DE19882225T1 - Meßwertgeber mit Trenneinheit für Drucksensor - Google Patents

Meßwertgeber mit Trenneinheit für Drucksensor

Info

Publication number
DE19882225T1
DE19882225T1 DE19882225T DE19882225T DE19882225T1 DE 19882225 T1 DE19882225 T1 DE 19882225T1 DE 19882225 T DE19882225 T DE 19882225T DE 19882225 T DE19882225 T DE 19882225T DE 19882225 T1 DE19882225 T1 DE 19882225T1
Authority
DE
Germany
Prior art keywords
sensor
separation unit
pressure sensor
pressure
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19882225T
Other languages
English (en)
Other versions
DE19882225B4 (de
Inventor
Fred C Sittler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of DE19882225T1 publication Critical patent/DE19882225T1/de
Application granted granted Critical
Publication of DE19882225B4 publication Critical patent/DE19882225B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0046Fluidic connecting means using isolation membranes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE19882225T 1997-03-14 1998-03-06 Meßwertgeber mit Trenneinheit für Drucksensor Expired - Lifetime DE19882225B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/818,379 US5731522A (en) 1997-03-14 1997-03-14 Transmitter with isolation assembly for pressure sensor
US08/818,379 1997-03-14
PCT/US1998/004844 WO1998041833A1 (en) 1997-03-14 1998-03-06 Transmitter with isolation assembly for pressure sensor

Publications (2)

Publication Number Publication Date
DE19882225T1 true DE19882225T1 (de) 2000-03-16
DE19882225B4 DE19882225B4 (de) 2009-07-09

Family

ID=25225410

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882225T Expired - Lifetime DE19882225B4 (de) 1997-03-14 1998-03-06 Meßwertgeber mit Trenneinheit für Drucksensor

Country Status (6)

Country Link
US (1) US5731522A (de)
CN (1) CN1134654C (de)
CA (1) CA2283588A1 (de)
DE (1) DE19882225B4 (de)
GB (1) GB2338066B (de)
WO (1) WO1998041833A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10392623B4 (de) * 2002-05-08 2009-09-24 Rosemount Inc., Eden Prairie Drucksensoranordnung

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US7623932B2 (en) * 1996-03-28 2009-11-24 Fisher-Rosemount Systems, Inc. Rule set for root cause diagnostics
US8290721B2 (en) 1996-03-28 2012-10-16 Rosemount Inc. Flow measurement diagnostics
US6578435B2 (en) 1999-11-23 2003-06-17 Nt International, Inc. Chemically inert flow control with non-contaminating body
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) * 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US8266465B2 (en) 2000-07-26 2012-09-11 Bridgestone Americas Tire Operation, LLC System for conserving battery life in a battery operated device
US7161476B2 (en) 2000-07-26 2007-01-09 Bridgestone Firestone North American Tire, Llc Electronic tire management system
US6510741B2 (en) 2000-09-06 2003-01-28 Dwyer Instruments, Inc. Manometer having dual pressure sensors
AU2002234163A1 (en) * 2000-10-24 2002-05-06 Rosemount, Inc. Process connection for in-line pressure transmitter
JP2004342821A (ja) * 2003-05-15 2004-12-02 Renesas Technology Corp 半導体装置
US6883380B2 (en) * 2003-05-16 2005-04-26 Rosemount Inc Pressure sensor capsule
US7627441B2 (en) * 2003-09-30 2009-12-01 Rosemount Inc. Process device with vibration based diagnostics
US7258021B2 (en) * 2004-06-25 2007-08-21 Rosemount Inc. Process transmitter isolation assembly
US7373831B2 (en) * 2004-06-25 2008-05-20 Rosemount Inc. High temperature pressure transmitter assembly
US7036381B2 (en) * 2004-06-25 2006-05-02 Rosemount Inc. High temperature pressure transmitter assembly
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7190053B2 (en) 2004-09-16 2007-03-13 Rosemount Inc. Field device incorporating circuit card assembly as environmental and EMI/RFI shield
CA2597015A1 (en) * 2005-02-28 2006-09-08 Rosemount Inc. Process connection for process diagnostics
US8112565B2 (en) 2005-06-08 2012-02-07 Fisher-Rosemount Systems, Inc. Multi-protocol field device interface with automatic bus detection
US20070068225A1 (en) * 2005-09-29 2007-03-29 Brown Gregory C Leak detector for process valve
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US7287432B2 (en) * 2005-11-17 2007-10-30 Rosemount Inc. Process transmitter with overpressure vent
JP5676100B2 (ja) * 2006-04-25 2015-02-25 ローズマウント インコーポレイテッド ニアネットシェイプ焼結セラミックを用いた圧力センサ
US7953501B2 (en) * 2006-09-25 2011-05-31 Fisher-Rosemount Systems, Inc. Industrial process control loop monitor
US8788070B2 (en) 2006-09-26 2014-07-22 Rosemount Inc. Automatic field device service adviser
WO2008042290A2 (en) 2006-09-29 2008-04-10 Rosemount Inc. Magnetic flowmeter with verification
US7458275B2 (en) * 2007-03-15 2008-12-02 Rosemount Inc. Welded header for pressure transmitter
US7454975B2 (en) * 2007-04-06 2008-11-25 Rosemount Inc. Expansion chamber for use with a pressure transmitter
US8898036B2 (en) * 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US7590511B2 (en) * 2007-09-25 2009-09-15 Rosemount Inc. Field device for digital process control loop diagnostics
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
US7497123B1 (en) 2007-12-18 2009-03-03 Rosemount Inc. Direct mount for pressure transmitter with thermal management
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
US7814798B2 (en) * 2008-09-17 2010-10-19 P I Components Corporation Diaphragm structure and method of manufacturing a diaphragm structure
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US9207670B2 (en) 2011-03-21 2015-12-08 Rosemount Inc. Degrading sensor detection implemented within a transmitter
US9010191B2 (en) 2011-12-22 2015-04-21 Rosemount Inc. Pressure sensor module for sub-sea applications
US9389106B2 (en) 2012-03-06 2016-07-12 Rosemount Inc. Remote seal pressure measurement system for subsea use
US9052240B2 (en) 2012-06-29 2015-06-09 Rosemount Inc. Industrial process temperature transmitter with sensor stress diagnostics
US9602122B2 (en) 2012-09-28 2017-03-21 Rosemount Inc. Process variable measurement noise diagnostic
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
CN104583742B (zh) * 2013-07-19 2016-12-28 罗斯蒙特公司 包括具有两件式隔离插塞的隔离组件的压力变送器
US9234776B2 (en) 2013-09-26 2016-01-12 Rosemount Inc. Multivariable process fluid transmitter for high pressure applications
US9459170B2 (en) * 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
US10260980B2 (en) 2013-09-27 2019-04-16 Rosemount Inc. Pressure sensor with mineral insulated cable
US9423315B2 (en) * 2013-10-15 2016-08-23 Rosemount Aerospace Inc. Duplex pressure transducers
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
US9816889B2 (en) * 2015-01-30 2017-11-14 Omega Engineering, Inc. Differential pressure sensing device with overload protection
US10209154B2 (en) * 2015-03-30 2019-02-19 Rosemount Inc. In-line process fluid pressure transmitter for high pressure applications
RU2693732C1 (ru) * 2015-09-30 2019-07-04 Роузмаунт Инк. Передатчик давления с защитой от избыточного давления
US10378987B2 (en) * 2017-03-10 2019-08-13 Honeywell International Inc. Pressure sensor with flow porting having integral flame-proof safety mechanism
US10598559B2 (en) 2017-06-29 2020-03-24 Rosemount Inc. Pressure sensor assembly
JP2021517969A (ja) 2018-05-17 2021-07-29 ローズマウント インコーポレイテッド 測定素子およびこれを具備する測定機器
CN109752418B (zh) * 2019-01-21 2021-11-05 中国科学院上海微系统与信息技术研究所 一种微型热导气体传感器

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB705124A (en) * 1952-02-05 1954-03-10 Alltools Ltd Improvements in pipe couplings
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US4006640A (en) * 1976-02-06 1977-02-08 Honeywell Inc. Seal for process pressure to current transmitter
US4092696A (en) * 1976-12-27 1978-05-30 Borg-Warner Corporation Variable area capacitive pressure transducer with temperature compensation
JPS5461975A (en) * 1977-10-26 1979-05-18 Hitachi Ltd Detector of differential pressure, pressure and load
US4208782A (en) * 1977-12-12 1980-06-24 Kulite Semiconductor Products, Inc. Methods of fabricating transducers employing flat bondable surfaces with buried contact areas
US4196632A (en) * 1978-08-14 1980-04-08 The Boeing Company Dual capacitance type bonded pressure transducer
JPS5817421B2 (ja) * 1979-02-02 1983-04-07 日産自動車株式会社 半導体圧力センサ
US4236137A (en) * 1979-03-19 1980-11-25 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flexure frames
US4434451A (en) * 1979-10-29 1984-02-28 Delatorre Leroy C Pressure sensors
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4443293A (en) * 1981-04-20 1984-04-17 Kulite Semiconductor Products, Inc. Method of fabricating transducer structure employing vertically walled diaphragms with quasi rectangular active areas
DE3222620A1 (de) * 1982-02-15 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Druck- oder druckdifferenzmessgeraet mit einer vor ueberlastung geschuetzten drucksonsor-einrichtung
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
GB8401848D0 (en) * 1984-01-24 1984-02-29 Carter R E Pressure transducer
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material
US4586108A (en) * 1984-10-12 1986-04-29 Rosemount Inc. Circuit for capacitive sensor made of brittle material
JPS6227637A (ja) * 1985-07-29 1987-02-05 Chino Corp 圧力センサ
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
US4798089A (en) * 1987-03-12 1989-01-17 Rosemount Inc. Isolator apparatus
US4833922A (en) * 1987-06-01 1989-05-30 Rosemount Inc. Modular transmitter
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
JPH01301134A (ja) * 1988-05-30 1989-12-05 Nippon Beeles- Kk 圧力伝送器
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
US4930353A (en) * 1988-08-07 1990-06-05 Nippondenso Co., Ltd. Semiconductor pressure sensor
US5081867A (en) * 1988-09-30 1992-01-21 Nec Corporation Semiconductor sensor
FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
US5022270A (en) * 1989-06-15 1991-06-11 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
US4993754A (en) * 1989-09-29 1991-02-19 Rosemount Inc. Liquid level coplanar transmitter adapter
JP2625225B2 (ja) * 1989-12-22 1997-07-02 株式会社日立製作所 半導体圧力センサ
US5115676A (en) * 1990-01-10 1992-05-26 Setra Systems, Inc. Flush-mounted pressure sensor
JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
JP2718563B2 (ja) * 1990-08-28 1998-02-25 日本特殊陶業株式会社 圧力検出器
US5095755A (en) * 1990-11-01 1992-03-17 Rosemount Inc. Isolator for pressure transmitter
US5094109A (en) * 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
WO1992017757A1 (en) * 1991-04-05 1992-10-15 Mark Iv Transducer Corporation Differential pressure device
US5161415A (en) * 1991-04-11 1992-11-10 Mitsubishi Denki K.K. Pressure sensor
US5133215A (en) * 1991-06-19 1992-07-28 Honeywell Inc. Pressure transmitter assembly having sensor isolation mounting
KR0163443B1 (ko) * 1991-07-04 1999-03-30 나까오 다께시 압력측정장치
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5227068A (en) * 1991-10-25 1993-07-13 Eco-Soil Systems, Inc. Closed apparatus system for improving irrigation and method for its use
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
FR2687777B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur capacitif a faible capacite parasite et procede de fabrication.
US5287746A (en) * 1992-04-14 1994-02-22 Rosemount Inc. Modular transmitter with flame arresting header
JPH05296867A (ja) * 1992-04-23 1993-11-12 Hitachi Ltd 差圧伝送器
SE515191C2 (sv) * 1992-05-05 2001-06-25 Volvo Ab Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck
US5337612A (en) * 1992-06-08 1994-08-16 Quartzdyne, Inc. Apparatus for pressure transducer isolation
US5424650A (en) * 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
SG41962A1 (en) * 1993-09-24 1997-08-15 Rosemount Inc Pressure transmitter isolation diaphragm

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10392623B4 (de) * 2002-05-08 2009-09-24 Rosemount Inc., Eden Prairie Drucksensoranordnung

Also Published As

Publication number Publication date
CN1134654C (zh) 2004-01-14
GB9921573D0 (en) 1999-11-17
US5731522A (en) 1998-03-24
WO1998041833A1 (en) 1998-09-24
GB2338066B (en) 2000-12-20
DE19882225B4 (de) 2009-07-09
CN1249812A (zh) 2000-04-05
CA2283588A1 (en) 1998-09-24
GB2338066A (en) 1999-12-08

Similar Documents

Publication Publication Date Title
DE19882225T1 (de) Meßwertgeber mit Trenneinheit für Drucksensor
DE69707798T2 (de) Drucksensor
DE59504814D1 (de) Drucksensor
DE59508560D1 (de) Kapazitiver Drucksensor
BR9711484A (pt) Unidade de sensor de pressÆo
DE69521890D1 (de) Stabilisierter drucksensor
DE69803519T2 (de) Drucksensor
DE69812738D1 (de) Bremsleitung-Sensoreinheit
DE69806403D1 (de) Druckeinheit
DE59803182D1 (de) Drucksensor
NO305004B1 (no) Trykksensor
DE59506697D1 (de) Drucksensor
DE29619276U1 (de) Drucksensor
DE69815416D1 (de) Sensor für Kodierelement
DE59600381D1 (de) Druckanzeiger
DE59805205D1 (de) Drucksensor
KR960034621U (ko) 압력센서
FI965017A0 (fi) Tryckgivare
DE9421746U1 (de) Drucksensor
KR960022792U (ko) 압력센서
GB2322449B (en) Detecting pressure changes
DE29701572U1 (de) Drucksensor
DE29717859U1 (de) Drucksensor
DE29601451U1 (de) Elektronischer Drucksensor
DE59901932D1 (de) Drucksensorbaugruppe

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8364 No opposition during term of opposition
R071 Expiry of right