DE102004019442A1 - An planarer Verbindung angeordneter Kühlkörper - Google Patents

An planarer Verbindung angeordneter Kühlkörper Download PDF

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Publication number
DE102004019442A1
DE102004019442A1 DE200410019442 DE102004019442A DE102004019442A1 DE 102004019442 A1 DE102004019442 A1 DE 102004019442A1 DE 200410019442 DE200410019442 DE 200410019442 DE 102004019442 A DE102004019442 A DE 102004019442A DE 102004019442 A1 DE102004019442 A1 DE 102004019442A1
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Germany
Prior art keywords
layer
insulating material
electrically insulating
substrate
component
Prior art date
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Ceased
Application number
DE200410019442
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German (de)
English (en)
Inventor
Markus Frühauf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
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Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE200410019442 priority Critical patent/DE102004019442A1/de
Publication of DE102004019442A1 publication Critical patent/DE102004019442A1/de
Ceased legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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    • H01L2224/241Disposition
    • H01L2224/24151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/24221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/24225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2224/24221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/24225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/24226Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the HDI interconnect connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the item being planar
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    • H01L2224/82009Pre-treatment of the connector or the bonding area
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    • H01L2224/82039Reshaping, e.g. forming vias by heating means using a laser
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    • H01L25/072Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
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    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
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    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding
DE200410019442 2004-04-19 2004-04-19 An planarer Verbindung angeordneter Kühlkörper Ceased DE102004019442A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200410019442 DE102004019442A1 (de) 2004-04-19 2004-04-19 An planarer Verbindung angeordneter Kühlkörper

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Application Number Priority Date Filing Date Title
DE200410019442 DE102004019442A1 (de) 2004-04-19 2004-04-19 An planarer Verbindung angeordneter Kühlkörper

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005053396A1 (de) * 2005-11-09 2007-05-16 Semikron Elektronik Gmbh Schaltungseinrichtung, insbesondere Frequenzumrichter
WO2008040596A2 (de) * 2006-09-29 2008-04-10 Siemens Aktiengesellschaft Kühlkörper zur kühlung eines elektrischen bauelementes
EP3340293A1 (de) * 2016-12-20 2018-06-27 Siemens Aktiengesellschaft Halbleitermodul mit stützstruktur auf der unterseite

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293301A (en) * 1990-11-30 1994-03-08 Shinko Electric Industries Co., Ltd. Semiconductor device and lead frame used therein
DE10058446A1 (de) * 1999-11-24 2001-05-31 Denso Corp Halbleitervorrichtung mit Abstrahlungsstruktur, sowie Verfahren zu ihrer Herstellung
WO2003030247A2 (de) * 2001-09-28 2003-04-10 Siemens Aktiengesellschaft Verfahren zum kontaktieren elektrischer kontaktflächen eines substrats und vorrichtung aus einem substrat mit elektrischen kontaktflächen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293301A (en) * 1990-11-30 1994-03-08 Shinko Electric Industries Co., Ltd. Semiconductor device and lead frame used therein
DE10058446A1 (de) * 1999-11-24 2001-05-31 Denso Corp Halbleitervorrichtung mit Abstrahlungsstruktur, sowie Verfahren zu ihrer Herstellung
WO2003030247A2 (de) * 2001-09-28 2003-04-10 Siemens Aktiengesellschaft Verfahren zum kontaktieren elektrischer kontaktflächen eines substrats und vorrichtung aus einem substrat mit elektrischen kontaktflächen

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005053396A1 (de) * 2005-11-09 2007-05-16 Semikron Elektronik Gmbh Schaltungseinrichtung, insbesondere Frequenzumrichter
DE102005053396B4 (de) * 2005-11-09 2010-04-15 Semikron Elektronik Gmbh & Co. Kg Schaltungseinrichtung, insbesondere Frequenzumrichter
WO2008040596A2 (de) * 2006-09-29 2008-04-10 Siemens Aktiengesellschaft Kühlkörper zur kühlung eines elektrischen bauelementes
WO2008040596A3 (de) * 2006-09-29 2008-05-22 Siemens Ag Kühlkörper zur kühlung eines elektrischen bauelementes
EP3340293A1 (de) * 2016-12-20 2018-06-27 Siemens Aktiengesellschaft Halbleitermodul mit stützstruktur auf der unterseite
WO2018114651A1 (de) * 2016-12-20 2018-06-28 Siemens Aktiengesellschaft Halbleitermodul mit stützstruktur auf der unterseite
CN110100308A (zh) * 2016-12-20 2019-08-06 西门子股份公司 底侧具有支撑结构的半导体模块
US10699984B2 (en) 2016-12-20 2020-06-30 Siemens Aktiengesellschaft Semiconductor module with a supporting structure on the bottom side
CN110100308B (zh) * 2016-12-20 2020-09-22 西门子股份公司 底侧具有支撑结构的半导体模块

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