DE112005000923A5 - Mikrofluidische Hochdruckkapillarventilvorrichtung sowie ein Verfahren zum Herstellen dieser Vorrichtung - Google Patents

Mikrofluidische Hochdruckkapillarventilvorrichtung sowie ein Verfahren zum Herstellen dieser Vorrichtung Download PDF

Info

Publication number
DE112005000923A5
DE112005000923A5 DE200511000923 DE112005000923T DE112005000923A5 DE 112005000923 A5 DE112005000923 A5 DE 112005000923A5 DE 200511000923 DE200511000923 DE 200511000923 DE 112005000923 T DE112005000923 T DE 112005000923T DE 112005000923 A5 DE112005000923 A5 DE 112005000923A5
Authority
DE
Germany
Prior art keywords
producing
capillary valve
pressure capillary
valve device
microfluidic high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE200511000923
Other languages
English (en)
Inventor
Robert W. Crocker
Pamela F. Caton
Geoff C. Gerhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sandia National Laboratories
Waters Technologies Corp
Original Assignee
Sandia National Laboratories
Waters Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandia National Laboratories, Waters Technologies Corp filed Critical Sandia National Laboratories
Publication of DE112005000923A5 publication Critical patent/DE112005000923A5/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C1/00—Circuit elements having no moving parts
    • F15C1/02—Details, e.g. special constructional devices for circuits with fluid elements, such as resistances, capacitive circuit elements; devices preventing reaction coupling in composite elements ; Switch boards; Programme devices
    • F15C1/04—Means for controlling fluid streams to fluid devices, e.g. by electric signals or other signals, no mixing taking place between the signal and the flow to be controlled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0021—No-moving-parts valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/1624—Destructible or deformable element controlled
    • Y10T137/1797—Heat destructible or fusible
    • Y10T137/1812—In fluid flow path
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2191—By non-fluid energy field affecting input [e.g., transducer]
    • Y10T137/2196—Acoustical or thermal energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves
DE200511000923 2004-04-21 2005-04-19 Mikrofluidische Hochdruckkapillarventilvorrichtung sowie ein Verfahren zum Herstellen dieser Vorrichtung Ceased DE112005000923A5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US56425604P 2004-04-21 2004-04-21
US60/564,256 2004-04-21
US10/941,216 2004-09-15
US10/941,216 US7204264B2 (en) 2004-04-21 2004-09-15 High pressure capillary micro-fluidic valve device and a method of fabricating same
PCT/US2005/013306 WO2005103504A2 (en) 2004-04-21 2005-04-19 High pressure capillary micro-fluidic valve device and a method of fabricating same

Publications (1)

Publication Number Publication Date
DE112005000923A5 true DE112005000923A5 (de) 2011-11-10

Family

ID=35135239

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200511000923 Ceased DE112005000923A5 (de) 2004-04-21 2005-04-19 Mikrofluidische Hochdruckkapillarventilvorrichtung sowie ein Verfahren zum Herstellen dieser Vorrichtung

Country Status (5)

Country Link
US (1) US7204264B2 (de)
JP (1) JP4909887B2 (de)
DE (1) DE112005000923A5 (de)
GB (1) GB2431712B (de)
WO (1) WO2005103504A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7716945B2 (en) * 2005-04-07 2010-05-18 Thermo Fisher Scientific (Asheville) Llc Pressure equalization port apparatus and method for a refrigeration unit
WO2007021810A2 (en) * 2005-08-11 2007-02-22 Eksigent Technologies, Llc Microfluidic methods and apparatuses for fluid mixing and valving
US8145429B2 (en) 2009-01-09 2012-03-27 Baker Hughes Incorporated System and method for sampling and analyzing downhole formation fluids
US9764323B2 (en) 2014-09-18 2017-09-19 Waters Technologies Corporation Device and methods using porous media in fluidic devices
US11002262B2 (en) * 2018-02-26 2021-05-11 Valco Instruments Company, L.P. Pump for liquid chromatography with pressure sensor
CN112169851B (zh) * 2020-10-13 2022-03-29 中国科学院微电子研究所 一种微流道入口盖板及其制备和使用方法
CN113846000A (zh) * 2021-08-16 2021-12-28 向化英 基于冻融法的植物叶绿体提取用设备

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663203A (en) * 1969-04-01 1972-05-16 Columbia Gas Syst Melting of fusible materials
US3688501A (en) * 1970-07-30 1972-09-05 Ellis Eng Inc Fluid pressure amplifier
US3789190A (en) 1972-10-17 1974-01-29 A J Matlen Temperature regulation for electrical heater
US3917531A (en) * 1974-02-11 1975-11-04 Spectra Physics Flow rate feedback control chromatograph
US3975946A (en) * 1974-02-27 1976-08-24 Micromeritics Instrument Corporation Liquid chromatography sample measuring and introducing apparatus
US3932067A (en) * 1974-02-27 1976-01-13 Micromeritics Instrument Corporation Liquid chromatography apparatus and method
FR2279104A1 (fr) * 1974-07-18 1976-02-13 Aquitaine Petrole Procede d'analyse par chromatographie en phase liquide
JPS5385528A (en) * 1977-01-06 1978-07-28 Nippon Mining Co Controlling method and device for transporting melted material having high melting point by way of pipe
US4258740A (en) * 1977-05-16 1981-03-31 Packard Instrument Company, Inc. Fluid flow control device
US4174772A (en) * 1977-12-28 1979-11-20 Eli Lilly And Company Apparatus and method for coordinating chromatographic separation (HPLC) with UV/VIS absorbency values and with bioautograph test results
GB2019995B (en) 1978-04-10 1982-09-29 Kaartinen N Method and apparatus for handling batches of liquids
US4203472A (en) * 1978-06-20 1980-05-20 Dulaney Burrell C Device for stopping fluid flow from a pipe
US4505115A (en) * 1981-09-08 1985-03-19 Arbuckle Donald P Fluidic transformer apparatus with feedback
FI70331C (fi) * 1985-04-12 1986-09-15 Fluilogic Systems Oy Foerfarande foer framstaellning av till en behandlingsenhet for vaetskemaengd hoerande genom nedfrysning staengbara kra na samt genom foerfarande framstaelld behandlingsenhet
US4612959A (en) * 1985-05-07 1986-09-23 Mobil Oil Corporation Valveless shut-off and transfer device
DE3608227C2 (de) * 1986-03-12 1999-06-24 Abc Biotechnologie Bioverfahre Anordnung zur Flüssigkeitschromatographie
US4840730A (en) * 1986-07-25 1989-06-20 Sepragen Corporation Chromatography system using horizontal flow columns
US4684465A (en) * 1986-10-10 1987-08-04 Combustion Engineering, Inc. Supercritical fluid chromatograph with pneumatically controlled pump
DE3785207T2 (de) * 1987-09-26 1993-07-15 Hewlett Packard Gmbh Pumpvorrichtung zur abgabe von fluessigkeit bei hohem druck.
GB8816499D0 (en) * 1988-07-12 1988-08-17 C J S Sciences Ltd Valve
JPH0814337B2 (ja) * 1988-11-11 1996-02-14 株式会社日立製作所 流体自体の相変化を利用した流路の開閉制御弁及び開閉制御方法
FI86229C (fi) * 1989-04-10 1992-07-27 Niilo Kaartinen Foerfarande foer formning av ett uppvaermbart och nedkylbart element vid ett system behandlande smao vaetskemaengder samt ett medelst foerfarandet framstaellt element.
US4949742A (en) * 1989-04-26 1990-08-21 Spectra-Physics, Inc. Temperature operated gas valve
JP3028826B2 (ja) * 1990-03-09 2000-04-04 株式会社日立製作所 流体流路の開閉装置及びその開閉制御方法及び閉止確認方法
US5035138A (en) * 1990-04-23 1991-07-30 Hewlett-Packard Company Mass flow sensor having wide dynamic range
US5614089A (en) * 1990-07-13 1997-03-25 Isco, Inc. Apparatus and method for supercritical fluid extraction or supercritical fluid chromatography
US5092745A (en) * 1990-11-14 1992-03-03 Graham John M Automatic pressure-driven compressor
ATE147281T1 (de) * 1991-03-28 1997-01-15 Perseptive Biosystems Inc Produktinformation in chromatographischem effluenten durch differenzbildung
DE69219125T2 (de) * 1991-06-26 1997-07-24 Perseptive Biosystems Inc Verfahren und vorrichtung zum nachweis von kontaminationsspuren
US5316262A (en) * 1992-01-31 1994-05-31 Suprex Corporation Fluid restrictor apparatus and method for making the same
US5630706A (en) 1992-03-05 1997-05-20 Yang; Frank J. Multichannel pump apparatus with microflow rate capability
US5750029A (en) * 1992-10-16 1998-05-12 Suprex Corporation Method and apparatus for determination of analyte concentration
US5346622A (en) * 1993-03-04 1994-09-13 Hewlett-Packard Company Hydrocarbon class separation and quantitation by split column effluent analysis
WO1994029690A1 (en) * 1993-06-05 1994-12-22 Glaxo Group Limited Liquid flow management means
US5491096A (en) * 1993-12-27 1996-02-13 Eli Lilly And Company Antigen detection with affinity chromatography and parallel processing a control
JPH08126673A (ja) * 1994-10-31 1996-05-21 Koei Tsusho Kk ローラーマッサージ器
US5563352A (en) * 1995-01-06 1996-10-08 University Corporation For Atmospheric Research Gas concentration and injection system for chromatographic analysis of organic trace gases
FR2730545B1 (fr) * 1995-02-13 1997-03-28 Bio Merieux Vanne statique a congelation, et enceinte de traitement controlee par au moins une vanne
AU5305296A (en) * 1995-03-07 1996-09-23 Biomolecular Assays, Inc. Pressure cycling reactor
US5637790A (en) 1996-02-28 1997-06-10 De Corral; Jose L. Three capillary flow-through viscometer
US5778760A (en) * 1997-04-16 1998-07-14 Yuda; Lawrence F. End cap for intermediate use in cylinder assembly and method
US6041811A (en) * 1997-09-04 2000-03-28 Pa-Plug, Inc. Plug for forming an ice barrier in a pipeline
US6007302A (en) * 1997-10-06 1999-12-28 The Aerospace Corporation Mechanical valve having n-type and p-type thermoelectric elements for heating and cooling a fluid between an inlet and an outlet in a fluid pump
US5938932A (en) * 1997-11-14 1999-08-17 Pharmacopeia, Inc. High-throughput method and apparatus for identifying, quantitating and determining the purity of chemical compounds in mixtures
FI981432A (fi) * 1998-06-22 1999-12-23 Niilo Kaartinen Jäähana
DE19914358C2 (de) * 1999-03-30 2001-05-17 Agilent Technologies Inc Vorrichtung und Verfahren zur Bereitstellung von Volumenströmen von Flüssigkeiten in Kapillaren
US6386050B1 (en) * 1999-12-21 2002-05-14 Agilent Technologies, Inc. Non-invasive fluid flow sensing based on injected heat tracers and indirect temperature monitoring
US6460420B1 (en) * 2000-04-13 2002-10-08 Sandia National Laboratories Flowmeter for pressure-driven chromatography systems
US6813944B2 (en) * 2000-05-04 2004-11-09 Sensirion Ag Flow sensor
US7004184B2 (en) * 2000-07-24 2006-02-28 The Reagents Of The University Of Michigan Compositions and methods for liquid metering in microchannels
US6789190B1 (en) * 2000-11-16 2004-09-07 Computing Services Support Solutions, Inc. Packet flooding defense system
JP3548858B2 (ja) * 2001-01-22 2004-07-28 独立行政法人産業技術総合研究所 流量の制御方法及びそれに用いるマイクロバルブ
DE60100789T2 (de) 2001-04-04 2004-04-01 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Fluss-Verteiler zu analytischen Zwecken
US6989129B2 (en) * 2001-04-05 2006-01-24 The President And Fellows Of Harvard College Automated capillary liquid chromatography small volume analysis system
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
US6557575B1 (en) * 2001-11-19 2003-05-06 Waters Investments Limited Fluid flow control freeze/thaw valve for narrow bore capillaries or microfluidic devices
US6712587B2 (en) * 2001-12-21 2004-03-30 Waters Investments Limited Hydraulic amplifier pump for use in ultrahigh pressure liquid chromatography
JP2003336949A (ja) * 2002-05-17 2003-11-28 Yamatake Corp 冷媒移動器および冷却装置
JP4178850B2 (ja) * 2002-06-25 2008-11-12 ソニー株式会社 冷却装置、電子機器装置、冷却装置の製造方法及びエバポレータ
JP4032954B2 (ja) * 2002-07-05 2008-01-16 ソニー株式会社 冷却装置、電子機器装置、音響装置及び冷却装置の製造方法

Also Published As

Publication number Publication date
JP4909887B2 (ja) 2012-04-04
GB2431712B (en) 2009-03-04
WO2005103504A2 (en) 2005-11-03
US7204264B2 (en) 2007-04-17
WO2005103504A3 (en) 2007-06-07
GB0623198D0 (en) 2006-12-27
GB2431712A (en) 2007-05-02
JP2007533936A (ja) 2007-11-22
US20050236055A1 (en) 2005-10-27

Similar Documents

Publication Publication Date Title
DE602005014378D1 (de) Verfahren und einrichtung zum erzeugen einer terahertzwelle
DE112005001609A5 (de) Messzelle sowie Verfahren zum Herstellen einer Messzelle und Messvorrichtung zur Aufnahme einer derartigen Messzelle
DE502005002662D1 (de) Verfahren zur steuerung eines bilevel-geräts sowie bilevel-gerät
DE502005011138D1 (de) Verfahren und vorrichtung zum herstellen profilierter, zumindest abschnittsweise länglicher bauteile
DE112005000923A5 (de) Mikrofluidische Hochdruckkapillarventilvorrichtung sowie ein Verfahren zum Herstellen dieser Vorrichtung
ATA15372003A (de) Schweissanlage, sowie verfahren zur energieeinbringung in einen schweissprozess
DE502004003948D1 (de) Hydraulische Steuereinrichtung für ein Doppelkupplungsgetriebe sowie ein Verfahren zum hydraulischen Ansteuern eines Doppelkupplungsgetriebes.
DE502005005126D1 (de) Verfahren zum Herstellen eines top-emittierenden Bauteils sowie Verwendung
DE602005008201D1 (de) Vorrichtung und verfahren zur druckreduzierung
ATE493215T1 (de) Dosenkörper und verfahren sowie vorrichtung zum herstellen desselben
DE602006012975D1 (de) Vorrichtung zum binden eines halbleiterbauelements und verfahren zum binden eines halbleiterbauelements damit
DE502005001279D1 (de) Verfahren und Vorrichtung zum automatischen Anfahren
DE502005010348D1 (de) Verfahren und werkzeugeinrichtung zum umformen
DE602004025672D1 (de) Verfahren und vorrichtung zum wechseln von drucklaenge in einer druckpresse
DE602005027312D1 (de) Verfahren zum herstellen eines piezoelektrischen elements
DE602005011941D1 (de) Verfahren und vorrichtung zur aufrechterhaltung von druckverstärkung in einer servoventilanordnung
FI20045293A (fi) Laite ja menetelmä diffraktiivisen mikrorakenteen tuottamiseksi
DE102006011743A8 (de) Verfahren zum Herstellen von Peltier-Modulen sowie Peltier-Modul
DE602005003378D1 (de) Vorrichtung und Verfahren zum Biegen von Profilen
DE602004014412D1 (de) Verfahren und vorrichtung zum programmieren eines
DE602005017003D1 (de) Verfahren und Vorrichtung zum Herstellen von Klebeband
DE50300907D1 (de) Vorrichtung und verfahren zum erzeugen eines befehlscodes für ein kryptogramm
DE502005008883D1 (de) Verfahren und vorrichtung zum ansteuern eines stellgliedes
DE502005004014D1 (de) Verfahren und vorrichtung zum steuern eines ventils
DE602004001895D1 (de) Einrichtung zum Herstellen eines hohlen metallischen Elementes durch Diffusionsverbindung und superplastische Verformung, Verwendung derselben sowie Verfahren zum Herstellen eines solchen metallischen Elementes

Legal Events

Date Code Title Description
R012 Request for examination validly filed

Effective date: 20120323

R082 Change of representative

Representative=s name: CORINNA VOSSIUS IP GROUP PATENT- UND RECHTSANW, DE

Representative=s name: CORINNA VOSSIUS IP GROUP, DE

Representative=s name: WINKLER IP, DE

R082 Change of representative

Representative=s name: CORINNA VOSSIUS IP GROUP PATENT- UND RECHTSANW, DE

Representative=s name: WINKLER IP, DE

R016 Response to examination communication
R082 Change of representative

Representative=s name: WINKLER IP, DE

R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final