DE19751790A1 - Vorrichtung und Verfahren zum Abgeben einer Schreibflüssigkeit von einem Druckkopf - Google Patents
Vorrichtung und Verfahren zum Abgeben einer Schreibflüssigkeit von einem DruckkopfInfo
- Publication number
- DE19751790A1 DE19751790A1 DE19751790A DE19751790A DE19751790A1 DE 19751790 A1 DE19751790 A1 DE 19751790A1 DE 19751790 A DE19751790 A DE 19751790A DE 19751790 A DE19751790 A DE 19751790A DE 19751790 A1 DE19751790 A1 DE 19751790A1
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- writing
- dispensing
- memory alloy
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims description 45
- 238000000034 method Methods 0.000 title claims description 22
- 239000010409 thin film Substances 0.000 claims description 161
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 128
- 239000007788 liquid Substances 0.000 claims description 86
- 239000000758 substrate Substances 0.000 claims description 30
- 229910000734 martensite Inorganic materials 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 230000009466 transformation Effects 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 17
- 229910001566 austenite Inorganic materials 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000012549 training Methods 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 238000000137 annealing Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 238000007639 printing Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000002457 bidirectional effect Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 229910010380 TiNi Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000282342 Martes americana Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000002716 delivery method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 229910002070 thin film alloy Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR19970007642 | 1997-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19751790A1 true DE19751790A1 (de) | 1998-09-17 |
| DE19751790C2 DE19751790C2 (de) | 1999-08-05 |
Family
ID=19499025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19751790A Expired - Fee Related DE19751790C2 (de) | 1997-03-07 | 1997-11-21 | Vorrichtung zum Abgeben einer Schreibflüssigkeit von einem Druckkopf und Verfahren zu ihrer Herstellung |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP2927764B2 (un) |
| KR (1) | KR100221459B1 (un) |
| CN (1) | CN1192962A (un) |
| DE (1) | DE19751790C2 (un) |
| FR (1) | FR2760404A1 (un) |
| GB (1) | GB2322831B (un) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6340223B1 (en) * | 1999-06-28 | 2002-01-22 | Sharp Kabushiki Kaisha | Ink-jet head and fabrication method of the same |
| KR100374788B1 (ko) | 2000-04-26 | 2003-03-04 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법 |
| KR100645426B1 (ko) * | 2000-09-29 | 2006-12-19 | 삼성전자주식회사 | 잉크젯 프린터 헤드 |
| CN105107670A (zh) * | 2015-09-17 | 2015-12-02 | 厦门理工学院 | 一种记忆金属驱动式液体微喷方法与装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634273A2 (en) * | 1993-07-13 | 1995-01-18 | Sharp Kabushiki Kaisha | Ink jet head and a method of manufacturing thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57203177A (en) | 1981-06-09 | 1982-12-13 | Fujitsu Ltd | Character recognizing system |
| JPS5993356A (ja) * | 1982-11-18 | 1984-05-29 | Sanyo Electric Co Ltd | インクヘツド |
| JPS6357251A (ja) | 1986-08-28 | 1988-03-11 | Fujitsu Ltd | インクジエツトヘツド |
| JPH02265752A (ja) | 1989-04-05 | 1990-10-30 | Matsushita Electric Ind Co Ltd | インクジェット記録ヘッド |
| JPH02308466A (ja) | 1989-05-23 | 1990-12-21 | Matsushita Electric Ind Co Ltd | ディスククランプ装置 |
| JPH0365349A (ja) | 1989-08-03 | 1991-03-20 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
| EP0678384B1 (en) * | 1990-02-23 | 1997-08-20 | Seiko Epson Corporation | Drop-on-demand ink-jet printing head |
| JPH04247680A (ja) | 1991-02-04 | 1992-09-03 | Toshiba Corp | 基板凸部切断装置 |
-
1997
- 1997-05-27 KR KR1019970020896A patent/KR100221459B1/ko not_active IP Right Cessation
- 1997-11-14 CN CN97122124A patent/CN1192962A/zh active Pending
- 1997-11-14 GB GB9724165A patent/GB2322831B/en not_active Expired - Fee Related
- 1997-11-14 FR FR9714304A patent/FR2760404A1/fr active Pending
- 1997-11-21 JP JP9321278A patent/JP2927764B2/ja not_active Expired - Fee Related
- 1997-11-21 DE DE19751790A patent/DE19751790C2/de not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634273A2 (en) * | 1993-07-13 | 1995-01-18 | Sharp Kabushiki Kaisha | Ink jet head and a method of manufacturing thereof |
Non-Patent Citations (3)
| Title |
|---|
| BEUER, Michael B.: "Encyclopedia of Materials Science and Engineering", Vol. 6, 1. Aufl., 1986, S. 4365-4374 * |
| Patents Abstracts of Japan, M-1632 mit JP 06-91865 A * |
| Patents Abstracts of Japan, M-725 mit JP 63-57251 A * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2927764B2 (ja) | 1999-07-28 |
| KR100221459B1 (ko) | 1999-09-15 |
| CN1192962A (zh) | 1998-09-16 |
| GB2322831A (en) | 1998-09-09 |
| FR2760404A1 (fr) | 1998-09-11 |
| JPH10250075A (ja) | 1998-09-22 |
| DE19751790C2 (de) | 1999-08-05 |
| KR19980079246A (ko) | 1998-11-25 |
| GB9724165D0 (en) | 1998-01-14 |
| GB2322831B (en) | 2001-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |