DE3069388D1 - Vibrating beam force transducer - Google Patents
Vibrating beam force transducerInfo
- Publication number
- DE3069388D1 DE3069388D1 DE8080107998T DE3069388T DE3069388D1 DE 3069388 D1 DE3069388 D1 DE 3069388D1 DE 8080107998 T DE8080107998 T DE 8080107998T DE 3069388 T DE3069388 T DE 3069388T DE 3069388 D1 DE3069388 D1 DE 3069388D1
- Authority
- DE
- Germany
- Prior art keywords
- tines
- mounting pads
- fork
- ortuning
- masses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
- G01L1/106—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0013—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a string
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Gyroscopes (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Vibration Prevention Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/103,918 US4321500A (en) | 1979-12-17 | 1979-12-17 | Longitudinal isolation system for flexurally vibrating force transducers |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3069388D1 true DE3069388D1 (en) | 1984-11-08 |
Family
ID=22297699
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8080107998T Expired DE3069388D1 (en) | 1979-12-17 | 1980-12-17 | Vibrating beam force transducer |
Country Status (6)
Country | Link |
---|---|
US (1) | US4321500A (de) |
EP (1) | EP0030741B1 (de) |
JP (1) | JPS56132534A (de) |
AT (1) | ATE9738T1 (de) |
CA (1) | CA1141983A (de) |
DE (1) | DE3069388D1 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6333139Y2 (de) * | 1981-05-29 | 1988-09-05 | ||
US4446394A (en) * | 1981-09-14 | 1984-05-01 | The Singer Company | Linearizing mechanism for a vibrating beam force transducer |
US4445065A (en) * | 1981-09-14 | 1984-04-24 | The Singer Company | Non-prismal beam resonator |
US4526247A (en) * | 1983-01-18 | 1985-07-02 | Ohaus Scale Corporation | Weighing scale transducer |
WO1984003998A1 (en) * | 1983-04-01 | 1984-10-11 | Nise Errol Peter Eer | Doubling resonating beam force transducer with reduced longitudinal pumping |
US4531073A (en) * | 1983-05-31 | 1985-07-23 | Ohaus Scale Corporation | Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity |
FR2574209B1 (fr) * | 1984-12-04 | 1987-01-30 | Onera (Off Nat Aerospatiale) | Resonateur a lame vibrante |
JPS623630A (ja) * | 1985-06-29 | 1987-01-09 | Teraoka Seiko Co Ltd | 荷重検出用振動子 |
US4706259A (en) * | 1985-12-30 | 1987-11-10 | Sundstrand Data Control, Inc. | Mounting and isolation system for tuning fork temperature sensor |
US4656383A (en) * | 1986-02-14 | 1987-04-07 | The Singer Company-Kearfott Division | Vibrating beam force transducer with single isolator spring |
US4658174A (en) * | 1986-03-20 | 1987-04-14 | The Singer Company-Kearfott Division | Vibrating beam force transducer with angled isolator springs |
US4658175A (en) * | 1986-03-26 | 1987-04-14 | The Singer Company-Kearfott Division | Vibrating beam force transducer with A-frame beam root and frequency adjusting means |
GB8610253D0 (en) * | 1986-04-26 | 1986-05-29 | Stc Plc | Resonator device |
US4773493A (en) * | 1986-07-01 | 1988-09-27 | Sensor International | Vibration type measuring apparatus |
IL80550A0 (en) * | 1986-11-07 | 1987-02-27 | Israel Aircraft Ind Ltd | Resonant element force transducer for acceleration sensing |
US4743790A (en) * | 1987-04-14 | 1988-05-10 | Crystal Gage Inc. | Force sensing vibrating beam resonator |
US4856350A (en) * | 1987-10-22 | 1989-08-15 | Hanson Richard A | Force sensing device and method |
US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
US4919500A (en) * | 1988-09-09 | 1990-04-24 | General Scanning, Inc. | Torsion bar scanner with damping |
US4980598A (en) * | 1989-12-21 | 1990-12-25 | Lucas Schaevitz Inc. | Monolithic resonator for a vibrating beam accelerometer |
US5144184A (en) * | 1990-01-26 | 1992-09-01 | The Charles Stark Draper Laboratory, Inc. | Micromechanical device with a trimmable resonant frequency structure and method of trimming same |
US5473945A (en) * | 1990-02-14 | 1995-12-12 | The Charles Stark Draper Laboratory, Inc. | Micromechanical angular accelerometer with auxiliary linear accelerometer |
US5039170A (en) * | 1990-06-20 | 1991-08-13 | Reno Salvage Co. | Resonant beam suspension pads |
US5408119A (en) * | 1990-10-17 | 1995-04-18 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency |
US5605598A (en) * | 1990-10-17 | 1997-02-25 | The Charles Stark Draper Laboratory Inc. | Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency |
SE468656B (sv) * | 1990-10-19 | 1993-02-22 | Rydborn S A O | Anordning foer omvandling av mekanisk paaverkan till en elektrisk signal |
US5129983A (en) * | 1991-02-25 | 1992-07-14 | The Charles Stark Draper Laboratory, Inc. | Method of fabrication of large area micromechanical devices |
US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
US5331852A (en) * | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
US5635639A (en) * | 1991-09-11 | 1997-06-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical tuning fork angular rate sensor |
WO1993010428A1 (en) * | 1991-11-12 | 1993-05-27 | Masstech Scientific Pty. Ltd. | Force or load sensors |
US5408877A (en) * | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
US5336854A (en) * | 1992-04-03 | 1994-08-09 | Weigh-Tronix, Inc. | Electronic force sensing load cell |
US5391844A (en) * | 1992-04-03 | 1995-02-21 | Weigh-Tronix Inc | Load cell |
US5313023A (en) * | 1992-04-03 | 1994-05-17 | Weigh-Tronix, Inc. | Load cell |
US5442146A (en) * | 1992-04-03 | 1995-08-15 | Weigh-Tronix, Inc. | Counting scale and load cell assembly therefor |
US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
US5767405A (en) * | 1992-04-07 | 1998-06-16 | The Charles Stark Draper Laboratory, Inc. | Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout |
US5450762A (en) * | 1992-12-17 | 1995-09-19 | Alliedsignal Inc. | Reactionless single beam vibrating force sensor |
US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
CH687103A5 (de) * | 1993-08-20 | 1996-09-13 | Mettler Toledo Ag | Flache einstueckige Messaite mit zwei Knoten zur Weg- oder Kraftmessung. |
FR2723638B1 (fr) * | 1994-08-10 | 1996-10-18 | Sagem | Transducteur force-frequence a poutres vibrantes |
US5581035A (en) * | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
US5646348A (en) * | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
US5725729A (en) * | 1994-09-26 | 1998-03-10 | The Charles Stark Draper Laboratory, Inc. | Process for micromechanical fabrication |
US5604336A (en) * | 1995-03-08 | 1997-02-18 | Weigh-Tronix, Inc. | Load cell with composite end beams having portions with different elastic modulus |
JP3119135B2 (ja) * | 1995-09-11 | 2000-12-18 | 株式会社村田製作所 | 加速度センサ |
US5817942A (en) * | 1996-02-28 | 1998-10-06 | The Charles Stark Draper Laboratory, Inc. | Capacitive in-plane accelerometer |
US5739431A (en) * | 1996-06-13 | 1998-04-14 | Alliedsignal, Inc. | Miniature magnetometer-accelerometer |
US5892153A (en) * | 1996-11-21 | 1999-04-06 | The Charles Stark Draper Laboratory, Inc. | Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US5783973A (en) * | 1997-02-24 | 1998-07-21 | The Charles Stark Draper Laboratory, Inc. | Temperature insensitive silicon oscillator and precision voltage reference formed therefrom |
US5952574A (en) * | 1997-04-29 | 1999-09-14 | The Charles Stark Draper Laboratory, Inc. | Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US5945642A (en) * | 1998-03-13 | 1999-08-31 | Minnesota Mining And Manufacturing Company | Acoustic horn |
ATE479084T1 (de) * | 2001-01-17 | 2010-09-15 | Honeywell Int Inc | Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen |
US6497152B2 (en) | 2001-02-23 | 2002-12-24 | Paroscientific, Inc. | Method for eliminating output discontinuities in digital pressure transducers and digital pressure transducer employing same |
US20040035206A1 (en) * | 2002-03-26 | 2004-02-26 | Ward Paul A. | Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same |
US20040016307A1 (en) * | 2002-07-24 | 2004-01-29 | Albert William C. | Vibration isolation mechanism for a vibrating beam force sensor |
US7250705B2 (en) * | 2005-09-16 | 2007-07-31 | Texas Instruments Incorporated | Resonant oscillating device actuator structure |
US20070075104A1 (en) * | 2005-10-05 | 2007-04-05 | Yau Wai S | Pinch Clip Garment Hanger |
JP2010019826A (ja) * | 2008-03-25 | 2010-01-28 | Epson Toyocom Corp | 圧力センサ |
JP2009258085A (ja) * | 2008-03-25 | 2009-11-05 | Epson Toyocom Corp | 圧力センサおよびその製造方法 |
JP2010019828A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー用ダイアフラムおよび圧力センサー |
JP2010019829A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー |
JP2010019827A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー |
US8187902B2 (en) * | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
JP5187529B2 (ja) * | 2008-07-22 | 2013-04-24 | セイコーエプソン株式会社 | 圧力センサー |
JP4756394B2 (ja) * | 2009-03-04 | 2011-08-24 | セイコーエプソン株式会社 | 圧力センサー |
GB2470398B (en) | 2009-05-21 | 2014-03-19 | Ge Infrastructure Sensing Inc | A resonant sensor for measuring the pressure of a fluid |
JP6930396B2 (ja) * | 2017-11-28 | 2021-09-01 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、携帯型電子機器および移動体 |
US11119115B2 (en) | 2018-08-27 | 2021-09-14 | Honeywell International Inc. | Vibrating beam accelerometer |
CN115585879B (zh) * | 2022-10-10 | 2023-08-18 | 国网山东省电力公司高密市供电公司 | 一种监测电力设备振动幅度的声波检测装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3190129A (en) * | 1961-07-10 | 1965-06-22 | Bosch Arma Corp | Accelerometer and parts therefor |
US3479536A (en) * | 1967-03-14 | 1969-11-18 | Singer General Precision | Piezoelectric force transducer |
US3470400A (en) * | 1967-12-21 | 1969-09-30 | Singer General Precision | Single beam force transducer with integral mounting isolation |
US3480809A (en) * | 1968-07-09 | 1969-11-25 | Philamon Inc | Tuning fork resonator with reed-mode damping and reed signal cancellation |
US4104920A (en) * | 1977-04-01 | 1978-08-08 | The Singer Company | Piezoelectric damping mechanism |
US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
-
1979
- 1979-12-17 US US06/103,918 patent/US4321500A/en not_active Expired - Lifetime
-
1980
- 1980-12-15 CA CA000366780A patent/CA1141983A/en not_active Expired
- 1980-12-17 DE DE8080107998T patent/DE3069388D1/de not_active Expired
- 1980-12-17 AT AT80107998T patent/ATE9738T1/de not_active IP Right Cessation
- 1980-12-17 JP JP17864080A patent/JPS56132534A/ja active Pending
- 1980-12-17 EP EP80107998A patent/EP0030741B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0030741A3 (en) | 1981-07-15 |
ATE9738T1 (de) | 1984-10-15 |
EP0030741A2 (de) | 1981-06-24 |
US4321500A (en) | 1982-03-23 |
JPS56132534A (en) | 1981-10-16 |
CA1141983A (en) | 1983-03-01 |
EP0030741B1 (de) | 1984-10-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8339 | Ceased/non-payment of the annual fee |