DE3579386D1 - Vorrichtung zum bestimmen des oxydationsgrades einer oxydbeschichtung. - Google Patents

Vorrichtung zum bestimmen des oxydationsgrades einer oxydbeschichtung.

Info

Publication number
DE3579386D1
DE3579386D1 DE8585304423T DE3579386T DE3579386D1 DE 3579386 D1 DE3579386 D1 DE 3579386D1 DE 8585304423 T DE8585304423 T DE 8585304423T DE 3579386 T DE3579386 T DE 3579386T DE 3579386 D1 DE3579386 D1 DE 3579386D1
Authority
DE
Germany
Prior art keywords
oxydide
oxydation
coating
determining
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585304423T
Other languages
English (en)
Inventor
Mamoru C O Patent Div Tominaga
Leo C O Patent Division Mori
Junetsu C O Patent Div Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3579386D1 publication Critical patent/DE3579386D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE8585304423T 1984-06-21 1985-06-20 Vorrichtung zum bestimmen des oxydationsgrades einer oxydbeschichtung. Expired - Lifetime DE3579386D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59127843A JPS617445A (ja) 1984-06-21 1984-06-21 銅酸化被膜の酸化度判別装置

Publications (1)

Publication Number Publication Date
DE3579386D1 true DE3579386D1 (de) 1990-10-04

Family

ID=14970036

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585304423T Expired - Lifetime DE3579386D1 (de) 1984-06-21 1985-06-20 Vorrichtung zum bestimmen des oxydationsgrades einer oxydbeschichtung.

Country Status (4)

Country Link
US (1) US4957370A (de)
EP (1) EP0169664B1 (de)
JP (1) JPS617445A (de)
DE (1) DE3579386D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038038A (en) * 1989-05-09 1991-08-06 Southwest Research Institute Optical sensor for detecting quantity of protective coating
JPH0310146A (ja) * 1989-06-08 1991-01-17 Okawara Mfg Co Ltd 反射型光ファイバー式赤外線水分計
CA2085143C (en) * 1991-12-13 1997-03-04 Tomohiro Marui Method and apparatus for process control of material emitting radiation
GB9219450D0 (en) * 1992-09-15 1992-10-28 Glaverbel Thin film thickness monitoring and control
JP3070027B2 (ja) * 1993-04-21 2000-07-24 富士通株式会社 配線基板の製造方法
GB2339831B (en) 1998-07-20 2002-08-14 Meritor Light Vehicle Sys Ltd Door mechanism
GB2345539A (en) * 1999-01-06 2000-07-12 Samfit Uk Ltd Detecting a non-uniform coating on a core member
EP1143222A3 (de) * 2000-04-06 2002-01-02 Applied Materials, Inc. Verfahren und Vorrichtung zur Messung der Schichtdicke von Kupferoxyd
US6525829B1 (en) * 2001-05-25 2003-02-25 Novellus Systems, Inc. Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity
US7044623B2 (en) * 2003-11-21 2006-05-16 Deepsea Power & Light Thru-hull light
US20070137544A1 (en) * 2005-09-09 2007-06-21 Macdonald Ian M Two piece view port and light housing
US7826055B2 (en) * 2006-03-09 2010-11-02 Oclaro Technology Limited Optical channel analyzer with variable filter
US20080130304A1 (en) * 2006-09-15 2008-06-05 Randal Rash Underwater light with diffuser
US7671993B2 (en) * 2007-01-25 2010-03-02 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Methods and apparatus for estimating the intensity of one spectrum of light in a mixed light, in response to the sensed intensities of one or more other spectrums of light in the mixed light
CN116045791B (zh) * 2023-04-03 2023-07-21 成都飞机工业(集团)有限责任公司 一种金属漆涂层厚度评估方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3017512A (en) * 1959-06-29 1962-01-16 American Can Co Coating thickness gauge
DE1623319A1 (de) * 1967-06-22 1971-03-18 Telefunken Patent Vorrichtung zur Bestimmung der Dicke von luftdurchlaessiegen Schichten
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
IT988911B (it) * 1972-06-07 1975-04-30 Infra Systems Inc Apparecchio perfezionato per mi surare le proprieta dei costi tuenti di un nastro che trasla
IT1033240B (it) * 1974-03-14 1979-07-10 Grapho Metronic Gmbh & Co Umidificatore in una macchina stampatrice offset con un dispositivo per la regolazione del quantitativo d acqua sulla piastra
DE2634241A1 (de) * 1975-10-06 1977-04-14 Ibm Hochwirksames beleuchtungssystem
GB2016678B (en) * 1978-03-10 1982-09-15 Asahi Dow Ltd Infrared multilayer film thickness measuring method and apparatus
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
JPS56101505A (en) * 1980-01-18 1981-08-14 Chino Works Ltd Optical measurement device
JPS6058793B2 (ja) * 1980-03-24 1985-12-21 日電アネルバ株式会社 プラズマ分光監視装置
SE8006679L (sv) * 1980-09-24 1982-03-25 Asea Ab Korrelerande fiberoptiskt metdon
JPS57166547A (en) * 1981-04-07 1982-10-14 Olympus Optical Co Ltd Apparatus for reflective spectrophotometry
JPS5830605A (ja) * 1981-08-18 1983-02-23 Kawasaki Steel Corp 表面被膜厚さ測定方法
JPS58115306A (ja) * 1981-12-29 1983-07-09 Chugai Ro Kogyo Kaisha Ltd 塗膜厚連続測定装置
CH668646A5 (de) * 1983-05-31 1989-01-13 Contraves Ag Vorrichtung zum wiederholten foerdern von fluessigkeitsvolumina.

Also Published As

Publication number Publication date
EP0169664B1 (de) 1990-08-29
US4957370A (en) 1990-09-18
EP0169664A1 (de) 1986-01-29
JPS617445A (ja) 1986-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee