DE3787687D1 - Halbleiterspeicher. - Google Patents

Halbleiterspeicher.

Info

Publication number
DE3787687D1
DE3787687D1 DE87108924T DE3787687T DE3787687D1 DE 3787687 D1 DE3787687 D1 DE 3787687D1 DE 87108924 T DE87108924 T DE 87108924T DE 3787687 T DE3787687 T DE 3787687T DE 3787687 D1 DE3787687 D1 DE 3787687D1
Authority
DE
Germany
Prior art keywords
trench
longitudinal axis
disposed
major surface
storage means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE87108924T
Other languages
English (en)
Other versions
DE3787687T2 (de
Inventor
Richard Raymond Garnache
Donald Macalpine Kenney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3787687D1 publication Critical patent/DE3787687D1/de
Publication of DE3787687T2 publication Critical patent/DE3787687T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
    • H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical
DE87108924T 1986-07-15 1987-06-23 Halbleiterspeicher. Expired - Fee Related DE3787687T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/885,618 US4769786A (en) 1986-07-15 1986-07-15 Two square memory cells

Publications (2)

Publication Number Publication Date
DE3787687D1 true DE3787687D1 (de) 1993-11-11
DE3787687T2 DE3787687T2 (de) 1994-05-05

Family

ID=25387321

Family Applications (1)

Application Number Title Priority Date Filing Date
DE87108924T Expired - Fee Related DE3787687T2 (de) 1986-07-15 1987-06-23 Halbleiterspeicher.

Country Status (11)

Country Link
US (1) US4769786A (de)
EP (1) EP0254046B1 (de)
JP (1) JPH07101731B2 (de)
AT (1) ATE95632T1 (de)
AU (1) AU594169B2 (de)
BR (1) BR8703296A (de)
CA (1) CA1283480C (de)
DE (1) DE3787687T2 (de)
DK (1) DK365487A (de)
ES (1) ES2044872T3 (de)
NO (1) NO172714C (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682800B2 (ja) * 1985-04-16 1994-10-19 株式会社東芝 半導体記憶装置
US4751558A (en) * 1985-10-31 1988-06-14 International Business Machines Corporation High density memory with field shield
US4811067A (en) * 1986-05-02 1989-03-07 International Business Machines Corporation High density vertically structured memory
USRE33972E (en) * 1986-07-15 1992-06-23 International Business Machines Corporation Two square memory cells
JPS63245954A (ja) * 1987-04-01 1988-10-13 Hitachi Ltd 半導体メモリ
US4812885A (en) * 1987-08-04 1989-03-14 Texas Instruments Incorporated Capacitive coupling
US5109259A (en) * 1987-09-22 1992-04-28 Texas Instruments Incorporated Multiple DRAM cells in a trench
JPH01125858A (ja) * 1987-11-10 1989-05-18 Fujitsu Ltd 半導体装置およびその製造方法
JPH07105477B2 (ja) * 1988-05-28 1995-11-13 富士通株式会社 半導体装置及びその製造方法
US4926224A (en) * 1988-06-03 1990-05-15 Texas Instruments Incorporated Crosspoint dynamic ram cell for folded bitline array
US5008214A (en) * 1988-06-03 1991-04-16 Texas Instruments Incorporated Method of making crosspoint dynamic RAM cell array with overlapping wordlines and folded bitlines
US4977436A (en) * 1988-07-25 1990-12-11 Motorola, Inc. High density DRAM
US5001525A (en) * 1989-03-27 1991-03-19 International Business Machines Corporation Two square memory cells having highly conductive word lines
US4989055A (en) * 1989-06-15 1991-01-29 Texas Instruments Incorporated Dynamic random access memory cell
US5064777A (en) * 1990-06-28 1991-11-12 International Business Machines Corporation Fabrication method for a double trench memory cell device
US5034787A (en) * 1990-06-28 1991-07-23 International Business Machines Corporation Structure and fabrication method for a double trench memory cell device
US5365097A (en) * 1992-10-05 1994-11-15 International Business Machines Corporation Vertical epitaxial SOI transistor, memory cell and fabrication methods
US5641694A (en) * 1994-12-22 1997-06-24 International Business Machines Corporation Method of fabricating vertical epitaxial SOI transistor
US6074909A (en) * 1998-07-31 2000-06-13 Siemens Aktiengesellschaft Apparatus and method for forming controlled deep trench top isolation layers
US6730540B2 (en) 2002-04-18 2004-05-04 Tru-Si Technologies, Inc. Clock distribution networks and conductive lines in semiconductor integrated circuits
US20070082454A1 (en) * 2005-10-12 2007-04-12 Infineon Technologies Ag Microelectronic device and method of manufacturing a microelectronic device

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387286A (en) * 1967-07-14 1968-06-04 Ibm Field-effect transistor memory
US3841926A (en) * 1973-01-02 1974-10-15 Ibm Integrated circuit fabrication process
US3811076A (en) * 1973-01-02 1974-05-14 Ibm Field effect transistor integrated circuit and memory
US4225945A (en) * 1976-01-12 1980-09-30 Texas Instruments Incorporated Random access MOS memory cell using double level polysilicon
US4222062A (en) * 1976-05-04 1980-09-09 American Microsystems, Inc. VMOS Floating gate memory device
US4462040A (en) * 1979-05-07 1984-07-24 International Business Machines Corporation Single electrode U-MOSFET random access memory
US4271418A (en) * 1979-10-29 1981-06-02 American Microsystems, Inc. VMOS Memory cell and method for making same
JPS5681968A (en) * 1979-12-07 1981-07-04 Toshiba Corp Manufacture of semiconductor device
US4295924A (en) * 1979-12-17 1981-10-20 International Business Machines Corporation Method for providing self-aligned conductor in a V-groove device
US4335450A (en) * 1980-01-30 1982-06-15 International Business Machines Corporation Non-destructive read out field effect transistor memory cell system
KR920010461B1 (ko) * 1983-09-28 1992-11-28 가부시끼가이샤 히다찌세이사꾸쇼 반도체 메모리와 그 제조 방법
JPS60136378A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 半導体装置およびその製造方法
JPH0648719B2 (ja) * 1984-01-20 1994-06-22 株式会社日立製作所 半導体記憶装置
DE3565339D1 (en) * 1984-04-19 1988-11-03 Nippon Telegraph & Telephone Semiconductor memory device and method of manufacturing the same
US4672410A (en) * 1984-07-12 1987-06-09 Nippon Telegraph & Telephone Semiconductor memory device with trench surrounding each memory cell
US4673962A (en) * 1985-03-21 1987-06-16 Texas Instruments Incorporated Vertical DRAM cell and method
JPH0682800B2 (ja) * 1985-04-16 1994-10-19 株式会社東芝 半導体記憶装置
JPH0680805B2 (ja) * 1985-05-29 1994-10-12 日本電気株式会社 Ｍｉｓ型半導体記憶装置
US4673963A (en) * 1985-08-27 1987-06-16 Texas Instruments Incorporated High well capacity CCD imager

Also Published As

Publication number Publication date
NO872721D0 (no) 1987-06-29
BR8703296A (pt) 1988-03-15
CA1283480C (en) 1991-04-23
US4769786A (en) 1988-09-06
NO172714C (no) 1993-08-25
ES2044872T3 (es) 1994-01-16
DE3787687T2 (de) 1994-05-05
ATE95632T1 (de) 1993-10-15
AU594169B2 (en) 1990-03-01
NO172714B (no) 1993-05-18
AU7524887A (en) 1988-01-21
JPS6321866A (ja) 1988-01-29
DK365487A (da) 1988-01-16
NO872721L (no) 1988-01-18
EP0254046A1 (de) 1988-01-27
DK365487D0 (da) 1987-07-14
EP0254046B1 (de) 1993-10-06
JPH07101731B2 (ja) 1995-11-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee