DE1514322A1 - Arrangement to improve the ignition and stability of induction plasma torches - Google Patents

Arrangement to improve the ignition and stability of induction plasma torches

Info

Publication number
DE1514322A1
DE1514322A1 DE19651514322 DE1514322A DE1514322A1 DE 1514322 A1 DE1514322 A1 DE 1514322A1 DE 19651514322 DE19651514322 DE 19651514322 DE 1514322 A DE1514322 A DE 1514322A DE 1514322 A1 DE1514322 A1 DE 1514322A1
Authority
DE
Germany
Prior art keywords
inductor
arrangement
ignition
stability
induction plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19651514322
Other languages
German (de)
Other versions
DE1514322B2 (en
DE1514322C3 (en
Inventor
Werner Gaertner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Publication of DE1514322A1 publication Critical patent/DE1514322A1/en
Publication of DE1514322B2 publication Critical patent/DE1514322B2/en
Application granted granted Critical
Publication of DE1514322C3 publication Critical patent/DE1514322C3/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/04Sources of current
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/16Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
    • H05H1/18Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance

Description

Philips Patentverwaltung G.m.b.H.', Hamburg 1, Monokel) ergs tr. 7Philips Patentverwaltung G.m.b.H. ', Hamburg 1, Monokel) ergs tr. 7

Anordnung zur Verbesserung der Zündung und Stabilität vonArrangement to improve the ignition and stability of

Induktions-PlasmabrennernInduction plasma torches

Die Erfindung betrifft eine Anordnung zur Verbesserung der
■Zündung sowie zur Erhöhung der Stabilität von Induktions-Plasmabrennern.
The invention relates to an arrangement for improving the
■ Ignition and to increase the stability of induction plasma torches.

Bei derartigen Plasmabrennern ist es üblich, den Induktor direkt an den HP-Ausgang eines Generators anzuschließen. Dabei
ist der durch den Induktor fließende HP-Strom nahezu konstant. Auch ist die Blindleistung im Induktor sehr gering, so daß die Zündung durch Premdeinwirkung, zum Beispiel durch einen Lichtbogen, eingeleitet werden muß.
With such plasma torches it is common to connect the inductor directly to the HP output of a generator. Included
the HP current flowing through the inductor is almost constant. The reactive power in the inductor is also very low, so that ignition has to be initiated by the action of a premade, for example by an electric arc.

Bei Änderung der Gaszufuhr ist eine manuelle Nachstellung der GeneratorkOpplung erforderlich, um ein Auslösen des Überstromrelais oder gar ein Verlöschen des Plasmas zu verhindern»If the gas supply is changed, manual readjustment of the Generator coupling required to trigger the overcurrent relay or even to prevent the plasma from going out "

Dabei kann eine zwischen Auskoppelspule und Induktor eiage-Here, a between the decoupling coil and the inductor can be

PHD-O94PHD-O94

057.0057.0

BADBATH

schaltete veränderbare Impedanz, "beispielsweise ein einstellbarerKondensator, zur leistungsveränderung dienen, wie es z.B« aus der französischen Patentschrift 1 371 963 "bekannt ist.switched variable impedance, "for example an adjustable capacitor, serve to change the performance, as it is known, for example, from French patent specification 1 371 963 ".

Die oben genannten Nacht eile, nämlich die Notwendigkeit einer Premdeinwirkung zum Zünden sowie der manuellen Kopplungsveränderung, werden bei einem Induktions-Plasmabrenner mit zwisohen Koppelspule und Induktor liegender Kapazität erfindungsgemäß dadurch vermieden, daß diß genannte Kapazität in zwei ÜJeilkapazitäten aufgeteilt ist, deren eine in bekannter Weise in Serie und deren andere parallel zum Induktor liegen und beide Kapazitäten gemeinsam mit der Induktivität des Induktors auf Resonanzfrequenz abgestimmt sind οThe above night rush, namely the need for one Premd effect for ignition as well as the manual coupling change, are according to the invention in an induction plasma torch with a capacitance between the coupling coil and the inductor avoided by dividing the said capacity into two partial capacities, one of which is known Way in series and the others in parallel to the inductor and both capacitances together with the inductance of the inductor are tuned to the resonance frequency ο

Auf diese Weise wird einmal eine wesentlich höhere Blindleistung, die zur Einleitung der Zündung stets ausreicht, zum anderen auch eine erheblich bessere Stabilisierung erzielt.In this way, on the one hand, there is a much higher reactive power, which is always sufficient to initiate the ignition, on the other hand also achieved a considerably better stabilization.

Eine Veränderung der Kapazitäten kann beispielsweise durch Zu- oder Abschalten von weiteren Kapazitäten erfolgen, während die Induktivität des Induktors z. B. durch Veränderung des Windungsabs "band es beeinflußt v/erden kann.A change in the capacities can take place, for example, by connecting or disconnecting additional capacities while the inductance of the inductor e.g. B. by changing the Windungsabs "tied it can be influenced.

Zweckmäßigerweise legt man dabei den Arbeitspunkt auf den induktiven Ast der Resonanzkurve, da damit neben der Spannungsverminderung am Induktor nach erfolgter Zündung infolge der erhöhten Dämpfung eine weitere Verminderung durch Verkleinerung der Induktivität eintritt»It is expedient to place the operating point on the inductive one Branch of the resonance curve, because it not only reduces the voltage at the inductor after the ignition has taken place due to the increased Attenuation a further reduction occurs by reducing the inductance »

Die Figur zeigt einen üblichen Generator 1, dessen HP-Energie durch die Spule 2 ausgekoppelt und dem aus der Reihenkapazität 3, dem Induktor 4 und der diesem parallelgeschalteten Kapazität 5 gebildeten Resonanzkreis zugeführt istoThe figure shows a conventional generator 1, its HP energy decoupled by the coil 2 and that from the series capacitance 3, the inductor 4 and the capacitance connected in parallel with it 5 formed resonance circuit is fed

Duroh geeignete Wahl des Verhältnisses der Kapazitäten 3 undDuroh capacities 3 and suitable choice of ratio

909836/0570909836/0570

zueinander läßt sick auch die Arbeitsweise der Anordnung beeinflussen« So.ergibt eine relativ hohe Kapazität 3 ein "hartes", eine kleine Kapazität 3 dagegen ein "weiches" Arbeiten des Brenners ο Eine "mittlere" Arbeitsweise -wurde z. B. dann erzielt, wenn das Verhältnis der beiden Kapazitäten etwa 1:1 beträgt.to one another also allows the working of the arrangement to be influenced « So a relatively high capacity 3 gives a "hard" one, a small capacity 3, on the other hand, allows the burner to work "softly" ο A "medium" way of working - was z. B. then achieved when the ratio of the two capacities is about 1: 1.

PatentansprücheClaims

■ - 4 ■-■ - 4 ■ -

BAD 9 09836/05 7 0BATH 9 09836/05 7 0

Claims (3)

15U322 Patenten, epr üohe15U322 patents, epr üohe 1. Anordnung zur Verbesserung der Zündung und Stabilität eines Induktions~Plasmabrennere mit einer ewieoben Koppelspule und Induktor liegenden Kapazität, dadurch gekennzeichnet, daß die genannte Kapazität in swei l'eilkapaeitäten (3,5) aufgeteilt ist, deren eine (3) in bekannter Weite in Serie und deren andere (5) parallel sum Induktor (4) liegen und beide Kapa«itäten alt der Induktivität dee Induktors (4) auf Reeonansfrequene abgestimmt sind·1. Arrangement to improve ignition and stability an induction plasma torch with an e as above Coupling coil and inductor lying capacitance, characterized in that said capacitance in swei l'eilkapaeititäten (3.5) is divided, one of which (3) in a known distance in series and the other (5) of which are parallel to the inductor (4) and both capacities alt the inductance of the inductor (4) are matched to the resonance frequency 2. Anordnung nach Anepruoa 1, dadurch gekenmeiohnet, daß die lapasitäten (3»5) und/oder die Induktivität (4) reranderbar sind*2. Arrangement according to Anepruoa 1, thereby gekenmeiohnet that the lapasities (3 »5) and / or the inductance (4) can be reranded * 3. Anordnung nach Anspruch 1 oder 2, dadurch gekenaseiohnet, daß die beiden Kap»itäten (3,5) etwa gleich groß eind.3. Arrangement according to claim 1 or 2, characterized gekenaseiohnet, that the two chapters (3.5) are about the same size. 4· Anordnung naoh einem der AneprUohe 1 bis 3» dadurch ge» kennieiehnet, daß die Abstimmung auf den induktir«n Ast der Reeonanikurre erfolgt·4 · Arrangement according to one of the recommendations 1 to 3 » knows that the coordination on the inductive branch the Reeonanikurre takes place 909836/057 0909836/057 0 BAD ORiQlNALBAD ORiQlNAL
DE1514322A 1965-11-12 1965-11-12 Circuit arrangement for igniting and operating a high-frequency induction plasma torch Expired DE1514322C3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP0038111 1965-11-12

Publications (3)

Publication Number Publication Date
DE1514322A1 true DE1514322A1 (en) 1969-09-04
DE1514322B2 DE1514322B2 (en) 1973-11-15
DE1514322C3 DE1514322C3 (en) 1974-06-06

Family

ID=7375687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1514322A Expired DE1514322C3 (en) 1965-11-12 1965-11-12 Circuit arrangement for igniting and operating a high-frequency induction plasma torch

Country Status (8)

Country Link
US (1) US3440387A (en)
AT (1) AT273330B (en)
BE (1) BE689622A (en)
CH (1) CH454300A (en)
DE (1) DE1514322C3 (en)
GB (1) GB1139049A (en)
NL (1) NL6615715A (en)
SE (1) SE300663B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022404A1 (en) * 1979-07-04 1981-01-14 Instruments S.A. Plasma generator
US5288971A (en) * 1991-08-09 1994-02-22 Advanced Energy Industries, Inc. System for igniting a plasma for thin film processing
US6633017B1 (en) 1997-10-14 2003-10-14 Advanced Energy Industries, Inc. System for plasma ignition by fast voltage rise

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2778525B1 (en) * 1998-05-05 2000-07-13 Chapel Et Cie METHOD AND DEVICE FOR HIGH FREQUENCY PROCESSING OF PRODUCTS AND HIGH FREQUENCY INDUCTANCE AND GENERATOR USED FOR THEIR IMPLEMENTATION

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB667657A (en) * 1950-04-26 1952-03-05 Westinghouse Electric Int Co Improvements in or relating to high frequency heating systems
US2727212A (en) * 1950-10-27 1955-12-13 Westinghouse Electric Corp Constant load voltage circuit
NL78609C (en) * 1951-01-12
FR1358425A (en) * 1963-01-22 1964-04-17 Traitements Electrolytiques & High Frequency Plasma Torch Improvement
NL6412703A (en) * 1964-10-31 1966-05-02
US3353060A (en) * 1964-11-28 1967-11-14 Hitachi Ltd High-frequency discharge plasma generator with an auxiliary electrode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022404A1 (en) * 1979-07-04 1981-01-14 Instruments S.A. Plasma generator
US5288971A (en) * 1991-08-09 1994-02-22 Advanced Energy Industries, Inc. System for igniting a plasma for thin film processing
US6633017B1 (en) 1997-10-14 2003-10-14 Advanced Energy Industries, Inc. System for plasma ignition by fast voltage rise

Also Published As

Publication number Publication date
NL6615715A (en) 1967-05-16
CH454300A (en) 1968-04-15
AT273330B (en) 1969-08-11
SE300663B (en) 1968-05-06
DE1514322B2 (en) 1973-11-15
US3440387A (en) 1969-04-22
DE1514322C3 (en) 1974-06-06
BE689622A (en) 1967-04-14
GB1139049A (en) 1969-01-08

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee