DE3882689D1 - Testprobe fuer elektrische signale. - Google Patents

Testprobe fuer elektrische signale.

Info

Publication number
DE3882689D1
DE3882689D1 DE8888120574T DE3882689T DE3882689D1 DE 3882689 D1 DE3882689 D1 DE 3882689D1 DE 8888120574 T DE8888120574 T DE 8888120574T DE 3882689 T DE3882689 T DE 3882689T DE 3882689 D1 DE3882689 D1 DE 3882689D1
Authority
DE
Germany
Prior art keywords
test sample
electrical signals
signals
electrical
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888120574T
Other languages
English (en)
Other versions
DE3882689T2 (de
Inventor
Jean-Marc Halbout
Mark Benjamin Ketchen
Paul Andrew Moskowitz
Michael Roy Scheuermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE3882689D1 publication Critical patent/DE3882689D1/de
Application granted granted Critical
Publication of DE3882689T2 publication Critical patent/DE3882689T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
DE88120574T 1988-01-15 1988-12-09 Testprobe für elektrische Signale. Expired - Fee Related DE3882689T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/144,215 US4851767A (en) 1988-01-15 1988-01-15 Detachable high-speed opto-electronic sampling probe

Publications (2)

Publication Number Publication Date
DE3882689D1 true DE3882689D1 (de) 1993-09-02
DE3882689T2 DE3882689T2 (de) 1994-02-17

Family

ID=22507591

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88120574T Expired - Fee Related DE3882689T2 (de) 1988-01-15 1988-12-09 Testprobe für elektrische Signale.

Country Status (4)

Country Link
US (1) US4851767A (de)
EP (1) EP0324110B1 (de)
JP (1) JPH01182767A (de)
DE (1) DE3882689T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5034903A (en) * 1989-01-30 1991-07-23 Alfano Robert R Apparatus and method for measuring the time evolution of carriers propogating within submicron and micron electronic devices
US5041783A (en) * 1989-02-13 1991-08-20 Olympus Optical Co., Ltd. Probe unit for an atomic probe microscope
US5006789A (en) * 1989-05-23 1991-04-09 The University Of Rochester Electro-optic signal measurement
JPH0680713B2 (ja) * 1989-10-11 1994-10-12 三菱電機株式会社 ウエハ試験用プローブカードおよびその製造方法
US5177437A (en) * 1990-08-08 1993-01-05 Photon Dynamics, Inc. High-density optically-addressable circuit board probe panel and method for use
JPH0496792U (de) * 1991-01-31 1992-08-21
US5274325A (en) * 1991-03-18 1993-12-28 Nippon Telegraph And Telephone Corporation Method and apparatus for electro-optic sampling measurement of electrical signals in integrated circuits
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
EP0559274A3 (en) * 1992-03-03 1994-06-29 Philips Nv Probe apparatus and method for measuring high-frequency signals
US5317256A (en) * 1992-05-12 1994-05-31 University Of Michigan High-speed, high-impedance external photoconductive-type sampling probe/pulser
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
WO1994024575A1 (en) * 1993-04-13 1994-10-27 Teratec Corporation Electrooptic instrument
US5583445A (en) * 1994-02-04 1996-12-10 Hughes Aircraft Company Opto-electronic membrane probe
US5663657A (en) * 1994-09-26 1997-09-02 University Of South Florida Determining long minority carrier diffusion lengths
US6037797A (en) * 1997-07-11 2000-03-14 Semiconductor Diagnostics, Inc. Measurement of the interface trap charge in an oxide semiconductor layer interface
DE19928338C1 (de) * 1999-06-21 2001-01-18 Univ Gesamthochschule Kassel Verfahren zur räumlichen und zeitlichen Abtastung ultraschneller elektrischer Signale einer Probe mittels einer Cantileversonde aus Halbleitermaterial für die Rastersondenmikroskopie
US6400165B1 (en) * 2000-02-02 2002-06-04 Lucent Technologies Inc. Ultra-fast probe
US6512384B1 (en) 2000-06-29 2003-01-28 Semiconductor Diagnostics, Inc. Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages
JP2002214050A (ja) * 2000-12-01 2002-07-31 Agilent Technol Inc 光サンプリング装置
DE10143173A1 (de) * 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7427868B2 (en) 2003-12-24 2008-09-23 Cascade Microtech, Inc. Active wafer probe
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7990165B2 (en) 2006-04-21 2011-08-02 National Institute Of Advanced Industrial Science And Technology Contact probe and method of making the same
US7609077B2 (en) * 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7992280B2 (en) 2008-01-07 2011-08-09 Mssc Us Method of casting metal anti-shift collars for stabilizer bar
US11768225B2 (en) 2021-06-29 2023-09-26 International Business Machines Corporation Removable contactless probe
CN114563650B (zh) * 2022-04-26 2022-07-05 苏州威达智电子科技有限公司 一种Micro LED智能压接点亮检测装置及其检测方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3405361A (en) * 1964-01-08 1968-10-08 Signetics Corp Fluid actuable multi-point microprobe for semiconductors
US4065717A (en) * 1970-09-15 1977-12-27 Signetics Corporation Multi-point microprobe for testing integrated circuits
US4021112A (en) * 1975-06-23 1977-05-03 Xerox Corporation Photoreceptor dark current leakage detecting apparatus for xerographic machines
US4141756A (en) * 1977-10-14 1979-02-27 Honeywell Inc. Method of making a gap UV photodiode by multiple ion-implantations
US4128843A (en) * 1977-10-14 1978-12-05 Honeywell Inc. GaP Directed field UV photodiode
US4301409A (en) * 1978-06-06 1981-11-17 California Institute Of Technology Solar cell anomaly detection method and apparatus
US4218618A (en) * 1979-02-21 1980-08-19 The University Of Rochester Apparatus for switching high voltage pulses with picosecond accuracy
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
US4446425A (en) * 1982-02-12 1984-05-01 The University Of Rochester Measurement of electrical signals with picosecond resolution
US4712057A (en) * 1983-05-25 1987-12-08 Battelle Memorial Institute Method of examining and testing an electric device such as an integrated or printed circuit
US4510675A (en) * 1983-08-03 1985-04-16 Sovonics Solar Systems System for eliminating short and latent short circuit current paths in photovoltaic devices
JPS6073367A (ja) * 1983-09-30 1985-04-25 Fujitsu Ltd エネルギ−分析装置
US4709141A (en) * 1986-01-09 1987-11-24 Rockwell International Corporation Non-destructive testing of cooled detector arrays
JPH0673366A (ja) * 1992-08-27 1994-03-15 Lion Corp 油ゲル化剤

Also Published As

Publication number Publication date
EP0324110A2 (de) 1989-07-19
US4851767A (en) 1989-07-25
JPH01182767A (ja) 1989-07-20
EP0324110A3 (en) 1990-12-05
EP0324110B1 (de) 1993-07-28
DE3882689T2 (de) 1994-02-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee