DE3851631D1 - System und verfahren zum nachweis der position und bewegung. - Google Patents
System und verfahren zum nachweis der position und bewegung.Info
- Publication number
- DE3851631D1 DE3851631D1 DE3851631T DE3851631T DE3851631D1 DE 3851631 D1 DE3851631 D1 DE 3851631D1 DE 3851631 T DE3851631 T DE 3851631T DE 3851631 T DE3851631 T DE 3851631T DE 3851631 D1 DE3851631 D1 DE 3851631D1
- Authority
- DE
- Germany
- Prior art keywords
- fet
- channel region
- movement
- detected
- freedom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/070,349 US4767973A (en) | 1987-07-06 | 1987-07-06 | Systems and methods for sensing position and movement |
PCT/US1988/002260 WO1989000295A1 (en) | 1987-07-06 | 1988-07-05 | Systems and methods for sensing position and movement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3851631D1 true DE3851631D1 (de) | 1994-10-27 |
DE3851631T2 DE3851631T2 (de) | 1995-02-23 |
Family
ID=22094766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3851631T Expired - Fee Related DE3851631T2 (de) | 1987-07-06 | 1988-07-05 | System und verfahren zum nachweis der position und bewegung. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4767973A (de) |
EP (1) | EP0371990B1 (de) |
JP (1) | JP2554730B2 (de) |
AT (1) | ATE112060T1 (de) |
AU (1) | AU2087288A (de) |
DE (1) | DE3851631T2 (de) |
WO (1) | WO1989000295A1 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4818895A (en) * | 1987-11-13 | 1989-04-04 | Kaufman Lance R | Direct current sense lead |
US4980646A (en) * | 1988-03-30 | 1990-12-25 | The Trustees Of The University Of Pennsylvania | Impedance tomographic tactile sensor |
US5354695A (en) * | 1992-04-08 | 1994-10-11 | Leedy Glenn J | Membrane dielectric isolation IC fabrication |
US5109701A (en) * | 1989-04-03 | 1992-05-05 | Sarcos Group | Field-based movement sensor |
US4964306A (en) * | 1989-04-03 | 1990-10-23 | Sarcos Group | Field-based movement sensor |
CA2026873C (en) * | 1989-10-04 | 1997-06-17 | Stephen C. Jacobsen | Mechanical/electrical displacement transducer |
US5457368A (en) * | 1993-03-09 | 1995-10-10 | University Of Utah Research Foundation | Mechanical/electrical displacement transducer |
US5198740A (en) * | 1989-10-04 | 1993-03-30 | University Of Utah Research Foundation | Sliding contact mechanical/electrical displacement transducer |
US5235225A (en) * | 1990-08-31 | 1993-08-10 | Northwestern University | Linear electrostatic actuator with means for concatenation |
US5481184A (en) * | 1991-12-31 | 1996-01-02 | Sarcos Group | Movement actuator/sensor systems |
GB9303111D0 (en) * | 1993-02-17 | 1993-03-31 | Hitachi Europ Ltd | Displacement transducer |
DE59401352D1 (de) * | 1994-07-01 | 1997-01-30 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmesseinrichtung |
DE19607335A1 (de) * | 1995-02-28 | 1996-08-29 | Ebara Corp | Elektronenmikroskop |
JP3326669B2 (ja) * | 1995-06-30 | 2002-09-24 | ソニー株式会社 | データ再生装置 |
US5840047A (en) * | 1996-04-16 | 1998-11-24 | Prosthetic Sensing Technologies, Llc | Sensor device for monitoring a prosthetic device |
US5806365A (en) * | 1996-04-30 | 1998-09-15 | Motorola, Inc. | Acceleration sensing device on a support substrate and method of operation |
US6026316A (en) * | 1997-05-15 | 2000-02-15 | Regents Of The University Of Minnesota | Method and apparatus for use with MR imaging |
US6272370B1 (en) | 1998-08-07 | 2001-08-07 | The Regents Of University Of Minnesota | MR-visible medical device for neurological interventions using nonlinear magnetic stereotaxis and a method imaging |
US6061587A (en) * | 1997-05-15 | 2000-05-09 | Regents Of The University Of Minnesota | Method and apparatus for use with MR imaging |
US7048716B1 (en) | 1997-05-15 | 2006-05-23 | Stanford University | MR-compatible devices |
US6039075A (en) | 1997-06-12 | 2000-03-21 | Sarco Lc | Band controlled valve/actuator |
US5964705A (en) | 1997-08-22 | 1999-10-12 | Image-Guided Drug Delivery System, Inc. | MR-compatible medical devices |
US6463317B1 (en) | 1998-05-19 | 2002-10-08 | Regents Of The University Of Minnesota | Device and method for the endovascular treatment of aneurysms |
DE10029501C1 (de) * | 2000-06-21 | 2001-10-04 | Fraunhofer Ges Forschung | Vertikal-Transistor mit beweglichen Gate und Verfahren zu dessen Herstelllung |
US6791931B2 (en) * | 2001-03-16 | 2004-09-14 | Hewlett-Packard Development Company, L.P. | Accelerometer using field emitter technology |
DE10149165A1 (de) * | 2001-10-04 | 2003-04-30 | Bircher Ag Beringen | Verfahren zur Herstellung eines Sensorelementes, insbesondere Schaltelementes |
US20090027038A1 (en) * | 2002-10-23 | 2009-01-29 | Elsa Garmire | Systems And Methods That Detect Changes In Incident Optical Radiation |
DE102004023330A1 (de) * | 2004-05-12 | 2005-12-08 | Robert Bosch Gmbh | Ortungsgerät sowie Verfahren zur Kalibrierung eines Ortungsgeräts |
JP4794828B2 (ja) * | 2004-06-08 | 2011-10-19 | キヤノン株式会社 | 電位測定装置および画像形成装置 |
US20060074295A1 (en) * | 2004-10-01 | 2006-04-06 | Nexgen | Combined MR coil technology in medical devices |
US20070279399A1 (en) * | 2006-05-31 | 2007-12-06 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Method and apparatus for obtaining navigation information from a ball mounted in a stylus |
JP2008008739A (ja) * | 2006-06-29 | 2008-01-17 | Toshiba Mach Co Ltd | 信号処理装置、速度検出装置、サーボ機構 |
US9285930B2 (en) * | 2007-05-09 | 2016-03-15 | Wacom Co., Ltd. | Electret stylus for touch-sensor device |
US9241227B2 (en) * | 2011-01-06 | 2016-01-19 | Bose Corporation | Transducer with integrated sensor |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3016752A (en) * | 1960-11-16 | 1962-01-16 | Eugene C Huebschmann | Transistor type accelerometer |
DE1231033B (de) * | 1963-09-13 | 1966-12-22 | Siemens Ag | Druckempfindliches Halbleiterbauelement mit drei Zonen abwechselnd entgegengesetztenLeitungstyps und einem Stempel auf einer Zone |
DE1197510B (de) * | 1963-12-14 | 1965-07-29 | Siemens Ag | Elektroakustischer Wandler auf Halbleiterbasis |
US3294988A (en) * | 1964-09-24 | 1966-12-27 | Hewlett Packard Co | Transducers |
GB1088794A (en) * | 1964-12-23 | 1967-10-25 | Standard Telephones Cables Ltd | Improvements in or relating to semiconductor devices |
US3569747A (en) * | 1965-07-14 | 1971-03-09 | Kistler Instr Corp | Piezoelectric transducer |
US3351786A (en) * | 1965-08-06 | 1967-11-07 | Univ California | Piezoelectric-semiconductor, electromechanical transducer |
US3436492A (en) * | 1966-01-17 | 1969-04-01 | Northern Electric Co | Field effect electroacoustic transducer |
US3612778A (en) * | 1967-05-15 | 1971-10-12 | Thermo Electron Corp | Electret acoustic transducer and method of making |
US3585466A (en) * | 1968-12-10 | 1971-06-15 | Westinghouse Electric Corp | Resonant gate transistor with improved gain having a vibratory member disposed in a spaced relationship between a field responsive member and a field plate |
US3585415A (en) * | 1969-10-06 | 1971-06-15 | Univ California | Stress-strain transducer charge coupled to a piezoelectric material |
US3935481A (en) * | 1970-03-19 | 1976-01-27 | Kureha Kagaku Kogyo Kabushiki Kaisha | Field effect transistor switch with electrect for control |
DE2113053A1 (de) * | 1970-03-19 | 1971-09-30 | Kureha Chemical Ind Co Ltd | Verfahren und Vorrichtung zum Steuern eines elektrischen Stromkreises |
DE2107555B2 (de) * | 1971-02-17 | 1972-08-31 | F. Hoffmann-La Roche & Co., Ag, Basel (Schweiz) | Ultraschallbildaufnahmeanordnung |
JPS5221046Y2 (de) * | 1971-08-31 | 1977-05-14 | ||
SE358801B (de) * | 1971-10-13 | 1973-08-06 | Ericsson Telefon Ab L M | |
JPS4861126A (de) * | 1971-12-02 | 1973-08-27 | ||
SE362571B (de) * | 1971-12-02 | 1973-12-10 | Ericsson Telefon Ab L M | |
US3973146A (en) * | 1974-03-18 | 1976-08-03 | North American Philips Corporation | Signal detector comprising field effect transistors |
US4035822A (en) * | 1975-03-14 | 1977-07-12 | Rca Corporation | Pressure sensitive field effect device |
US3978508A (en) * | 1975-03-14 | 1976-08-31 | Rca Corporation | Pressure sensitive field effect device |
US4047214A (en) * | 1975-09-04 | 1977-09-06 | Westinghouse Electric Corporation | Electrostatically bonded dielectric-on-semiconductor device, and a method of making the same |
US4035823A (en) * | 1975-10-06 | 1977-07-12 | Honeywell Inc. | Stress sensor apparatus |
DE2556298C2 (de) * | 1975-12-13 | 1982-05-13 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Piezoelektrischer Beschleunigungsgeber |
US4360955A (en) * | 1978-05-08 | 1982-11-30 | Barry Block | Method of making a capacitive force transducer |
US4331840A (en) * | 1980-02-22 | 1982-05-25 | Lectret S.A. | Electret transducer with tapered acoustic chamber |
US4390800A (en) * | 1980-06-30 | 1983-06-28 | Tokyo Shibaura Denki Kabushiki Kaisha | Electret device |
US4441038A (en) * | 1980-06-30 | 1984-04-03 | Tokyo Shibaura Denki Kabushiki Kaisha | Electret device |
US4378510A (en) * | 1980-07-17 | 1983-03-29 | Motorola Inc. | Miniaturized accelerometer with piezoelectric FET |
AT366862B (de) * | 1980-07-28 | 1982-05-10 | Akg Akustische Kino Geraete | Elektroakustischer wandler nach dem zweiwegprinzip |
US4443666A (en) * | 1980-11-24 | 1984-04-17 | Gentex Corporation | Electret microphone assembly |
US4527218A (en) * | 1981-06-08 | 1985-07-02 | At&T Bell Laboratories | Stable positively charged Teflon electrets |
DK146770C (da) * | 1981-11-13 | 1984-06-04 | Brueel & Kjaer As | Kapacitiv transducer |
US4716371A (en) * | 1985-07-22 | 1987-12-29 | The Simco Company, Inc. | Non-contact autoranging electrostatic fieldmeter with automatic distance indicator |
-
1987
- 1987-07-06 US US07/070,349 patent/US4767973A/en not_active Expired - Fee Related
-
1988
- 1988-07-05 WO PCT/US1988/002260 patent/WO1989000295A1/en active IP Right Grant
- 1988-07-05 AT AT88906565T patent/ATE112060T1/de not_active IP Right Cessation
- 1988-07-05 AU AU20872/88A patent/AU2087288A/en not_active Abandoned
- 1988-07-05 JP JP63506282A patent/JP2554730B2/ja not_active Expired - Fee Related
- 1988-07-05 EP EP88906565A patent/EP0371990B1/de not_active Expired - Lifetime
- 1988-07-05 DE DE3851631T patent/DE3851631T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4767973A (en) | 1988-08-30 |
WO1989000295A1 (en) | 1989-01-12 |
EP0371990A1 (de) | 1990-06-13 |
EP0371990A4 (en) | 1991-01-30 |
AU2087288A (en) | 1989-01-30 |
JP2554730B2 (ja) | 1996-11-13 |
EP0371990B1 (de) | 1994-09-21 |
ATE112060T1 (de) | 1994-10-15 |
JPH03502132A (ja) | 1991-05-16 |
DE3851631T2 (de) | 1995-02-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |