DE03707756T1 - Mikrohergestellter kreisel - Google Patents

Mikrohergestellter kreisel Download PDF

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Publication number
DE03707756T1
DE03707756T1 DE03707756T DE03707756T DE03707756T1 DE 03707756 T1 DE03707756 T1 DE 03707756T1 DE 03707756 T DE03707756 T DE 03707756T DE 03707756 T DE03707756 T DE 03707756T DE 03707756 T1 DE03707756 T1 DE 03707756T1
Authority
DE
Germany
Prior art keywords
suppression electrode
quadrature suppression
resonator mass
quadrature
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE03707756T
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English (en)
Inventor
A Geen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
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Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Publication of DE03707756T1 publication Critical patent/DE03707756T1/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Steroid Compounds (AREA)
  • Pressure Sensors (AREA)
DE03707756T 2002-02-06 2003-02-06 Mikrohergestellter kreisel Pending DE03707756T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35461002P 2002-02-06 2002-02-06
US36432202P 2002-03-14 2002-03-14
PCT/US2003/003615 WO2003067190A1 (en) 2002-02-06 2003-02-06 Micromachined gyroscope

Publications (1)

Publication Number Publication Date
DE03707756T1 true DE03707756T1 (de) 2005-05-04

Family

ID=27737467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE03707756T Pending DE03707756T1 (de) 2002-02-06 2003-02-06 Mikrohergestellter kreisel

Country Status (8)

Country Link
US (5) US6877374B2 (de)
EP (3) EP1472507B1 (de)
JP (1) JP4392246B2 (de)
CN (1) CN1628238B (de)
AT (1) ATE509254T1 (de)
AU (1) AU2003209031A1 (de)
DE (1) DE03707756T1 (de)
WO (1) WO2003067190A1 (de)

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US20060179945A1 (en) 2006-08-17
EP1472507A1 (de) 2004-11-03
WO2003067190A1 (en) 2003-08-14
US6877374B2 (en) 2005-04-12
US7357025B2 (en) 2008-04-15
US20050139005A1 (en) 2005-06-30
ATE509254T1 (de) 2011-05-15
US7216539B2 (en) 2007-05-15
JP2005526959A (ja) 2005-09-08
US7032451B2 (en) 2006-04-25
JP4392246B2 (ja) 2009-12-24
AU2003209031A1 (en) 2003-09-02
US20030172753A1 (en) 2003-09-18
EP1472507B1 (de) 2011-05-11
WO2003067190A8 (en) 2005-08-18
US7204144B2 (en) 2007-04-17
US20060191340A1 (en) 2006-08-31
CN1628238A (zh) 2005-06-15
EP2327959B1 (de) 2012-09-12
EP2327959A1 (de) 2011-06-01
EP2325604B1 (de) 2013-04-24
EP2325604A1 (de) 2011-05-25
US20060191339A1 (en) 2006-08-31
AU2003209031A8 (en) 2003-09-02
CN1628238B (zh) 2012-05-23

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