DE1009986T1 - Fehlerkompensierter druckwandler - Google Patents

Fehlerkompensierter druckwandler

Info

Publication number
DE1009986T1
DE1009986T1 DE1009986T DE97932547T DE1009986T1 DE 1009986 T1 DE1009986 T1 DE 1009986T1 DE 1009986 T DE1009986 T DE 1009986T DE 97932547 T DE97932547 T DE 97932547T DE 1009986 T1 DE1009986 T1 DE 1009986T1
Authority
DE
Germany
Prior art keywords
pressure converter
compensated pressure
error compensated
error
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1009986T
Other languages
English (en)
Inventor
Dennis Dauenhauer
Dale Dauenhauer
Alexander Breitenbach
Herman Erichsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Data Instruments Inc
Original Assignee
Honeywell Data Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21804276&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE1009986(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell Data Instruments Inc filed Critical Honeywell Data Instruments Inc
Publication of DE1009986T1 publication Critical patent/DE1009986T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE1009986T 1996-07-10 1997-07-10 Fehlerkompensierter druckwandler Pending DE1009986T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2144596P 1996-07-10 1996-07-10
PCT/US1997/011907 WO1998001731A1 (en) 1996-07-10 1997-07-10 Pressure transducer with error compensation

Publications (1)

Publication Number Publication Date
DE1009986T1 true DE1009986T1 (de) 2001-05-03

Family

ID=21804276

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69715928T Expired - Lifetime DE69715928T2 (de) 1996-07-10 1997-07-10 Fehlerkompensierter druckwandler
DE1009986T Pending DE1009986T1 (de) 1996-07-10 1997-07-10 Fehlerkompensierter druckwandler

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69715928T Expired - Lifetime DE69715928T2 (de) 1996-07-10 1997-07-10 Fehlerkompensierter druckwandler

Country Status (5)

Country Link
US (1) US6023978A (de)
EP (1) EP1009986B1 (de)
JP (1) JP2001511884A (de)
DE (2) DE69715928T2 (de)
WO (1) WO1998001731A1 (de)

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DE60100011T2 (de) * 2000-01-18 2003-05-08 Denso Corp Hochdruckwandler mit ein oder zwei Gewindeschäften mit Vielkontakt Sensor Chips
US6450005B1 (en) 2000-12-21 2002-09-17 Honeywell International Inc. Method and apparatus for the calibration and compensation of sensors
US6581468B2 (en) * 2001-03-22 2003-06-24 Kavlico Corporation Independent-excitation cross-coupled differential-pressure transducer
US6986654B2 (en) * 2002-07-03 2006-01-17 Therics, Inc. Apparatus, systems and methods for use in three-dimensional printing
US7306967B1 (en) 2003-05-28 2007-12-11 Adsem, Inc. Method of forming high temperature thermistors
US6909975B2 (en) * 2003-11-24 2005-06-21 Mks Instruments, Inc. Integrated absolute and differential pressure transducer
US7292132B1 (en) * 2003-12-17 2007-11-06 Adsem, Inc. NTC thermistor probe
US7812705B1 (en) 2003-12-17 2010-10-12 Adsem, Inc. High temperature thermistor probe
US7032456B1 (en) * 2004-12-30 2006-04-25 The United States Of America As Represented By The Secretary Of The Navy Isostatic piezoresistive pressure transducer with temperature output
US7884432B2 (en) 2005-03-22 2011-02-08 Ametek, Inc. Apparatus and methods for shielding integrated circuitry
KR100755588B1 (ko) * 2006-02-21 2007-09-06 삼성전기주식회사 센서 복합 모듈의 초기 보정값 설정방법
US20080011297A1 (en) * 2006-06-30 2008-01-17 Scott Thomas Mazar Monitoring physiologic conditions via transtracheal measurement of respiratory parameters
US7467555B2 (en) 2006-07-10 2008-12-23 Rosemount Inc. Pressure transmitter with multiple reference pressure sensors
US7497124B2 (en) * 2007-04-20 2009-03-03 Delphi Technologies, Inc. Dual pressure sensor apparatus
US20090250254A1 (en) * 2008-04-02 2009-10-08 Sufariu Diana A Methods for configurable manufacturing and apparatus
US7698950B2 (en) * 2008-04-04 2010-04-20 Wika Alexander Wiegand Gmbh & Co. Kg Pressure sensor assembly for measuring absolute pressure
US7950286B2 (en) * 2008-12-19 2011-05-31 Honeywell International Inc. Multi-range pressure sensor apparatus and method utilizing a single sense die and multiple signal paths
US10330513B2 (en) * 2009-05-27 2019-06-25 Honeywell International Inc. Multi-dynamic-range sensor
US8943900B2 (en) 2009-10-02 2015-02-03 Schlumberger Technology Corporation Method and apparatus for differential pressure measurement
US8082797B2 (en) 2009-11-11 2011-12-27 Honeywell International Inc. Pressure sensor assembly
US8393222B2 (en) * 2010-02-27 2013-03-12 Codman Neuro Sciences Sárl Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US8770034B2 (en) 2011-09-06 2014-07-08 Honeywell International Inc. Packaged sensor with multiple sensors elements
US8466523B2 (en) * 2011-10-07 2013-06-18 Continental Automotive Systems, Inc. Differential pressure sensor device
CN102507073A (zh) * 2011-10-27 2012-06-20 威海市天罡仪表股份有限公司 一种压力、压差组合测量通信实现方法
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
EP2824438A1 (de) * 2013-07-12 2015-01-14 Siemens Aktiengesellschaft Drucksensor
US9234776B2 (en) * 2013-09-26 2016-01-12 Rosemount Inc. Multivariable process fluid transmitter for high pressure applications
US9423315B2 (en) * 2013-10-15 2016-08-23 Rosemount Aerospace Inc. Duplex pressure transducers
DE102014221067A1 (de) * 2014-10-16 2016-04-21 Robert Bosch Gmbh Drucksensor zur Erfassung eines Drucks eines fluiden Mediums
US9593994B2 (en) 2014-10-16 2017-03-14 DunAn Sensing, LLC Compensated pressure sensors
JP6158846B2 (ja) * 2015-02-17 2017-07-05 トヨタ自動車株式会社 圧力センサ
US10107873B2 (en) * 2016-03-10 2018-10-23 Allegro Microsystems, Llc Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress
EP3229003A1 (de) * 2016-04-04 2017-10-11 IMI Hydronic Engineering International SA Messmodul
US10162017B2 (en) 2016-07-12 2018-12-25 Allegro Microsystems, Llc Systems and methods for reducing high order hall plate sensitivity temperature coefficients
US10203255B2 (en) * 2016-08-25 2019-02-12 Measurement Specialties, Inc. Differential pressure sensor incorporating common mode error compensation
US10466125B2 (en) 2016-11-11 2019-11-05 Measurement Specialties Inc. Pressure sensor sub assembly and fabrication
US10371591B2 (en) 2016-11-11 2019-08-06 Measurement Specialties, Inc. Method and apparatus for correction of pressure sensors
US10260981B2 (en) * 2017-02-06 2019-04-16 Nxp Usa, Inc. Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
US10782315B2 (en) 2017-04-17 2020-09-22 Rosemount Aerospace Inc. Apparatus and method for packaging, handling or testing of sensors
US10520559B2 (en) 2017-08-14 2019-12-31 Allegro Microsystems, Llc Arrangements for Hall effect elements and vertical epi resistors upon a substrate
DE102017119358A1 (de) * 2017-08-24 2019-02-28 Endress+Hauser SE+Co. KG Modulares Feldgerät
US10809139B2 (en) 2018-02-14 2020-10-20 Carefusion 303, Inc. Integrated sensor to monitor fluid delivery
EP3739317B1 (de) * 2018-02-15 2023-05-10 Mitsumi Electric Co., Ltd. Drucksensorvorrichtung
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Also Published As

Publication number Publication date
DE69715928D1 (de) 2002-10-31
JP2001511884A (ja) 2001-08-14
US6023978A (en) 2000-02-15
EP1009986A1 (de) 2000-06-21
DE69715928T2 (de) 2003-08-07
WO1998001731A1 (en) 1998-01-15
EP1009986B1 (de) 2002-09-25

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