DE3677137D1 - Kapazitiver streufeldsensor und verfahren. - Google Patents

Kapazitiver streufeldsensor und verfahren.

Info

Publication number
DE3677137D1
DE3677137D1 DE8686306192T DE3677137T DE3677137D1 DE 3677137 D1 DE3677137 D1 DE 3677137D1 DE 8686306192 T DE8686306192 T DE 8686306192T DE 3677137 T DE3677137 T DE 3677137T DE 3677137 D1 DE3677137 D1 DE 3677137D1
Authority
DE
Germany
Prior art keywords
probe
plate element
hole
distance
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686306192T
Other languages
English (en)
Inventor
Joseph L Garbini
Laurence J Albrecht
Jens E Jorgensen
Georg F Mauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Washington Research Foundation
Original Assignee
Washington Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Washington Research Foundation filed Critical Washington Research Foundation
Application granted granted Critical
Publication of DE3677137D1 publication Critical patent/DE3677137D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/12—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
DE8686306192T 1985-08-09 1986-08-11 Kapazitiver streufeldsensor und verfahren. Expired - Fee Related DE3677137D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/764,164 US4814691A (en) 1985-08-09 1985-08-09 Fringe field capacitive sensor for measuring profile of a surface

Publications (1)

Publication Number Publication Date
DE3677137D1 true DE3677137D1 (de) 1991-02-28

Family

ID=25069862

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686306192T Expired - Fee Related DE3677137D1 (de) 1985-08-09 1986-08-11 Kapazitiver streufeldsensor und verfahren.

Country Status (5)

Country Link
US (1) US4814691A (de)
EP (1) EP0221638B1 (de)
AT (1) ATE60436T1 (de)
CA (1) CA1279988C (de)
DE (1) DE3677137D1 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2690908B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 表面計測装置
US4996492A (en) * 1989-03-07 1991-02-26 The Boeing Company Probe for inspecting countersunk holes in conductive bodies
US5021740A (en) * 1989-03-07 1991-06-04 The Boeing Company Method and apparatus for measuring the distance between a body and a capacitance probe
EP0425823A1 (de) * 1989-09-29 1991-05-08 Antivision Systems Corp. Elektrostatische Abbildungsvorrichtung
US5281921A (en) * 1990-04-24 1994-01-25 Novak James L Non-contact capacitance based image sensing method and system
US5189377A (en) * 1990-09-04 1993-02-23 Extrude Hone Corporation Method and apparatus for co-ordinate measuring using a capacitance probe
GB9021448D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance sensing probe
GB9021447D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
WO1992008947A1 (en) * 1990-11-16 1992-05-29 Moonstone Designs Limited Device for determining the presence and/or characteristics of an object or a substance
US5272443A (en) * 1992-04-22 1993-12-21 Aluminum Company Of America Chatter and profile measuring using capacitor sensors
US5365166A (en) * 1993-02-08 1994-11-15 Westinghouse Electric Corporation System and method for testing electrical generators
DE4304451C2 (de) * 1993-02-13 1995-12-14 Seichter Gmbh Meßsystem zur Erfassung von Unebenheiten auf der Oberfläche eines Meßobjektes
US5517190A (en) * 1994-02-03 1996-05-14 Gunn; Colin N. Physical measurement from changes in reactance
US5646538A (en) * 1995-06-13 1997-07-08 Measurement Systems, Inc. Method and apparatus for fastener hole inspection with a capacitive probe
DE69618559T2 (de) 1996-02-14 2002-08-14 St Microelectronics Srl Kapazitiver Abstandssensor, insbesondere zur Erfassung von Fingerabdrücken
US6320394B1 (en) 1996-02-14 2001-11-20 Stmicroelectronics S.R.L. Capacitive distance sensor
US6114862A (en) 1996-02-14 2000-09-05 Stmicroelectronics, Inc. Capacitive distance sensor
US6483931B2 (en) * 1997-09-11 2002-11-19 Stmicroelectronics, Inc. Electrostatic discharge protection of a capacitve type fingerprint sensing array
US6028773A (en) * 1997-11-14 2000-02-22 Stmicroelectronics, Inc. Packaging for silicon sensors
US6191593B1 (en) 1997-12-17 2001-02-20 Stmicroelectronics, Inc. Method for the non-invasive sensing of physical matter on the detection surface of a capacitive sensor
US6091082A (en) 1998-02-17 2000-07-18 Stmicroelectronics, Inc. Electrostatic discharge protection for integrated circuit sensor passivation
US6181142B1 (en) * 1998-07-21 2001-01-30 Ade Corporation Nonlinear current mirror for loop-gain control
US6397158B1 (en) * 1999-04-29 2002-05-28 Sun Microsystems, Inc. Method for determining capacitance values for quieting noisy power conductors
US7239227B1 (en) 1999-12-30 2007-07-03 Upek, Inc. Command interface using fingerprint sensor input system
US6512381B2 (en) 1999-12-30 2003-01-28 Stmicroelectronics, Inc. Enhanced fingerprint detection
US6618505B2 (en) 2000-03-09 2003-09-09 The Boeing Company Method, apparatus and computer program product for determining shim shape
US6943665B2 (en) * 2000-03-21 2005-09-13 T. Eric Chornenky Human machine interface
US20030098774A1 (en) * 2000-03-21 2003-05-29 Chornenky Todd E. Security apparatus
US7137300B2 (en) * 2003-03-19 2006-11-21 California Institute Of Technology Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making
US8115497B2 (en) * 2007-11-13 2012-02-14 Authentec, Inc. Pixel sensing circuit with common mode cancellation
RU2504730C1 (ru) * 2012-07-19 2014-01-20 Федеральное Государственное Унитарное Предприятие "Государственный научно-производственный ракетно-космический центр "ЦСКБ-Прогресс" (ФГУП "ГНПРКЦ "ЦСКБ-Прогресс") Способ контроля целостности токопроводящего покрытия на диэлектрическом материале
WO2017072976A1 (ja) * 2015-10-30 2017-05-04 三菱電機株式会社 ワイヤ放電加工機、ワイヤ放電加工機の制御装置の制御方法及び位置決め方法
US9817439B2 (en) 2016-02-29 2017-11-14 JumpStartCSR, Inc. System, method and device for designing, manufacturing, and monitoring custom human-interfacing devices
WO2017195001A1 (en) * 2016-05-13 2017-11-16 Arcelormittal Method for obtaining a height of a material stacked in a coke oven
EP3335872A1 (de) 2016-12-16 2018-06-20 Amcor Flexibles Winterbourne Limited Polymerffolien und daraus hergestellte verpackungen
WO2020012440A1 (en) * 2018-07-12 2020-01-16 Scuola Superiore Di Studi Universitari E Di Perfezionamento Sant'anna Sensitive system for increased proximity detection
US11480428B2 (en) * 2019-01-09 2022-10-25 The Boeing Company Methods and systems to test a size or characteristic of a hole

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2802178A (en) * 1954-09-22 1957-08-06 Gen Electric Motion detecting device
US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US3504279A (en) * 1967-09-27 1970-03-31 Reliance Electric & Eng Co Noncontact interrupted surface inspection apparatus providing an electrical analog of the surface profile
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3842194A (en) * 1971-03-22 1974-10-15 Rca Corp Information records and recording/playback systems therefor
GB1436698A (en) * 1972-02-11 1976-05-19 Bakelite Xylonite Ltd Apparatus for thickness measurement
US3771051A (en) * 1972-06-14 1973-11-06 Ade Corp Apparatus and method for indicating surface roughness
FR2202586A5 (de) * 1972-10-06 1974-05-03 Commissariat Energie Atomique
GB1483187A (en) * 1973-10-22 1977-08-17 Ici Ltd Method of and apparatus for assessing the flatness of anodes
US4103226A (en) * 1976-09-15 1978-07-25 Westinghouse Electric Corp. Apparatus for gauging the texture of a conducting surface
US4112355A (en) * 1976-10-22 1978-09-05 Lockheed Corporation Quality and fit measuring apparatus for fasteners and their holes
US4168465A (en) * 1977-12-15 1979-09-18 The United States Of America As Represented By The Secretary Of The Air Force Tapered hole capacitive probe
GB2015165B (en) * 1978-02-09 1983-01-12 Koa Oil Co Ltd Detecting capacitively corrosion of pipes
US4152641A (en) * 1978-02-27 1979-05-01 Rca Corporation Method and apparatus for the determination of signal pickup qualities of a stylus of a capacitive disc video player
DD136897B1 (de) * 1978-06-20 1981-03-25 Elektromat Veb Kapazitiver messfuehler
US4296371A (en) * 1980-03-17 1981-10-20 Rca Corporation System for measuring stylus shoe length
US4352060A (en) * 1980-07-01 1982-09-28 Viak Ab Apparatus for measuring the interior dimensions of a cast iron mold
GB2100441A (en) * 1981-06-12 1982-12-22 Automatic Systems Lab Ltd Method for determining dimensions and/or form of surfaces
US4481616A (en) * 1981-09-30 1984-11-06 Rca Corporation Scanning capacitance microscope
US4422035A (en) * 1981-12-11 1983-12-20 Extrude Hone Corporation Capacitance measurement probe

Also Published As

Publication number Publication date
ATE60436T1 (de) 1991-02-15
CA1279988C (en) 1991-02-12
EP0221638A1 (de) 1987-05-13
US4814691A (en) 1989-03-21
EP0221638B1 (de) 1991-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: STIPPL PATENTANWAELTE, 90482 NUERNBERG

8339 Ceased/non-payment of the annual fee