CN1973954B - Air purifying method for high frequency plasma flame apparatus - Google Patents
Air purifying method for high frequency plasma flame apparatus Download PDFInfo
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- CN1973954B CN1973954B CN2006101144744A CN200610114474A CN1973954B CN 1973954 B CN1973954 B CN 1973954B CN 2006101144744 A CN2006101144744 A CN 2006101144744A CN 200610114474 A CN200610114474 A CN 200610114474A CN 1973954 B CN1973954 B CN 1973954B
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Abstract
The air purifying system for high frequency plasma flame apparatus includes three parts: one air compression unit, one filtering and dehumidifying molecular sieve unit and one filtering film unit. Theair compression unit includes one air compressor, one air storage tank and one automatic water drainer connected together; the filtering and dehumidifying molecular sieve unit includes at least one drying container with assembled molecular sieve; and the filtering film unit has air inlet pipe connected to the air outlet of the drying container and air outlet pipe connected to outer pipeline. Theair purified through the said system has solid grain size smaller than 0.1 micron, solid residue less than 0.04 mg/cu m, and dew point at normal pressure -67 deg.c, and the present invention has filtering efficiency up to 99.9999 % and can meet the requirement as the air source for of frequency plasma flame apparatus.
Description
Technical field:
The present invention relates to air source purification techniques, be specifically related to cleaning system and the purification method of a kind of high frequency plasma flame apparatus with the air source of the gas.
Background technology:
In recent years, along with the development of microelectronic industry and medical industry also more and more higher to the requirement of air quality, the corresponding reports that occurred much about air cleaning, dehumidifying.In these reports, major technique field substantially can be divided three classes: 1, solid, liquid particulate filtration in the air, and generally adopt the polymer filtration net to filter, solid content can reach 0.08mg/m in the air of filtration back
32, utilize freezing to remove airborne moisture, general dew points at normal pressure can reach 2 ℃～8 ℃; 3, utilize the airborne moisture of molecular sieve adsorption, use the effect that different molecular sieves can reach and be more or less the same, general dew points at normal pressure can reach subzero about 50 ℃.Use above technology and can satisfy under the general operating mode requirement substantially, but for high frequency plasma is supplied with source of the gas, can't reach corresponding requirement air quality.This mainly is because high frequency plasma is a kind of free of contamination thermal source, does not filter clean solid particle in the air and is melted, even gasification, ionization by plasma, and the article on plasma body pollution, thus further pollute the purity of machined material.Airborne moisture by plasma gasification after ionization, produce hydrogen ion, hydrogen ion combines with oxonium ion and enters matrix material formation hydroxyl, has a strong impact on the optical property of material.Therefore the high frequency plasma source of the gas requires solid grain size less than 0.1 μ m, and filter efficiency reaches 99.9999%, and solid residue weight is less than 0.04mg/m
3, subzero 67 ℃ of dew points at normal pressure, present existing air cleaning mode can not satisfy these requirements.
Summary of the invention:
Purpose of the present invention is to provide a kind of system and Multiple Combination air purification method of the source of the gas that purifies air, and satisfies high frequency plasma flame with the requirement of air source of the gas.
A kind of high frequency plasma flame apparatus of the present invention cleaning system of air, comprise air compression unit, molecular sieve filtration Dehumidifying element and membrane filtration unit three parts, wherein: described air compression unit comprises an air compressor, an air accumulator and an automatic water trap, the escape pipe of air compressor is connected with the air accumulator air inlet pipe, automatic water trap is connected with air accumulator bottom first escape pipe, and air accumulator is also established another second escape pipe; Described molecular sieve filtration Dehumidifying element comprises one group of drying receptacle at least, in the drier container molecular sieve is housed, and drying receptacle lower end air inlet pipe is communicated with second escape pipe of air accumulator, and the drying receptacle upper end sets out tracheae; Described membrane filter unit, its air inlet pipe is communicated with the drying receptacle escape pipe, and its escape pipe is connected with external pipe.
Above-mentioned high frequency plasma flame is installed Pressure gauge and safety valve with the cleaning system of air, the described air accumulator of described molecular sieve filtration Dehumidifying element upper end, and its second escape pipe is communicated with the drying receptacle air inlet pipe by a pressure-reducing valve.
Above-mentioned high frequency plasma flame is connected with a cooling driers by behind the pressure-reducing valve with the cleaning system of air, second escape pipe of described air accumulator again, and described cooling driers is established a water trap in addition.
High frequency plasma flame is with the cleaning system of air as mentioned above, described molecular sieve filtration Dehumidifying element comprises two groups of drying receptacles and is installed in the thermal regeneration device of this drier bottom that second escape pipe of air accumulator is communicated with two groups of drying receptacle air inlet pipe respectively by a current divider.
The above-mentioned high frequency plasma flame cleaning system of air, the escape pipe of described every group of drying receptacle upper end is a three-way pipe, one is communicated with the membrane filtration unit, another links to each other with the air inlet pipe of a glass rotameter with another group drier by a valve, also has one to be communicated with an emptying valve that is in communication with the outside.
High frequency plasma flame is with the cleaning system of air as mentioned above, it is characterized in that, described membrane filter comprises sleeve, filtering core and filtration membrane, filtering core is placed on sleeve inner, the filter film invests the filtering core outer surface, the air inlet pipe of membrane filter communicates with pipe in the filtering core, and the escape pipe of membrane filter is located between filtering core and the sleeve lining.
The above-mentioned high frequency plasma flame cleaning system of air, wherein said air compressor machine is an oilless air compressor.Pipeline is stainless steel pipes.
Another purpose of the present invention is to provide the purification method of a kind of high frequency plasma flame apparatus with air.
This method adopts aforementioned air cleaning system, specifically may further comprise the steps:
1) air is by air compressor compression back input air accumulator, and setting air accumulator pressure is 0.8MPa, and pressure-reducing valve is in opening always;
2) compressed air enters cooling driers behind pressure-reducing valve, opens the valve that connects drier on the I way switch of current divider and this road;
3) when dew point hygrometer monitoring dew point is higher than-67 ℃, open the II way switch, close current divider I way switch simultaneously, open the thermal regeneration device under the drier of I road, open the emptying valve simultaneously;
4) compressed air alternately enters membrane filter after be connected with external pipe by valve by stainless steel pipes.
Adopt technique scheme, through after the cleaning system of the present invention, solid grain size is less than 0.1 μ m in the air, and solid residue weight is less than 0.04mg/m
3, subzero 67 ℃ of dew points at normal pressure, filter efficiency can reach 99.9999%, satisfies the requirement of high frequency plasma source of the gas.
Description of drawings:
Fig. 1 is the structured flowchart of air cleaning system of the present invention;
Fig. 2 is an air cleaning system workflow diagram of the present invention;
Fig. 3 is air accumulator structural representation in the air cleaning system of the present invention;
Fig. 4 is I group dryer configuration schematic diagram in the air cleaning system of the present invention;
Fig. 5 is the structural representation of membrane filter in the air cleaning system of the present invention.
The specific embodiment:
Referring to Fig. 1, air cleaning system of the present invention comprises air compression unit 1, molecular sieve filtration Dehumidifying element 2 and membrane filtration unit 3 three parts successively.Wherein:
Continuation is referring to Fig. 2, and air compression unit 1 mainly comprises an air compressor 11, an air accumulator 12 and an automatic water trap 13.Wherein, with reference to shown in Figure 3, air accumulator 12 is connected with an air inlet pipe 129, one first escape pipe 127 of being located at the lower end, another is located at second escape pipe 128 of upper end, air accumulator 12 first escape pipes 127 connect water trap 13, second escape pipe 128 connects a pressure-reducing valve 14, air accumulator 12 upper ends installing Pressure gauge 18 and safety valve 15.The escape pipe of air compressor 11 is connected with air accumulator 12 air inlet pipe 129, and automatic water trap 13 is connected with air accumulator 12 bottom escape pipes 127.11 pairs of inhaled airs of described air compressor (to call air compressor machine in the following text) compress, and pressure reaches as high as 1.1MPa, and compressed air is stabilized in 0.8MPa after by air accumulator 12, and temperature is about 40 ℃.By thermodynamic principles as can be known, the dew point of air also rose when air pressure rose, and freeze-outed so have aqueous water through the air of the moisture-saturated of overcompression.Therefore, connect automatic water trap 13, get rid of the water that condenses and in air accumulator 12 bottoms.Stable in order to guarantee gas pressure, at the escape pipe 128 of air accumulator 12 pressure-reducing valve 14 is set, pressure is set to 0.8MPa, and pressure value shows by Pressure gauge 18, and safety valve 15 is set above air accumulator 12, guarantees the security performance of whole gas circuit.The escape pipe 128 of air accumulator 12 is connected by pipeline with the import of a cooling driers 16, and the air themperature of process cooling driers 16 can reach about 5 ℃, utilizes the automatic water trap 17 of cooling driers 16 to get rid of the aqueous water that condensations are got off.In the present invention, the air compressor machine 11 of employing is an oilless air compressor, and promptly air compressor machine itself carries degreasing unit, can reach technological requirement through monitoring, therefore needn't put degreasing unit in addition.
In order further to remove airborne moisture, further use molecular sieve filtration Dehumidifying element 2 among the present invention.Referring to Fig. 2, this unit 2 comprises I group drier 22 and II group drier 23, and every group of drier bottom is equipped with thermal regeneration device 224 and 234 respectively, can be to the drier heating of regenerating.Two groups of dryer configuration are identical, referring to Fig. 4 the wherein structure of I group drier are shown, and comprise a drier container 226, in this container 226, molecular sieve 227 is housed, container bottom connects a regeneration heater 224, and container upper end sets out tracheae 229, and air inlet pipe 228 is established in the lower end.In native system, two groups of driers can alternation, the escape pipe of cooling driers 16 links to each other with the air inlet pipe 228 of valve 211 with I group drier 22 bottoms by current divider 21, the escape pipe 229 of I group drier 22 upper ends is a three-way pipe, one is communicated with membrane filtration unit 3, another links to each other with the air inlet pipe 238 of glass rotameter 222 with II group drier 23 by valve 221, also has one to be communicated with an emptying valve 233 that is in communication with the outside; Similar to the above, the escape pipe of cooling driers 16 links to each other with II group drier 23 bottom air inlet pipe 238 with valve 212 by current divider 21, the escape pipe 239 of II group drier 23 upper ends is a three-way pipe, one is communicated with membrane filtration unit 3, another links to each other with the air inlet pipe 228 of glass rotameter 232 with I group drier 22 by valve 231, also has one to be communicated with an emptying valve 223 that is in communication with the outside.Use the zeolite matter molecular sieve 227 of pore size as 5A in every group of drier of the present invention, specific area surpasses 700m
2/ g has extremely strong affinity to hydrone.Molecular sieve adsorption can reach absorption after a period of time saturated, saturated molecular sieve no longer has adsorption capacity, molecular sieve saturated under hot conditions can be deviate from the hydrone (this process claims the regeneration of molecular sieve) of absorption, the general high more dehydrating effect of temperature is good more, and the molecular sieve after dehydration adsorption capacity once more is also strong more.General dehydration temperaturre is decided according to specific requirement between 150～300 ℃, requires subzero 67 ℃ of dew points at normal pressure among the present invention, and regeneration temperature is set to 240 ℃.Adopt among the present invention that two group driers are in parallel to be used, wherein one group of work, one group is used for regenerating standby, and two groups are used in turn, guarantee that air cleaning system turns round continuously.As Fig. 2, after molecular sieve work a period of time absorption in the I group drier is saturated, open II group drier air intake valve 212, turn off I group air intake valve 211 simultaneously, open the valve 231 between I group drier and the II group drier, open the power switch of thermal regeneration device 224 under the I group drier this moment, to entering the gas heating of I group drier, this heated air heats I group molecular sieve, heated gas directly enters atmosphere via emptying valve 233, this moment, I group drier directly was communicated with atmosphere, and inside is normal pressure, helps deviating from of the interior moisture of molecular sieve.Utilize thermocouple to monitor, begin to keep constant temperature about 4 hours when temperature reaches 240 ℃, close the heater switch of thermal regeneration device 224 under the I group drier, continue blast-cold to room temperature, valve-off 231 and the regeneration of valve 233, the I group finish.The gas flow that is used to regenerate is generally 1m
3/ h, flow is by glass rotameter 232 controls.According to the dew point hygrometer monitoring result, dew point is minimum reaches subzero 75 ℃ in actual measurement in the work, when dew point is higher than subzero 67 ℃, changes dryer group, simultaneously should group regeneration.
In order to remove airborne solid particulate matter, the present invention further adopts polytetrafluoroethylene film filter unit 3, also claim membrane filter, referring to shown in Figure 5, comprise stainless steel sleeve 39, filtering core 38 and filtration membrane 36, filtering core 38 is placed on stainless steel sleeve 39 inside, filtration membrane 36 invests filtering core 38 outer surfaces, utilize the contact-making surface of rubber blanket 37 crystal entertainment ball 38 and sleeve 39, the air inlet pipe 35 of membrane filter 3 communicates with pipe in the filtering core 38, and the escape pipe 34 of membrane filter 3 is located between filtering core 38 and sleeve 39 inwalls; Main element is a polytetrafluoroethylene film 36 in the filter 3, it is the most advanced filtering material of generally acknowledging in the world that polytetrafluoroethylmicroporous microporous membrane is laminated with filtrate, this film surface is smooth, splendid chemical stability is arranged, not aging, hydrophobic makes the dust that is trapped in the surface be easy to peel off again, therefore is easy to clean.Do not change porosity behind this film deashing simultaneously, after putting into operation, the pressure loss changes not quite with the increase of service time, and the pressure loss of ordinary filter can be increasing with the prolongation of service time, improved the service life of filtrate.After adopting this filter to filter, the residual quantity of solid grain size more than 0.1 μ m is lower than 1ppm (1,000,000/) in the air, and gross weight is less than 0.04mg/m
3, and do not have the oil gas flavor.
In the present invention, all pipelines all adopt stainless steel pipes, and air reservoir is customized by the unit that possesses anti-riot certification, and total interface all adopts inferior arc-welding welding, and complete equipment is installed after public security department is up to the standards.
Adopt above air cleaning system, the purification process of air is as follows, referring to Fig. 2:
1, by total valve 111 and stainless steel pipes input air accumulator 12, air accumulator escape pipe 128 is communicated with pressure-reducing valve 14 to air by air compressor 11 compression backs, and compressed air enters cooling driers 16 by pipeline after pressure-reducing valve 14 steady pressures:
2, the compressed air back that lowers the temperature in cooling driers 16 is divided into two-way by current divider 21, wherein one the tunnel enters I group drier 22 via valve 211, and another road enters II group drier 23 via valve 212;
3, when using I group drier 22, valve 211 is opened, valve 212 is closed, compressed air enters I group drier 22 by stainless steel pipes, if II group drier 23 regeneration, then open valve 221, by glass rotameter 222 control regeneration gas flows, gas via II group drier after by valve 223 emptyings;
4, the compressed air in the I group drier 22 enters polytetrafluoroethylene film filter 3 via stainless steel pipes;
5, when using II group drier 23, valve 212 is opened, valve 211 is closed, compressed air enters II group drier 23 by stainless steel pipes, if I group drier 22 regeneration, then open valve 231, by glass rotameter 232 control regeneration gas flows, gas via I group drier after by valve 233 emptyings;
6, the compressed air in the II group drier enters polytetrafluoroethylene film filter 3 via stainless steel pipes;
7, the compressed air after polytetrafluoroethylene film filter 3 filters is connected with external pipe via valve 32 by glass rotameter 33 control flows.
Use air cleaning system of the present invention to carry out air cleaning, below be Detection of Air Quality result before and after purifying.
Detection method: be determined as solid residue in the locating tab assembly gas with GB GB/T 15432 overall suspended pellets; Dew point uses dew point hygrometer directly to measure, and pressure is as the criterion with the Pressure gauge reading.
Result: referring to table 1.
| Sampling | Pressure (MPa) | Grain diameter (μ m) | Solid residue weight (mg/m 3) | Dew points at normal pressure (℃) | Smell |
| After the purification | 0.8 | ＜0.1 | ＜0.04 | -67 | Do not have |
| Before the purification | 0.1013 | ＞10.0 | ＞0.5 | 0 | Have |
More than detection shows, through after the cleaning system of the present invention, solid grain size is less than 0.1 μ m in the air, and solid residue weight is less than 0.04mg/m
3, subzero 67 ℃ of dew points at normal pressure, filter efficiency can reach 99.9999%, satisfies the requirement of high frequency plasma source of the gas.
Claims (8)
1. the purification method of a high frequency plasma flame apparatus usefulness air is characterized in that, uses following air cleaning facility, may further comprise the steps:
1) air is by air compressor compression back input air accumulator, and setting air accumulator pressure is 0.8MPa, and pressure-reducing valve is in opening always;
2) compressed air enters cooling driers behind pressure-reducing valve, opens the valve that connects drying receptacle on the I way switch of current divider and this road;
3) when dew point hygrometer monitoring dew point is higher than-67 ℃, open the II way switch, close current divider I way switch simultaneously, open the thermal regeneration device under the drier of I road, open the emptying valve simultaneously;
4) compressed air alternately enters membrane filter after be connected with external pipe by valve by stainless steel pipes;
Described air cleaning facility comprises air compression unit, molecular sieve filtration Dehumidifying element and membrane filter unit three parts, wherein:
Described air compression unit comprises an air compressor, an air accumulator and an automatic water trap, the escape pipe of air compressor is connected with the air accumulator air inlet pipe, automatic water trap is connected with air accumulator bottom first escape pipe, and air accumulator is also established another second escape pipe;
Described molecular sieve filtration Dehumidifying element comprises one group of drying receptacle at least, and molecular sieve is housed in the drying receptacle, and drying receptacle lower end air inlet pipe is communicated with second escape pipe of air accumulator, and the drying receptacle upper end sets out tracheae;
Described membrane filter unit, its air inlet pipe is communicated with the drying receptacle escape pipe, and its escape pipe is connected with external pipe;
Described air accumulator upper end installing Pressure gauge and safety valve, its second escape pipe is communicated with the drying receptacle air inlet pipe by a pressure-reducing valve.
2. according to the purification method of the described high frequency plasma flame of claim 1 with air, it is characterized in that second escape pipe of air accumulator described in the air cleaning facility is connected with a cooling driers by behind the pressure-reducing valve again, described cooling driers is established a water trap in addition.
3. according to claim 1 or 2 described high frequency plasma flames purification method with air, it is characterized in that, the Dehumidifying element of molecular sieve filtration described in the air cleaning facility comprises two groups of drying receptacles and is installed in the thermal regeneration device of this drying receptacle bottom that second escape pipe of air accumulator is communicated with two groups of drying receptacle air inlet pipe respectively by a current divider.
4. according to the purification method of the described high frequency plasma flame of claim 3 with air, it is characterized in that, the escape pipe of every group of drying receptacle upper end is a three-way pipe described in the air cleaning facility, one is communicated with the membrane filter unit, another links to each other with the air inlet pipe of a glass rotameter with another group drying receptacle by a valve, also has one to be communicated with an emptying valve that is in communication with the outside.
5. according to claim 1 or 2 or 4 described high frequency plasma flames purification method with air, it is characterized in that, membrane filter described in the air cleaning facility comprises sleeve, filtering core and filtration membrane, filtering core is placed on sleeve inner, filtration membrane invests the filtering core outer surface, the air inlet pipe of membrane filter communicates with pipe in the filtering core, and the escape pipe of membrane filter is located between filtering core and the sleeve lining.
6. according to the purification method of the described high frequency plasma flame of claim 3 with air, it is characterized in that, membrane filter described in the air cleaning facility comprises sleeve, filtering core and filtration membrane, filtering core is placed on sleeve inner, filtration membrane invests the filtering core outer surface, the air inlet pipe of membrane filter communicates with pipe in the filtering core, and the escape pipe of membrane filter is located between filtering core and the sleeve lining.
7. according to the purification method of the described high frequency plasma flame of claim 5, it is characterized in that described air compressor is an oilless air compressor with air.
8. according to the purification method of the described high frequency plasma flame of claim 5, it is characterized in that wherein pipeline is stainless steel pipes with air.
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| CN2006101144744A CN1973954B (en) | 2006-11-10 | 2006-11-10 | Air purifying method for high frequency plasma flame apparatus |
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| CN1973954B true CN1973954B (en) | 2010-06-02 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565289A (en) * | 2012-02-02 | 2012-07-11 | 山东新华医疗器械股份有限公司 | Detector used for detecting comprehensive resistance of oxirane sterilization indicator |
| CN103357221A (en) * | 2013-08-06 | 2013-10-23 | 涂国坚 | Precision filtration system for lyophilizer |
| CN109316909A (en) * | 2018-12-10 | 2019-02-12 | 攀枝花钢企欣宇化工有限公司 | Air molecule sieves drying system |
| CN109908714B (en) * | 2019-04-11 | 2024-01-23 | 西安热工研究院有限公司 | High-pressure dry air maintenance system and maintenance method for water vapor system of power station |
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| CN2216858Y (en) * | 1994-06-28 | 1996-01-10 | 冶金工业部重庆钢铁设计研究院 | Combination type equipment for purifying compressed air |
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| US4231768A (en) * | 1978-09-29 | 1980-11-04 | Pall Corporation | Air purification system and process |
| CN2216858Y (en) * | 1994-06-28 | 1996-01-10 | 冶金工业部重庆钢铁设计研究院 | Combination type equipment for purifying compressed air |
| CN1153679A (en) * | 1995-12-06 | 1997-07-09 | 中国科学院大连化学物理研究所 | Filter element for air-purifying film filter |
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