DE102012107480A1 - detecting device - Google Patents

Abstract

The invention relates to a detector device adapted to receive light and generate electrical signals comprising a housing and a detector disposed in the housing, the detector comprising a light sensor adapted to receive light and to release electrons. The detector device is characterized in that the light sensor is at a lower electrical potential level than the housing, and that the detector is in thermally conductive contact with the housing by means of an electrically insulating intermediate arrangement, wherein within the housing the heat conduction direction of the light propagation direction of the light to be detected is opposite.

Description

The invention relates to a detector device adapted to receive light and generate electrical signals comprising a housing and a detector disposed in the housing, the detector comprising a light sensor adapted to receive light and to release electrons.

Detector devices of the type mentioned above often have a temperature-dependent dark current, which causes noise. By cooling, this dark current can be reduced.

Out DE 10 2009 036 066 A1 An optoelectronic detector is known, which has a thermally conductively connected to the detector cooling device, namely a Peltier element. To avoid the formation of condensate on a surface of the optoelectronic detector, a sensor for determining a current value with respect to the ambient air humidity and the ambient dew point temperature is provided. The sensor is connected to a control unit which controls the cooling device as a function of the value. This optoelectronic detector has the advantage that cooling is not completely dispensed with. However, it has the disadvantage that the actual cooling capacity is limited to a small degree; namely to the degree at which no condensation occurs. As a result, the result is that detector noise is insufficiently avoided.

The same document mentions another detector device in which the detector together with the cooling device, typically a Peltier element, is encapsulated in an airtight housing filled or evacuated with a dried gas. The waste heat of the cooling device can be supplied to a heat sink in this device, which is thermally conductively connected to the cooling device and / or used for heating other components, such as an entrance window of the housing. However, this detector device is identified as disadvantageous because the airtight encapsulation is expensive.

In fact, it has even been shown in practice that this detector device has further disadvantages. In particular, cooling is often not very effective. In addition, cooling is particularly difficult when the detector must be at a different electrical potential level than the housing. In this case, the Peltier element can not be easily arranged between the housing and the detector. Such a potential difference is usually necessary if an acceleration of photoelectrons is to take place within the detector.

For example US 5,508,740 , out US 5,596,228 or off US 4,833,889 Detector devices are known in which an active cooling device is provided in each case on the side facing away from a light incidence side of a light sensor. These detector devices have the disadvantage that a large part of the cooling capacity is lost unused.

Also from WO99 / 59186 is a detector device with a cooling, namely a detector device with a means of a Peltier element cooled photomultiplier known.

It is the object of the present invention to provide a detector device which allows a detection of light, in particular of light, which emanates from a microscopic sample, with a particularly good signal-to-noise ratio.

The object is achieved by a detector device of the aforementioned type, which is characterized in that, characterized in that the light sensor is at a lower electrical potential level than the housing, and that the detector by an electrically insulating intermediate arrangement in heat-conducting contact with the Housing is, wherein the heat conduction direction of the light propagation direction of the light to be detected is opposite within the housing.

In the detector device according to the invention an efficient cooling is possible, which at least greatly reduces the occurrence of disturbing and signal-distorting dark currents.

In an advantageous embodiment, the detector device according to the invention as a detector to a photomultiplier detector (PMT). In such a PMT detector, photons hit a photocathode and release electrons from its surface by the external photoelectric effect. These released photoelectrons are accelerated in an electric field and encounter other electrodes or dynodes.

In a particular embodiment, the detector device according to the invention has the particular advantage that by arranging the light sensor, for example a photocathode, at a low electrical potential level in a simple manner and largely without additional components, such as in a dynode cascade of a photomultiplier, a high acceleration of the released electrons is possible. Disturbing and signal-distorting influences of additional components are thereby effectively avoided.

In a particular embodiment, it is provided that the electrons released by the light sensor are accelerated freely within the detector by means of exclusively a single acceleration stage over an acceleration path. In particular, it can also be provided that the electrons released by the light sensor within the detector flying freely by means of only a single acceleration stage over an acceleration distance with an acceleration voltage of more than 1500 V, in particular more than 2000 V, in particular more than 4000 V, in particular more than 6000 V, in particular about 8000 V are accelerated.

In another embodiment, it is provided that the electrons released from a photosensitive medium are multiplied by means of several acceleration stages and then the resulting current is measured, as in the abovementioned PMT detector.

To generate a sufficiently high detection signal can be advantageously provided that the acceleration stage is followed by an absorber for multiplying the number of electrons and / or an avalanche diode, which is operated below its breakdown voltage.

Preferably, the intermediate assembly is high voltage resistant and electrically resistant to electrical shock. To achieve this, special components and materials may be used, some of which are mentioned and described below by way of example.

The detector device according to the invention may be constructed such that the potential difference between the light sensor and the housing is more than 1500 V, in particular more than 2000 V, in particular more than 4000 V, in particular more than 6000 V, in particular about 8000 V. Such a detector device is able to emit detection signals that are significantly less noisy than signals from systems with photomultipliers.

Preferably, the intermediate arrangement between a light sensor plane of the light sensor and an inlet opening plane of the housing, in which an inlet opening for the light to be detected is provided, is arranged. It can be provided that the light to be detected passes through the intermediate arrangement, for example through a transparent block integrated in the intermediate arrangement, in particular a glass block, or through a passageway. Alternatively, it can also be provided that the intermediate arrangement is arranged between a light sensor plane of the light sensor and an inlet opening plane of the housing in which an inlet opening for the light to be detected is present, and that the light to be detected passes the intermediate arrangement to the light sensor.

In a particular embodiment, the detector has its own detector housing, wherein the intermediate arrangement is arranged between the housing and the detector housing.

It can be provided, in particular, that the intermediate arrangement and the detector housing engage mechanically in one another and / or that the detector has its own detector housing with a circumferential projection which engages in a circumferential groove of the intermediate arrangement or of a component of the intermediate arrangement. These designs have the advantage of a special mechanical stability. In particular, in these embodiments, there is no risk of unwanted misalignment of the components to each other.

As already mentioned, it may be advantageously provided that the light path for the light to be detected within the housing, in particular completely, through glass, in particular a glass block, in particular by quartz glass, runs and / or that the intermediate arrangement at least one glass block, in particular of quartz glass, through which passes the light path for the light to be detected. In this way, it is largely avoided that dirt or condensation deposits on the optical path and that the light to be detected is unintentionally attenuated or deflected.

In a particularly advantageous embodiment, the light path is interrupted by a gap which serves to compensate for manufacturing tolerances and as a thermally insulating element. This gap may be filled with a gas, a transparent, thermally and electrically insulating liquid or a transparent, flexible thermally insulating solid. The medium in the gap can take on the function of an immersion medium and thus reduce reflection on the glass surfaces and increase the optical efficiency.

A particularly efficient cooling of the light sensor is achieved in a particular embodiment in which the intermediate arrangement on the light incidence side of the light sensor is in direct contact with the light sensor and / or with a substrate carrying the light sensor.

As already mentioned, it can be advantageously provided that a light path is defined for the light to be detected, which extends through the intermediate arrangement, in particular a cooling component of the intermediate arrangement, or past the intermediate arrangement. This way a can symmetrical and uniform cooling of the light sensor, in particular on its light incidence side, can be achieved, whereby the dark current behavior is significantly improved.

In a particular embodiment, it is provided that the light sensor and the housing are thermally conductively connected by means of the intermediate arrangement, wherein the contact surface of the intermediate arrangement with the light sensor is smaller than the contact surface of the intermediate arrangement with the housing. Such a design has the very special advantage that, on the one hand, a particularly good heat dissipation away from the light sensor is ensured, while on the other hand, the free accessibility of the photosensitive surface of the light sensor for the light to be detected is at most limited.

In a particularly advantageous embodiment, the intermediate arrangement has a plurality of cooling components, which are stacked in layers. In particular, the cooling components may be annular, so that a passageway for the light to be detected is present. In particular, a transparent block, in particular a glass block, can be arranged in the passageway, through which the light to be detected passes.

In that regard, it can be provided, in particular, that the intermediate arrangement has a plurality of annular cooling components which are stacked in layers, and that the annular cooling components surround a glass block, in particular of quartz glass, through which the light path for the light to be detected passes.

In a particular embodiment, the intermediate arrangement has a plurality of annular cooling components, which are stacked in layers. In particular, it can be provided that the stacking direction is parallel to the heat transport direction.

In a particular embodiment it can be provided that at least two cooling components are arranged coaxially with each other. In this case, provision can be made, in particular, for the light path for the light to be detected to run along the rotational symmetry axis of the cooling components. In addition, it can be provided in an advantageous manner that the intermediate arrangement is in contact with an entrance window or an entrance optics of the housing. Such an arrangement is characterized in that a light sensor of the detector can be cooled particularly effectively, because a direct heat transfer from the light sensor or its substrate to the housing takes place.

It can be advantageously provided in particular that the intermediate arrangement comprises a plurality of cooling components, which are thermally connected in series. In particular, it can be provided with particular advantage that one of the cooling components is designed as a passive cooling component, for example as a boron nitride ring, and is in direct contact with a light sensor and / or a light-sensor-carrying substrate.

In a particularly advantageous manner, it is provided in a particular embodiment that at least one of the cooling components is designed as a heat-conducting, electrically insulating intermediate element and / or that at least one of the cooling components is designed as a passive cooling component through which a heat flow takes place.

Alternatively or additionally, it can also advantageously be provided that at least one of the cooling components is designed as an active cooling component, in particular as a Peltier element or as a heat pump or as a heat pipe. In a particularly advantageous embodiment, the cooling component is designed as an annular Peltier element. Such an embodiment has the advantage that the light path for the light to be detected can run through the middle of the ring, so that the light path is arranged when passing through the annular Peltier element substantially coaxially to the rotational symmetry axis of the annular Peltier element.

In particular, in order to be able to withstand the above-mentioned potential differences, it is provided in a particular embodiment that at least one of the cooling components at least partially made of an electrically insulating and thermally conductive material, in particular boron nitride, aluminum nitride, alumina, diamond, synthetic diamond, a flexible thermally conductive material , thermally conductive rubber or a combination of these materials. These substances are characterized on the one hand by a high thermal conductivity and on the other hand by a very low electrical conductivity. In addition, these materials offer the advantage that they can be processed simply and accurately, for example by grinding, turning or milling.

In a particular embodiment it is provided that at least one of the cooling components is both an electrical insulator and a thermal conductor. In particular, to achieve this, the cooling member may at least partially consist of a composite material. For example, the cooling member may each comprise a core of a thermally conductive material, for example of a metal, such as aluminum or copper, which is at least partially surrounded by an electrical insulator. In particular, can be provided be that the surrounding electrical insulator - in relation to the heat conduction direction - is thinner than the core. In particular, the core may have a thickness of several millimeters or even several centimeters.

As a composite component, the cooling component, in particular due to the easy machinability of a metallic core, for example, can be produced without great effort in exceptional forms.

On the one hand, the core acts as a spacer, for example, between the light sensor and a housing or, for example, between the light sensor and a cooling component, in particular designed as a Peltier element. In addition, the property of good thermal conductivity of the block is exploited. To provide electrical isolation, the block is surrounded by an electrical insulator. In a particular embodiment, the electrical insulator is designed as an insulator film, in particular as a plastic film. For example, the use of a Kaptonfolie offers. Since a suitable plastic film, for example a Kapton film, can already have a very high electrical breakdown strength at a thickness of fractions of a millimeter, the electrical insulator film can be substantially thinner than the core. In this way, in particular, it is achieved that the electrical insulator foil hardly has a thermally insulating effect. The particular combination of the thermally conductive core with the thinner electrical insulation film leads to a cooling component that is both electrically insulating, as well as thermally conductive.

The surrounding electrical insulator may also consist of an initially liquid material which is applied, for example, by brushing, spraying or dipping on the core and cures there.

In a particularly advantageous manner, it can be provided that one of the cooling components is designed as a passive cooling component through which a heat flow takes place. It is particularly advantageous if the passive cooling component has good thermal conductivity in order to ensure rapid heat transfer. In that regard, can be advantageously provided that the Zwischenanorndung or at least one of the cooling components has a thermal conductivity greater than 1 W / mK, in particular greater than 10 W / mK, in particular greater than 100 W / mK, very particularly greater than 500 W / mK.

In a particularly advantageous embodiment, the intermediate arrangement or at least one of the cooling components of the intermediate assembly is shaped and dimensioned so that they fit snugly and as large as possible to the component to be cooled of the detector device, in particular to a light sensor and / or a light sensor-carrying substrate can. As a result, a particularly good cooling can be achieved. The same applies analogously to the case in which one of the cooling components is designed as an active cooling component. However, the formation of the intermediate arrangement is preferably always such that the function of the detector and / or the function of parts of the detector is not adversely affected, for example. By shading a light path.

In a particularly advantageous embodiment, which can be used in particular when the detector and / or parts of the detector are at a different electrical potential level than the housing, the intermediate arrangement or at least one of the cooling components is electrically largely insulating. In particular, it can be provided that the intermediate arrangement or at least one of the cooling components has an electrical conductivity of less than 10 ^-7 S / m, in particular less than 10 ^-8 S / m.

In particular, for embodiments in which high potential differences may be present-according to an independent idea of the invention, which is also feasible detached from a special arrangement and execution of the intermediate arrangement-advantageously be provided that the intermediate assembly or at least one cooling member of the intermediate assembly to increase the tracking resistance on an outer surface has a creepage path extended by means of a labyrinth and / or by means of ribs and / or by means of at least one groove and / or by means of at least one projection.

In a very particular embodiment, it is provided that the intermediate arrangement or at least one cooling component of the intermediate arrangement, in particular for increasing the tracking resistance, has at least one peripheral projection or at least one circumferential groove. Such a design has the particular advantage that the creepage path is lengthened along the surface of the cooling component or of the further cooling component, so that the risk of an electrical flashover is at least reduced.

In particular, for embodiments in which high potential differences may be present - be provided advantageous according to an independent inventive idea, which is also implemented by a special arrangement and execution of the intermediate arrangement that interstices filled the intermediate assembly or at least one cooling member of the intermediate assembly with an electrically insulating material are. In particular, when using a thermoelectric converter, in particular a Peltier element, in addition be advantageously provided that the filler material is formed both electrically, and thermally insulating. In a particular embodiment, a cooling component of the intermediate arrangement is designed as a thermoelectric converter, in particular as a Peltier element, whose intermediate spaces are filled with epoxy resin or silicone, in particular poured out.

By filling the intermediate spaces of the cooling component and / or the further cooling component with an electrically insulating material, unwanted voltage flashovers can be effectively avoided. By filling with electrically insulating material, a spattering of sparks along the surface of internal components, such as the usually columnar or cuboid semiconductor elements of a Peltier element, effectively prevented.

In particular, to avoid the formation of condensation, it can be advantageously provided that the housing is gas-tight and / or that there is a vacuum in the housing. For example. It can also be provided that the gas-tight housing is filled with a gas, preferably a dried gas, whose dew point is particularly low. For example, it may be advantageous to introduce a desiccant in the housing. This serves to remove any remaining moisture or to absorb penetrating moisture.

In a particular embodiment, it is provided that the intermediate arrangement is arranged such that the waste heat of the detector and / or a, in particular active, cooling component heats at least one entrance window of the housing and / or an inlet optics of the housing. As a result, the waste heat of the active cooling component to avoid the formation of condensation on the entrance window or the entrance optics is used in an advantageous manner.

In a particularly efficient cooling embodiment, a passive cooling component is provided which conducts heat from the light sensor and / or from the substrate of the light sensor to another, active, cooling component, in particular a Peltier element, which is not connected to the light sensor and not to a substrate of the Peltier element Light sensor is in direct contact. In addition, it is provided that the further, active cooling component emits heat directly or indirectly to the housing. The special sequence of the arrangement ensures that the additional process heat of the active cooling component does not have to be passed through the passive cooling component.

The detector device according to the invention can be used particularly advantageously with or in a microscope, in particular a scanning microscope or a confocal scanning microscope. In a particularly advantageous embodiment of a confocal scanning microscope, this has several of the detector devices according to the invention. For example. it can be provided that the individual detector devices are assigned different detection spectral ranges and / or can be assigned.

Other objects, advantages, features and applications of the present invention will become apparent from the following description of an embodiment with reference to the drawings. All described and / or illustrated features alone or in any meaningful combination form the subject matter of the present invention, also independent of their summary in the claims or their dependency.

Show it:

1 schematically an embodiment of a detector device according to the invention,

2 schematically another embodiment of a detector device according to the invention,

3 schematically a third embodiment of a detector device according to the invention and

4 schematically a fourth embodiment of a detector device according to the invention,

5 a detailed representation of an embodiment of an intermediate arrangement of the detector device according to the invention,

6 schematically a fifth embodiment of a detector device according to the invention,

7 schematically a sixth embodiment of a detector device according to the invention,

8th schematically in an exploded view of the fifth embodiment of the detector device according to the invention,

9 schematically in an exploded view of the sixth embodiment of the detector device according to the invention,

10 schematically a seventh embodiment of a detector device according to the invention,

11 schematically in an exploded view of the seventh embodiment of the detector device according to the invention,

12 schematically an eighth embodiment of a detector device according to the invention and

13 schematically in an exploded view of the eighth embodiment of the detector device according to the invention.

1 shows a detector device 1 that is designed to light 2 to receive and at an electrical outlet 3 to provide electrical signals. The detector device 1 has a housing 4 in which a detector 5 is arranged.

The detector 5 has a light sensor 6 namely one on a substrate 7 arranged photocathode 8th which is operated in transmission arrangement. This means that the photocathode 8th on the side the light to be detected 2 receives that of an entrance optics 9 of the housing 4 is facing, and that the photocathode 8th on the side facing away from this side photoelectrons emits.

The photocathode 8th and her substrate 7 are at a potential level of -8000 V, while the case 4 is at a potential level of 0V.

The detector 5 also has an avalanche diode 10 on, opposite the case 4 at a potential level of -400V. The from the photocathode 8th generated photoelectrons are due to the between the photocathode 8th and the avalanche diode 10 accelerated potential difference and meet an avalanche diode 10 , the electrical signals via the electrical outlet 3 outputs. This type of detector may be, for example, a hybrid detector.

It is an electrically insulating intermediate arrangement 18 installed so that the detector 5 through the intermediate arrangement 18 in thermally conductive contact with the housing 4 standing, being inside the case 4 the heat conduction direction of the light propagation direction of the light to be detected 2 is opposite.

The detector device 1 points inside the housing 4 a cooling component 11 on, which is designed as a passive cooling component. Specifically, the cooling component 11 as a heat-conducting, electrically insulating intermediate element 12 educated. The intermediate element 12 has an annular shape, wherein the central axis of the intermediate element coaxial with the light path of the light to be detected 2 runs.

The detector device 1 also points inside the case 4 another cooling component 13 on, as a preferably annular Peltier element 14 is trained. The annular Peltier element 14 is coaxial with the annular intermediate element 12 arranged. The Peltier element and the intermediate element 12 need not necessarily be annular, but it is advantageous if the Peltier element and the intermediate element 12 are arranged coaxially to each other.

The annular Peltier element 14 is in heat-conducting contact with the intermediate element 12 , The intermediate element 12 is in heat-conducting contact with the substrate 7 ,

About the heat-conducting, electrically insulating intermediate element 12 can reduce the cooling capacity for cooling the substrate 7 and the photocathode 8th be used particularly effectively. In addition, it is envisaged that the warm side of the annular Peltier element 14 the housing 4 and the entry optics 9 is facing. This will cause the entrance optics 9 heated, so that no condensation can precipitate. The remaining space between the detector 5 , the intermediate element 12 and the annular Peltier element 14 to the housing 4 is filled with a thermally and electrically insulating potting compound (for example, silicone). The area between the entrance optics 9 and the photocathode 8th is filled with a dried gas.

2 shows another embodiment of the detector device according to the invention. As in the embodiment of 1 , shows 2 a detector device 1 that is designed to light 2 to receive and at an electrical outlet 3 to provide electrical signals. The detector device 1 has a housing 4 in which a detector 5 , with a different construction than the one in 1 is shown is arranged.

The detector 5 has a light sensor consisting of a photosensitive layer 7 that in a particular embodiment on a substrate 7 is arranged. This type of detector may be, for example, a photomultiplier (PMT). With such a PMT detector, photons hit the photocathode 8th and dissolve electrons from their surface by the external photoelectric effect. These released photoelectrons are accelerated in an electric field and encounter other electrodes in dynode cascade 40 ,

It is an electrically insulating intermediate arrangement 18 installed so that the detector 5 through the intermediate arrangement 18 in thermally conductive contact with the housing 4 standing, being inside the case 4 the heat conduction direction of the light propagation direction of the light to be detected 2 is opposite.

The detector device 1 points inside the housing 4 a cooling component 11 on, which is designed as a passive cooling component. Specifically, the cooling component 11 as a heat-conducting, electrically insulating intermediate element 12 educated. The intermediate element 12 has an annular shape, wherein the central axis of the intermediate element coaxial with the light path of the light to be detected 2 runs.

The detector device 1 also points inside the case 4 another cooling component 13 on, as an annular Peltier element 14 is trained. The annular Peltier element 14 is coaxial with the annular intermediate element 12 arranged. The Peltier element and the intermediate element 12 also need not be annular, but they should preferably be coaxial with each other. The Peltier element and / or the intermediate element could consist of several parts.

The annular Peltier element 14 is in heat-conducting contact with the intermediate element 12 , The intermediate element 12 is in heat-conducting contact with the substrate 7 ,

About the heat-conducting, electrically insulating intermediate element 12 can reduce the cooling capacity for cooling the substrate 7 and the photocathode 8th be used particularly effectively. In addition, it is envisaged that the warm side of the annular Peltier element 14 the housing 4 and the entry optics 9 is facing. This will cause the entrance optics 9 heated, so that no condensation can precipitate. The remaining space between the detector 5 , the intermediate element 12 and the annular Peltier element 14 to the housing 4 is filled with a thermally and electrically insulating potting compound (for example, silicone). The area between the entrance optics 9 and the photocathode 8th is filled with a dried gas.

3 schematically shows a third embodiment of a detector device according to the invention, which basically corresponds in basic construction to the detector devices which in the 1 and 2 are shown. However, the cooling component points 11 that acts as a heat-conducting, electrically insulating element between 12 is formed, a conical passage for the light to be detected 2 on. In addition, the other cooling component 14 with a (compared to the embodiments, in the 1 and 2 are shown) enlarged in diameter passage provided. There is also an enlarged entrance window 9 of the housing 4 built-in. This embodiment has the particular advantage that the numerical aperture is significantly increased. As a result, obliquely incident light in particular can also unhindered to that as a photocathode 8th get trained light sensor.

In particular, the entrance window is substantially larger than the light sensor, in this example the photocathode 8th , executed. The radius of the free opening of the cooling component 11 and the further cooling component 13 therefore takes from the photocathode 8th starting in the direction of the entrance window towards. In this way it is additionally achieved that also the contact surface between the as an intermediate element 12 executed cooling component 11 and the further cooling component 14 namely the Peltier element 14 , is substantially enlarged, which in particular ensures a good heat dissipation.

At the in 3 illustrated embodiment is also the contact surface of the cooling component 11 with the substrate 7 of the light sensor 6 larger than the contact surface of the cooling component 11 with the other cooling component 13 without the cooling component 11 directly in contact with other components of the detector 5 stands.

In particular, this is also the outer contour of the cooling component 11 conical.

To effect additional thermal isolation relative to the housing is an annular thermal insulator 15 provided, which is the cooling component 11 surrounds.

4 schematically shows a fourth embodiment of a detector device according to the invention, the structure of the in 3 shown embodiment corresponds. To increase the tracking resistance is the passage for the light 2 of the intermediate element 12 with a circumferential rib structure 12a Mistake. This is the creepage distance from the light sensor 6 to the further cooling component 13 increases and thereby significantly reduces the risk of electrical flashover.

5 shows a detailed representation of an embodiment of an intermediate arrangement of the detector device according to the invention. In this embodiment, the gaps of the other cooling member 13 namely, the Peltier element 14 , with an electrically insulating material 16 , For example, with silicone, are filled. By filling the gaps with an electrically insulating material 16 Unwanted voltage flashovers can be effectively avoided. By filling with electrically insulating material 16 is a spattering of sparks along the surface of internal components, such as the columnar or cuboid semiconductor elements 17 of the Peltier element 14 , effectively prevented.

In addition, the electrically insulating material 16 on the outside and in the area of the passage for the light 2 ribbed to extend the creepage path.

6 schematically shows a fifth embodiment of the detector device according to the invention 1 ,

The detector device 1 has a housing 4 in which a detector 5 is arranged. The detector 5 includes as a light sensor 6 a photocathode 8th , which is operated in transmission arrangement and is at a lower electrical potential level than the housing 4 , The photocathode is an avalanche diode 10 downstream, which reach the released due to a light irradiation electrons after passing through the intermediate acceleration section.

It is an electrically insulating intermediate arrangement 18 installed so that the detector 5 through the intermediate arrangement 18 in thermally conductive contact with the housing 4 standing, being inside the case 4 the heat conduction direction of the light propagation direction of the light to be detected 2 is opposite.

Seen from the light beam direction is directly in front of light sensor 6 a transparent substrate, in this case a plane-parallel glass pane 19 , namely a borosilicate glass pane, arranged. In front of the glass pane 19 is a transparent glass block 20 arranged to pass through the light to be detected before it the light sensor 6 reached.

The intermediate arrangement 18 has a plurality of annular cooling components, which are arranged in a stacked arrangement coaxial with each other and in which the glass block 20 is arranged. Immediately adjacent to the plane-parallel glass pane 19 is a passive cooling component, namely an aluminum nitride ring 21 arranged with an adhesive 22 with the glass block 20 is glued. The glue 22 is formed high voltage resistant and preferably consists of an epoxy resin with a dielectric strength of 20 KV / mm.

Adjacent to the aluminum nitride ring 21 is as another cooling component an annular Peltier element 23 built-in. Between the annular Peltier element 23 and the housing 4 there is a thermally conductive medium, for example a copper ring 24 ,

Preferably, the free spaces are between the detector 5 and the intermediate arrangement 18 on the one hand and the housing 4 on the other hand filled with silicone.

7 schematically shows a sixth embodiment of a detector device according to the invention 1 that differ from the in 6 illustrated embodiment by the shape and the arrangement of the glass block 20 different. Seen from the light beam direction is directly in front of light sensor 6 a transparent substrate, in this case a glass plate 19 ,

The glass block 20 is at the in 7 illustrated embodiment frustoconical, wherein the end with the smaller diameter of the light sensor 6 is facing. The end with the larger diameter forms the entrance window of the detector device 1 and preferably closes flush with the housing 4 from. The glass block 20 is connected to the warm side of the cooling element, so that on its outside no condensation of ambient humidity can take place. Glass is a bad conductor of heat. Nevertheless, some heat is transported inwards.

To the heat input into the glass plate 19 is low between the glass block 20 and the glass plate 19 an air gap 35 available. This air gap is also used to compensate for manufacturing tolerances, otherwise a force on the glass plate 19 could cause. The glass block 20 is a bit warmer than the environment inside the detector. Despite the air gap, a little heat energy on the surface facing him glass plate 19 transfer. The glass plate 19 So it is slightly warmer in the middle than on the edge and warmer than the cooling component 11 , Any existing residual moisture will therefore be on the cooling component 11 or on the edge of the glass plate 19 knock down. The center and thus the light path through the glass plate 19 stay free of condensation problems.

To condensation problems due to residual moisture in the air gap 35 or in the remaining free volume 25 To avoid these may be filled with a dried gas or a transparent, electrically and thermally insulating medium (for example, silicone oil). At the same time, this medium can still be designed such that it reduces refractive index jumps, for example from air to glass and vice versa, and thus reduces reflections and optical losses. It would accordingly take over the function of an immersion medium.

The glass block 20 is at the in 7 illustrated embodiment with an impact-resistant adhesive 22 glued to the copper ring.

8th schematically shows an exploded view of the structure of the fifth embodiment of the detector device according to the invention 1 ,

The detector device 1 has a housing 4 in which a detector 5 is arranged. The detector 5 includes as a light sensor 6 a photocathode 8th , which is operated in transmission arrangement and is at a lower electrical potential level than because housing 4 , The photocathode is an avalanche diode 10 downstream, which reach the released due to a light irradiation electrons after passing through the intermediate acceleration section.

It is an electrically insulating intermediate arrangement 18 installed so that the detector 5 through the intermediate arrangement 18 in thermally conductive contact with the housing 4 standing, being inside the case 4 the heat conduction direction of the light propagation direction of the light to be detected 2 is opposite.

The detector 5 has one to an inlet opening 26 for the light to be detected aligned circumferential projection 27 which is in a circumferential groove 28 the intermediate arrangement 18 intervenes. The groove 28 is located between an aluminum nitride ring 21 into which a chamfer has been milled, and into the aluminum nitride ring 21 glued glass block 20 through which the light to be detected passes.

Adjacent to the aluminum nitride ring 21 is as another cooling component an annular Peltier element 23 built-in. Adjacent to the Peltier element 23 there is a thermally conductive element, such as a copper ring 24 whose outer diameter is larger than that of the Peltier element 23 is. Between the copper ring 24 and the housing 4 is located to seal an elastic ring 29 from a flexible thermally conductive material, for example rubber material.

The electrical detection signals are via a connector 30 output.

9 shows schematically in an exploded view of the structure of the sixth embodiment detail view of a ninth embodiment of a detector device according to the invention, which differs from that in 8th illustrated embodiment characterized in that the glass block instead of the aluminum nitride ring 21 with a glue 22 to the copper ring 24 is glued. Instead of a copper ring, can also be another thermally conductive element 24 be used. For example, Element 24 an aluminum nitride ring or other metal ring.

10 schematically shows a seventh embodiment of a detector device according to the invention, which differs from the in 6 illustrated embodiment characterized in that the detector 5 a PMT detector (for example, as in the in 2 shown embodiment) is.

11 shows schematically in an exploded view the structure of the seventh embodiment, which differs from that in 8th illustrated embodiment characterized in that the detector 5 a PMT detector (for example, as in the in 2 shown embodiment) is.

12 schematically shows an eighth embodiment of the detector device according to the invention, which differs from the in 7 illustrated embodiment characterized in that the detector 5 a PMT detector (for example, as in the in 2 shown embodiment) is.

13 schematically shows an exploded view of the structure of the eighth embodiment, which differs from the in 9 illustrated embodiment characterized in that the detector 5 a PMT detector (for example, as in the in 2 shown embodiment) is. The glass block 20 is to the copper ring 24 instead of the aluminum nitride ring 21 as in 11 , glued. Instead of a copper ring, can also be another thermally conductive element 24 be used. For example, element might 24 an aluminum nitride ring or other metal ring.

LIST OF REFERENCE NUMBERS

1

 detecting device

2

 to be detected light

3

 electrical outlet

4

 casing

5

 detector

6

 light sensor

7

 substratum

8th

 photocathode

9

 admission optics

10

 avalanche diode

11

 cooling component

12

 intermediate element

12a

 rib structure

13

 Another cooling component

14

 Peltier element

15

 Thermal insulator

16

 electrically insulating material

17

 Semiconductor components

18

 intermediate assembly

19

 Glass plate; pane

20

 glass block

21

 electrically insulating thermally conductive element; Aluminiumnitridring

22

 Glue

23

 Peltier element

24

 thermally conductive element; copper ring

25

 remaining volume

26

 inlet opening

27

 head Start

28

 groove

29

 elastic heat-conducting ring

30

 connector

35

 air gap

40

 Dynodenkaskade

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102009036066 A1 [0003]
• US 5508740 [0006]
• US 5596228 [0006]
• US 4833889 [0006]
• WO 99/59186 [0007]

Claims (24)

A detector device adapted to receive light and generate electrical signals comprising a housing and a detector disposed in the housing, the detector comprising a light sensor adapted to receive light and to release electrons, characterized in that the Light sensor is at a lower electrical potential level than the housing, and that the detector is in thermally conductive contact with the housing by an electrically insulating intermediate arrangement, wherein inside the housing, the heat conduction direction opposite to the light propagation direction of the light to be detected. Detector device according to claim 1, characterized in that a. the electrons released by the light sensor are accelerated freely within the detector by means of exclusively a single acceleration stage over an acceleration distance, or that b. the electrons released by the light sensor within the detector flying freely by means of only a single acceleration stage over an acceleration distance with an acceleration voltage of more than 1500 V, in particular more than 2000 V, in particular more than 4000 V, in particular more than 6000 V, especially about 8000 V be accelerated or that c. the electrons released from a photosensitive medium are multiplied by means of several acceleration stages and then the resulting current is measured. Detector device according to claim 2, characterized in that the acceleration stage is followed by an avalanche diode which is operated below its breakdown voltage. Detector device according to one of claims 1 to 3, characterized in that the intermediate assembly is formed high voltage resistant and electrically resistant to electrical shock. Detector device according to one of Claims 1 to 4, characterized in that the potential difference between the light sensor and the housing is more than 1500 V, in particular more than 2000 V, in particular more than 4000 V, in particular more than 6000 V, in particular approximately 8000 V , Detector device according to one of claims 1 to 5, characterized in that the intermediate arrangement between a light sensor plane of the light sensor and an inlet opening plane of the housing, in which an inlet opening for the light to be detected is present. Detector device according to one of claims 1 to 6, characterized in that a. the detector has its own detector housing and that the intermediate arrangement is arranged between the housing and the detector housing and / or that b. mechanically engage the intermediate assembly and the detector housing and / or that c. the detector has its own detector housing with a circumferential projection which engages in a circumferential groove of the intermediate assembly or a component of the intermediate assembly. Detector device according to claim 1 to 7, characterized in that an optical path for the light to be detected is set, which passes through the intermediate arrangement or past the intermediate arrangement. Detector device according to claim 8, characterized in that a. the light path for the light to be detected within the housing, in particular completely, passes through glass, in particular a glass block, in particular through quartz glass, and / or that b. the intermediate arrangement has at least one glass block, in particular of quartz glass, through which the light path for the light to be detected passes. Detector device according to claim 8 or 9, characterized in that the light path is interrupted by a gap which serves to compensate for manufacturing tolerances and / or as a thermally insulating element. Detector device according to claim 10, characterized in that the gap with a medium, in particular with a gas and / or a transparent, thermally and electrically insulating liquid and / or a transparent, flexible, thematically insulating solid filled. Detector device according to one of claims 1 to 11, characterized in that the intermediate arrangement is on the light incident side of the light sensor in direct contact with the light sensor and / or to a substrate carrying the light sensor. Detector device according to one of claims 1 to 12, characterized in that a. the intermediate arrangement has a plurality of cooling components which are stacked in layers and / or that b. the intermediate arrangement has a plurality of annular cooling components which are stacked in layers, and / or that c. the intermediate arrangement comprises a plurality of cooling components which are stacked in layers, wherein the Stacking direction is parallel to the heat transport direction and / or that d. the intermediate arrangement comprises a plurality of annular cooling components which are stacked in layers, and in that the annular cooling components surround a glass block, in particular of quartz glass, through which the light path for the light to be detected passes, and / or that e. the intermediate arrangement has a plurality of cooling components which are thermally connected in series. Detector device according to claim 13, characterized in that a. at least one of the cooling components is designed as a heat-conducting, electrically insulating intermediate element and / or that b. at least one of the cooling components is designed as a passive cooling component, through which a heat flow takes place and / or that c. at least one of the cooling components consists of a flexible heat-conducting material. Detector device according to claim 13 or 14, characterized in that at least one of the cooling components is designed as an active cooling component, in particular as a Peltier element or as a heat pump or as a heat pipe. Detector device according to one of claims 13 to 16, characterized in that at least one of the cooling components at least partially made of an electrically insulating and thermally conductive material, in particular boron nitride, aluminum nitride, alumina, diamond, synthetic diamond, heat conductive rubber or a combination of these materials, consists. Detector device according to one of claims 13 to 16, characterized in that a. at least one of the cooling components is both an electrical insulator, so also a thermal conductor and / or that b. at least one of the cooling components at least partially consists of a composite material and / or that c. at least one of the cooling components comprises a core of a thermally conductive material, in particular aluminum, which is at least partially surrounded by an electrical insulator, in particular an electrical insulator film, for example a plastic film, and / or that d. at least one of the cooling components comprises a core of a thermally conductive material, in particular of aluminum, which is at least partially surrounded by an electrical insulator, which is thinner relative to the heat conduction direction, than the core. Detector device ( 1 ) according to one of claims 1 to 16, characterized in that the intermediate arrangement or at least one of the cooling components has a thermal conductivity greater than 1 W / mK, in particular greater than 10 W / mK, in particular greater than 100 W / mK, in particular greater than 500 W / mK having. Detector device according to one of claims 1 to 18, characterized in that the intermediate arrangement or at least one of the cooling components has an electrical conductivity of less than 10 ^-7 S / m, in particular less than 10 ^-8 S / m. Detector device according to one of claims 1 to 19, characterized in that the intermediate arrangement or at least one of the cooling components to increase the tracking resistance on an outer surface by means of a labyrinth and / or by means of ribs and / or by means of at least one groove and / or by means of at least one projection extended creepage path has. Detector device according to one of claims 1 to 20, characterized in that a. that intermediate spaces of the intermediate arrangement are filled with an electrically insulating material and / or that b. that intermediate spaces of the intermediate arrangement are filled with an electrically and thermally insulating material and / or that c. the cooling component and / or the further cooling component are designed as a thermoelectric converter, in particular as a Peltier element, whose interspaces are filled with an electrically insulating material and / or that d. at least one of the cooling components is designed as a thermoelectric converter, in particular as a Peltier element, whose interstices are filled with an electrically and thermally insulating material and / or that e. at least one of the cooling components is designed as a thermoelectric converter, in particular as a Peltier element, whose interstices are filled with epoxy resin or silicone. Detector device according to one of claims 1 to 21, characterized in that the housing is gas-tight and / or that there is a vacuum in the housing. Detector device according to one of claims 1 to 22, characterized in that the intermediate arrangement is arranged such that the waste heat of the detector and / or a, in particular active, cooling component heats at least one entrance window of the housing and / or an inlet optics of the housing. Optical device, in particular microscope or scanning microscope or confocal Scanning microscope, comprising at least one detector device according to one of claims 1 to 23.

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