring devices on, make that the anode of negative electrode and the said neighboring devices in the said multiple arrangement of said each device in the said multiple arrangement is adjacent.

34. system as claimed in claim 30 also comprises single recycle unit, the said flow-generator that is configured to each device in said multiple arrangement provides liquid.

35. a device that is used to produce electromagnetic radiation, this device comprises:

A) be used to generate device along the flow of liquid of big envelope inner surface;

B) be used for generating electric arc so that produce the device of electromagnetic radiation at big envelope, the wherein said device that is used to generate electric arc comprises first and second electrodes; And

C) be used to hold the device of a part of said flow of liquid; The said assembly axis that is used to hold is to extending outwardly beyond a said electrode, and the wherein said device that is used to hold comprises and being used for the device of a said said electrode with the turbulent flow isolation that causes owing to the collapse of flow of liquid described in the said device that is used to hold.

36. device as claimed in claim 35; Also comprise being used to generate device from the radially inner gas stream of said flow of liquid, and the wherein said device that is used to hold comprise be used for a said said electrode with because the device of the turbulent flow isolation that the collapse of said flow of liquid and gas stream causes.

37. device as claimed in claim 35; The wherein said device that is used to generate electric arc comprises and is used to generate the discharge of electricity pulse so that produce the device of irradiance flash, and the wherein said device that is used to hold comprise hold through since the pressure pulse that said discharge of electricity pulse causes to the said flow of liquid of a volume of extrapolation.

38. a method that produces electromagnetic radiation, this method comprises:

A) generate along the flow of liquid of the inner surface of big envelope;

B) between first and second electrodes, in big envelope, generate electric arc, so that produce electromagnetic radiation; And

C) in drain chamber, hold a part of said flow of liquid, said drain chamber axially extends outwardly beyond a said electrode, wherein holds to comprise a said said electrode and the turbulent flow isolation that causes owing to the collapse of flow of liquid described in the said drain chamber.

39. method as claimed in claim 38 also comprises generation from the radially inner gas stream of said flow of liquid, and wherein hold comprise with a said said electrode with because the turbulent flow isolation that the collapse of said flow of liquid and gas stream causes.

40. method as claimed in claim 38 wherein generates electric arc and comprises and generate the discharge of electricity pulse so that produce irradiance flash, and wherein hold comprise hold through since the pressure pulse that said discharge of electricity pulse causes to the said flow of liquid of a volume of extrapolation.

41. method as claimed in claim 38 wherein generates flow of liquid and comprises that the stream reflector that utilizes electric insulation generates flow of liquid.

42. method as claimed in claim 41 also comprises another isolation at least at least one and the said a plurality of power circuit in a plurality of power circuits.

43. method as claimed in claim 41 also comprises said first and second electrodes of cooling.

44. method as claimed in claim 43, wherein cooling comprises through the corresponding coolant channel of said first and second electrodes and comes the circulating fluid cooling agent.

45. method as claimed in claim 43 wherein generates said electric arc and comprises generation discharge of electricity pulse so that produce irradiance flash, generates idle current but also be included between said first and second electrodes.

46. method as claimed in claim 45 wherein generates said idle current and is included in the said idle current of generation in the said discharge of electricity pulse time period before, the said time period is longer through the time through the required fluid of said big envelope than said flow of liquid.

47. method as claimed in claim 45 wherein generates said idle current and comprises generation at least 1 * 10 ²The electric current of ampere is as said idle current.

48. method as claimed in claim 45 wherein generates said idle current and is included at least 1 * 10 ²Generate at least 4 * 10 in the millisecond ²The electric current of ampere is as said idle current.

49. one kind comprises a plurality of methods of coming irradiation one common target like the device that claim 5 limited of control.

50. method as claimed in claim 49, wherein control comprises that the control multiple arrangement comes the irradiation semiconductor wafer.

51. method as claimed in claim 49, wherein control comprise each device that makes in the said multiple arrangement generate with said multiple arrangement in the relative direction of the electric arc direction of each neighboring devices on said electric arc.