DE202016005868U1 - Manipulator system with means for generating an air flow - Google Patents

Abstract

A manipulator system (1) comprising a manipulator base (40), the manipulator base having a housing (42); at least one manipulator (10), the manipulator having a manipulator housing (12); and wherein the manipulator (10) is disposed on the manipulator base (50); at least one adapter (20) arranged between the manipulator base (40) and the manipulator (10); and wherein the interior of the manipulator housing (12) and the interior of the housing (42) of the manipulator base (40) are connected via at least one connection opening (22) disposed in the adapter (20); and wherein the adapter (20) includes means for generating an airflow (24) configured to generate a first airflow (26) from the interior of the manipulator housing (12) through the communication port (22) into the housing (42) of the manipulator base (40) flows.

Description

Field of the invention

The present invention relates to a manipulator system with means for generating an air flow.

Background of the invention

Manipulator systems are used when z. For example, production of goods requires an increased degree of precision and reproducibility at a high production rate. In addition, they are suitable for processing special goods having high sensitivity to, for example, impurities. Such goods must be produced in specially isolated clean rooms, which only have a controllable upper limit of impurity particles, such. B. allow dust, aerosols or biological contaminants such as microbes in the air. This is particularly the case for semiconductor, biotechnology and medical applications. It is advantageous to carry out the production as far as possible without direct human contact. Accordingly, all funds used for the processing or production of the goods must be designed to deliver as little pollution particles in the clean room. However, manipulator systems often include a variety of moving parts that can generate particles. This is particularly the case for movable joints or mechanical components inside a manipulator system, which generate fine particles by friction during movement and thus can contaminate a clean room.

Patent document US 4,972,731 shows a clean room robot, which is especially suitable for the production of semiconductor devices. This robot includes a partitioned body that at least partially comprises a plurality of arm parts which are connected to each other via rotatable joints. Both the arm parts and the rotatable joints are hollow, so that a continuous flow of air through each of the rotatable joints as well as each arm part of the divided body can be passed. At the other end of the robot is mounted a rotating fan blower which can generate an air flow passing through the interior of the divided body of the robot. This airflow entrains any contaminating particulate matter that may be caused by frictional wear between moving components of the rotatable joints. Thus, the particles can be transported from inside the body.

Similarly, the patent document discloses US 6,267,022 B1 an articulated robot with a hollow structure.

Further, it is known to form manipulator systems mobile, with a large part of the mechanical and electronic components is arranged on a movable base, the free movement of the manipulator system through the space, for. B. on wheels. For this purpose, a compact design of the components for drive and the control of the manipulator system are usually necessary.

Manipulator systems which are suitable for use in a clean room are usually manipulator systems which control the sucked by a negative pressure in the interior of the manipulator system particles via an air flow controlled from the clean room, so that no contamination of the clean room takes place. The guiding of the air flow from the clean room, z. B. via a hose, manhole or channel, thereby causing a more or less stationary arrangement of the manipulator system, which limits the range and flexibility of the manipulator system.

The object of the present invention is to at least partially overcome the above disadvantages.

Detailed description of the invention

The present invention relates to a manipulator system comprising a manipulator base, the manipulator base having a housing; at least one manipulator, the manipulator having a manipulator housing and wherein the manipulator is arranged on the manipulator base; at least one adapter arranged between the manipulator base and the manipulator; and wherein the interior of the manipulator housing and the interior of the housing of the manipulator base via at least one connection opening, which is arranged in the adapter, are connected. The adapter includes means for generating an airflow configured to generate a first airflow that flows from the interior of the manipulator housing through the connection opening into the housing of the manipulator base.

The manipulator here typically comprises arm members which are movably connected to each other via joints. Both the housing of the manipulator base, as well as the housing of the manipulator are largely hermetically sealed, ie with the exception of defined and provided for this purpose inlets and outlets, for example, a controlled insertion and (possibly filtered) allow removal of air. This prevents dirt particles, such as dust and other contaminating particles, from being released when using the Manipulator system can be generated, from the manipulator system into the environment. These particles, which are generated in the manipulator system, z. B. be particles caused by friction of moving parts of the manipulator or in drive systems z. B. generated by gears or moving parts of electric motors and brakes.

The adapter is disposed between the manipulator base and the manipulator, and preferably connects the manipulator base to the manipulator so that air from the manipulator can flow toward the manipulator base. Preferably, the adapter is an easily replaceable component, which allows a quick and cost-efficient conversion of an existing manipulator system. In order to enable use of the manipulator system, for example, in a clean room, an air flow is generated in the direction of the manipulator base, which in turn generates a negative pressure in the manipulator. Thus, particles that are generated in the manipulator are sucked off and transported by the air flow in the direction of the manipulator base. Especially in manipulator systems with multiple joints as a segregation of the particles generated at these joints is prevented in the environment. For example, different manipulators with different task, for example, for z. B. gripping, guiding or cutting, as needed by means of the adapter to be mounted on the manipulator base. The housing of the manipulator or the manipulator base should thereby have the lowest possible weight and at the same time be able to withstand the overpressures or underpressures generated in the housings without the housing becoming leaky. This can be z. B. on light metal housing or polymer housing can be achieved. In addition, the housing of the manipulator base should provide sufficient space to accommodate preferably all mechanical and electronic components of the manipulator system. Thus, particles generated in the manipulator base by said components can also be retained in the manipulator base so that the environment is not contaminated.

Preferably, the means for generating the air flow comprise a first ventilation device, preferably a fan, and the first ventilation device is arranged in the at least one connection opening between the manipulator and the manipulator base. The ventilation devices should preferably be designed such that they are suitable for generating a laminar flow of air as possible from the manipulator in the direction of the manipulator base. This can preferably be done in particular by means of fans (also referred to as fans or blowers). The ventilation device is preferably arranged between the two cavities formed by the housings, so that the air is drawn in from one side, in this case from the side of the manipulator, and thus a negative pressure is generated in the manipulator. The aspirated air is then blown into the manipulator base on the other side of the fan. The fan used here is preferably an axial fan, which is arranged in the connection opening between the manipulator and the manipulator base in order to generate the described air flow. The axis of rotation of the fan is parallel to the direction of movement of the generated air flow. The laminar flow of air prevents the particles that move with the air flow, can not be removed by turbulence. The fan is in this case preferably an electrically driven fan, which is fed by the power supply of the manipulator base, d. H. There are no additional means for driving the fan necessary.

Preferably, the first ventilation device is electronically controlled by a ventilation control, wherein the ventilation control is preferably arranged in the adapter. The ventilation control controls, as needed, the strength of the air flow generated by the ventilation device. For example, the ventilation control can control the rotational speed of the fan. So, depending on whether z. B. the manipulator is in operation or not, the ventilation device are regulated up or down accordingly to produce an optimal air flow. Next, the ventilation control is preferably suitable to shut down the mechanics of the manipulator system in case of malfunction of the ventilation device. Thus, it can be prevented that the manipulator system works without the air flow described above and emits particles uncontrolled in the environment. The preferred arrangement of the vent control in the adapter allows the adapter to be preferably a stand-alone module which can be provided to generate airflow from the manipulator towards the manipulator base without additional electronic or mechanical components to the manipulator or the manipulator base must be added. The compact design also a repair or cleaning, such as the ventilation device and the ventilation control is simplified. In this case, the ventilation control is preferably supplied with power by the electrical supply of the manipulator base.

Preferably, the manipulator is an articulated arm robot. An articulated robot advantageously makes it possible to guide a tool in several spatial dimensions, depending on the number and shape of the joints and the arm members movably connected to the joints. In a Particularly preferred embodiment, a 6-axis articulated arm robot can be used.

Preferably, the first air flow is suitable for transporting particles from the manipulator housing into the manipulator base. The particles generated in the manipulator housing are mainly due to friction at the joints, by mechanically interacting components or by a corresponding end effector, such as a drill or a grinder. The air flow, which is preferably at the proximal end, d. H. At the attachment end of the manipulator, where the manipulator is mounted on the adapter or on the manipulator housing, is generated, so should be advantageous so strong that even particles that are generated at the distal end of the manipulator, can be removed.

Further preferably, the housing of the manipulator base on a second opening, which is preferably arranged in the vicinity of the connection opening, wherein the second opening is associated with at least one second ventilation device for generating a second air flow, which from the environment through the second opening in the Housing the manipulator base flows, the second ventilation device is preferably a fan. The manipulator system can thus preferably have a second air flow which, together with the first air flow, can form a common air flow in the manipulator base. For this purpose, similar or the same means as for the generation of the first air flow can be provided. The assignment of the second ventilation device and the generated second air flow prevents particles from entering the environment from the manipulator base, which is largely hermetically sealed. In this case, the second air flow should preferably be designed in the manipulator base in such a way that it does not run counter to the first generated air flow and thus transports particles in the direction of the manipulator.

Preferably, the housing of the manipulator base has at least one outlet opening through which the air can flow out of the housing of the manipulator base into the environment, wherein the outlet opening is preferably arranged on the side of the housing of the manipulator base opposite the connection opening. For a guidance of the air flow generated in the manipulator base through the housing, it is advantageous to arrange the outlet opening on the opposite side of the inlet opening. As a result, an air flow is generated, which flows as possible through the entire interior of the manipulator base. As a result, good cooling of the components inside the manipulator base can advantageously be achieved. The outlet opening is preferably designed such that the build-up of excessive overpressure in the manipulator base is prevented, so that no air can escape uncontrollably from the housing of the manipulator base. As mentioned above, the housing of manipulator and manipulator base should otherwise be made airtight.

Further preferably, the outlet opening comprises retention means for retaining particles, the retention means preferably being fine dust filters. The retention means for retaining particles are preferably designed such that on the one hand they have a high permeability to the air flow, in order to avoid the above-mentioned construction of a defective overpressure, and on the other hand have a high degree of separation of the transported particles, so that they do not pass the retention means , Preferably, as required, several different retaining means such. As filters for retaining liquid particles, as well as filters for retaining particulate matter are combined to achieve a high level of total retained particles.

Preferably, the outlet opening is arranged on the side of the housing of the manipulator base, which is arranged opposite to the second opening. The airflow generated by the second venting device in the manipulator base is typically stronger than the first airflow since, as mentioned above, the second venting device on the air inlet side is in direct contact with the environment and therefore not as in the first Ventilation device, the housing of the manipulator acts as a throttle. Therefore, preferably, a large portion of the airflow generated in the manipulator base is generated by the second venting device. In order to ensure a sufficiently strong air flow through the entire interior of the manipulator base and thus good cooling of the components and transport of all particles from the manipulator base, the outlet opening is therefore preferably arranged opposite the second opening.

Further preferably, the outlet opening is arranged in the bottom-facing side of the housing of the manipulator base. The arrangement of the outlet opening in the side facing the bottom of the housing has the advantage that the air flow interacts only minimally with the environment during the outflow of air from the manipulator base. Thus, a high flow rate of a strong airflow after exiting the manipulator base is attenuated. This offers in particular an advantage in clean rooms, which often have a defined air circulation within the rooms. Preferably, the floor facing side of the housing is spaced to the ground, so that the air can escape unhindered. The arrangement of the outlet opening on the bottom side of the manipulator base also offers the advantage that the manipulator system can be positioned directly next to other devices in the clean room without being affected by the escaping air.

Preferably, means for controlling and / or driving the manipulator system are provided in the manipulator base, wherein the air flows generated in the housing of the manipulator base are guided along these means. For example, means for controlling and / or driving the manipulator system include electronics, devices, energy storage and drives. These allow the manipulator to be controlled and driven, i. H. the movement of the manipulator in the working process. Further control and control the means, for example, the movement of the manipulator base and thus the entire manipulator system in the room, eg. B. about wheels, brakes and steering systems. Thus, the manipulator system may preferably be a mobile manipulator system and reach different locations in a room. The means for controlling and / or driving in the manipulator base are preferably arranged as compact as possible and space-saving, so that the manipulator system can be regarded as a "closed system" that requires no additional means for controlling and driving. The air streams generated in the housing of the manipulator base cool the frictional or electrical energy generating means disposed in the manipulator base. Thus, the means, especially electronic components, are protected from damage by heat generation and extends the life of the components. Preferably, the cooling takes place solely by inflowing ambient air or the extracted air from the manipulator, which makes the cooling low maintenance and cost-efficient.

Preferably, the air flow in the housing of the manipulator base is suitable for transporting particles from the manipulator base. The airflow is preferably configured to allow transport of the particles generated by the means for controlling and driving disposed in the manipulator base. Contamination of the environment of the manipulator base by the particles is thus prevented.

Further preferably, the manipulator is a manipulator for a clean room, wherein the manipulator system according to ISO 14644-1 the air purity classes ISO 9-7 , preferably ISO 6-4 , especially preferred ISO 3-1 Fulfills. Depending on the field of application of the manipulator system, different cleanroom classes can be used ISO 14644-1 To be defined. For example, clean room class 2 has an upper limit of 100 particles with a diameter of 0.1-0.2 μm. This allows the use of the manipulator system in the production of contamination-sensitive products z. In optics and laser technology, aerospace engineering, life sciences, medical research and nanotechnology.

Preferably, the adapter has an adapter plate and the manipulator housing is mounted on one side of the adapter plate and the housing of the manipulator base on the other side, and wherein the adapter plate has sealing means, so that the connection opening between the manipulator housing and manipulator Base is airtight to the environment. The adapter plate preferably has fastening means, so that the adapter plate can be fixed with one of its sides to the manipulator base and with its opposite side to the manipulator. The connection opening between the manipulator housing and the manipulator base preferably runs perpendicular to the main plane of the adapter plate through the adapter plate. So that particles which have been sucked out of the manipulator during the passage through the adapter plate do not escape into the environment, the adapter is preferably sealed airtight from the environment with sealing means. As a sealant in this case, for example rubber seals such as O-rings or other means can be provided, which allow a simple and reliable seal. For example, the sealing means can already be provided on the manipulator housing, the adapter plate or the manipulator, which simplifies the assembly of the manipulator system.

Further preferably, the manipulator base is a driverless transport vehicle. The design of the manipulator base as a driverless transport vehicle has the advantage that the manipulator base can move autonomously within a room. All means necessary for controlling and driving the driverless transport vehicle are preferably provided in the manipulator base. Thus, the manipulator system according to the invention can advantageously be used at different locations in, for example, a clean room, without a manual conversion of the manipulator system is necessary, which among other things, the range of the manipulator and thus increases its flexibility in use.

Detailed description of the figures

The invention will be described in more detail below with reference to the appended figures. It shows

1 a schematic detail view of a manipulator and an adapter;

2 a schematic sectional side view of a manipulator base;

3 the basis of 2 with attached manipulator; and

4 a schematic view of a manipulator system.

In particular shows 1 in a schematic view an adapter 20 in the form of an adapter plate resting on a manipulator mounting plate 60 is arranged and part of a manipulator 10 , At the contact surface between the adapter 20 and the manipulator mounting plate 60 are sealants 30 intended. The manipulator mounting plate 60 is part of a manipulator base 40 , which is described in more detail in the following figures. On the side, opposite the connection side between manipulator mounting plate 60 and adapters 20 , is the manipulator 10 attached. At the contact surface between manipulator 10 and adapters 20 are also sealants 30 intended. The manipulator 10 has a manipulator housing 12 on which the inside of the manipulator 10 mostly airtight to the environment 90 seals. To allow airflow, the manipulator may be provided with a suitable opening, such as near the end effector. A connection opening 22 that in the adapter 20 is arranged, connects the interior of the manipulator 10 with the interior of the manipulator base 40 , A first ventilation device 24 is in the connection opening 22 arranged and generated in operation a first air flow 26 , allowing air from inside the manipulator 10 sucked and towards the manipulator base 40 is blown. The first ventilation device 24 is thereby controlled by a ventilation control 28 controlled and is in the adapter 20 arranged or a part of the adapter 20 , Furthermore, the manipulator points 10 joints 14 On, the movement of the manipulator around the joints 14 defined movement axes allows. Particles, for example, by the movement of the manipulator 10 around the axes of movement at the joints 14 inside the manipulator 10 can be generated via the first air flow 26 from the inside of the manipulator 10 sucked and towards the manipulator base 40 be blown.

2 shows a schematic view of the manipulator base 40 , The base 40 has a housing 42 on which the inside of the manipulator base 40 opposite the environment 90 nearly airtight seals. The interior of the manipulator base 40 has means for controlling and driving the manipulator system, such. B. electronics 66 . 68 , Energy storage 70 and drives 72 (eg wheels). These may be on suitable mounting plates for attaching control / drive means 62 be attached. Furthermore, the housing has 42 the manipulator base 40 a second opening 44 on that the inside of the manipulator base 40 with the environment 90 combines. One of the second opening 44 associated second ventilation device 46 can make a second airflow 48 from the surroundings 90 in the interior of the manipulator base 40 produce. Alternatively, for example, in addition an alternative second opening 44 ' with an alternative second ventilation device 46 ' an alternative second airflow 48 ' from the surroundings 90 in the interior of the manipulator base 40 produce. Inside the manipulator base 40 thus becomes an airflow 49 generated from the base in the manipulator 40 incoming air streams 48 . 48 ' composed. The airflow 49 flows through the interior of the manipulator base 40 in the direction of an outlet opening 50 , Here, the air in the manipulator base 40 through openings 64 in the mounting plate 62 stream. The outlet opening 50 is at the bottom 100 arranged facing side. The airflow 49 Can be particles that are generated by the inside of the manipulator 40 arranged means 66 . 68 . 70 . 72 be generated or particles from the environment 90 in the interior of the manipulator base 40 be blown, transport in the direction of the outlet opening 50 , Furthermore, the air flows along the middle 66 . 68 . 70 . 72 so that they are cooled by the passing air. The outlet opening 50 has retention means 58 on that are suitable particles by the air flow 49 within the manipulator base 40 be transported, withhold.

3 shows a schematic view of a manipulator system 1 in which the manipulator 10 over the adapter 20 with the manipulator base 40 connected is. The manipulator 10 as well as the adapter 20 as well as the manipulator base 40 essentially correspond to those of 1 and 2 , Instead of in 2 shown alternative ventilation devices 46 ' However, the manipulator system has a connection opening 22 between the manipulator 10 and the manipulator base 40 in the adapter 20 on which the inside of the manipulator 10 with the interior of the manipulator base 40 combines. Similar to in 2 shown, becomes a flow of air 49 within the manipulator base 40 generated, arising from the incoming air streams 26 . 48 composed. The airflow 49 transports both the particles from the manipulator 10 , as well as particles from the environment 90 in the interior of the manipulator base 40 flow and particles that are inside the manipulator base 40 be generated and cools when flowing through the manipulator base 40 the means provided therein 66 . 68 . 70 . 72 for driving and controlling the manipulator system 1 , At the outlet opening are in turn retaining means 58 , such as suitable filters. It is also conceivable, alternatively or additionally, the outlet opening 50 With For example, to provide a hose to carry away the particles suitable.

4 shows a schematic view of the manipulator system 1 being the manipulator 10 over the adapter 20 with the manipulator base 40 connected is. It is as a manipulator 10 An articulated arm robot with multiple joints 14 provided, each arm parts 18 connect, with the joints a movement of a manipulator 10 attached end effector 16 allow in all directions. The manipulator system 1 is a mobile manipulator system, which by means of the drives 72 , in particular wheels, arbitrarily in a plane parallel to the direction of propagation 80 of the soil 100 can be moved.

LIST OF REFERENCE NUMBERS

1

manipulator system

10

manipulator

12

Manipulator housing

14

joints

16

end effector

18

arm parts

20

adapter

22

connecting opening

24

first ventilation device

26

first airflow

28

Ventilation control

30

sealant

40

Manipulator base

42

Housing of the manipulator base

44

second opening

46

second ventilation device

48

second airflow

44 '

alternative second opening

46 '

alternative second ventilation device

48 '

alternative second airflow airflow inside the

49

Manipulator base

50

outlet opening

58

Retention means

60

Manipulator mounting plate Mounting plate for

62

Control / drive means

64

Openings in the mounting plate

66

equipment

68

equipment

70

energy storage

72

drives

90

Surroundings

100

ground

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 4972731 [0003]
• US 6267022 B1 [0004]

Cited non-patent literature

• ISO 14644-1 [0022]
• ISO 9-7 [0022]
• ISO 6-4 [0022]
• ISO 3-1 [0022]
• ISO 14644-1 [0022]

Claims (15)

Manipulator system ( 1 ), comprising a manipulator base ( 40 ), wherein the manipulator base a housing ( 42 ) having; at least one manipulator ( 10 ), wherein the manipulator a manipulator housing ( 12 ) having; and wherein the manipulator ( 10 ) on the manipulator base ( 50 ) is arranged; at least one adapter ( 20 ), which lies between the manipulator base ( 40 ) and Manipulator ( 10 ) is arranged; and wherein the interior of the manipulator housing ( 12 ) and the interior of the housing ( 42 ) of the manipulator base ( 40 ) via at least one connection opening ( 22 ) in the adapter ( 20 ) are connected; and wherein the adapter ( 20 ) Means for generating an air flow ( 24 ) arranged in such a way a first air flow ( 26 ) generated by the interior of the manipulator housing ( 12 ) through the connection opening ( 22 ) in the housing ( 42 ) of the manipulator base ( 40 ) flows. The manipulator system according to claim 1, wherein the means for generating the air flow ( 26 ) a first ventilation device ( 24 ), preferably a fan; and wherein the first ventilation device ( 24 ) in the at least one connection opening ( 22 ) between the manipulator ( 10 ) and the manipulator base ( 40 ) is arranged. The manipulator system ( 1 ) according to the preceding claim, wherein the first ventilation device ( 24 ) is electronically controlled by a ventilation control ( 28 ), whereby the ventilation control ( 28 ) preferably in the adapter ( 20 ) is arranged. The manipulator system ( 1 ) according to one of the preceding claims, wherein the manipulator ( 10 ) is an articulated arm robot. The manipulator system ( 1 ) according to one of the preceding claims, wherein the first air stream ( 26 ) is suitable for particles from the manipulator housing ( 12 ) into the manipulator base ( 40 ) to transport. The manipulator system ( 1 ) according to one of the preceding claims, wherein the housing ( 42 ) of the manipulator base ( 40 ) a second opening ( 44 ), preferably in the vicinity of the connection opening ( 22 ), wherein the second opening ( 44 ) at least one second ventilation device ( 46 ) for generating a second air stream ( 48 ) associated with the environment ( 90 ) through the second opening ( 44 ) in the housing of the manipulator base ( 42 ) flows, wherein the second ventilation device ( 46 ) is preferably a fan. The manipulator system ( 1 ) according to one of the preceding claims, wherein the housing of the manipulator base ( 42 ) at least one outlet opening ( 50 ) by which the air from the housing of the manipulator base ( 42 ) in the nearby areas ( 90 ), wherein the outlet opening ( 50 ) preferably on the side of the housing of the manipulator base ( 42 ), opposite the connection opening ( 22 ) is arranged. The manipulator system according to claim 7, wherein the outlet opening ( 50 ) Retention means ( 58 ) for retaining particles, wherein the retaining means ( 58 ) are preferably fine dust filters. The manipulator system ( 1 ) according to a combination of claims 7 and 8, wherein the outlet opening ( 50 ) on the side of the housing of the manipulator base ( 42 ), opposite the second opening ( 44 ) is arranged. The manipulator system ( 1 ) according to the preceding claim, wherein the outlet opening ( 50 ) in the ground ( 100 ) facing side of the housing of the manipulator base ( 42 ) is arranged. The manipulator system ( 1 ) according to one of the preceding claims, wherein in the manipulator base ( 40 ) Means for controlling and / or driving the manipulator system ( 66 . 68 . 70 . 72 ) are provided, wherein in the housing of the manipulator base ( 42 ) generated along these means ( 66 . 68 . 70 . 72 ) are guided. The manipulator system ( 1 ) according to the preceding claim, wherein the air flow in the housing of the manipulator base ( 42 ) is suitable for particles from the manipulator base ( 40 ) to transport. The manipulator system ( 1 ) according to one of the preceding claims, wherein the manipulator ( 10 ) is a manipulator for the clean room, wherein the manipulator system ( 1 ) according to ISO 14644-1 the air purity classes ISO 9-7, preferably ISO 6-4, particularly preferably meets ISO 3-1. The manipulator system ( 1 ) according to one of the preceding claims, wherein the adapter ( 20 ) has an adapter plate; and wherein the manipulator housing ( 12 ) is mounted on one side of the adapter plate and the housing of the manipulator base ( 42 ) on the other side, and wherein the adapter plate sealant ( 30 ), so that the connection opening ( 22 ) between manipulator housing ( 12 ) and manipulator base ( 40 ) to the environment ( 90 ) is airtight. The manipulator system ( 1 ) according to one of the preceding claims, wherein the manipulator base ( 40 ) is a driverless transport vehicle.

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