DE3689537D1 - Befestigung einer Komponente auf einem Substrat. - Google Patents

Befestigung einer Komponente auf einem Substrat.

Info

Publication number
DE3689537D1
DE3689537D1 DE86308046T DE3689537T DE3689537D1 DE 3689537 D1 DE3689537 D1 DE 3689537D1 DE 86308046 T DE86308046 T DE 86308046T DE 3689537 T DE3689537 T DE 3689537T DE 3689537 D1 DE3689537 D1 DE 3689537D1
Authority
DE
Germany
Prior art keywords
mirror
paths
bridges
supports
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE86308046T
Other languages
English (en)
Other versions
DE3689537T2 (de
Inventor
Ian William Stanley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858525459A external-priority patent/GB8525459D0/en
Priority claimed from GB858525461A external-priority patent/GB8525461D0/en
Priority claimed from GB858525462A external-priority patent/GB8525462D0/en
Priority claimed from GB858525458A external-priority patent/GB8525458D0/en
Priority claimed from GB858525460A external-priority patent/GB8525460D0/en
Priority claimed from GB858526189A external-priority patent/GB8526189D0/en
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Application granted granted Critical
Publication of DE3689537D1 publication Critical patent/DE3689537D1/de
Publication of DE3689537T2 publication Critical patent/DE3689537T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/32Optical coupling means having lens focusing means positioned between opposed fibre ends
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/38Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • G02B6/3803Adjustment or alignment devices for alignment prior to splicing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00Optical: systems and elements
    • Y10S359/90Methods
DE86308046T 1985-10-16 1986-10-16 Befestigung einer Komponente auf einem Substrat. Expired - Fee Related DE3689537T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GB858525459A GB8525459D0 (en) 1985-10-16 1985-10-16 Mounting component to substrate
GB858525461A GB8525461D0 (en) 1985-10-16 1985-10-16 Wavelength selection device
GB858525462A GB8525462D0 (en) 1985-10-16 1985-10-16 Radiation deflector assembly
GB858525458A GB8525458D0 (en) 1985-10-16 1985-10-16 Positioning optical components & waveguides
GB858525460A GB8525460D0 (en) 1985-10-16 1985-10-16 Movable member mounting
GB858526189A GB8526189D0 (en) 1985-10-23 1985-10-23 Fabry-perot interferometer

Publications (2)

Publication Number Publication Date
DE3689537D1 true DE3689537D1 (de) 1994-02-24
DE3689537T2 DE3689537T2 (de) 1994-04-28

Family

ID=27546918

Family Applications (6)

Application Number Title Priority Date Filing Date
DE86308046T Expired - Fee Related DE3689537T2 (de) 1985-10-16 1986-10-16 Befestigung einer Komponente auf einem Substrat.
DE8686308045T Expired - Fee Related DE3687063T2 (de) 1985-10-16 1986-10-16 Optische komponente mit wellenleiter.
DE8686308048T Expired - Fee Related DE3667864D1 (de) 1985-10-16 1986-10-16 Vorrichtung und verfahren zur wellenlaengenselektion.
DE8686308050T Expired - Fee Related DE3669401D1 (en) 1985-10-16 1986-10-16 Fabry-perot-interferometer.
DE8686308049T Expired - Fee Related DE3677881D1 (de) 1985-10-16 1986-10-16 Ablenkungsvorrichtung fuer strahlung.
DE8686308047T Expired - Lifetime DE3667335D1 (de) 1985-10-16 1986-10-16 Bewegliches gehaeuse fuer ein element.

Family Applications After (5)

Application Number Title Priority Date Filing Date
DE8686308045T Expired - Fee Related DE3687063T2 (de) 1985-10-16 1986-10-16 Optische komponente mit wellenleiter.
DE8686308048T Expired - Fee Related DE3667864D1 (de) 1985-10-16 1986-10-16 Vorrichtung und verfahren zur wellenlaengenselektion.
DE8686308050T Expired - Fee Related DE3669401D1 (en) 1985-10-16 1986-10-16 Fabry-perot-interferometer.
DE8686308049T Expired - Fee Related DE3677881D1 (de) 1985-10-16 1986-10-16 Ablenkungsvorrichtung fuer strahlung.
DE8686308047T Expired - Lifetime DE3667335D1 (de) 1985-10-16 1986-10-16 Bewegliches gehaeuse fuer ein element.

Country Status (9)

Country Link
US (7) US4867532A (de)
EP (6) EP0219359B1 (de)
JP (5) JPH077149B2 (de)
AT (6) ATE50864T1 (de)
DE (6) DE3689537T2 (de)
ES (3) ES2013599B3 (de)
GR (3) GR3000242T3 (de)
SG (1) SG892G (de)
WO (6) WO1987002475A1 (de)

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GR3000264T3 (en) 1991-03-15
ATE48480T1 (de) 1989-12-15
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US4896936A (en) 1990-01-30
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EP0219357B1 (de) 1989-12-27
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US4846930A (en) 1989-07-11
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DE3667335D1 (de) 1990-01-11
US4867532A (en) 1989-09-19
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US4854658A (en) 1989-08-08
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ATE49064T1 (de) 1990-01-15
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WO1987002476A1 (en) 1987-04-23
US4871244A (en) 1989-10-03
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GR3000242T3 (en) 1991-03-15
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