DE2021479A1 - Pressure gauge with double quartz glass diaphragm - Google Patents

Pressure gauge with double quartz glass diaphragm

Info

Publication number
DE2021479A1
DE2021479A1 DE19702021479 DE2021479A DE2021479A1 DE 2021479 A1 DE2021479 A1 DE 2021479A1 DE 19702021479 DE19702021479 DE 19702021479 DE 2021479 A DE2021479 A DE 2021479A DE 2021479 A1 DE2021479 A1 DE 2021479A1
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DE
Germany
Prior art keywords
pressure
measuring device
membranes
measure
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702021479
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German (de)
Inventor
Alfred Prof Dr Ehmert
Jens Dr Rer Nat Geerk
Hans Prof Dr-Ing Kleinwaechter
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Individual
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Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Individual filed Critical Individual
Priority to DE19702021479 priority Critical patent/DE2021479A1/en
Publication of DE2021479A1 publication Critical patent/DE2021479A1/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Abstract

A double diaphragm consists of two discs of quartz glass joined at the rims or is made from the solid. Pressure fluctuations cause deflections of the discs (which are not falsified by permanent set) and those can be measured directly or by metallizing the discs and measuring the capacitance changes.

Description

Druckmessgerät zur Messung von Drucken in Gasen und Flüssigkeiten.Pressure gauge for measuring pressures in gases and liquids.

Die vorliegende Erfindung bezieht sich auf ein Druckmessgerät, mit dem Drucke in Gasen und Flüssigkeiten gemessen werden. Die Begriffe Gase und Flüssigkeiten werden im folgenden durch den Oberbegriff "Fluid" zusammengefasst. Die Mess-Sonde eines solchen Gerätes besteht aus einer oder mehreren elastischen Membranen, die sich infolge der Differenz der Drucke, die auf beiden Seiten der Membran herrschen, durchbiegt.The present invention relates to a pressure measuring device with measuring pressures in gases and liquids. The terms gases and liquids are summarized in the following by the generic term "fluid". The measuring probe Such a device consists of one or more elastic membranes, which due to the difference in the pressures that prevail on both sides of the membrane, sags.

Die Durchbiegung ist ein Mass für die Differenz der Drucke und wird durch mechanische oder elektrische Mittel auf ein Anzeigegerät übertragen. Elektrische Übertragungsmittel mit digitaler Anzeige, wie sie bei der vorliegenden Erfindung verwendet werden, haben den Vorteil, dass sie reibungs- und spielfrei arbeiten.The deflection is a measure of the difference between the pressures and is transmitted to a display device by mechanical or electrical means. Electric Digital display transmission means as used in the present invention used have the advantage that they work without friction or play.

In Fig. 1 ist das Messprinzip eines herkömmlichen Druckmessgerätes dargestellt. Eine Kammer (3) ist durch eine metallische Membran (4) in zwei Räume (1) und (2), in denen die Fluiddrucke p (1) und p (2) herrschen, geteilt. Die strichierte gerade Linie zeigt die Membran im nicht belasteten Zustand: p (1) I p (2), die durchgezogene Linie zeigt die Membran im belasteten Zustand: p (1)>p (2). Parallel zu der nicht belasteten, ebenen Membran ist eine mittels der Isolatoren (6) gegen die Kammer (3) isolierte Metallplatte angebracht, die mittels der gasdichten Durchführung (7) elektrisch nach außen gefuhrt' wird und mit der Membran einen elektrischen Kondensator bildet. Die infolge der Durchbiegung der Membran sich ändernde Kapazität des Kondensators ist ein Mass für die Druckdifferenz p (1) - p (2).In Fig. 1 is the measuring principle of a conventional pressure measuring device shown. A chamber (3) is divided into two spaces by a metallic membrane (4) (1) and (2), in which the fluid pressures p (1) and p (2) prevail, divided. The dashed The straight line shows the membrane in the unloaded state: p (1) I p (2), the solid line Line shows the membrane in the loaded state: p (1)> p (2). Parallel to that not loaded, flat membrane is one by means of the isolators (6) against the chamber (3) insulated metal plate attached, which by means of the gas-tight bushing (7) electrically to the outside 'and with the membrane an electrical capacitor forms. The capacitance of the capacitor, which changes as a result of the deflection of the membrane is a measure of the pressure difference p (1) - p (2).

Die herkömmlichen Druckmessgeräte besitzen meistens eine etallmembrane.The conventional pressure gauges usually have a metal membrane.

Diese haben jedoch den Nachteil, dass sie eine elastische Nachwirkung haben, wodurch solche Geräte für Präzisionsmessungen ungeeignet sind.However, these have the disadvantage that they have an elastic after-effect which makes such devices unsuitable for precision measurements.

Diesen Nachteil haben Druckmessgeräte mit einer erfindungsgemänaus Quarzglas oder quarzähnlichem Glas gefertigten Membran nicht, da diese Art Gläser keine oder nur eine sehr geringe elastische Nachwirkung haben. Ferner hat Quarzglas einen sehr kleinen Temperaturausdehnungskoeffizienten, was einen weiteren Vorteil bedeutet. Die Verwendung von Quarzglas oder quarzähnlichem Glas als Membranmaterial in Druckmessgeräten bedeutet einen wesentlichen technischen Fortschritt.Pressure gauges with a device according to the invention have this disadvantage Quartz glass or quartz-like glass does not make membranes, as these types of glasses have little or no elastic aftereffect. Furthermore has quartz glass a very small coefficient of thermal expansion, which is another advantage means. The use of quartz glass or quartz-like glass as the membrane material in pressure gauges represents a significant technical advance.

Gegenstand der Erfindung ist ein Druskmessgerät zur Messung von Drucken in Fluids, dessen aus Quarzglas oder quarzähnlichem Glas gefertigte Membranen wegen Ihrer Nichtplastizität bei Druckeinwirkung des Fluids keine oder extrem geringe elastische Nachwirkungen haben.The subject of the invention is a drusk measuring device for measuring pressure in fluids, their membranes made of quartz glass or quartz-like glass because of Their non-plasticity when the fluid acts under pressure is none or extremely low have elastic after-effects.

Ein weiterer GEgenstand der Erfindung (Fig. 2) ist eine Anordnung von zwei Membranen (8), die an ihren Rändern zu einer Doppelmembran miteinander verbunden sind. Die Verbindung (9) kann durch ein Klebemittel, durch Verlötung oder durch Verschmelzung hergestellt werden. Die Doppelmembran kann auch aus einem Stück hergestellt sein (Fig. 3). Mittels des erfindungsgemässen Druckmessgerätes, das eine Doppelmembran enthält (siehe Fig. 4), ist die Differenz der Drucke p (1) und p (2), die im Aussenraum (10) bzw. im Innenraum (11) herrschen, messbar. Mittels der Rohrleitungen (12) und (13) können die Drucke p (1) und p (2) an den interessierenden Stellen abgenommen werden. Es ist auch möglich, einen der Räume (10) oder (11) zu evakuieren und abzuschliessen, während in dem jeweils anderen Raum der Druck des Fluids wirksam ist; in diesem Fall wird der absolute Druck gemessen. Die Doppelmembran erhöht die Messempfindlichkeit und bedeutet darum einen technischen Fortschritt.Another object of the invention (Fig. 2) is an arrangement of two membranes (8) which at their edges form a double membrane with one another are connected. The connection (9) can by an adhesive, by soldering or be made by amalgamation. The double membrane can also be made from one piece be made (Fig. 3). By means of the pressure measuring device according to the invention that contains a double membrane (see Fig. 4), the difference between the pressures is p (1) and p (2), which prevail in the outer space (10) and in the inner space (11), can be measured. Means the pipes (12) and (13) can apply the pressures p (1) and p (2) to the interested Bodies are removed. It is also possible to use one of the rooms (10) or (11) evacuate and lock, while the pressure of the Fluids is effective; in this case the absolute pressure is measured. The double membrane increases the measurement sensitivity and therefore represents a technical advance.

Ein weiterer Erfindungsgegenstand ist ein Druckmessgerät mit einer Doppelmembran (siehe Fig. 5), die zwei an ihren Innenflächen angebrachte Metallschichten (14) besitzt, die elektrisch nach aussen geführt sind (15) und gemeinsam einen elektrischen Kondensator bilden. Bei Durchbiegungen der Membranen ändert sich die Kapazität des Kondensators, die, messbar gemacht, ein Mass für die Druckdifferenz des Fluids ist. Die Metallisierung der Quarzglasmembranen zum Zwecke der elektrischen Messung der Durchbiegungen ist eine neue Methode, die einen technischen Fortschritt darstellt. Ein weiterer technischer Fortschritt wird dadurch erzielt, dass infolge der Symmetrie der Doppelmembran Verspannungen durch Temperatureinflüsse kompensiert werden.Another subject of the invention is a pressure measuring device with a double membrane (see FIG. 5), which has two metal layers (14) attached to its inner surfaces, which are electrically led to the outside (15) and together form an electrical capacitor. When the diaphragms bend, the capacitance of the capacitor changes, which, when made measurable, is a measure of the pressure difference in the fluid. The metallization of the quartz glass membranes for the purpose of electrical measurement of the deflections is a new method that represents a technical advance. A further technical advance is achieved by the fact that, due to the symmetry of the double membrane, tension is caused by temperature influences be compensated.

Ein weiterer Gegenstand der Erfindung ist ein Druckmessgerät mit einer Doppelmembran aus Quarzglas (siehe Fig. 6), deren eine Aussenfläche metallisiert ist. Diese bildet zusammen mit einer metallisierten Quarzplatte (17) einen elektrischen Kondensator. Der Innenraum der Doppelmembran, der keinerlei gasende Metalle enthält, kann hoch evakuiert werden,crnrtleisnet sichbesonders zur Messung von Absolutdrucken. Another object of the invention is a pressure measuring device with a double membrane made of quartz glass (see FIG. 6), one outer surface of which is metallized. Together with a metallized quartz plate (17), this forms an electrical capacitor. The interior of the double membrane, which does not contain any gassing metals, can be highly evacuated and is particularly suitable for measuring absolute pressures.

Ferner ist Gegenstand der Erfindung ein Druckmessgerät mit einer Doppelmembran aus Quarzglas (siehe Fig. 7), deren beide Aussenflächen metallisiert sind (16). Diese bilden zusammen mit je einer metallisierten Quarzplatte (17) zwei Kondensatoren. Diese Messanordnung hat eine besonders hohe Empfindlichkeit. Der Innenraum der Doppelmembran, der keinerlei gasendeMetalle enthält, kann hoch evakuiert werden. Der Erfindungsgegenstand eignet sich somit besonders zur Messung von tisinenAbsolutdrucken und stellt einen technischen Fortschritt dar.The invention also relates to a pressure measuring device with a double membrane made of quartz glass (see Fig. 7), the two outer surfaces of which are metallized (16). Together with a metallized quartz plate (17) each, these form two capacitors. This measuring arrangement has a particularly high sensitivity. The interior of the double membrane, which does not contain any gassing metals, can be highly evacuated. The subject of the invention is therefore particularly suitable for measuring tisine absolute pressures and provides a technical progress.

Claims (1)

Anspruch 1Claim 1 Druckmessgerät zur Messung von Drucken in Gasen oder Flüssigkeiten, wobei hier die Begriffe Gas und Flüssigkeit durch den Oberbegriff "Fluid" zusammengefasst sind, enthaltend eine oder mehrere Membranen, deren Durchbiegung bei Druckeinwirkung des Fluids ein Mass für die Grösse des Druckes ist, dadurch gekennzeichnet, daß die Membrane oder die Membranen aus Quarzglas oder quarzähnlichem Glas gefertigt sind und somit keine oder nur sehr geringe elastische Nachwirkungen haben.Pressure measuring device for measuring pressures in gases or liquids, where the terms gas and liquid are summarized here by the generic term "fluid" are, containing one or more membranes, their deflection when pressure is applied of the fluid is a measure of the magnitude of the pressure, characterized in that the membrane or the membranes made of quartz glass or quartz-like glass and thus have little or no elastic after-effects. Anspruch 2 Druckmessgerät nach A1 dadurch gekennzeichnet, daß zwei Membranen gleicher Abmessungen, einen hohlen Innenraum bildend, an ihren Rändern durch Verkittung, Verlötung, Verschmelzung oder andere Mittel zu einer Doppelmembran fest miteinander verbunden sind, wobei die Differenz der Fluiddrucke, die im Aussenraum um die Doppelmembran bzw. in deren Innenraum wirksam sind, messbare Durchbiegungen beider Membranen zur Folge hat, die ein Mass für eben diese Druckdifferenz sind.Claim 2 pressure measuring device according to A1, characterized in that two Membranes of the same dimensions, forming a hollow interior, on their edges by cementing, soldering, fusing or other means to form a double membrane are firmly connected to each other, the difference in the fluid pressures in the outer space measurable deflections are effective around the double membrane or in its interior of both diaphragms, which are a measure of this pressure difference. Anspruch 3 Druckmessgerät nach A1 und A2 dadurch gekennzeichnet, dass der Innenraum der Doppelmembran evakuiert und verschlossen ist, und somit die messbaren Durchbiegungen der Membranen ein Mass für den Absolutdruck des im Raum um die Doppelmembran befindlichen Fluids elna.Claim 3 pressure measuring device according to A1 and A2, characterized in that the interior of the double membrane is evacuated and sealed, and thus the measurable Deflection of the diaphragm is a measure of the absolute pressure in the space around the double diaphragm located fluids elna. Anspruch 4 Druckmessgerät nach A1, A2 und A3 dadurch gekennzeichnet, dass beide Innenflächen der Doppelmembran metallissind und einen elektrischen Kondensator bilden, dessen messbare Kapazität ein Mass für die Durchbiegungen der Membranen und somit für den Absolutdruck im Fluid ist.Claim 4 pressure measuring device according to A1, A2 and A3, characterized in that that both inner surfaces of the double membrane are metallic and an electrical capacitor form, the measurable capacity of which is a measure of the deflection of the membranes and thus for the absolute pressure in the fluid. Anspruch 5 Druckmessgerät nach A1, A2 und A3 dadurch gskennzeichnet,dass eine der beiden Aussenflächen der Doppelmembrane metallisiert ist und mit einer zu dieser Fläche dicht benachbart angeordneten, metallisierten oder metallischen Platte einen elektrischen Kondensator bildet, dessen messbare Kapazität ein Mass für die Durchbiegungen der Membranen und somit für den Absolutdruck im Fluid ist.Claim 5 pressure measuring device according to A1, A2 and A3 characterized in that one of the two outer surfaces of the double membrane is metallized and with one metallized or metallic Plate forms an electrical capacitor, the measurable capacitance of which is a measure for the deflection of the membranes and thus for the absolute pressure in the fluid. Anspruch 6 Druckmessgerät nach A1, A2 und A3 dadurch gekennzeichnet, daas beide Aussenflächen der Doppelmembrane metallisiert sind und mit zu diesen Flächen dicht benachbart angeordneten, metallisierten oder metallischen Platten zwei elektrische Kondensatoren bilden, deren messbare Kapazität ein Mass für die Durchbiegungen der Membranen und somit für den Absolutdruck im Fluid ist.Claim 6 pressure measuring device according to A1, A2 and A3, characterized in that that both outer surfaces of the double membrane are metallized and with them Areas of closely spaced, metallized or metallic plates form two electrical capacitors, the measurable capacitance of which is a measure of the Deflections of the membranes and thus for the absolute pressure in the fluid. L e e r s e i t eL e r s e i t e
DE19702021479 1970-05-02 1970-05-02 Pressure gauge with double quartz glass diaphragm Pending DE2021479A1 (en)

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Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
US3952234A (en) * 1973-12-31 1976-04-20 Donald Jack Birchall Pressure transducers
DE2709945A1 (en) * 1976-03-12 1977-09-15 Kavlico Corp CAPACITIVE PRESSURE TRANSDUCER AND METHOD OF MANUFACTURING IT
FR2346704A1 (en) * 1976-03-29 1977-10-28 Setra Systems Inc CAPACITIVE PRESSURE DETECTOR
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
FR2442439A1 (en) * 1978-11-24 1980-06-20 Vaisala Oy Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
FR2477709A1 (en) * 1980-03-06 1981-09-11 Bosch Gmbh Robert MANOMETRIC CAPSULE
WO1983000385A1 (en) * 1981-07-27 1983-02-03 Rosemount Inc Improved capacitance pressure sensor
US4388668A (en) * 1976-03-12 1983-06-14 Kaylico Corporation Capacitive pressure transducer
DE3505926A1 (en) * 1984-02-21 1985-08-22 Vaisala Oy, Helsinki CAPACITIVE PRESSURE GAUGE FOR ABSOLUTE PRESSURE
DE3523104A1 (en) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode
DE3901492A1 (en) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US5001595A (en) * 1989-04-01 1991-03-19 Gerhard Dittrich Capacitive pressure sensor and method of manufacturing same
DE3943475C2 (en) * 1988-07-22 1991-07-25 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De Capacitive pressure transducer with thermal bonded flexible diaphragm
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US5097712A (en) * 1989-09-28 1992-03-24 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US5111698A (en) * 1989-10-06 1992-05-12 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
DE102009051611A1 (en) * 2009-11-02 2011-05-05 Vega Grieshaber Kg cell
US8201456B2 (en) 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor

Cited By (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
US3952234A (en) * 1973-12-31 1976-04-20 Donald Jack Birchall Pressure transducers
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
DE2709945A1 (en) * 1976-03-12 1977-09-15 Kavlico Corp CAPACITIVE PRESSURE TRANSDUCER AND METHOD OF MANUFACTURING IT
FR2344006A1 (en) * 1976-03-12 1977-10-07 Kavlico Corp CAPACITIVE PRESSURE TRANSDUCER AND METHOD FOR MANUFACTURING SUCH A TRANSDUCER
US4388668A (en) * 1976-03-12 1983-06-14 Kaylico Corporation Capacitive pressure transducer
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
FR2346704A1 (en) * 1976-03-29 1977-10-28 Setra Systems Inc CAPACITIVE PRESSURE DETECTOR
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
FR2442439A1 (en) * 1978-11-24 1980-06-20 Vaisala Oy Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
FR2477709A1 (en) * 1980-03-06 1981-09-11 Bosch Gmbh Robert MANOMETRIC CAPSULE
WO1983000385A1 (en) * 1981-07-27 1983-02-03 Rosemount Inc Improved capacitance pressure sensor
DE3505926A1 (en) * 1984-02-21 1985-08-22 Vaisala Oy, Helsinki CAPACITIVE PRESSURE GAUGE FOR ABSOLUTE PRESSURE
DE3523104A1 (en) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
DE3901492A1 (en) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
US5005421A (en) * 1988-07-22 1991-04-09 Endress U. Hauser Gmbh U. Co. Pressure sensor and method for the manufacture thereof
DE3943475C2 (en) * 1988-07-22 1991-07-25 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De Capacitive pressure transducer with thermal bonded flexible diaphragm
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
EP0373536A3 (en) * 1988-12-12 1991-03-06 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
US5001595A (en) * 1989-04-01 1991-03-19 Gerhard Dittrich Capacitive pressure sensor and method of manufacturing same
US5097712A (en) * 1989-09-28 1992-03-24 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US5111698A (en) * 1989-10-06 1992-05-12 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6082199A (en) 1995-02-28 2000-07-04 Rosemount Inc. Pressure sensor cavity etched with hot POCL3 gas
US6089097A (en) 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
DE102009051611A1 (en) * 2009-11-02 2011-05-05 Vega Grieshaber Kg cell
US8201456B2 (en) 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor
US8468894B2 (en) 2009-11-02 2013-06-25 Vega Grieshaber Kg Measuring cell and a method of use therefor

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