DE3870643D1 - Verfahren zum bestimmen der dicke von schichten, seine anwendung zum bestimmen gewisser wechselwirkungen und mittel zur realisierung dieses verfahrens. - Google Patents

Verfahren zum bestimmen der dicke von schichten, seine anwendung zum bestimmen gewisser wechselwirkungen und mittel zur realisierung dieses verfahrens.

Info

Publication number
DE3870643D1
DE3870643D1 DE8888200230T DE3870643T DE3870643D1 DE 3870643 D1 DE3870643 D1 DE 3870643D1 DE 8888200230 T DE8888200230 T DE 8888200230T DE 3870643 T DE3870643 T DE 3870643T DE 3870643 D1 DE3870643 D1 DE 3870643D1
Authority
DE
Germany
Prior art keywords
thickness
carrier
determining
layer
thin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888200230T
Other languages
English (en)
Inventor
Gerrit Cornelis Dubbeldam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akzo Nobel NV
Original Assignee
Akzo NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akzo NV filed Critical Akzo NV
Application granted granted Critical
Publication of DE3870643D1 publication Critical patent/DE3870643D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
DE8888200230T 1987-02-12 1988-02-09 Verfahren zum bestimmen der dicke von schichten, seine anwendung zum bestimmen gewisser wechselwirkungen und mittel zur realisierung dieses verfahrens. Expired - Fee Related DE3870643D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8700337 1987-02-12

Publications (1)

Publication Number Publication Date
DE3870643D1 true DE3870643D1 (de) 1992-06-11

Family

ID=19849559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888200230T Expired - Fee Related DE3870643D1 (de) 1987-02-12 1988-02-09 Verfahren zum bestimmen der dicke von schichten, seine anwendung zum bestimmen gewisser wechselwirkungen und mittel zur realisierung dieses verfahrens.

Country Status (6)

Country Link
US (1) US4908508A (de)
EP (1) EP0278577B1 (de)
JP (1) JP2559053B2 (de)
AT (1) ATE75847T1 (de)
CA (1) CA1296886C (de)
DE (1) DE3870643D1 (de)

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SE462408B (sv) * 1988-11-10 1990-06-18 Pharmacia Ab Optiskt biosensorsystem utnyttjande ytplasmonresonans foer detektering av en specific biomolekyl, saett att kalibrera sensoranordningen samt saett att korrigera foer baslinjedrift i systemet
EP0419082B1 (de) * 1989-09-21 1996-04-17 Stanley Electric Corporation Gerät zur optischen Abstandmessung
US5129724A (en) * 1991-01-29 1992-07-14 Wyko Corporation Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
JPH08500667A (ja) * 1992-06-24 1996-01-23 アクゾ・エヌ・ベー 分光学を用いて同一表面上の多数の免疫複合体を測定する方法
EP1635162A3 (de) * 1992-07-31 2010-02-24 Inverness Medical - BioStar Inc. Vorrichtungen und Verfahren zur Detektion eines Analyten mittels optischer Interferenz
US5499733A (en) * 1992-09-17 1996-03-19 Luxtron Corporation Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
US5325181A (en) * 1992-10-22 1994-06-28 International Business Machines Corporation Nulling optical bridge for measurement of changes in reflectivity and/or transmissivity
US5362962A (en) * 1993-04-16 1994-11-08 Edison Welding Institute Method and apparatus for measuring pipeline corrosion
US5365067A (en) * 1993-06-30 1994-11-15 National Research Council Of Canada Method and device for evaluation of surface properties, especially molecular orientation, in non-transparent layers
US5891352A (en) 1993-09-16 1999-04-06 Luxtron Corporation Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
US5764365A (en) 1993-11-09 1998-06-09 Nova Measuring Instruments, Ltd. Two-dimensional beam deflector
IL107549A (en) 1993-11-09 1996-01-31 Nova Measuring Instr Ltd Device for measuring the thickness of thin films
DE4420293A1 (de) * 1994-06-10 1995-12-14 Dresden Messelektronik Gmbh Vorrichtung zur berührungslosen Bestimmung des Oberflächenprofils eines Werkstücks
DE4434473A1 (de) * 1994-09-27 1996-03-28 Basler Gmbh Verfahren und Vorrichtung zur Qualitätskontrolle von Gegenständen mit polarisiertem Licht
JPH08316279A (ja) * 1995-02-14 1996-11-29 Internatl Business Mach Corp <Ibm> 半導体基体の厚さ測定方法及びその測定装置
EP1650547B1 (de) * 1996-04-30 2011-10-19 FUJIFILM Corporation Oberflächenplasmonensensor
JPH10160576A (ja) * 1996-11-27 1998-06-19 Yuureka:Kk 偏光解析装置の波長変更方法
US6134011A (en) * 1997-09-22 2000-10-17 Hdi Instrumentation Optical measurement system using polarized light
IL123575A (en) * 1998-03-05 2001-08-26 Nova Measuring Instr Ltd Method and apparatus for alignment of a wafer
EP0973069A3 (de) * 1998-07-14 2006-10-04 Nova Measuring Instruments Limited Kontrollgerät und photolithographisches Verfahren zur Behandlung von Substraten
US6212961B1 (en) 1999-02-11 2001-04-10 Nova Measuring Instruments Ltd. Buffer system for a wafer handling system
WO2001011310A1 (en) * 1999-08-06 2001-02-15 Thermo Biostar, Inc. Instruments for analyzing binding assays based on attenuation of light by thin films
US6485205B2 (en) 2000-12-19 2002-11-26 Hewlett-Packard Company Media weight sensor using an acoustic resonator
US6467977B2 (en) 2000-12-19 2002-10-22 Hewlett-Packard Company Media weight sensor using a resonant piezoelectric element
US7470518B2 (en) 2002-02-12 2008-12-30 Cellectricon Ab Systems and method for rapidly changing the solution environment around sensors
EP1476536B1 (de) 2002-02-12 2011-07-20 Cellectricon Ab Systeme und verfahren zur schnellen änderung der lösungsumgebung von sensoren
US20030219754A1 (en) * 2002-05-23 2003-11-27 Oleksy Jerome E. Fluorescence polarization detection of nucleic acids
US20060192960A1 (en) * 2003-03-24 2006-08-31 Rencs Erik V Polarization detection
RU2231046C1 (ru) * 2003-05-30 2004-06-20 Деревягин Александр Михайлович Способ измерения точки росы и устройство для его осуществления
US8315834B2 (en) * 2003-12-17 2012-11-20 Siemens Energy, Inc. System and method for measuring coating thickness
US7206066B2 (en) * 2004-03-19 2007-04-17 Kla-Tencor Technologies Corporation Reflectance surface analyzer
EP1619465A1 (de) * 2004-07-19 2006-01-25 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Vorrichtung und Verfahren zur optischen Überwachung von Schichten
AT504136B1 (de) * 2006-12-29 2008-03-15 Univ Linz Verfahren zur bestimmung der dicke einer metallisierungsschicht auf einer polymerfolie
DE102008021199A1 (de) * 2008-04-28 2009-10-29 Focke & Co.(Gmbh & Co. Kg) Verfahren und Vorrichtung zum Prüfen von mit Folie umwickelten Zigarettenpackungen
KR101105328B1 (ko) * 2009-11-23 2012-01-16 한국표준과학연구원 분자 흡착 및 해리 동특성 측정장치 및 측정방법
EP3526587B1 (de) * 2016-10-13 2024-05-01 Instrumentation Laboratory Company Gesamtproteinmessung mittels vollblutrefraktometrie

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US2556344A (en) * 1948-12-14 1951-06-12 Silge Martin Refractometer employing the principle of total reflection
US2666355A (en) * 1951-10-12 1954-01-19 Hans J Trurnit Method of studying chemical reactions by measuring interfacial film thicknesses
US3017512A (en) * 1959-06-29 1962-01-16 American Can Co Coating thickness gauge
DE3176524D1 (en) * 1981-06-22 1987-12-17 Battelle Memorial Institute A method for determining bioactive substances
DE3135196A1 (de) * 1981-09-05 1983-03-17 Merck Patent Gmbh, 6100 Darmstadt Verfahren, mittel und vorrichtung zur bestimmung biologischer komponenten
US4585348A (en) * 1981-09-28 1986-04-29 International Business Machines Corporation Ultra-fast photometric instrument
NO850157L (no) * 1984-01-16 1985-10-23 Barringer Research Ltd Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate.
US4672196A (en) * 1984-02-02 1987-06-09 Canino Lawrence S Method and apparatus for measuring properties of thin materials using polarized light
US4681450A (en) * 1985-06-21 1987-07-21 Research Corporation Photodetector arrangement for measuring the state of polarization of light

Also Published As

Publication number Publication date
JPS63201507A (ja) 1988-08-19
JP2559053B2 (ja) 1996-11-27
ATE75847T1 (de) 1992-05-15
EP0278577B1 (de) 1992-05-06
EP0278577A1 (de) 1988-08-17
US4908508A (en) 1990-03-13
CA1296886C (en) 1992-03-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AKZO NOBEL N.V., ARNHEIM/ARNHEM, NL

8339 Ceased/non-payment of the annual fee