DE3685491D1 - Polieranlage mit unterwasser-bernoulli-entnahme. - Google Patents

Polieranlage mit unterwasser-bernoulli-entnahme.

Info

Publication number: DE3685491D1
Authority: DE; Germany
Prior art keywords: bernoulli; underwater; removal; polishing system; polishing
Prior art date: 1985-11-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE8686905542T

Other languages

English (en)

Inventor

Paul W Cronkhite

Bruce C Bosley

James H Jones

Asit G Patel

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Motorola Solutions Inc

Original Assignee

Motorola Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-11-01

Filing date

1986-08-25

Publication date

1992-07-02

1986-08-25 Application filed by Motorola Inc filed Critical Motorola Inc

1992-07-02 Application granted granted Critical

1992-07-02 Publication of DE3685491D1 publication Critical patent/DE3685491D1/de

2006-08-26 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping

DE8686905542T 1985-11-01 1986-08-25 Polieranlage mit unterwasser-bernoulli-entnahme. Expired - Lifetime DE3685491D1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US06/793,818 US4653231A (en)	1985-11-01	1985-11-01	Polishing system with underwater Bernoulli pickup
PCT/US1986/001724 WO1987002608A1 (en)	1985-11-01	1986-08-25	Polishing system with underwater bernoulli pickup

Publications (1)

Publication Number	Publication Date
DE3685491D1 true DE3685491D1 (de)	1992-07-02

Family

ID=25160891

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8686905542T Expired - Lifetime DE3685491D1 (de)	1985-11-01	1986-08-25	Polieranlage mit unterwasser-bernoulli-entnahme.

Country Status (7)

Country	Link
US (1)	US4653231A (de)
EP (1)	EP0245289B1 (de)
JP (1)	JPH0632886B2 (de)
DE (1)	DE3685491D1 (de)
HK (1)	HK81895A (de)
SG (1)	SG139794G (de)
WO (1)	WO1987002608A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH658216A5 (fr) *	1985-09-06	1986-10-31	Bula & Fils Mach	Procede de finissage de pieces moulees ou usinees et centre de finissage pour la mise en oeuvre de ce procede.
US5885138A (en)	1993-09-21	1999-03-23	Ebara Corporation	Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US5679059A (en) *	1994-11-29	1997-10-21	Ebara Corporation	Polishing aparatus and method
KR100390293B1 (ko) *	1993-09-21	2003-09-02	가부시끼가이샤 도시바	폴리싱장치
US5938504A (en)	1993-11-16	1999-08-17	Applied Materials, Inc.	Substrate polishing apparatus
US5582534A (en) *	1993-12-27	1996-12-10	Applied Materials, Inc.	Orbital chemical mechanical polishing apparatus and method
US5643053A (en)	1993-12-27	1997-07-01	Applied Materials, Inc.	Chemical mechanical polishing apparatus with improved polishing control
US5650039A (en) *	1994-03-02	1997-07-22	Applied Materials, Inc.	Chemical mechanical polishing apparatus with improved slurry distribution
US5733175A (en) *	1994-04-25	1998-03-31	Leach; Michael A.	Polishing a workpiece using equal velocity at all points overlapping a polisher
US5679060A (en) *	1994-07-14	1997-10-21	Silicon Technology Corporation	Wafer grinding machine
US5534106A (en) *	1994-07-26	1996-07-09	Kabushiki Kaisha Toshiba	Apparatus for processing semiconductor wafers
US5607341A (en) *	1994-08-08	1997-03-04	Leach; Michael A.	Method and structure for polishing a wafer during manufacture of integrated circuits
KR100487590B1 (ko) *	1995-08-21	2005-08-04	가부시키가이샤 에바라 세이사꾸쇼	폴리싱장치
US7097544B1 (en) *	1995-10-27	2006-08-29	Applied Materials Inc.	Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
US5804507A (en) *	1995-10-27	1998-09-08	Applied Materials, Inc.	Radially oscillating carousel processing system for chemical mechanical polishing
US5738574A (en) *	1995-10-27	1998-04-14	Applied Materials, Inc.	Continuous processing system for chemical mechanical polishing
JP3696690B2 (ja) *	1996-04-23	2005-09-21	不二越機械工業株式会社	ウェーハの研磨装置システム
US6213853B1 (en)	1997-09-10	2001-04-10	Speedfam-Ipec Corporation	Integral machine for polishing, cleaning, rinsing and drying workpieces
GB9921879D0 (en) *	1999-09-17	1999-11-17	Interpole Limited	Method to obtain metallic lead either from lead ores or from exhausted lead-acid storage batteries
US7249992B2 (en) *	2004-07-02	2007-07-31	Strasbaugh	Method, apparatus and system for use in processing wafers
NZ571914A (en) *	2008-10-10	2011-05-27	Xiaoqi Chen	Non-contact lifting and locomotion device
CA2857213C (en) *	2013-08-10	2016-11-22	Taizhou Federal Robot Technology Co., Ltd.	A surface processing system for a work piece
CN104015230B (zh) *	2014-06-23	2015-12-30	台州联帮机器人科技有限公司	一种工件表面的加工系统及加工方法
CN107533993B (zh) *	2015-04-29	2020-12-29	应用材料公司	高速旋转分拣器
US11705354B2 (en)	2020-07-10	2023-07-18	Applied Materials, Inc.	Substrate handling systems

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3701222A (en) *	1971-12-13	1972-10-31	Richardson Co	Continuous sheet graining process
DE2429421C2 (de) *	1974-06-19	1981-12-10	Vits-Maschinenbau Gmbh, 4018 Langenfeld	Vorrichtung zum Anheben des oberen Bogens eines Stapels mit Blasluft
DE2451549A1 (de) *	1974-10-30	1976-08-12	Mueller Georg Kugellager	Belade- und entladevorrichtung fuer plattenfoermige halbleitermaterialien
US4141180A (en) *	1977-09-21	1979-02-27	Kayex Corporation	Polishing apparatus
US4184292A (en) *	1978-03-24	1980-01-22	Revlon, Inc.	Vacuum chuck
JPS57154854A (en) *	1981-03-20	1982-09-24	Hitachi Ltd	Processing device for plate type material
JPS57154835A (en) *	1981-03-20	1982-09-24	Hitachi Ltd	Method and apparatus for drying tabular material
FR2505712A1 (fr) *	1981-05-18	1982-11-19	Procedes Equip Sciences Ind Sa	Machine a polir automatique, pour plaquettes minces, fragiles et deformables
JPS58157141A (ja) *	1982-03-13	1983-09-19	Fuji Seiki Seizosho:Kk	リ−ドフレ−ムケ−ス連続送出し装置
JPS59156666A (ja) *	1984-02-03	1984-09-05	Supiide Fuamu Kk	平面研削装置におけるワ−クの自動装填機構

1985
- 1985-11-01 US US06/793,818 patent/US4653231A/en not_active Expired - Lifetime
1986
- 1986-08-25 DE DE8686905542T patent/DE3685491D1/de not_active Expired - Lifetime
- 1986-08-25 JP JP61504548A patent/JPH0632886B2/ja not_active Expired - Lifetime
- 1986-08-25 EP EP86905542A patent/EP0245289B1/de not_active Expired - Lifetime
- 1986-08-25 WO PCT/US1986/001724 patent/WO1987002608A1/en active IP Right Grant
1994
- 1994-09-30 SG SG139794A patent/SG139794G/en unknown
1995
- 1995-05-25 HK HK81895A patent/HK81895A/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
JPH0632886B2 (ja)	1994-05-02
HK81895A (en)	1995-06-01
EP0245289A1 (de)	1987-11-19
EP0245289A4 (de)	1989-01-24
EP0245289B1 (de)	1992-05-27
JPS63501203A (ja)	1988-05-12
WO1987002608A1 (en)	1987-05-07
US4653231A (en)	1987-03-31
SG139794G (en)	1995-01-13

Legal Events

Date	Code	Title
1993-06-24	8364	No opposition during term of opposition
1998-10-08	8320	Willingness to grant licences declared (paragraph 23)
2002-09-26	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE3685491D1 (de)	1992-07-02	Polieranlage mit unterwasser-bernoulli-entnahme.
NO863995L (no)	1987-04-09	Gjennomsiktig gjenstand.
NO864083L (no)	1987-04-21	Hoeytrykks-fluidsvivel.
IT8620235A0 (it)	1986-04-28	Connettore subaqueo.
FI873667A0 (fi)	1987-08-25	Tvaotaktsfoerbraenningsmotor samt cylinderlock i denna.
NO861405L (no)	1986-10-13	Undervannskopling for samleledning.
FI852736A0 (fi)	1985-07-10	Termosterbar kyvettenhet.
FI860715A (fi)	1986-08-23	Anordning foer cirkelsaog samt cirkelsaogblad.
FI862717A0 (fi)	1986-06-25	Foerbaettrat kollagenkorvskal.
NO161789C (no)	1989-09-27	Redningsvest.
FI863446A0 (fi)	1986-08-26	Interpolations- eller decimatorfilter samt foer detta avsett digitalfilter.
FI863447A0 (fi)	1986-08-26	Interpolations- eller decimatorfilter samt foer detta avsett sugfilter.
FI864781A0 (fi)	1986-11-24	Haestsko med utbytbar sula.
NL187870C (nl)	1992-02-03	Vasthoudring.
FI865127A0 (fi)	1986-12-16	Fungicider innehaollande triazol- och oligoetergrupper samt kompositioner.
NO864437D0 (no)	1986-11-07	Baereanordning.
DE3679386D1 (de)	1991-06-27	Niedrigpegel-klemmschaltung.
FI872473A0 (fi)	1987-06-03	Rotinlaeggning samt svetsfoerfarande.
DE3680692D1 (de)	1991-09-12	Kreisel.
KR870003828U (ko)	1987-03-30	양응 부력선
NL190406C (nl)	1994-02-16	Drijvende inrichting.
NO156861C (no)	1987-12-09	Langstrakt flytelegeme.
NO863911D0 (no)	1986-10-01	Seilbrett.
TR24348A (tr)	1991-09-16	Sueratli giden tekne
FI853447L (fi)	1987-03-11	Kombinerad rikt- och planhyvel samt fraesmaskin foer traebearbetning.