DE3463574D1 - Buckling beam test probe contactor assembly with spring biased stripper plate - Google Patents

Buckling beam test probe contactor assembly with spring biased stripper plate

Info

Publication number
DE3463574D1
DE3463574D1 DE8484105934T DE3463574T DE3463574D1 DE 3463574 D1 DE3463574 D1 DE 3463574D1 DE 8484105934 T DE8484105934 T DE 8484105934T DE 3463574 T DE3463574 T DE 3463574T DE 3463574 D1 DE3463574 D1 DE 3463574D1
Authority
DE
Germany
Prior art keywords
stripper plate
spring biased
test probe
contactor assembly
beam test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484105934T
Other languages
English (en)
Inventor
Thomas John Cochran
Philo Burton Hodge
Hans Guenther Hottenrott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3463574D1 publication Critical patent/DE3463574D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
DE8484105934T 1983-06-30 1984-05-25 Buckling beam test probe contactor assembly with spring biased stripper plate Expired DE3463574D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/509,519 US4518910A (en) 1983-06-30 1983-06-30 Buckling beam twist probe contactor assembly with spring biased stripper plate

Publications (1)

Publication Number Publication Date
DE3463574D1 true DE3463574D1 (en) 1987-06-11

Family

ID=24026955

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484105934T Expired DE3463574D1 (en) 1983-06-30 1984-05-25 Buckling beam test probe contactor assembly with spring biased stripper plate

Country Status (4)

Country Link
US (1) US4518910A (de)
EP (1) EP0130350B1 (de)
JP (1) JPS6011170A (de)
DE (1) DE3463574D1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622514A (en) * 1984-06-15 1986-11-11 Ibm Multiple mode buckling beam probe assembly
US4866375A (en) * 1984-06-22 1989-09-12 Malloy James T Universal test fixture
JPH0515108Y2 (de) * 1985-05-31 1993-04-21
JPS61275668A (ja) * 1985-05-31 1986-12-05 Yokowo Mfg Co Ltd 回路基板等の検査装置
JPH0515107Y2 (de) * 1985-05-31 1993-04-21
JPS61275669A (ja) * 1985-05-31 1986-12-05 Yokowo Mfg Co Ltd 回路基板等の検査装置
JPH0515109Y2 (de) * 1985-05-31 1993-04-21
JPS61197575U (de) * 1985-05-31 1986-12-10
JPS61275667A (ja) * 1985-05-31 1986-12-05 Yokowo Mfg Co Ltd 回路基板等の検査装置
US4878018A (en) * 1986-02-28 1989-10-31 Malloy James T Electrical testing device
US4816754A (en) * 1986-04-29 1989-03-28 International Business Machines Corporation Contactor and probe assembly for electrical test apparatus
US5033977A (en) * 1987-10-13 1991-07-23 Minnesota Mining & Manufacturing Co. Electrical connector and fixture for four-sided integrated circuit device
JPH0754816B2 (ja) * 1988-03-11 1995-06-07 東京エレクトロン株式会社 プローブカード
US4901013A (en) * 1988-08-19 1990-02-13 American Telephone And Telegraph Company, At&T Bell Laboratories Apparatus having a buckling beam probe assembly
DE4012839B4 (de) * 1989-04-26 2004-02-26 Atg Test Systems Gmbh & Co.Kg Verfahren und Prüfvorrichtung zum Prüfen von elektrischen oder elektronischen Prüflingen
US4987365A (en) * 1989-04-28 1991-01-22 Hewlett-Packard Company Method and apparatus for testing integrated circuits
US5153472A (en) * 1991-07-19 1992-10-06 International Business Machines Corporation Probe positioning actuator
US5597317A (en) * 1995-08-11 1997-01-28 W. L. Gore & Associates, Inc. Surface mating electrical connector
US6419500B1 (en) 1999-03-08 2002-07-16 Kulicke & Soffa Investment, Inc. Probe assembly having floatable buckling beam probes and apparatus for abrading the same
US6799976B1 (en) * 1999-07-28 2004-10-05 Nanonexus, Inc. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US7382142B2 (en) 2000-05-23 2008-06-03 Nanonexus, Inc. High density interconnect system having rapid fabrication cycle
US6710609B2 (en) * 2002-07-15 2004-03-23 Nanonexus, Inc. Mosaic decal probe
US7247035B2 (en) * 2000-06-20 2007-07-24 Nanonexus, Inc. Enhanced stress metal spring contactor
US6812718B1 (en) 1999-05-27 2004-11-02 Nanonexus, Inc. Massively parallel interface for electronic circuits
US7349223B2 (en) 2000-05-23 2008-03-25 Nanonexus, Inc. Enhanced compliant probe card systems having improved planarity
US7952373B2 (en) 2000-05-23 2011-05-31 Verigy (Singapore) Pte. Ltd. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US7579848B2 (en) 2000-05-23 2009-08-25 Nanonexus, Inc. High density interconnect system for IC packages and interconnect assemblies
US20050068054A1 (en) * 2000-05-23 2005-03-31 Sammy Mok Standardized layout patterns and routing structures for integrated circuit wafer probe card assemblies
US20060066328A1 (en) * 2004-09-30 2006-03-30 Probelogic, Inc. Buckling beam probe test assembly
JP6407128B2 (ja) * 2015-11-18 2018-10-17 三菱電機株式会社 半導体装置の評価装置および半導体装置の評価方法
CN113396019B (zh) * 2019-03-12 2022-06-28 阿尔卑斯阿尔派株式会社 电磁驱动装置以及操作装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806801A (en) * 1972-12-26 1974-04-23 Ibm Probe contactor having buckling beam probes
US4063172A (en) * 1976-06-01 1977-12-13 International Business Machines Corporation Multiple site, differential displacement, surface contacting assembly
DE3273554D1 (en) * 1981-06-30 1986-11-06 Ibm Contact probe assembly for integrated circuits

Also Published As

Publication number Publication date
US4518910A (en) 1985-05-21
JPS6011170A (ja) 1985-01-21
JPH0145030B2 (de) 1989-10-02
EP0130350A1 (de) 1985-01-09
EP0130350B1 (de) 1987-05-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee