DE3375265D1 - High-frequency piezoelectric resonator and process for its production - Google Patents

High-frequency piezoelectric resonator and process for its production

Info

Publication number
DE3375265D1
DE3375265D1 DE8383401025T DE3375265T DE3375265D1 DE 3375265 D1 DE3375265 D1 DE 3375265D1 DE 8383401025 T DE8383401025 T DE 8383401025T DE 3375265 T DE3375265 T DE 3375265T DE 3375265 D1 DE3375265 D1 DE 3375265D1
Authority
DE
Germany
Prior art keywords
production
piezoelectric resonator
frequency piezoelectric
frequency
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383401025T
Other languages
English (en)
Inventor
Marc Berte
Louis Bidard
Serge Lechopier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CEPE
Compagnie Electronique et de Piezoelectricite CEPE
Original Assignee
CEPE
Compagnie Electronique et de Piezoelectricite CEPE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CEPE, Compagnie Electronique et de Piezoelectricite CEPE filed Critical CEPE
Application granted granted Critical
Publication of DE3375265D1 publication Critical patent/DE3375265D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE8383401025T 1982-06-01 1983-05-24 High-frequency piezoelectric resonator and process for its production Expired DE3375265D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8209511A FR2527865A1 (fr) 1982-06-01 1982-06-01 Resonateur piezo-electrique a haute frequence et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE3375265D1 true DE3375265D1 (en) 1988-02-11

Family

ID=9274512

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383401025T Expired DE3375265D1 (en) 1982-06-01 1983-05-24 High-frequency piezoelectric resonator and process for its production

Country Status (7)

Country Link
US (2) US4517485A (de)
EP (1) EP0096611B1 (de)
JP (1) JPS58219810A (de)
CA (1) CA1205533A (de)
DE (1) DE3375265D1 (de)
DK (1) DK160118C (de)
FR (1) FR2527865A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication
FR2592247A1 (fr) * 1985-12-24 1987-06-26 Electronique Piezo Electr Cie Perfectionnement aux resonateurs piezoelectriques.
JP3102869B2 (ja) * 1990-02-09 2000-10-23 東洋通信機株式会社 超薄板圧電共振子の構造
EP0468052B1 (de) * 1990-02-09 1996-11-06 Toyo Communication Equipment Co. Ltd. Struktur zur Festhaltung in einem Modül eines flachen ultradünnen piezoelektrischen Resonators
WO1991019351A1 (en) * 1990-05-25 1991-12-12 Toyo Communication Equipment Co., Ltd. Structure of electrode and lead thereof of ultra thin plate piezoelectric resonator
US5668057A (en) * 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
JPH06291587A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 圧電振動子
US8001962B2 (en) * 2002-08-23 2011-08-23 Sheiman Ultrasonic Research Foundation Pty Ltd. Nebulizing and drug delivery device
SE0300375D0 (sv) 2003-02-12 2003-02-12 Attana Ab Piezoelectric resonator
JP2006020020A (ja) * 2004-07-01 2006-01-19 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2006238266A (ja) * 2005-02-28 2006-09-07 Seiko Epson Corp 圧電振動片、及び圧電振動子
US7814901B2 (en) * 2005-03-09 2010-10-19 Ric Investments, Llc Nebulizing drug delivery device with increased flow rate
US8056557B2 (en) * 2005-03-09 2011-11-15 Ric Investments, Llc Nebulizing drug delivery device with barrier
EP2021131B1 (de) * 2005-05-23 2011-07-13 Biosonic Australia Pty. Ltd. Vorrichtung zur zerstäubung und flüssigkeitsfiltration
US7568377B2 (en) * 2005-07-28 2009-08-04 University Of South Florida High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection
US20100313883A1 (en) * 2006-04-20 2010-12-16 Koninklijke Philips Electronics N.V. Ultrasonic bebulilzer with metal coated ultrasonic genrator
EP3067723A1 (de) * 2015-03-13 2016-09-14 Université Paris Diderot - Paris 7 Verfharen zum einstellen von einem oder mehreren Resonatoren
US10352800B2 (en) * 2016-06-03 2019-07-16 Mks Instruments, Inc. Micromachined bulk acoustic wave resonator pressure sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2095376A (en) * 1934-11-24 1937-10-12 Telefunken Gmbh Piezoelectric oscillator crystal
GB579237A (en) * 1942-12-08 1946-07-29 Scophony Ltd Improvements in or relating to piezo-electric crystals for generating mechanical supersonic waves in fluids and for other purposes
US3222622A (en) * 1962-08-14 1965-12-07 Clevite Corp Wave filter comprising piezoelectric wafer electroded to define a plurality of resonant regions independently operable without significant electro-mechanical interaction
US3396287A (en) * 1965-09-29 1968-08-06 Piezo Technology Inc Crystal structures and method of fabricating them
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
US3721841A (en) * 1971-06-16 1973-03-20 Motorola Inc Contact for piezoelectric crystals
JPS5236540Y2 (de) * 1972-09-04 1977-08-19
US4339683A (en) * 1980-02-04 1982-07-13 The United States Of America As Represented By The Secretary Of The Navy Electrical connection
FR2484734A1 (fr) * 1980-06-13 1981-12-18 Cepe Resonateur piezoelectrique a composants electroniques integres, et oscillateur muni d'un tel resonateur
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication

Also Published As

Publication number Publication date
FR2527865B1 (de) 1985-02-22
JPH0437603B2 (de) 1992-06-19
JPS58219810A (ja) 1983-12-21
EP0096611B1 (de) 1988-01-07
FR2527865A1 (fr) 1983-12-02
DK242783D0 (da) 1983-05-30
US4517485A (en) 1985-05-14
EP0096611A1 (de) 1983-12-21
DK160118C (da) 1991-07-01
CA1205533A (en) 1986-06-03
DK242783A (da) 1983-12-02
US4656707A (en) 1987-04-14
DK160118B (da) 1991-01-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee