DE29809568U1 - Sondenhalter für Niederstrom-Messungen - Google Patents

Sondenhalter für Niederstrom-Messungen

Info

Publication number
DE29809568U1
DE29809568U1 DE29809568U DE29809568U DE29809568U1 DE 29809568 U1 DE29809568 U1 DE 29809568U1 DE 29809568 U DE29809568 U DE 29809568U DE 29809568 U DE29809568 U DE 29809568U DE 29809568 U1 DE29809568 U1 DE 29809568U1
Authority
DE
Germany
Prior art keywords
low current
probe holder
current measurements
measurements
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29809568U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Beaverton Inc
Original Assignee
Cascade Microtech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cascade Microtech Inc filed Critical Cascade Microtech Inc
Publication of DE29809568U1 publication Critical patent/DE29809568U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/11—End pieces or tapping pieces for wires, supported by the wire and for facilitating electrical connection to some other wire, terminal or conductive member
    • H01R11/18—End pieces terminating in a probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/18—Screening arrangements against electric or magnetic fields, e.g. against earth's field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0023—Measuring currents or voltages from sources with high internal resistance by means of measuring circuits with high input impedance, e.g. OP-amplifiers
DE29809568U 1997-05-28 1998-05-27 Sondenhalter für Niederstrom-Messungen Expired - Lifetime DE29809568U1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/864,287 US6232789B1 (en) 1997-05-28 1997-05-28 Probe holder for low current measurements

Publications (1)

Publication Number Publication Date
DE29809568U1 true DE29809568U1 (de) 1998-10-08

Family

ID=25342927

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29809568U Expired - Lifetime DE29809568U1 (de) 1997-05-28 1998-05-27 Sondenhalter für Niederstrom-Messungen

Country Status (3)

Country Link
US (7) US6232789B1 (de)
JP (1) JP3974257B2 (de)
DE (1) DE29809568U1 (de)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7688097B2 (en) 2000-12-04 2010-03-30 Cascade Microtech, Inc. Wafer probe
WO2010041188A1 (en) * 2008-10-08 2010-04-15 Nxp B.V. Wafer probe
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7750652B2 (en) 2006-06-12 2010-07-06 Cascade Microtech, Inc. Test structure and probe for differential signals
US7759953B2 (en) 2003-12-24 2010-07-20 Cascade Microtech, Inc. Active wafer probe
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7898273B2 (en) 2003-05-23 2011-03-01 Cascade Microtech, Inc. Probe for testing a device under test
US7898281B2 (en) 2005-01-31 2011-03-01 Cascade Mircotech, Inc. Interface for testing semiconductors
CN114152879A (zh) * 2021-12-06 2022-03-08 福建带好路智能科技有限公司 一种兼容型单电芯手动iv测试夹具

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6034533A (en) * 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6489795B1 (en) * 2001-05-18 2002-12-03 Anthony G. Klele High-frequency test probe assembly for microcircuits and associated methods
US6552523B2 (en) * 2001-05-24 2003-04-22 Tektronix, Inc. Combination low capacitance probe tip and socket for a measurement probe
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US6697239B2 (en) 2002-05-31 2004-02-24 John Mezzalingua Associates, Inc. Ground fault circuit interrupter for coaxial drop cable and method of operation
US6724205B1 (en) * 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US20050162177A1 (en) * 2004-01-28 2005-07-28 Chou Arlen L. Multi-signal single beam probe
US7388366B2 (en) * 2006-02-03 2008-06-17 Keithley Instruments, Inc. Test system connection system with triaxial cables
US7432728B2 (en) * 2006-02-27 2008-10-07 Sv Probe Pte Ltd. Blade probe and blade probe card
DE102006054673A1 (de) * 2006-11-17 2008-05-21 Suss Microtec Test Systems Gmbh Sondenaufnahme zur Halterung einer Sonde zur Prüfung von Halbleiterbauelementen, Sondenhalterarm und Prüfvorrichtung
JP4847907B2 (ja) * 2007-03-29 2011-12-28 ルネサスエレクトロニクス株式会社 半導体検査装置
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
WO2012024007A2 (en) 2010-05-21 2012-02-23 University Of Virginia Patent Foundation Micromachined on-wafer probes and related method
US8622752B2 (en) * 2011-04-13 2014-01-07 Teradyne, Inc. Probe-card interposer constructed using hexagonal modules
DE202012002391U1 (de) * 2012-03-08 2013-06-10 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Vorrichtung zur Messung elektronischer Bauteile
US9470753B2 (en) 2012-11-07 2016-10-18 Cascade Microtech, Inc. Systems and methods for testing electronic devices that include low power output drivers
US9435855B2 (en) 2013-11-19 2016-09-06 Teradyne, Inc. Interconnect for transmitting signals between a device and a tester
US9594114B2 (en) 2014-06-26 2017-03-14 Teradyne, Inc. Structure for transmitting signals in an application space between a device under test and test electronics
CN105823912B (zh) * 2016-05-24 2018-10-02 南京协辰电子科技有限公司 阻抗测试探针组件
US9977052B2 (en) 2016-10-04 2018-05-22 Teradyne, Inc. Test fixture
JP2018204963A (ja) * 2017-05-30 2018-12-27 日置電機株式会社 センサおよび測定装置
CN107402318A (zh) * 2017-08-31 2017-11-28 京东方科技集团股份有限公司 探针组件及测试设备
JP6716107B2 (ja) * 2017-10-02 2020-07-01 株式会社精工技研 測定用プローブ
US10677815B2 (en) 2018-06-08 2020-06-09 Teradyne, Inc. Test system having distributed resources
US11579171B1 (en) * 2019-02-15 2023-02-14 Meta Platforms Technologies, Llc Probe card for characterizing processes of submicron semiconductor device fabrication
KR102174427B1 (ko) 2019-04-22 2020-11-05 리노공업주식회사 검사장치
US11363746B2 (en) 2019-09-06 2022-06-14 Teradyne, Inc. EMI shielding for a signal trace
KR102255463B1 (ko) * 2020-05-28 2021-05-24 한국전력공사 전압 계측 프로브 홀더
US11862901B2 (en) 2020-12-15 2024-01-02 Teradyne, Inc. Interposer

Family Cites Families (270)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US491783A (en) 1893-02-14 Bolster-plate
DE288234C (de)
US468629A (en) * 1892-02-09 Stove-pipe and collar fastener
US1337866A (en) 1917-09-27 1920-04-20 Griffiths Ethel Grace System for protecting electric cables
US2142625A (en) 1932-07-06 1939-01-03 Hollandsche Draad En Kabelfab High tension cable
US2376101A (en) 1942-04-01 1945-05-15 Ferris Instr Corp Electrical energy transmission
US2389668A (en) 1943-03-04 1945-11-27 Barnes Drill Co Indexing mechanism for machine tables
US2545258A (en) * 1945-03-22 1951-03-13 Marcel L Cailloux Device for telecontrol of spatial movement
US2762234A (en) 1952-09-08 1956-09-11 Dodd Roy Frank Search-track radar control
US2901696A (en) 1953-11-25 1959-08-25 Ingeniors N Magnetic Ab Fa Arrangement for automatic and continuous measuring of the noise factor of an electric device
US2921276A (en) * 1955-08-30 1960-01-12 Cutler Hammer Inc Microwave circuits
US3193712A (en) 1962-03-21 1965-07-06 Clarence A Harris High voltage cable
US3230299A (en) 1962-07-18 1966-01-18 Gen Cable Corp Electrical cable with chemically bonded rubber layers
US3176091A (en) 1962-11-07 1965-03-30 Helmer C Hanson Controlled multiple switching unit
US3262593A (en) 1963-07-10 1966-07-26 Gen Mills Inc Wall-mounted support structure
GB1031068A (en) 1963-09-23 1966-05-25 George Vincent Grispo Improvements in or relating to motion reduction mechanisms
US3218584A (en) 1964-01-02 1965-11-16 Sanders Associates Inc Strip line connection
US3429040A (en) * 1965-06-18 1969-02-25 Ibm Method of joining a component to a substrate
US3401126A (en) 1965-06-18 1968-09-10 Ibm Method of rendering noble metal conductive composition non-wettable by solder
US3445770A (en) 1965-12-27 1969-05-20 Philco Ford Corp Microelectronic test probe with defect marker access
US3484679A (en) 1966-10-03 1969-12-16 North American Rockwell Electrical apparatus for changing the effective capacitance of a cable
US3573617A (en) 1967-10-27 1971-04-06 Aai Corp Method and apparatus for testing packaged integrated circuits
GB1240866A (en) * 1968-08-22 1971-07-28 Amf Inc Control device
US3609539A (en) 1968-09-28 1971-09-28 Ibm Self-aligning kelvin probe
US3541222A (en) 1969-01-13 1970-11-17 Bunker Ramo Connector screen for interconnecting adjacent surfaces of laminar circuits and method of making
JPS497756B1 (de) 1969-01-24 1974-02-22
NL7003475A (de) * 1969-03-28 1970-09-30
US3648169A (en) * 1969-05-26 1972-03-07 Teledyne Inc Probe and head assembly
US3596228A (en) 1969-05-29 1971-07-27 Ibm Fluid actuated contactor
US3611199A (en) 1969-09-30 1971-10-05 Emerson Electric Co Digital electromagnetic wave phase shifter comprising switchable reflectively terminated power-dividing means
US3686624A (en) 1969-12-15 1972-08-22 Rca Corp Coax line to strip line end launcher
US3654585A (en) 1970-03-11 1972-04-04 Brooks Research And Mfg Inc Coordinate conversion for the testing of printed circuit boards
US3622915A (en) 1970-03-16 1971-11-23 Meca Electronics Inc Electrical coupler
US3740900A (en) 1970-07-01 1973-06-26 Signetics Corp Vacuum chuck assembly for semiconductor manufacture
US3700998A (en) 1970-08-20 1972-10-24 Computer Test Corp Sample and hold circuit with switching isolation
US3714572A (en) 1970-08-21 1973-01-30 Rca Corp Alignment and test fixture apparatus
US4009456A (en) * 1970-10-07 1977-02-22 General Microwave Corporation Variable microwave attenuator
US3714828A (en) * 1970-10-26 1973-02-06 G Durkan Fluidic digital pneumotachometer
US3680037A (en) 1970-11-05 1972-07-25 Tech Wire Prod Inc Electrical interconnector
US3662318A (en) 1970-12-23 1972-05-09 Comp Generale Electricite Transition device between coaxial and microstrip lines
US3710251A (en) 1971-04-07 1973-01-09 Collins Radio Co Microelectric heat exchanger pedestal
US3705379A (en) 1971-05-14 1972-12-05 Amp Inc Connector for interconnection of symmetrical and asymmetrical transmission lines
US3766470A (en) 1971-05-24 1973-10-16 Unit Process Assemblies Apparatus for testing the integrity of a thru-hole plating in circuit board workpieces or the like by measuring the effective thickness thereof
US3725829A (en) 1971-07-14 1973-04-03 Itek Corp Electrical connector
GB1387587A (en) * 1971-07-22 1975-03-19 Plessey Co Ltd Electrical interconnectors and connector assemblies
US3882597A (en) 1971-12-17 1975-05-13 Western Electric Co Method for making a test probe for semiconductor devices
US3810016A (en) 1971-12-17 1974-05-07 Western Electric Co Test probe for semiconductor devices
US3829076A (en) 1972-06-08 1974-08-13 H Sofy Dial index machine
US3858212A (en) 1972-08-29 1974-12-31 L Tompkins Multi-purpose information gathering and distribution system
US3952156A (en) 1972-09-07 1976-04-20 Xerox Corporation Signal processing system
CA970849A (en) 1972-09-18 1975-07-08 Malcolm P. Macmartin Low leakage isolating transformer for electromedical apparatus
US3806801A (en) 1972-12-26 1974-04-23 Ibm Probe contactor having buckling beam probes
US3839672A (en) 1973-02-05 1974-10-01 Belden Corp Method and apparatus for measuring the effectiveness of the shield in a coaxial cable
US3867698A (en) * 1973-03-01 1975-02-18 Western Electric Co Test probe for integrated circuit chips
US3803709A (en) 1973-03-01 1974-04-16 Western Electric Co Test probe for integrated circuit chips
US3833852A (en) 1973-08-16 1974-09-03 Owens Illinois Inc Inspection head mounting apparatus
US3849728A (en) 1973-08-21 1974-11-19 Wentworth Labor Inc Fixed point probe card and an assembly and repair fixture therefor
US3930809A (en) * 1973-08-21 1976-01-06 Wentworth Laboratories, Inc. Assembly fixture for fixed point probe card
US4001685A (en) 1974-03-04 1977-01-04 Electroglas, Inc. Micro-circuit test probe
US3936743A (en) * 1974-03-05 1976-02-03 Electroglas, Inc. High speed precision chuck assembly
US3971610A (en) 1974-05-10 1976-07-27 Technical Wire Products, Inc. Conductive elastomeric contacts and connectors
US3976959A (en) 1974-07-22 1976-08-24 Gaspari Russell A Planar balun
US3970934A (en) 1974-08-12 1976-07-20 Akin Aksu Printed circuit board testing means
US4038599A (en) 1974-12-30 1977-07-26 International Business Machines Corporation High density wafer contacting and test system
US4123706A (en) 1975-03-03 1978-10-31 Electroglas, Inc. Probe construction
US4038894A (en) 1975-07-18 1977-08-02 Springfield Tool And Die, Inc. Piercing apparatus
SE407115B (sv) 1975-10-06 1979-03-12 Kabi Ab Forfarande och metelektroder for studium av enzymatiska och andra biokemiska reaktioner
US4035723A (en) 1975-10-16 1977-07-12 Xynetics, Inc. Probe arm
US3992073A (en) 1975-11-24 1976-11-16 Technical Wire Products, Inc. Multi-conductor probe
US4116523A (en) * 1976-01-23 1978-09-26 James M. Foster High frequency probe
US4049252A (en) 1976-02-04 1977-09-20 Bell Theodore F Index table
US4008900A (en) * 1976-03-15 1977-02-22 John Freedom Indexing chuck
US4063195A (en) 1976-03-26 1977-12-13 Hughes Aircraft Company Parametric frequency converter
US4099120A (en) 1976-04-19 1978-07-04 Akin Aksu Probe head for testing printed circuit boards
US4027935A (en) 1976-06-21 1977-06-07 International Business Machines Corporation Contact for an electrical contactor assembly
US4074201A (en) * 1976-07-26 1978-02-14 Gte Sylvania Incorporated Signal analyzer with noise estimation and signal to noise readout
US4115735A (en) 1976-10-14 1978-09-19 Faultfinders, Inc. Test fixture employing plural platens for advancing some or all of the probes of the test fixture
US4093988A (en) 1976-11-08 1978-06-06 General Electric Company High speed frequency response measurement
US4124787A (en) 1977-03-11 1978-11-07 Atari, Inc. Joystick controller mechanism operating one or plural switches sequentially or simultaneously
US4151465A (en) 1977-05-16 1979-04-24 Lenz Seymour S Variable flexure test probe for microelectronic circuits
US4161692A (en) 1977-07-18 1979-07-17 Cerprobe Corporation Probe device for integrated circuit wafers
US4312117A (en) * 1977-09-01 1982-01-26 Raytheon Company Integrated test and assembly device
US4184729A (en) * 1977-10-13 1980-01-22 Bunker Ramo Corporation Flexible connector cable
US4135131A (en) 1977-10-14 1979-01-16 The United States Of America As Represented By The Secretary Of The Army Microwave time delay spectroscopic methods and apparatus for remote interrogation of biological targets
US4184133A (en) * 1977-11-28 1980-01-15 Rockwell International Corporation Assembly of microwave integrated circuits having a structurally continuous ground plane
US4216467A (en) 1977-12-22 1980-08-05 Westinghouse Electric Corp. Hand controller
US4232398A (en) 1978-02-09 1980-11-04 Motorola, Inc. Radio receiver alignment indicator
US4177421A (en) 1978-02-27 1979-12-04 Xerox Corporation Capacitive transducer
WO1980000101A1 (en) 1978-06-21 1980-01-24 Cerprobe Corp Probe and interface device for integrated circuit wafers
US4302146A (en) 1978-08-23 1981-11-24 Westinghouse Electric Corp. Probe positioner
US4225819A (en) 1978-10-12 1980-09-30 Bell Telephone Laboratories, Incorporated Circuit board contact contamination probe
US4306235A (en) 1978-11-02 1981-12-15 Cbc Corporation Multiple frequency microwave antenna
DE2849119A1 (de) 1978-11-13 1980-05-14 Siemens Ag Verfahren und schaltungsanordnung zur daempfungsmessung, insbesondere zur ermittlung der daempfungs- und/oder gruppenlaufzeitverzerrung eines messobjektes
US4251772A (en) * 1978-12-26 1981-02-17 Pacific Western Systems Inc. Probe head for an automatic semiconductive wafer prober
US4280112A (en) 1979-02-21 1981-07-21 Eisenhart Robert L Electrical coupler
US4287473A (en) 1979-05-25 1981-09-01 The United States Of America As Represented By The United States Department Of Energy Nondestructive method for detecting defects in photodetector and solar cell devices
FI58719C (fi) * 1979-06-01 1981-04-10 Instrumentarium Oy Diagnostiseringsanordning foer broestkancer
US4277741A (en) 1979-06-25 1981-07-07 General Motors Corporation Microwave acoustic spectrometer
US4327180A (en) 1979-09-14 1982-04-27 Board Of Governors, Wayne State Univ. Method and apparatus for electromagnetic radiation of biological material
US4284033A (en) 1979-10-31 1981-08-18 Rca Corporation Means to orbit and rotate target wafers supported on planet member
US4330783A (en) 1979-11-23 1982-05-18 Toia Michael J Coaxially fed dipole antenna
US4284682A (en) 1980-04-30 1981-08-18 Nasa Heat sealable, flame and abrasion resistant coated fabric
US4340860A (en) 1980-05-19 1982-07-20 Trigon Integrated circuit carrier package test probe
DE3032815A1 (de) 1980-08-30 1982-04-15 Jute- und Leinenindustrie H.R. Rathgeber KG, 7922 Herbrechtingen Gurtband und verfahren zu seiner herstellung
DE3267983D1 (en) * 1981-04-25 1986-01-30 Toshiba Kk Apparatus for measuring noise factor and available gain
US4425395A (en) * 1981-04-30 1984-01-10 Fujikura Rubber Works, Ltd. Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production
JPS5943091B2 (ja) * 1981-06-03 1984-10-19 義栄 長谷川 固定プロ−ブ・ボ−ド
US4888550A (en) 1981-09-14 1989-12-19 Texas Instruments Incorporated Intelligent multiprobe tip
US4480223A (en) 1981-11-25 1984-10-30 Seiichiro Aigo Unitary probe assembly
US4567436A (en) * 1982-01-21 1986-01-28 Linda Koch Magnetic thickness gauge with adjustable probe
US4502028A (en) * 1982-06-15 1985-02-26 Raytheon Company Programmable two-port microwave network
GB2133649A (en) * 1982-12-23 1984-07-25 Philips Electronic Associated Microwave oscillator
JPS60136006U (ja) * 1984-02-20 1985-09-10 株式会社　潤工社 フラツトケ−ブル
US4646005A (en) * 1984-03-16 1987-02-24 Motorola, Inc. Signal probe
US4722846A (en) * 1984-04-18 1988-02-02 Kikkoman Corporation Novel variant and process for producing light colored soy sauce using such variant
US4636722A (en) * 1984-05-21 1987-01-13 Probe-Rite, Inc. High density probe-head with isolated and shielded transmission lines
DE3428087A1 (de) * 1984-07-30 1986-01-30 Kraftwerk Union AG, 4330 Mülheim Konzentrisches dreileiterkabel
JPS61164338A (ja) * 1985-01-17 1986-07-25 Riken Denshi Kk 多重演算型ｄ／ａ変換器
DE3531893A1 (de) * 1985-09-06 1987-03-19 Siemens Ag Verfahren zur bestimmung der verteilung der dielektrizitaetskonstanten in einem untersuchungskoerper sowie messanordnung zur durchfuehrung des verfahrens
JPH0326643Y2 (de) * 1985-09-30 1991-06-10
US5917707A (en) * 1993-11-16 1999-06-29 Formfactor, Inc. Flexible contact structure with an electrically conductive shell
US5829128A (en) * 1993-11-16 1998-11-03 Formfactor, Inc. Method of mounting resilient contact structures to semiconductor devices
US4727319A (en) * 1985-12-24 1988-02-23 Hughes Aircraft Company Apparatus for on-wafer testing of electrical circuits
DE3785681T2 (de) * 1986-01-24 1993-08-12 Fuji Photo Film Co Ltd Blattfilmkassette und vorrichtung zum beladen von blattfilmen.
US4783625A (en) 1986-08-21 1988-11-08 Tektronix, Inc. Wideband high impedance card mountable probe
JP2609232B2 (ja) * 1986-09-04 1997-05-14 日本ヒューレット・パッカード株式会社 フローテイング駆動回路
US4904933A (en) * 1986-09-08 1990-02-27 Tektronix, Inc. Integrated circuit probe station
FR2606887B1 (fr) * 1986-11-18 1989-01-13 Thomson Semiconducteurs Circuit de mesure des caracteristiques dynamiques d'un boitier pour circuit integre rapide, et procede de mesure de ces caracteristiques dynamiques
US5180976A (en) * 1987-04-17 1993-01-19 Everett/Charles Contact Products, Inc. Integrated circuit carrier having built-in circuit verification
US4894612A (en) 1987-08-13 1990-01-16 Hypres, Incorporated Soft probe for providing high speed on-wafer connections to a circuit
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
US4791363A (en) 1987-09-28 1988-12-13 Logan John K Ceramic microstrip probe blade
JP2554669Y2 (ja) * 1987-11-10 1997-11-17 博 寺町 回転位置決め装置
US4891584A (en) * 1988-03-21 1990-01-02 Semitest, Inc. Apparatus for making surface photovoltage measurements of a semiconductor
JPH01133701U (de) * 1988-03-07 1989-09-12
US4988062A (en) * 1988-03-10 1991-01-29 London Robert A Apparatus, system and method for organizing and maintaining a plurality of medical catheters and the like
US4983910A (en) * 1988-05-20 1991-01-08 Stanford University Millimeter-wave active probe
US4987100A (en) * 1988-05-26 1991-01-22 International Business Machines Corporation Flexible carrier for an electronic device
US4991290A (en) * 1988-07-21 1991-02-12 Microelectronics And Computer Technology Flexible electrical interconnect and method of making
US4893914A (en) * 1988-10-12 1990-01-16 The Micromanipulator Company, Inc. Test station
DD288234A5 (de) 1989-09-27 1991-03-21 Ingenieurhochhschule Mittweida,Direkt. Forsch. U. Ib,De Vorrichtung zum geschirmten wafertest
US5089774A (en) * 1989-12-26 1992-02-18 Sharp Kabushiki Kaisha Apparatus and a method for checking a semiconductor
JPH03209737A (ja) * 1990-01-11 1991-09-12 Tokyo Electron Ltd プローブ装置
DE69130205T2 (de) * 1990-12-25 1999-03-25 Ngk Insulators Ltd Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben
US5487999A (en) * 1991-06-04 1996-01-30 Micron Technology, Inc. Method for fabricating a penetration limited contact having a rough textured surface
US5177438A (en) * 1991-08-02 1993-01-05 Motorola, Inc. Low resistance probe for semiconductor
US5334931A (en) 1991-11-12 1994-08-02 International Business Machines Corporation Molded test probe assembly
US5180977A (en) * 1991-12-02 1993-01-19 Hoya Corporation Usa Membrane probe contact bump compliancy system
US5389885A (en) * 1992-01-27 1995-02-14 Everett Charles Technologies, Inc. Expandable diaphragm test modules and connectors
US6380751B2 (en) * 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5371654A (en) * 1992-10-19 1994-12-06 International Business Machines Corporation Three dimensional high performance interconnection package
US5383787A (en) * 1993-04-27 1995-01-24 Aptix Corporation Integrated circuit package with direct access to internal signals
JPH0714898A (ja) * 1993-06-23 1995-01-17 Mitsubishi Electric Corp 半導体ウエハの試験解析装置および解析方法
JP3346838B2 (ja) * 1993-06-29 2002-11-18 有限会社創造庵 回転運動機構
US5594358A (en) * 1993-09-02 1997-01-14 Matsushita Electric Industrial Co., Ltd. Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line
US5326428A (en) * 1993-09-03 1994-07-05 Micron Semiconductor, Inc. Method for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability
DE9313420U1 (de) 1993-09-06 1993-10-28 Ge Elektronik Gmbh Magdeburg Tastkopf
US6029344A (en) * 1993-11-16 2000-02-29 Formfactor, Inc. Composite interconnection element for microelectronic components, and method of making same
US6023103A (en) * 1994-11-15 2000-02-08 Formfactor, Inc. Chip-scale carrier for semiconductor devices including mounted spring contacts
US6184053B1 (en) * 1993-11-16 2001-02-06 Formfactor, Inc. Method of making microelectronic spring contact elements
US6525555B1 (en) * 1993-11-16 2003-02-25 Formfactor, Inc. Wafer-level burn-in and test
US6836962B2 (en) * 1993-11-16 2005-01-04 Formfactor, Inc. Method and apparatus for shaping spring elements
US7064566B2 (en) * 1993-11-16 2006-06-20 Formfactor, Inc. Probe card assembly and kit
US5601740A (en) * 1993-11-16 1997-02-11 Formfactor, Inc. Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires
US20020011859A1 (en) * 1993-12-23 2002-01-31 Kenneth R. Smith Method for forming conductive bumps for the purpose of contrructing a fine pitch test device
US5715819A (en) * 1994-05-26 1998-02-10 The Carolinas Heart Institute Microwave tomographic spectroscopy system and method
US5704355A (en) * 1994-07-01 1998-01-06 Bridges; Jack E. Non-invasive system for breast cancer detection
US5481196A (en) * 1994-11-08 1996-01-02 Nebraska Electronics, Inc. Process and apparatus for microwave diagnostics and therapy
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5610529A (en) 1995-04-28 1997-03-11 Cascade Microtech, Inc. Probe station having conductive coating added to thermal chuck insulator
US5720098A (en) * 1995-05-12 1998-02-24 Probe Technology Method for making a probe preserving a uniform stress distribution under deflection
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
US6685817B1 (en) * 1995-05-26 2004-02-03 Formfactor, Inc. Method and apparatus for controlling plating over a face of a substrate
US6002109A (en) * 1995-07-10 1999-12-14 Mattson Technology, Inc. System and method for thermal processing of a semiconductor substrate
JP3838381B2 (ja) * 1995-11-22 2006-10-25 株式会社アドバンテスト プローブカード
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US5869974A (en) * 1996-04-01 1999-02-09 Micron Technology, Inc. Micromachined probe card having compliant contact members for testing semiconductor wafers
DE19618717C1 (de) 1996-05-09 1998-01-15 Multitest Elektronische Syst Elektrische Verbindungseinrichtung
KR100471341B1 (ko) * 1996-05-23 2005-07-21 제네시스 테크놀로지 가부시키가이샤 콘택트프로브및그것을구비한프로브장치
US6181149B1 (en) * 1996-09-26 2001-01-30 Delaware Capital Formation, Inc. Grid array package test contactor
TW358163B (en) * 1996-12-25 1999-05-11 Advantest Corp IC testing method and apparatus
US6690185B1 (en) * 1997-01-15 2004-02-10 Formfactor, Inc. Large contactor with multiple, aligned contactor units
US6520778B1 (en) * 1997-02-18 2003-02-18 Formfactor, Inc. Microelectronic contact structures, and methods of making same
JPH10335395A (ja) * 1997-05-28 1998-12-18 Advantest Corp プローブカードの接触位置検出方法
US6013586A (en) * 1997-10-09 2000-01-11 Dimension Polyant Sailcloth, Inc. Tent material product and method of making tent material product
US6287776B1 (en) * 1998-02-02 2001-09-11 Signature Bioscience, Inc. Method for detecting and classifying nucleic acid hybridization
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
US6181144B1 (en) * 1998-02-25 2001-01-30 Micron Technology, Inc. Semiconductor probe card having resistance measuring circuitry and method fabrication
JP3553791B2 (ja) * 1998-04-03 2004-08-11 株式会社ルネサステクノロジ 接続装置およびその製造方法、検査装置並びに半導体素子の製造方法
US6720501B1 (en) * 1998-04-14 2004-04-13 Formfactor, Inc. PC board having clustered blind vias
US6181416B1 (en) * 1998-04-14 2001-01-30 Optometrix, Inc. Schlieren method for imaging semiconductor device properties
TW440699B (en) * 1998-06-09 2001-06-16 Advantest Corp Test apparatus for electronic parts
GB2342148B (en) * 1998-10-01 2000-12-20 Nippon Kokan Kk Method and apparatus for preventing snow from melting and for packing snow in artificial ski facility
US6175228B1 (en) * 1998-10-30 2001-01-16 Agilent Technologies Electronic probe for measuring high impedance tri-state logic circuits
US6169410B1 (en) * 1998-11-09 2001-01-02 Anritsu Company Wafer probe with built in RF frequency conversion module
US6672875B1 (en) * 1998-12-02 2004-01-06 Formfactor, Inc. Spring interconnect structures
AU5586000A (en) * 1999-02-22 2000-09-14 Paul Bryant Programmable active microwave ultrafine resonance spectrometer (pamurs) method and systems
US6218910B1 (en) * 1999-02-25 2001-04-17 Formfactor, Inc. High bandwidth passive integrated circuit tester probe card assembly
US6448865B1 (en) * 1999-02-25 2002-09-10 Formfactor, Inc. Integrated circuit interconnect system
US6539531B2 (en) * 1999-02-25 2003-03-25 Formfactor, Inc. Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes
US6499121B1 (en) * 1999-03-01 2002-12-24 Formfactor, Inc. Distributed interface for parallel testing of multiple devices using a single tester channel
US6400166B2 (en) * 1999-04-15 2002-06-04 International Business Machines Corporation Micro probe and method of fabricating same
US6340895B1 (en) * 1999-07-14 2002-01-22 Aehr Test Systems, Inc. Wafer-level burn-in and test cartridge
US7013221B1 (en) * 1999-07-16 2006-03-14 Rosetta Inpharmatics Llc Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays
US7009415B2 (en) 1999-10-06 2006-03-07 Tokyo Electron Limited Probing method and probing apparatus
JP2001174482A (ja) * 1999-12-21 2001-06-29 Toshiba Corp 電気的特性評価用接触針、プローブ構造体、プローブカード、および電気的特性評価用接触針の製造方法
US6339338B1 (en) * 2000-01-18 2002-01-15 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US6509751B1 (en) * 2000-03-17 2003-01-21 Formfactor, Inc. Planarizer for a semiconductor contactor
US6677744B1 (en) * 2000-04-13 2004-01-13 Formfactor, Inc. System for measuring signal path resistance for an integrated circuit tester interconnect structure
US6379130B1 (en) * 2000-06-09 2002-04-30 Tecumseh Products Company Motor cover retention
JP2002022775A (ja) * 2000-07-05 2002-01-23 Ando Electric Co Ltd 電気光学プローブおよび磁気光学プローブ
US6731128B2 (en) * 2000-07-13 2004-05-04 International Business Machines Corporation TFI probe I/O wrap test method
JP2002039091A (ja) * 2000-07-21 2002-02-06 Minebea Co Ltd 送風機
US6970005B2 (en) * 2000-08-24 2005-11-29 Texas Instruments Incorporated Multiple-chip probe and universal tester contact assemblage
GB0021975D0 (en) * 2000-09-07 2000-10-25 Optomed As Filter optic probes
CA2428205A1 (en) * 2000-11-06 2002-05-10 Avantium International B.V. Screening for optimal yield in the crystallisation of multicomponent systems
WO2002052285A1 (en) * 2000-12-22 2002-07-04 Tokyo Electron Limited Probe cartridge assembly and multi-probe assembly
GB2371618B (en) * 2001-01-30 2004-11-17 Teraprobe Ltd A probe, apparatus and method for examining a sample
US7006046B2 (en) * 2001-02-15 2006-02-28 Integral Technologies, Inc. Low cost electronic probe devices manufactured from conductive loaded resin-based materials
JP2002261667A (ja) * 2001-02-28 2002-09-13 Pioneer Electronic Corp 受信装置
US6512482B1 (en) * 2001-03-20 2003-01-28 Xilinx, Inc. Method and apparatus using a semiconductor die integrated antenna structure
US6856150B2 (en) * 2001-04-10 2005-02-15 Formfactor, Inc. Probe card with coplanar daughter card
JP3979793B2 (ja) * 2001-05-29 2007-09-19 日立ソフトウエアエンジニアリング株式会社 プローブ設計装置及びプローブ設計方法
US20040021475A1 (en) * 2001-06-06 2004-02-05 Atsushi Ito Wafer prober
CA2353024C (en) * 2001-07-12 2005-12-06 Ibm Canada Limited-Ibm Canada Limitee Anti-vibration and anti-tilt microscope stand
IL144806A (en) * 2001-08-08 2005-11-20 Nova Measuring Instr Ltd Method and apparatus for process control in semiconductor manufacturing
US6678876B2 (en) * 2001-08-24 2004-01-13 Formfactor, Inc. Process and apparatus for finding paths through a routing space
DE10294378D2 (de) * 2001-09-24 2004-08-26 Jpk Instruments Ag Verfahren und Vorrichtung zum Messen einer Probe mit Hilfe eines Rastersondenmikroskops
US7071714B2 (en) 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
DE10297428T5 (de) * 2001-11-13 2005-01-27 Advantest Corp. Wellenlängerdispersions-Abtastsystem
US6822463B1 (en) * 2001-12-21 2004-11-23 Lecroy Corporation Active differential test probe with a transmission line input structure
US7020363B2 (en) * 2001-12-28 2006-03-28 Intel Corporation Optical probe for wafer testing
US7015707B2 (en) * 2002-03-20 2006-03-21 Gabe Cherian Micro probe
US6828767B2 (en) * 2002-03-20 2004-12-07 Santronics, Inc. Hand-held voltage detection probe
US6806697B2 (en) * 2002-04-05 2004-10-19 Agilent Technologies, Inc. Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe
DE10220343B4 (de) * 2002-05-07 2007-04-05 Atg Test Systems Gmbh & Co. Kg Reicholzheim Vorrichtung und Verfahren zum Prüfen von Leiterplatten und Prüfsonde
US7343185B2 (en) * 2002-06-21 2008-03-11 Nir Diagnostics Inc. Measurement of body compounds
KR100470970B1 (ko) * 2002-07-05 2005-03-10 삼성전자주식회사 반도체 검사장치용 프로브카드의 니들고정장치 및 방법
US6881072B2 (en) * 2002-10-01 2005-04-19 International Business Machines Corporation Membrane probe with anchored elements
US7026832B2 (en) * 2002-10-28 2006-04-11 Dainippon Screen Mfg. Co., Ltd. Probe mark reading device and probe mark reading method
JP2004199796A (ja) * 2002-12-19 2004-07-15 Shinka Jitsugyo Kk 薄膜磁気ヘッドの特性測定用プローブピンの接続方法及び薄膜磁気ヘッドの特性測定方法
JP2004265942A (ja) * 2003-02-20 2004-09-24 Okutekku:Kk プローブピンのゼロ点検出方法及びプローブ装置
US6987483B2 (en) * 2003-02-21 2006-01-17 Kyocera Wireless Corp. Effectively balanced dipole microstrip antenna
US6838885B2 (en) * 2003-03-05 2005-01-04 Murata Manufacturing Co., Ltd. Method of correcting measurement error and electronic component characteristic measurement apparatus
US6902941B2 (en) * 2003-03-11 2005-06-07 Taiwan Semiconductor Manufacturing Co., Ltd. Probing of device elements
US7022976B1 (en) 2003-04-02 2006-04-04 Advanced Micro Devices, Inc. Dynamically adjustable probe tips
US7002133B2 (en) * 2003-04-11 2006-02-21 Hewlett-Packard Development Company, L.P. Detecting one or more photons from their interactions with probe photons in a matter system
US7023225B2 (en) * 2003-04-16 2006-04-04 Lsi Logic Corporation Wafer-mounted micro-probing platform
TWI220163B (en) * 2003-04-24 2004-08-11 Ind Tech Res Inst Manufacturing method of high-conductivity nanometer thin-film probe card
US6900652B2 (en) 2003-06-13 2005-05-31 Solid State Measurements, Inc. Flexible membrane probe and method of use thereof
KR100523139B1 (ko) * 2003-06-23 2005-10-20 주식회사 하이닉스반도체 웨이퍼 테스트시 사용되는 프로빙 패드의 수를 감소시키기위한 반도체 장치 및 그의 테스팅 방법
US6956388B2 (en) * 2003-06-24 2005-10-18 Agilent Technologies, Inc. Multiple two axis floating probe assembly using split probe block
US7015708B2 (en) * 2003-07-11 2006-03-21 Gore Enterprise Holdings, Inc. Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts
US7068049B2 (en) * 2003-08-05 2006-06-27 Agilent Technologies, Inc. Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration
US7015703B2 (en) * 2003-08-12 2006-03-21 Scientific Systems Research Limited Radio frequency Langmuir probe
US7025628B2 (en) 2003-08-13 2006-04-11 Agilent Technologies, Inc. Electronic probe extender
JP3812559B2 (ja) * 2003-09-18 2006-08-23 Ｔｄｋ株式会社 渦電流プローブ
US7034553B2 (en) * 2003-12-05 2006-04-25 Prodont, Inc. Direct resistance measurement corrosion probe
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US7009188B2 (en) * 2004-05-04 2006-03-07 Micron Technology, Inc. Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
US7015709B2 (en) * 2004-05-12 2006-03-21 Delphi Technologies, Inc. Ultra-broadband differential voltage probes
US7023231B2 (en) 2004-05-14 2006-04-04 Solid State Measurements, Inc. Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof
US7019541B2 (en) * 2004-05-14 2006-03-28 Crown Products, Inc. Electric conductivity water probe
US7015690B2 (en) * 2004-05-27 2006-03-21 General Electric Company Omnidirectional eddy current probe and inspection system
US7148716B2 (en) * 2004-06-10 2006-12-12 Texas Instruments Incorporated System and method for the probing of a wafer
TWI252925B (en) * 2004-07-05 2006-04-11 Yulim Hitech Inc Probe card for testing a semiconductor device
US7001785B1 (en) * 2004-12-06 2006-02-21 Veeco Instruments, Inc. Capacitance probe for thin dielectric film characterization
JP2006237378A (ja) * 2005-02-25 2006-09-07 Elpida Memory Inc ウェハプローバおよびウェハ検査方法
US7005879B1 (en) * 2005-03-01 2006-02-28 International Business Machines Corporation Device for probe card power bus noise reduction
JP4611788B2 (ja) * 2005-04-12 2011-01-12 サンテック株式会社 光偏向プローブ及び光偏向プローブ装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7688097B2 (en) 2000-12-04 2010-03-30 Cascade Microtech, Inc. Wafer probe
US7761983B2 (en) 2000-12-04 2010-07-27 Cascade Microtech, Inc. Method of assembling a wafer probe
US7898273B2 (en) 2003-05-23 2011-03-01 Cascade Microtech, Inc. Probe for testing a device under test
US7759953B2 (en) 2003-12-24 2010-07-20 Cascade Microtech, Inc. Active wafer probe
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7940069B2 (en) 2005-01-31 2011-05-10 Cascade Microtech, Inc. System for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7898281B2 (en) 2005-01-31 2011-03-01 Cascade Mircotech, Inc. Interface for testing semiconductors
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7750652B2 (en) 2006-06-12 2010-07-06 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
WO2010041188A1 (en) * 2008-10-08 2010-04-15 Nxp B.V. Wafer probe
CN114152879A (zh) * 2021-12-06 2022-03-08 福建带好路智能科技有限公司 一种兼容型单电芯手动iv测试夹具

Also Published As

Publication number Publication date
US6384615B2 (en) 2002-05-07
US6232789B1 (en) 2001-05-15
US20030034789A1 (en) 2003-02-20
US6850082B2 (en) 2005-02-01
US20010009378A1 (en) 2001-07-26
US7221174B2 (en) 2007-05-22
US20060208748A1 (en) 2006-09-21
US20070194803A1 (en) 2007-08-23
JP3974257B2 (ja) 2007-09-12
US6496024B2 (en) 2002-12-17
US7057407B2 (en) 2006-06-06
US7504842B2 (en) 2009-03-17
US20020079911A1 (en) 2002-06-27
US20050035777A1 (en) 2005-02-17
JPH10339743A (ja) 1998-12-22

Similar Documents

Publication Publication Date Title
DE29809568U1 (de) Sondenhalter für Niederstrom-Messungen
DE29810205U1 (de) Niederstrom-Pogo-Sondenkarte
DE69928474D1 (de) Optiche sonde für nahfeld-messungen
DE69911326D1 (de) Sendeeinheit für Messinstrument
DE69820382D1 (de) Prüfgerät für Detektoren
DE69938360D1 (de) Armgreiforgan für probehalteroboter
DE59509461D1 (de) Tastkopf für Koordinatenmessgeräte
DE29809191U1 (de) Teststreifen-Meßsystem
DE29707307U1 (de) Aufsatzgerät für elektrische Handbohrmaschinen zur Dichtemessung
DK1071946T3 (da) Elektrokemisk måling
DE29608072U1 (de) Ventilator-Stifteaufnahme-Kombination für eine integrierte Schaltung
DE29814997U1 (de) Teststreifenmeßsystem
DE69839959D1 (de) Vorspannungsstrommessschaltung für Mikrofon
DE69818241D1 (de) Vorrichtung für longitudinale Messungen
DE59912779D1 (de) Auswertekonzept für Abstandsmessverfahren
DE59713051D1 (de) Probe
GB9924047D0 (en) Instrument for measuring alternating current
DE59712951D1 (de) Dichtelement für messfühler
DE29817986U1 (de) Meßsondenhalterung
DE69919457D1 (de) Messtaster
DE69942417D1 (de) Verbesserte bürstenhalterung für propellerenteiser
DE69809184D1 (de) Kontaktmessfühler
ATE400820T1 (de) Messanordnung für elektrizitätszähler
DE29705433U1 (de) Einstabmeßkette für elektrochemische Messungen
DE69823414D1 (de) Röhrensystem für elektrische Messungen

Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19981119

R163 Identified publications notified

Effective date: 19990208

R150 Utility model maintained after payment of first maintenance fee after three years

Effective date: 20010706

R151 Utility model maintained after payment of second maintenance fee after six years

Effective date: 20040817

R152 Utility model maintained after payment of third maintenance fee after eight years

Effective date: 20060726

R071 Expiry of right