DE3267089D1 - Vibrating beam rotation sensor - Google Patents

Vibrating beam rotation sensor

Info

Publication number
DE3267089D1
DE3267089D1 DE8282400351T DE3267089T DE3267089D1 DE 3267089 D1 DE3267089 D1 DE 3267089D1 DE 8282400351 T DE8282400351 T DE 8282400351T DE 3267089 T DE3267089 T DE 3267089T DE 3267089 D1 DE3267089 D1 DE 3267089D1
Authority
DE
Germany
Prior art keywords
rotation sensor
vibrating beam
beam rotation
vibrating
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282400351T
Other languages
English (en)
Inventor
James Michael O'connor
David Michael Shupe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Application granted granted Critical
Publication of DE3267089D1 publication Critical patent/DE3267089D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
DE8282400351T 1981-03-04 1982-03-02 Vibrating beam rotation sensor Expired DE3267089D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/240,518 US4381672A (en) 1981-03-04 1981-03-04 Vibrating beam rotation sensor

Publications (1)

Publication Number Publication Date
DE3267089D1 true DE3267089D1 (en) 1985-12-05

Family

ID=22906857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282400351T Expired DE3267089D1 (en) 1981-03-04 1982-03-02 Vibrating beam rotation sensor

Country Status (5)

Country Link
US (1) US4381672A (de)
EP (1) EP0060185B1 (de)
JP (1) JPS57160067A (de)
CA (1) CA1169677A (de)
DE (1) DE3267089D1 (de)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4517841A (en) * 1983-01-06 1985-05-21 Sundstrand Data Control, Inc. Accelerometer with beam resonator force transducer
GB2158579B (en) * 1984-01-23 1988-07-13 Piezoelectric Technology Inves Angular rate sensor system
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
GB2168481B (en) * 1984-12-13 1988-07-06 Stc Plc Silicon transducer
JP2518814B2 (ja) * 1985-04-08 1996-07-31 株式会社日立製作所 真空計
US4655089A (en) * 1985-06-07 1987-04-07 Smith Meter Inc. Mass flow meter and signal processing system
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
JPH01142477A (ja) * 1987-11-30 1989-06-05 Tohoku Tokushuko Kk 磁化検出用加振器
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH07104217B2 (ja) * 1988-05-27 1995-11-13 横河電機株式会社 振動式トランスデューサとその製造方法
WO1990001143A1 (en) * 1988-07-23 1990-02-08 Robert Bosch Gmbh Apparatus for measuring angular velocity
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
GB8920138D0 (en) * 1989-09-06 1989-10-18 Pa Consulting Services Double ended tuning fork force sensor
US5428259A (en) * 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
GB9111316D0 (en) * 1991-05-24 1991-07-17 Burdess James S Improvements in or relating to gyroscopic devices
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
GB9212099D0 (en) * 1992-06-06 1992-07-22 Lucas Ind Plc Angular rate sensor and method of production thereof
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
US5287331A (en) * 1992-10-26 1994-02-15 Queen's University Air coupled ultrasonic transducer
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5729074A (en) * 1994-03-24 1998-03-17 Sumitomo Electric Industries, Ltd. Micro mechanical component and production process thereof
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5679888A (en) * 1994-10-05 1997-10-21 Matsushita Electric Industrial Co., Ltd. Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
US5729075A (en) * 1995-06-12 1998-03-17 National Semiconductor Corporation Tuneable microelectromechanical system resonator
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
DE19528961C2 (de) * 1995-08-08 1998-10-29 Daimler Benz Ag Mikromechanischer Drehratensensor (DRS) und Sensoranordnung
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6182508B1 (en) * 1996-12-18 2001-02-06 Denso Corporation Structure of angular rate sensor
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5952573A (en) * 1997-05-05 1999-09-14 Hughes Electronics Corporation Micro-beam motion sensor
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US6124765A (en) * 1997-10-24 2000-09-26 Stmicroelectronics, Inc. Integrated released beam oscillator and associated methods
JP2000088578A (ja) * 1998-09-10 2000-03-31 Matsushita Electric Ind Co Ltd 角速度センサ
EP1050743A3 (de) 1999-05-07 2003-08-13 Alps Electric Co., Ltd. Stimmgabelkreisel
DE60037928T2 (de) 1999-09-08 2009-01-22 Alps Electric Co., Ltd. Kreiselgerät und Eingabegerät dafür
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
EP1313216B1 (de) * 1999-11-02 2011-08-10 ETA SA Manufacture Horlogère Suisse Temperaturkompensationsmechanismus für einen mikromechanischen ringresonator
US6445106B1 (en) * 2000-02-18 2002-09-03 Intel Corporation Micro-electromechanical structure resonator, method of making, and method of using
JP2001336936A (ja) 2000-05-29 2001-12-07 Alps Electric Co Ltd ジャイロスコープおよび入力装置
US20020074897A1 (en) * 2000-12-15 2002-06-20 Qing Ma Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
DE60037132T2 (de) * 2000-12-21 2008-09-11 Eta Sa Manufacture Horlogère Suisse Zeitbezug mit einem integrierten mikromechanischen Stimmgabelresonator
JP3972790B2 (ja) 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
JP4392246B2 (ja) * 2002-02-06 2009-12-24 アナログ・デバイスズ・インク マイクロ加工されたジャイロスコープ
US20040035206A1 (en) * 2002-03-26 2004-02-26 Ward Paul A. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
US7107842B2 (en) * 2003-05-10 2006-09-19 The Regents Of The University Of California Angular rate sensor using micro electromechanical haltere
US7091451B2 (en) * 2003-06-20 2006-08-15 Northrop Grumman Corporation Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
JP4213540B2 (ja) * 2003-08-20 2009-01-21 株式会社日立製作所 振動発電用振動子
US7287428B2 (en) * 2004-04-14 2007-10-30 Analog Devices, Inc. Inertial sensor with a linear array of sensor elements
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
GB2425222B (en) * 2005-04-12 2008-11-05 Perpetuum Ltd An electromechanical generator for converting mechanical vibrational energy into electrical energy
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
EP1783094A1 (de) * 2005-11-04 2007-05-09 Infineon Technologies SensoNor AS Erregung in mikromechanischen Bauelementen
US7861625B2 (en) * 2007-10-26 2011-01-04 Pro-Cut Licensing Company, Llc Dynamic alignment monitoring system for on-vehicle disk brake lathe
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
CN107064561B (zh) * 2017-03-21 2023-04-21 华南理工大学 一种单轴加速度传感器的标定装置及标定方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2513340A (en) * 1945-10-17 1950-07-04 Sperry Corp Angular velocity responsive apparatus
US2544646A (en) * 1948-06-16 1951-03-13 Sperry Corp Angular velocity measuring instrument
FR1176197A (fr) * 1957-05-24 1959-04-07 Bronzavia Sa Perfectionnements apportés aux moyens de mesure de la vitesse angulaire d'un organeou d'un objet rotatif
US3127775A (en) * 1960-10-28 1964-04-07 Gyrex Corp Vibratory rate gyroscope
US3141100A (en) * 1962-06-21 1964-07-14 Avco Corp Piezoelectric resonance device
US3201998A (en) * 1963-06-14 1965-08-24 Horn Leon Space sensing device
US3614677A (en) * 1966-04-29 1971-10-19 Ibm Electromechanical monolithic resonator
US3842681A (en) * 1973-07-19 1974-10-22 Sperry Rand Corp Angular rate sensor
US3992952A (en) * 1974-12-20 1976-11-23 The Singer Company Control system for angular displacement sensor
JPS5925486B2 (ja) * 1977-11-15 1984-06-18 シチズン時計株式会社 圧電振動子の容器
US4264838A (en) * 1979-10-01 1981-04-28 Sperry Corporation Force balanced piezoelectric vibratory rate sensor

Also Published As

Publication number Publication date
US4381672A (en) 1983-05-03
JPS57160067A (en) 1982-10-02
CA1169677A (en) 1984-06-26
EP0060185B1 (de) 1985-10-30
EP0060185A1 (de) 1982-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee