DE3587482T2 - Fehlerinspektion fuer plattenoberflaechen. - Google Patents

Fehlerinspektion fuer plattenoberflaechen.

Info

Publication number
DE3587482T2
DE3587482T2 DE85900918T DE3587482T DE3587482T2 DE 3587482 T2 DE3587482 T2 DE 3587482T2 DE 85900918 T DE85900918 T DE 85900918T DE 3587482 T DE3587482 T DE 3587482T DE 3587482 T2 DE3587482 T2 DE 3587482T2
Authority
DE
Germany
Prior art keywords
panel surfaces
error inspection
inspection
error
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE85900918T
Other languages
English (en)
Other versions
DE3587482D1 (de
DE3587482T3 (de
Inventor
Donald A Clarke
Rodger L Reynolds
Timothy R Pryor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diffracto Ltd Canada
Original Assignee
Diffracto Ltd Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24319106&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3587482(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Diffracto Ltd Canada filed Critical Diffracto Ltd Canada
Publication of DE3587482D1 publication Critical patent/DE3587482D1/de
Publication of DE3587482T2 publication Critical patent/DE3587482T2/de
Application granted granted Critical
Publication of DE3587482T3 publication Critical patent/DE3587482T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
DE3587482T 1984-02-14 1985-01-25 Fehlerinspektion für plattenoberflächen. Expired - Lifetime DE3587482T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/579,971 US4629319A (en) 1984-02-14 1984-02-14 Panel surface flaw inspection
PCT/US1985/000125 WO1985003776A1 (en) 1984-02-14 1985-01-25 Panel surface flaw inspection

Publications (3)

Publication Number Publication Date
DE3587482D1 DE3587482D1 (de) 1993-09-02
DE3587482T2 true DE3587482T2 (de) 1993-11-04
DE3587482T3 DE3587482T3 (de) 1999-01-28

Family

ID=24319106

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3587482T Expired - Lifetime DE3587482T3 (de) 1984-02-14 1985-01-25 Fehlerinspektion für plattenoberflächen.

Country Status (7)

Country Link
US (1) US4629319A (de)
EP (1) EP0174939B2 (de)
JP (1) JPH061249B2 (de)
CA (1) CA1241721A (de)
DE (1) DE3587482T3 (de)
IT (1) IT1212193B (de)
WO (1) WO1985003776A1 (de)

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DE102011082414A1 (de) * 2011-09-09 2013-03-14 Carl Zeiss Sms Gmbh Autofokuseinrichtung und Autofokussierverfahren für eine Abbildungsvorrichtung

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011082414A1 (de) * 2011-09-09 2013-03-14 Carl Zeiss Sms Gmbh Autofokuseinrichtung und Autofokussierverfahren für eine Abbildungsvorrichtung
US9297994B2 (en) 2011-09-09 2016-03-29 Carl Zeiss Sms Gmbh Grating-assisted autofocus device and autofocusing method for an imaging device

Also Published As

Publication number Publication date
US4629319A (en) 1986-12-16
EP0174939B1 (de) 1993-07-28
JPS61502009A (ja) 1986-09-11
EP0174939B2 (de) 1998-08-26
IT8512431A0 (it) 1985-02-14
EP0174939A4 (de) 1988-05-03
DE3587482D1 (de) 1993-09-02
EP0174939A1 (de) 1986-03-26
IT1212193B (it) 1989-11-22
DE3587482T3 (de) 1999-01-28
JPH061249B2 (ja) 1994-01-05
CA1241721A (en) 1988-09-06
WO1985003776A1 (en) 1985-08-29

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