DE3585587D1 - Verfahren zur herstellung eines halbleiterbeschleunigungsmessers. - Google Patents
Verfahren zur herstellung eines halbleiterbeschleunigungsmessers.Info
- Publication number
- DE3585587D1 DE3585587D1 DE8585113191T DE3585587T DE3585587D1 DE 3585587 D1 DE3585587 D1 DE 3585587D1 DE 8585113191 T DE8585113191 T DE 8585113191T DE 3585587 T DE3585587 T DE 3585587T DE 3585587 D1 DE3585587 D1 DE 3585587D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor accelerometer
- accelerometer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C11/00—Pivots; Pivotal connections
- F16C11/04—Pivotal connections
- F16C11/12—Pivotal connections incorporating flexible connections, e.g. leaf springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59218495A JPS6197572A (ja) | 1984-10-19 | 1984-10-19 | 半導体加速度センサの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3585587D1 true DE3585587D1 (de) | 1992-04-16 |
Family
ID=16720823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585113191T Expired - Lifetime DE3585587D1 (de) | 1984-10-19 | 1985-10-17 | Verfahren zur herstellung eines halbleiterbeschleunigungsmessers. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4706374A (de) |
EP (1) | EP0178662B1 (de) |
JP (1) | JPS6197572A (de) |
DE (1) | DE3585587D1 (de) |
Families Citing this family (84)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS638565A (ja) * | 1986-06-27 | 1988-01-14 | Mitsubishi Electric Corp | 半導体加速度検出装置 |
DE3764354D1 (de) * | 1987-01-20 | 1990-09-20 | Litef Gmbh | Biegefedergelenk und verfahren zu seiner herstellung. |
US4948757A (en) * | 1987-04-13 | 1990-08-14 | General Motors Corporation | Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures |
US4851080A (en) * | 1987-06-29 | 1989-07-25 | Massachusetts Institute Of Technology | Resonant accelerometer |
EP0309782B1 (de) * | 1987-09-30 | 1994-06-01 | Siemens Aktiengesellschaft | Verfahren zum Ätzen von (100) Silizium |
FI81915C (fi) * | 1987-11-09 | 1990-12-10 | Vaisala Oy | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
US5121633A (en) * | 1987-12-18 | 1992-06-16 | Nissan Motor Co., Ltd. | Semiconductor accelerometer |
US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
JP2741861B2 (ja) * | 1988-02-26 | 1998-04-22 | 株式会社日立製作所 | 振動子 |
US4918032A (en) * | 1988-04-13 | 1990-04-17 | General Motors Corporation | Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures |
DE68926601T2 (de) * | 1988-09-02 | 1997-01-23 | Honda Motor Co Ltd | Halbleitermessaufnehmer |
JPH07113647B2 (ja) * | 1988-09-02 | 1995-12-06 | 日産自動車株式会社 | 半導体加速度センサ |
US4922277A (en) * | 1988-11-28 | 1990-05-01 | The United States Of America As Represented By The Secretary Of The Air Force | Silicon wafer photoresist developer |
US5072288A (en) * | 1989-02-21 | 1991-12-10 | Cornell Research Foundation, Inc. | Microdynamic release structure |
US5149673A (en) * | 1989-02-21 | 1992-09-22 | Cornell Research Foundation, Inc. | Selective chemical vapor deposition of tungsten for microdynamic structures |
US5283459A (en) * | 1989-11-15 | 1994-02-01 | Kabushiki Kaisha Toshiba | Semiconductor sensor including an aperture having a funnel shaped section intersecting a second section |
JPH03156978A (ja) * | 1989-11-15 | 1991-07-04 | Toshiba Corp | 半導体センサー |
US5473945A (en) * | 1990-02-14 | 1995-12-12 | The Charles Stark Draper Laboratory, Inc. | Micromechanical angular accelerometer with auxiliary linear accelerometer |
US5126812A (en) * | 1990-02-14 | 1992-06-30 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical accelerometer |
US5068203A (en) * | 1990-09-04 | 1991-11-26 | Delco Electronics Corporation | Method for forming thin silicon membrane or beam |
US5063177A (en) * | 1990-10-04 | 1991-11-05 | Comsat | Method of packaging microwave semiconductor components and integrated circuits |
US5605598A (en) * | 1990-10-17 | 1997-02-25 | The Charles Stark Draper Laboratory Inc. | Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency |
US5408119A (en) * | 1990-10-17 | 1995-04-18 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency |
US5103279A (en) * | 1990-10-18 | 1992-04-07 | Motorola, Inc. | Field effect transistor with acceleration dependent gain |
JPH05196458A (ja) * | 1991-01-04 | 1993-08-06 | Univ Leland Stanford Jr | 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体 |
JPH04258175A (ja) * | 1991-02-12 | 1992-09-14 | Mitsubishi Electric Corp | シリコン半導体加速度センサの製造方法 |
US5129983A (en) * | 1991-02-25 | 1992-07-14 | The Charles Stark Draper Laboratory, Inc. | Method of fabrication of large area micromechanical devices |
US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
JP2587147B2 (ja) * | 1991-05-17 | 1997-03-05 | 本田技研工業株式会社 | 半導体センサ |
US5635639A (en) * | 1991-09-11 | 1997-06-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical tuning fork angular rate sensor |
US5331852A (en) * | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
JP3261544B2 (ja) * | 1991-10-03 | 2002-03-04 | キヤノン株式会社 | カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置 |
US5408877A (en) * | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
US5767405A (en) * | 1992-04-07 | 1998-06-16 | The Charles Stark Draper Laboratory, Inc. | Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout |
US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
US5357803A (en) * | 1992-04-08 | 1994-10-25 | Rochester Institute Of Technology | Micromachined microaccelerometer for measuring acceleration along three axes |
US5277064A (en) * | 1992-04-08 | 1994-01-11 | General Motors Corporation | Thick film accelerometer |
EP1119032B8 (de) * | 1992-04-22 | 2008-03-19 | Denso Corporation | Verfahren zum Erzeugen einer Halbleitervorrichtung |
JP2776142B2 (ja) * | 1992-05-15 | 1998-07-16 | 株式会社日立製作所 | 加速度センサ |
US5397904A (en) * | 1992-07-02 | 1995-03-14 | Cornell Research Foundation, Inc. | Transistor microstructure |
US5549785A (en) * | 1992-09-14 | 1996-08-27 | Nippondenso Co., Ltd. | Method of producing a semiconductor dynamic sensor |
FR2700065B1 (fr) * | 1992-12-28 | 1995-02-10 | Commissariat Energie Atomique | Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant. |
US5399415A (en) * | 1993-02-05 | 1995-03-21 | Cornell Research Foundation, Inc. | Isolated tungsten microelectromechanical structures |
US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
DE4309206C1 (de) * | 1993-03-22 | 1994-09-15 | Texas Instruments Deutschland | Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor |
US5426070A (en) * | 1993-05-26 | 1995-06-20 | Cornell Research Foundation, Inc. | Microstructures and high temperature isolation process for fabrication thereof |
US5610335A (en) * | 1993-05-26 | 1997-03-11 | Cornell Research Foundation | Microelectromechanical lateral accelerometer |
US5563343A (en) * | 1993-05-26 | 1996-10-08 | Cornell Research Foundation, Inc. | Microelectromechanical lateral accelerometer |
US5536988A (en) * | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5369057A (en) * | 1993-12-21 | 1994-11-29 | Delco Electronics Corporation | Method of making and sealing a semiconductor device having an air path therethrough |
US5508231A (en) * | 1994-03-07 | 1996-04-16 | National Semiconductor Corporation | Apparatus and method for achieving mechanical and thermal isolation of portions of integrated monolithic circuits |
US5484073A (en) * | 1994-03-28 | 1996-01-16 | I/O Sensors, Inc. | Method for fabricating suspension members for micromachined sensors |
US5629244A (en) * | 1994-04-28 | 1997-05-13 | Nec Corporation | Fabrication method of semiconductor accelerometer |
US5646348A (en) * | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
US5581035A (en) * | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
US5725729A (en) * | 1994-09-26 | 1998-03-10 | The Charles Stark Draper Laboratory, Inc. | Process for micromechanical fabrication |
US5640133A (en) * | 1995-06-23 | 1997-06-17 | Cornell Research Foundation, Inc. | Capacitance based tunable micromechanical resonators |
JPH0936385A (ja) * | 1995-07-25 | 1997-02-07 | Nissan Motor Co Ltd | 半導体装置の製造方法 |
JP3433871B2 (ja) * | 1996-01-26 | 2003-08-04 | 株式会社デンソー | 集積化半導体歪みセンサ及びその製造方法 |
US5817942A (en) * | 1996-02-28 | 1998-10-06 | The Charles Stark Draper Laboratory, Inc. | Capacitive in-plane accelerometer |
US5892153A (en) * | 1996-11-21 | 1999-04-06 | The Charles Stark Draper Laboratory, Inc. | Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US5783973A (en) * | 1997-02-24 | 1998-07-21 | The Charles Stark Draper Laboratory, Inc. | Temperature insensitive silicon oscillator and precision voltage reference formed therefrom |
US5952574A (en) * | 1997-04-29 | 1999-09-14 | The Charles Stark Draper Laboratory, Inc. | Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US5914553A (en) * | 1997-06-16 | 1999-06-22 | Cornell Research Foundation, Inc. | Multistable tunable micromechanical resonators |
US6756247B1 (en) | 1998-01-15 | 2004-06-29 | Timothy J. Davis | Integrated large area microstructures and micromechanical devices |
JP2000088878A (ja) * | 1998-09-09 | 2000-03-31 | Tokai Rika Co Ltd | 加速度スイッチ及びその製造方法 |
US20020071169A1 (en) | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
US6753638B2 (en) | 2000-02-03 | 2004-06-22 | Calient Networks, Inc. | Electrostatic actuator for micromechanical systems |
US6628041B2 (en) | 2000-05-16 | 2003-09-30 | Calient Networks, Inc. | Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same |
US6585383B2 (en) | 2000-05-18 | 2003-07-01 | Calient Networks, Inc. | Micromachined apparatus for improved reflection of light |
US6560384B1 (en) | 2000-06-01 | 2003-05-06 | Calient Networks, Inc. | Optical switch having mirrors arranged to accommodate freedom of movement |
US6825967B1 (en) | 2000-09-29 | 2004-11-30 | Calient Networks, Inc. | Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same |
US6544863B1 (en) | 2001-08-21 | 2003-04-08 | Calient Networks, Inc. | Method of fabricating semiconductor wafers having multiple height subsurface layers |
JP4306162B2 (ja) * | 2001-08-22 | 2009-07-29 | 株式会社デンソー | 半導体装置およびその製造方法 |
JP2003090969A (ja) * | 2001-09-17 | 2003-03-28 | Olympus Optical Co Ltd | 可変形状シリンダミラー |
US7728339B1 (en) | 2002-05-03 | 2010-06-01 | Calient Networks, Inc. | Boundary isolation for microelectromechanical devices |
US8187902B2 (en) | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
JP5824876B2 (ja) * | 2011-05-30 | 2015-12-02 | セイコーエプソン株式会社 | 物理量検出器の製造方法 |
US9222956B2 (en) * | 2013-11-26 | 2015-12-29 | Raytheon Company | High bandwidth linear flexure bearing |
JP6672269B2 (ja) * | 2014-05-06 | 2020-03-25 | メムズ ドライブ,インク.Mems Drive,Inc. | 低スチフネス曲げ部 |
US9621775B2 (en) | 2014-05-06 | 2017-04-11 | Mems Drive, Inc. | Electrical bar latching for low stiffness flexure MEMS actuator |
US11258158B2 (en) | 2017-08-17 | 2022-02-22 | Raytheon Company | Apparatus and method for providing linear motion of a device |
US10670825B2 (en) | 2018-08-23 | 2020-06-02 | Raytheon Company | Mounting devices with integrated alignment adjustment features and locking mechanisms |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4553436A (en) * | 1982-11-09 | 1985-11-19 | Texas Instruments Incorporated | Silicon accelerometer |
JPS6055655A (ja) * | 1983-09-07 | 1985-03-30 | Nissan Motor Co Ltd | 梁構造体を有する半導体装置 |
US4549427A (en) * | 1983-09-19 | 1985-10-29 | The United States Of America As Represented By The Secretary Of The Air Force | Electronic nerve agent detector |
US4597003A (en) * | 1983-12-01 | 1986-06-24 | Harry E. Aine | Chemical etching of a semiconductive wafer by undercutting an etch stopped layer |
-
1984
- 1984-10-19 JP JP59218495A patent/JPS6197572A/ja active Granted
-
1985
- 1985-09-27 US US06/780,933 patent/US4706374A/en not_active Expired - Lifetime
- 1985-10-17 DE DE8585113191T patent/DE3585587D1/de not_active Expired - Lifetime
- 1985-10-17 EP EP85113191A patent/EP0178662B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0453267B2 (de) | 1992-08-26 |
EP0178662B1 (de) | 1992-03-11 |
EP0178662A2 (de) | 1986-04-23 |
JPS6197572A (ja) | 1986-05-16 |
EP0178662A3 (en) | 1988-08-24 |
US4706374A (en) | 1987-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |