DE19526903B4 - Drehratensensor - Google Patents

Drehratensensor Download PDF

Info

Publication number
DE19526903B4
DE19526903B4 DE19526903A DE19526903A DE19526903B4 DE 19526903 B4 DE19526903 B4 DE 19526903B4 DE 19526903 A DE19526903 A DE 19526903A DE 19526903 A DE19526903 A DE 19526903A DE 19526903 B4 DE19526903 B4 DE 19526903B4
Authority
DE
Germany
Prior art keywords
yaw rate
rate sensor
sensor
yaw
rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19526903A
Other languages
English (en)
Other versions
DE19526903A1 (de
Inventor
Juergen Kurle
Kurt Weiblen
Horst Muenzel
Helmut Baumann
Klaus Heyers
Markus Lutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19526903A priority Critical patent/DE19526903B4/de
Priority to JP8191072A priority patent/JPH0933557A/ja
Priority to US08/681,243 priority patent/US5721377A/en
Publication of DE19526903A1 publication Critical patent/DE19526903A1/de
Application granted granted Critical
Publication of DE19526903B4 publication Critical patent/DE19526903B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
DE19526903A 1995-07-22 1995-07-22 Drehratensensor Expired - Lifetime DE19526903B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19526903A DE19526903B4 (de) 1995-07-22 1995-07-22 Drehratensensor
JP8191072A JPH0933557A (ja) 1995-07-22 1996-07-19 回転率センサ
US08/681,243 US5721377A (en) 1995-07-22 1996-07-22 Angular velocity sensor with built-in limit stops

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19526903A DE19526903B4 (de) 1995-07-22 1995-07-22 Drehratensensor

Publications (2)

Publication Number Publication Date
DE19526903A1 DE19526903A1 (de) 1997-01-23
DE19526903B4 true DE19526903B4 (de) 2005-03-10

Family

ID=7767593

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19526903A Expired - Lifetime DE19526903B4 (de) 1995-07-22 1995-07-22 Drehratensensor

Country Status (3)

Country Link
US (1) US5721377A (de)
JP (1) JPH0933557A (de)
DE (1) DE19526903B4 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1047966A (ja) * 1996-07-31 1998-02-20 Aisin Seiki Co Ltd 角速度センサ
DE19632060B4 (de) * 1996-08-09 2012-05-03 Robert Bosch Gmbh Verfahren zur Herstellung eines Drehratensensors
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
DE19811025B4 (de) * 1998-03-13 2004-04-15 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Mechanischer Oszillator und Verfahren zum Erzeugen einer mechanischen Schwingung
DE19844686A1 (de) 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
DE10038099A1 (de) * 2000-08-04 2002-02-21 Bosch Gmbh Robert Mikromechanisches Bauelement
JP2002103299A (ja) 2000-09-22 2002-04-09 Aisin Seiki Co Ltd マイクロマシンの製造方法
TW561262B (en) * 2001-10-19 2003-11-11 Yamaha Motor Co Ltd Tipping detecting device for a motorcycle
JP3492673B1 (ja) * 2002-06-21 2004-02-03 沖電気工業株式会社 静電容量型加速度センサの製造方法
US6865944B2 (en) * 2002-12-16 2005-03-15 Honeywell International Inc. Methods and systems for decelerating proof mass movements within MEMS structures
US7514283B2 (en) * 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
JP4455831B2 (ja) * 2003-03-28 2010-04-21 株式会社デンソー 加速度センサの製造方法
US8912174B2 (en) * 2003-04-16 2014-12-16 Mylan Pharmaceuticals Inc. Formulations and methods for treating rhinosinusitis
US7075160B2 (en) * 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US6952041B2 (en) * 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
FR2860865B1 (fr) * 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason
US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
JP2005283393A (ja) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk 慣性センサ
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
US7273762B2 (en) * 2004-11-09 2007-09-25 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device including a spring release bridge and method of making the same
JP2006226743A (ja) 2005-02-16 2006-08-31 Mitsubishi Electric Corp 加速度センサ
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
JP4919750B2 (ja) * 2006-09-27 2012-04-18 富士通株式会社 マイクロ構造体製造方法およびマイクロ構造体
DE102007052367A1 (de) * 2007-11-02 2009-05-07 Robert Bosch Gmbh Mikromechanisches System
JP5246470B2 (ja) * 2007-12-28 2013-07-24 Ｔｄｋ株式会社 角速度センサ素子
DE102008003242B4 (de) 2008-01-04 2017-03-30 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
CN101493327B (zh) * 2009-02-23 2010-12-01 陈志龙 电磁驱动静电预紧硅微机械陀螺
JP6338813B2 (ja) * 2012-04-03 2018-06-06 セイコーエプソン株式会社 ジャイロセンサー及びそれを用いた電子機器
CN103292798A (zh) * 2013-05-22 2013-09-11 同济大学 一种抗高强度冲击的音叉式微机械陀螺
JP5696756B2 (ja) * 2013-09-12 2015-04-08 株式会社豊田中央研究所 Ｍｅｍｓセンサ
JP2015123526A (ja) * 2013-12-26 2015-07-06 ソニー株式会社 機能素子、加速度センサおよびスイッチ
US20180180419A1 (en) * 2016-10-05 2018-06-28 Freescale Semiconductor, Inc. Inertial sensor with motion limit structure
DE102017208370A1 (de) * 2017-05-18 2018-11-22 Robert Bosch Gmbh Mikromechanischer Sensor
EP4177218A4 (de) * 2020-07-31 2024-01-10 Huawei Tech Co Ltd Mems-chip und herstellungsverfahren dafür, mems-vorrichtung und elektronische vorrichtung

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
DE4032559A1 (de) * 1990-10-13 1992-04-16 Bosch Gmbh Robert Drehratensensor
DE4228795A1 (de) * 1992-08-29 1994-03-03 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung
DE4335219A1 (de) * 1993-10-15 1995-04-20 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung eines Drehratensensor
DE19530736A1 (de) * 1995-02-10 1996-08-14 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
DE4032559A1 (de) * 1990-10-13 1992-04-16 Bosch Gmbh Robert Drehratensensor
DE4228795A1 (de) * 1992-08-29 1994-03-03 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung
DE4335219A1 (de) * 1993-10-15 1995-04-20 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung eines Drehratensensor
DE19530736A1 (de) * 1995-02-10 1996-08-14 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors

Also Published As

Publication number Publication date
DE19526903A1 (de) 1997-01-23
JPH0933557A (ja) 1997-02-07
US5721377A (en) 1998-02-24

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8110 Request for examination paragraph 44
8364 No opposition during term of opposition
R071 Expiry of right