DE20101638U1 - Sensor for determining the composition of gases - Google Patents

Sensor for determining the composition of gases

Info

Publication number
DE20101638U1
DE20101638U1 DE20101638U DE20101638U DE20101638U1 DE 20101638 U1 DE20101638 U1 DE 20101638U1 DE 20101638 U DE20101638 U DE 20101638U DE 20101638 U DE20101638 U DE 20101638U DE 20101638 U1 DE20101638 U1 DE 20101638U1
Authority
DE
Germany
Prior art keywords
sensor
sensor according
heater
sensitive layer
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20101638U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZENTRUM MIKROELEKTRONIK DRESDEN AG, DE
Original Assignee
Zentrum Mikroelektronik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zentrum Mikroelektronik Dresden GmbH filed Critical Zentrum Mikroelektronik Dresden GmbH
Priority to DE20101638U priority Critical patent/DE20101638U1/en
Publication of DE20101638U1 publication Critical patent/DE20101638U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (7)

1. Sensor zur Bestimmung der Zusammensetzung von Gasen mit mehreren in einem Array angeordneten Sensorelementen, die auf einem elektrisch nicht leitfähigem Substrat aufge­ bracht sind, die mindestens eine sensitive Schicht aus halbleitendem Metalloxid und Kontaktelektroden zur Messung des Widerstandes der sensitiven Schicht aufweisen, wobei das Array mit einer Heizanordnung versehen ist, da­ durch gekennzeichnet, dass in dem Sub­ strat (11) mehrere Membranen (12) ausgebildet sind, die voneinander durch je einen Steg (13) aus Substratmaterial thermisch entkoppelt sind, wobei ein Steg (13) eine Höhe aufweist, die größer als die Dicke einer Membran (12) ist, dass auf jeder Membran (12) ein Heizer (8) und ein Tempe­ raturfühler angeordnet ist, die voneinander durch Isolier­ schichten (9; 10) getrennt sind und dass über der Heizer-/ Temperaturfühler-Anordnung durch eine weitere Isolier­ schicht (6; 7) getrennt, ein Sensorelement (2) mit einer eigenen sensitiven Schicht (3) aufgebracht ist.1. Sensor for determining the composition of gases with a plurality of sensor elements arranged in an array, which are brought up on an electrically non-conductive substrate, which have at least one sensitive layer of semiconducting metal oxide and contact electrodes for measuring the resistance of the sensitive layer, the array is provided with a heating arrangement, characterized in that in the sub strate ( 11 ) a plurality of membranes ( 12 ) are formed, which are thermally decoupled from each other by a web ( 13 ) made of substrate material, wherein a web ( 13 ) has a height , which is greater than the thickness of a membrane ( 12 ), that a heater ( 8 ) and a temperature sensor are arranged on each membrane ( 12 ), which are separated from one another by insulating layers ( 9 ; 10 ) and that over the heater / Temperature sensor arrangement separated by a further insulating layer ( 6 ; 7 ), a sensor element ( 2 ) with its own sensitive layer ht ( 3 ) is applied. 2. Sensor nach Anspruch 1, dadurch gekenn­ zeichnet, dass der Heizer (8) und der Temperatur­ fühler aus Platin bestehen. 2. Sensor according to claim 1, characterized in that the heater ( 8 ) and the temperature sensor consist of platinum. 3. Sensor nach Anspruch 1, dadurch gekenn­ zeichnet, dass der Heizer (8) und der Temperatur­ fühler aus unterschiedlichem Material bestehen.3. Sensor according to claim 1, characterized in that the heater ( 8 ) and the temperature sensor consist of different material. 4. Sensor nach Anspruch 3, dadurch gekenn­ zeichnet, dass mindestens ein Material aus Wolfram oder Platin besteht.4. Sensor according to claim 3, characterized records that at least one material made of tungsten or platinum. 5. Sensor nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die sensitive Schicht (3) aus TiO2 besteht.5. Sensor according to one of claims 1 to 4, characterized in that the sensitive layer ( 3 ) consists of TiO 2 . 6. Sensor nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die Betriebstemperatur des Sensorelementes (2) des Array im Bereich von 400-540 °C liegt.6. Sensor according to one of claims 1 to 5, characterized in that the operating temperature of the sensor element ( 2 ) of the array is in the range of 400-540 ° C. 7. Sensor nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Kontaktelektroden (4; 5) aus Platin oder Gold bestehen.7. Sensor according to one of claims 1 to 6, characterized in that the contact electrodes ( 4 ; 5 ) consist of platinum or gold.
DE20101638U 2001-01-29 2001-01-29 Sensor for determining the composition of gases Expired - Lifetime DE20101638U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20101638U DE20101638U1 (en) 2001-01-29 2001-01-29 Sensor for determining the composition of gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20101638U DE20101638U1 (en) 2001-01-29 2001-01-29 Sensor for determining the composition of gases

Publications (1)

Publication Number Publication Date
DE20101638U1 true DE20101638U1 (en) 2001-04-26

Family

ID=7952305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20101638U Expired - Lifetime DE20101638U1 (en) 2001-01-29 2001-01-29 Sensor for determining the composition of gases

Country Status (1)

Country Link
DE (1) DE20101638U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8043566B2 (en) 2000-10-16 2011-10-25 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing mixtures of gases

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8043566B2 (en) 2000-10-16 2011-10-25 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing mixtures of gases

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20010531

R081 Change of applicant/patentee

Owner name: ZENTRUM MIKROELEKTRONIK DRESDEN AG, DE

Free format text: FORMER OWNER: ZENTRUM MIKROELEKTRONIK DRESDEN GMBH, 01109 DRESDEN, DE

Effective date: 20020612

R150 Term of protection extended to 6 years

Effective date: 20040317

R157 Lapse of ip right after 6 years

Effective date: 20070801