DE19882225T1 - Meßwertgeber mit Trenneinheit für Drucksensor - Google Patents
Meßwertgeber mit Trenneinheit für DrucksensorInfo
- Publication number
- DE19882225T1 DE19882225T1 DE19882225T DE19882225T DE19882225T1 DE 19882225 T1 DE19882225 T1 DE 19882225T1 DE 19882225 T DE19882225 T DE 19882225T DE 19882225 T DE19882225 T DE 19882225T DE 19882225 T1 DE19882225 T1 DE 19882225T1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- separation unit
- pressure sensor
- pressure
- separation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/818,379 US5731522A (en) | 1997-03-14 | 1997-03-14 | Transmitter with isolation assembly for pressure sensor |
US08/818,379 | 1997-03-14 | ||
PCT/US1998/004844 WO1998041833A1 (en) | 1997-03-14 | 1998-03-06 | Transmitter with isolation assembly for pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19882225T1 true DE19882225T1 (de) | 2000-03-16 |
DE19882225B4 DE19882225B4 (de) | 2009-07-09 |
Family
ID=25225410
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19882225T Expired - Lifetime DE19882225B4 (de) | 1997-03-14 | 1998-03-06 | Meßwertgeber mit Trenneinheit für Drucksensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US5731522A (de) |
CN (1) | CN1134654C (de) |
CA (1) | CA2283588A1 (de) |
DE (1) | DE19882225B4 (de) |
GB (1) | GB2338066B (de) |
WO (1) | WO1998041833A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10392623B4 (de) * | 2002-05-08 | 2009-09-24 | Rosemount Inc., Eden Prairie | Drucksensoranordnung |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US7623932B2 (en) * | 1996-03-28 | 2009-11-24 | Fisher-Rosemount Systems, Inc. | Rule set for root cause diagnostics |
US8290721B2 (en) | 1996-03-28 | 2012-10-16 | Rosemount Inc. | Flow measurement diagnostics |
US6578435B2 (en) | 1999-11-23 | 2003-06-17 | Nt International, Inc. | Chemically inert flow control with non-contaminating body |
US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6508129B1 (en) * | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6782754B1 (en) | 2000-07-07 | 2004-08-31 | Rosemount, Inc. | Pressure transmitter for clean environments |
US7152478B2 (en) * | 2000-07-20 | 2006-12-26 | Entegris, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US6612175B1 (en) | 2000-07-20 | 2003-09-02 | Nt International, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US8266465B2 (en) | 2000-07-26 | 2012-09-11 | Bridgestone Americas Tire Operation, LLC | System for conserving battery life in a battery operated device |
US7161476B2 (en) | 2000-07-26 | 2007-01-09 | Bridgestone Firestone North American Tire, Llc | Electronic tire management system |
US6510741B2 (en) | 2000-09-06 | 2003-01-28 | Dwyer Instruments, Inc. | Manometer having dual pressure sensors |
AU2002234163A1 (en) * | 2000-10-24 | 2002-05-06 | Rosemount, Inc. | Process connection for in-line pressure transmitter |
JP2004342821A (ja) * | 2003-05-15 | 2004-12-02 | Renesas Technology Corp | 半導体装置 |
US6883380B2 (en) * | 2003-05-16 | 2005-04-26 | Rosemount Inc | Pressure sensor capsule |
US7627441B2 (en) * | 2003-09-30 | 2009-12-01 | Rosemount Inc. | Process device with vibration based diagnostics |
US7258021B2 (en) * | 2004-06-25 | 2007-08-21 | Rosemount Inc. | Process transmitter isolation assembly |
US7373831B2 (en) * | 2004-06-25 | 2008-05-20 | Rosemount Inc. | High temperature pressure transmitter assembly |
US7036381B2 (en) * | 2004-06-25 | 2006-05-02 | Rosemount Inc. | High temperature pressure transmitter assembly |
US7347099B2 (en) * | 2004-07-16 | 2008-03-25 | Rosemount Inc. | Pressure transducer with external heater |
US7190053B2 (en) | 2004-09-16 | 2007-03-13 | Rosemount Inc. | Field device incorporating circuit card assembly as environmental and EMI/RFI shield |
CA2597015A1 (en) * | 2005-02-28 | 2006-09-08 | Rosemount Inc. | Process connection for process diagnostics |
US8112565B2 (en) | 2005-06-08 | 2012-02-07 | Fisher-Rosemount Systems, Inc. | Multi-protocol field device interface with automatic bus detection |
US20070068225A1 (en) * | 2005-09-29 | 2007-03-29 | Brown Gregory C | Leak detector for process valve |
US7679033B2 (en) * | 2005-09-29 | 2010-03-16 | Rosemount Inc. | Process field device temperature control |
US7287432B2 (en) * | 2005-11-17 | 2007-10-30 | Rosemount Inc. | Process transmitter with overpressure vent |
JP5676100B2 (ja) * | 2006-04-25 | 2015-02-25 | ローズマウント インコーポレイテッド | ニアネットシェイプ焼結セラミックを用いた圧力センサ |
US7953501B2 (en) * | 2006-09-25 | 2011-05-31 | Fisher-Rosemount Systems, Inc. | Industrial process control loop monitor |
US8788070B2 (en) | 2006-09-26 | 2014-07-22 | Rosemount Inc. | Automatic field device service adviser |
WO2008042290A2 (en) | 2006-09-29 | 2008-04-10 | Rosemount Inc. | Magnetic flowmeter with verification |
US7458275B2 (en) * | 2007-03-15 | 2008-12-02 | Rosemount Inc. | Welded header for pressure transmitter |
US7454975B2 (en) * | 2007-04-06 | 2008-11-25 | Rosemount Inc. | Expansion chamber for use with a pressure transmitter |
US8898036B2 (en) * | 2007-08-06 | 2014-11-25 | Rosemount Inc. | Process variable transmitter with acceleration sensor |
US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
US7590511B2 (en) * | 2007-09-25 | 2009-09-15 | Rosemount Inc. | Field device for digital process control loop diagnostics |
US7484416B1 (en) | 2007-10-15 | 2009-02-03 | Rosemount Inc. | Process control transmitter with vibration sensor |
US7779698B2 (en) * | 2007-11-08 | 2010-08-24 | Rosemount Inc. | Pressure sensor |
US7497123B1 (en) | 2007-12-18 | 2009-03-03 | Rosemount Inc. | Direct mount for pressure transmitter with thermal management |
US8042401B2 (en) * | 2008-06-12 | 2011-10-25 | Rosemount, Inc. | Isolation system for process pressure measurement |
US7814798B2 (en) * | 2008-09-17 | 2010-10-19 | P I Components Corporation | Diaphragm structure and method of manufacturing a diaphragm structure |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
US9207670B2 (en) | 2011-03-21 | 2015-12-08 | Rosemount Inc. | Degrading sensor detection implemented within a transmitter |
US9010191B2 (en) | 2011-12-22 | 2015-04-21 | Rosemount Inc. | Pressure sensor module for sub-sea applications |
US9389106B2 (en) | 2012-03-06 | 2016-07-12 | Rosemount Inc. | Remote seal pressure measurement system for subsea use |
US9052240B2 (en) | 2012-06-29 | 2015-06-09 | Rosemount Inc. | Industrial process temperature transmitter with sensor stress diagnostics |
US9602122B2 (en) | 2012-09-28 | 2017-03-21 | Rosemount Inc. | Process variable measurement noise diagnostic |
US9442031B2 (en) | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
CN104583742B (zh) * | 2013-07-19 | 2016-12-28 | 罗斯蒙特公司 | 包括具有两件式隔离插塞的隔离组件的压力变送器 |
US9234776B2 (en) | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
US9459170B2 (en) * | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
US10260980B2 (en) | 2013-09-27 | 2019-04-16 | Rosemount Inc. | Pressure sensor with mineral insulated cable |
US9423315B2 (en) * | 2013-10-15 | 2016-08-23 | Rosemount Aerospace Inc. | Duplex pressure transducers |
US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
US9816889B2 (en) * | 2015-01-30 | 2017-11-14 | Omega Engineering, Inc. | Differential pressure sensing device with overload protection |
US10209154B2 (en) * | 2015-03-30 | 2019-02-19 | Rosemount Inc. | In-line process fluid pressure transmitter for high pressure applications |
RU2693732C1 (ru) * | 2015-09-30 | 2019-07-04 | Роузмаунт Инк. | Передатчик давления с защитой от избыточного давления |
US10378987B2 (en) * | 2017-03-10 | 2019-08-13 | Honeywell International Inc. | Pressure sensor with flow porting having integral flame-proof safety mechanism |
US10598559B2 (en) | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
JP2021517969A (ja) | 2018-05-17 | 2021-07-29 | ローズマウント インコーポレイテッド | 測定素子およびこれを具備する測定機器 |
CN109752418B (zh) * | 2019-01-21 | 2021-11-05 | 中国科学院上海微系统与信息技术研究所 | 一种微型热导气体传感器 |
Family Cites Families (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB705124A (en) * | 1952-02-05 | 1954-03-10 | Alltools Ltd | Improvements in pipe couplings |
US3405559A (en) * | 1966-11-07 | 1968-10-15 | United Aircraft Corp | Pressure transducer |
US4006640A (en) * | 1976-02-06 | 1977-02-08 | Honeywell Inc. | Seal for process pressure to current transmitter |
US4092696A (en) * | 1976-12-27 | 1978-05-30 | Borg-Warner Corporation | Variable area capacitive pressure transducer with temperature compensation |
JPS5461975A (en) * | 1977-10-26 | 1979-05-18 | Hitachi Ltd | Detector of differential pressure, pressure and load |
US4208782A (en) * | 1977-12-12 | 1980-06-24 | Kulite Semiconductor Products, Inc. | Methods of fabricating transducers employing flat bondable surfaces with buried contact areas |
US4196632A (en) * | 1978-08-14 | 1980-04-08 | The Boeing Company | Dual capacitance type bonded pressure transducer |
JPS5817421B2 (ja) * | 1979-02-02 | 1983-04-07 | 日産自動車株式会社 | 半導体圧力センサ |
US4236137A (en) * | 1979-03-19 | 1980-11-25 | Kulite Semiconductor Products, Inc. | Semiconductor transducers employing flexure frames |
US4434451A (en) * | 1979-10-29 | 1984-02-28 | Delatorre Leroy C | Pressure sensors |
US4301492A (en) * | 1980-01-28 | 1981-11-17 | Paquin Maurice J | Pressure-sensing transducer |
US4443293A (en) * | 1981-04-20 | 1984-04-17 | Kulite Semiconductor Products, Inc. | Method of fabricating transducer structure employing vertically walled diaphragms with quasi rectangular active areas |
DE3222620A1 (de) * | 1982-02-15 | 1983-08-25 | Siemens AG, 1000 Berlin und 8000 München | Druck- oder druckdifferenzmessgeraet mit einer vor ueberlastung geschuetzten drucksonsor-einrichtung |
US4479070A (en) * | 1983-06-10 | 1984-10-23 | Sperry Corporation | Vibrating quartz diaphragm pressure sensor |
GB8401848D0 (en) * | 1984-01-24 | 1984-02-29 | Carter R E | Pressure transducer |
US4603371A (en) * | 1984-10-12 | 1986-07-29 | Rosemount Inc. | Capacitive sensing cell made of brittle material |
US4586108A (en) * | 1984-10-12 | 1986-04-29 | Rosemount Inc. | Circuit for capacitive sensor made of brittle material |
JPS6227637A (ja) * | 1985-07-29 | 1987-02-05 | Chino Corp | 圧力センサ |
US4800758A (en) * | 1986-06-23 | 1989-01-31 | Rosemount Inc. | Pressure transducer with stress isolation for hard mounting |
US4798089A (en) * | 1987-03-12 | 1989-01-17 | Rosemount Inc. | Isolator apparatus |
US4833922A (en) * | 1987-06-01 | 1989-05-30 | Rosemount Inc. | Modular transmitter |
US4790192A (en) * | 1987-09-24 | 1988-12-13 | Rosemount Inc. | Silicon side by side coplanar pressure sensors |
JPH0812123B2 (ja) * | 1987-11-27 | 1996-02-07 | 日本碍子株式会社 | 圧力センサ |
JPH01301134A (ja) * | 1988-05-30 | 1989-12-05 | Nippon Beeles- Kk | 圧力伝送器 |
DE3901492A1 (de) * | 1988-07-22 | 1990-01-25 | Endress Hauser Gmbh Co | Drucksensor und verfahren zu seiner herstellung |
US4930353A (en) * | 1988-08-07 | 1990-06-05 | Nippondenso Co., Ltd. | Semiconductor pressure sensor |
US5081867A (en) * | 1988-09-30 | 1992-01-21 | Nec Corporation | Semiconductor sensor |
FR2638524B1 (fr) * | 1988-10-27 | 1994-10-28 | Schlumberger Prospection | Capteur de pression utilisable dans les puits de petrole |
US5022270A (en) * | 1989-06-15 | 1991-06-11 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
US4993754A (en) * | 1989-09-29 | 1991-02-19 | Rosemount Inc. | Liquid level coplanar transmitter adapter |
JP2625225B2 (ja) * | 1989-12-22 | 1997-07-02 | 株式会社日立製作所 | 半導体圧力センサ |
US5115676A (en) * | 1990-01-10 | 1992-05-26 | Setra Systems, Inc. | Flush-mounted pressure sensor |
JP2724419B2 (ja) * | 1990-08-28 | 1998-03-09 | 日本特殊陶業株式会社 | 圧力センサ |
JP2718563B2 (ja) * | 1990-08-28 | 1998-02-25 | 日本特殊陶業株式会社 | 圧力検出器 |
US5095755A (en) * | 1990-11-01 | 1992-03-17 | Rosemount Inc. | Isolator for pressure transmitter |
US5094109A (en) * | 1990-12-06 | 1992-03-10 | Rosemount Inc. | Pressure transmitter with stress isolation depression |
US5157972A (en) * | 1991-03-29 | 1992-10-27 | Rosemount Inc. | Pressure sensor with high modules support |
WO1992017757A1 (en) * | 1991-04-05 | 1992-10-15 | Mark Iv Transducer Corporation | Differential pressure device |
US5161415A (en) * | 1991-04-11 | 1992-11-10 | Mitsubishi Denki K.K. | Pressure sensor |
US5133215A (en) * | 1991-06-19 | 1992-07-28 | Honeywell Inc. | Pressure transmitter assembly having sensor isolation mounting |
KR0163443B1 (ko) * | 1991-07-04 | 1999-03-30 | 나까오 다께시 | 압력측정장치 |
US5178015A (en) * | 1991-07-22 | 1993-01-12 | Monolithic Sensors Inc. | Silicon-on-silicon differential input sensors |
US5227068A (en) * | 1991-10-25 | 1993-07-13 | Eco-Soil Systems, Inc. | Closed apparatus system for improving irrigation and method for its use |
JP2896725B2 (ja) * | 1991-12-26 | 1999-05-31 | 株式会社山武 | 静電容量式圧力センサ |
FR2687777B1 (fr) * | 1992-02-20 | 1994-05-20 | Sextant Avionique | Micro-capteur capacitif a faible capacite parasite et procede de fabrication. |
US5287746A (en) * | 1992-04-14 | 1994-02-22 | Rosemount Inc. | Modular transmitter with flame arresting header |
JPH05296867A (ja) * | 1992-04-23 | 1993-11-12 | Hitachi Ltd | 差圧伝送器 |
SE515191C2 (sv) * | 1992-05-05 | 2001-06-25 | Volvo Ab | Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck |
US5337612A (en) * | 1992-06-08 | 1994-08-16 | Quartzdyne, Inc. | Apparatus for pressure transducer isolation |
US5424650A (en) * | 1993-09-24 | 1995-06-13 | Rosemont Inc. | Capacitive pressure sensor having circuitry for eliminating stray capacitance |
SG41962A1 (en) * | 1993-09-24 | 1997-08-15 | Rosemount Inc | Pressure transmitter isolation diaphragm |
-
1997
- 1997-03-14 US US08/818,379 patent/US5731522A/en not_active Expired - Lifetime
-
1998
- 1998-03-06 CA CA002283588A patent/CA2283588A1/en not_active Abandoned
- 1998-03-06 WO PCT/US1998/004844 patent/WO1998041833A1/en active Application Filing
- 1998-03-06 DE DE19882225T patent/DE19882225B4/de not_active Expired - Lifetime
- 1998-03-06 CN CNB988029529A patent/CN1134654C/zh not_active Expired - Lifetime
- 1998-03-06 GB GB9921573A patent/GB2338066B/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10392623B4 (de) * | 2002-05-08 | 2009-09-24 | Rosemount Inc., Eden Prairie | Drucksensoranordnung |
Also Published As
Publication number | Publication date |
---|---|
CN1134654C (zh) | 2004-01-14 |
GB9921573D0 (en) | 1999-11-17 |
US5731522A (en) | 1998-03-24 |
WO1998041833A1 (en) | 1998-09-24 |
GB2338066B (en) | 2000-12-20 |
DE19882225B4 (de) | 2009-07-09 |
CN1249812A (zh) | 2000-04-05 |
CA2283588A1 (en) | 1998-09-24 |
GB2338066A (en) | 1999-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |