DE4135655A1 - Mikrominiaturisierte, elektrostatisch betriebene membranpumpe - Google Patents
Mikrominiaturisierte, elektrostatisch betriebene membranpumpeInfo
- Publication number
- DE4135655A1 DE4135655A1 DE4135655A DE4135655A DE4135655A1 DE 4135655 A1 DE4135655 A1 DE 4135655A1 DE 4135655 A DE4135655 A DE 4135655A DE 4135655 A DE4135655 A DE 4135655A DE 4135655 A1 DE4135655 A1 DE 4135655A1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- pump body
- diaphragm pump
- pump according
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 43
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000012528 membrane Substances 0.000 claims description 59
- 239000007788 liquid Substances 0.000 claims description 29
- 238000005086 pumping Methods 0.000 claims description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- 241000446313 Lamella Species 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims 1
- 239000011796 hollow space material Substances 0.000 abstract 3
- 230000003014 reinforcing effect Effects 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000005686 electrostatic field Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 230000002706 hydrostatic effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/1055—Flap valves the valve being formed by one or more flexible elements more than two flexible elements oscillating around a fixed point
Description
Claims (24)
daß an den zweiten Pumpenkörper (3; 33) ein dritter Pumpenkörper (12; 34) anschließt, und
daß der zweite Pumpenkörper (3; 33) an der zu dem dritten Pumpenkörper (12; 34) weisenden Seite eine Ausnehmung (7; 44) aufweist, die zusammen mit dem dritten Pumpenkörper (3; 34) die Pumpkammer (19; 48) bildet.
daß in dem dritten Pumpenkörper (12) mindestens zwei in die Pumpkammer (19) mündende Durchtrittsöffnungen (15, 16) ausgebildet sind und
daß der Durchfluß durch die mindestens zwei Durch trittsöffnungen (15, 16) durch Rückschlagventile (17, 18) steuerbar ist.
daß die Pumpkammer (48) mit einem Raumbereich (46) in Fluidverbindung steht, an den zwei Durchtrittsöffnun gen (41, 47) anschließen, und
daß der Fluiddurchfluß durch die zwei Durchtrittsöff nungen (41, 47) durch je ein Rückschlagventil (52, 53) steuerbar ist.
daß der dritte Pumpenkörper (12) aus zwei miteinander verbundenen Teilkörpern (22a, 22b) besteht, von denen ein jeder eine erste Durchtrittsöffnung (24a bzw. 24b) und eine zweite Durchtrittsöffnung (25a bzw. 25b) auf weist, wobei die erste Durchtrittsöffnung (24a bzw. 24b) in dem einen Teilkörper (22a bzw. 22b) mit der zweiten Durchtrittsöffnung (25a bzw. 25b) in dem an deren Teilkörper (22b bzw. 22a) in Fluidverbindung steht, und
daß in der zweiten Durchtrittsöffnung (25a bzw. 25b) sich zu der Fluidströmungsrichtung unter einem spitzen Winkel erstreckende Lamellenabschnitte (28) angeordnet sind, die an einem ihrer Enden über dünne, elastische Verbindungsstege (27) mit dem Teilkörper (22a bzw. 22b), in dessen Durchtrittsöffnung (25a bzw. 25b) sich die Lamellenabschnitte (28) erstrecken, im Bereich seiner von dem anderen Teilkörper (22b) fortweisenden Seite verbunden sind und in Richtung zu der Oberfläche des zweiten Teilkörpers (22b) einander nähernd verlau fen.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4143343A DE4143343C2 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe |
DE4135655A DE4135655A1 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene membranpumpe |
PCT/DE1992/000630 WO1993005295A1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe |
DE59204373T DE59204373D1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe. |
US08/204,265 US5529465A (en) | 1991-09-11 | 1992-07-28 | Micro-miniaturized, electrostatically driven diaphragm micropump |
KR1019940700780A KR0119362B1 (ko) | 1991-09-11 | 1992-07-28 | 초소형 정전 구동 격판 마이크로펌프 |
EP92916327A EP0603201B1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4130211 | 1991-09-11 | ||
DE4135655A DE4135655A1 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene membranpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
DE4135655A1 true DE4135655A1 (de) | 1993-03-18 |
DE4135655C2 DE4135655C2 (de) | 1993-08-05 |
Family
ID=25907199
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4143343A Expired - Fee Related DE4143343C2 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe |
DE4135655A Granted DE4135655A1 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene membranpumpe |
DE59204373T Expired - Fee Related DE59204373D1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4143343A Expired - Fee Related DE4143343C2 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE59204373T Expired - Fee Related DE59204373D1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5529465A (de) |
EP (1) | EP0603201B1 (de) |
KR (1) | KR0119362B1 (de) |
DE (3) | DE4143343C2 (de) |
WO (1) | WO1993005295A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4332720A1 (de) * | 1993-09-25 | 1995-03-30 | Kernforschungsz Karlsruhe | Mikromembranpumpe |
DE4405026A1 (de) * | 1994-02-17 | 1995-08-24 | Rossendorf Forschzent | Mikro-Fluidmanipulator |
Families Citing this family (175)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4422743A1 (de) * | 1994-06-29 | 1996-01-04 | Torsten Gerlach | Mikropumpe |
DE4433894A1 (de) * | 1994-09-22 | 1996-03-28 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe |
DE19624271C1 (de) * | 1996-06-18 | 1998-01-22 | Inst Mikro Und Informationstec | Rückschlagventillose Fluidpumpe |
US5919582A (en) * | 1995-10-18 | 1999-07-06 | Aer Energy Resources, Inc. | Diffusion controlled air vent and recirculation air manager for a metal-air battery |
DE19546570C1 (de) * | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
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DE19719861A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines Mikromembranpumpenkörpers |
DE19719862A1 (de) | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
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WO1990015929A1 (fr) * | 1989-06-14 | 1990-12-27 | Westonbridge International Limited | Micropompe perfectionnee |
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1991
- 1991-10-29 DE DE4143343A patent/DE4143343C2/de not_active Expired - Fee Related
- 1991-10-29 DE DE4135655A patent/DE4135655A1/de active Granted
-
1992
- 1992-07-28 US US08/204,265 patent/US5529465A/en not_active Expired - Fee Related
- 1992-07-28 WO PCT/DE1992/000630 patent/WO1993005295A1/de active IP Right Grant
- 1992-07-28 KR KR1019940700780A patent/KR0119362B1/ko not_active IP Right Cessation
- 1992-07-28 DE DE59204373T patent/DE59204373D1/de not_active Expired - Fee Related
- 1992-07-28 EP EP92916327A patent/EP0603201B1/de not_active Expired - Lifetime
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Publication number | Priority date | Publication date | Assignee | Title |
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WO1990015929A1 (fr) * | 1989-06-14 | 1990-12-27 | Westonbridge International Limited | Micropompe perfectionnee |
DE4006152A1 (de) * | 1990-02-27 | 1991-08-29 | Fraunhofer Ges Forschung | Mikrominiaturisierte pumpe |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4332720A1 (de) * | 1993-09-25 | 1995-03-30 | Kernforschungsz Karlsruhe | Mikromembranpumpe |
DE4405026A1 (de) * | 1994-02-17 | 1995-08-24 | Rossendorf Forschzent | Mikro-Fluidmanipulator |
Also Published As
Publication number | Publication date |
---|---|
EP0603201A1 (de) | 1994-06-29 |
DE4143343A1 (de) | 1993-03-25 |
WO1993005295A1 (de) | 1993-03-18 |
DE4135655C2 (de) | 1993-08-05 |
DE4143343C2 (de) | 1994-09-22 |
KR0119362B1 (ko) | 1997-09-30 |
US5529465A (en) | 1996-06-25 |
DE59204373D1 (de) | 1995-12-21 |
EP0603201B1 (de) | 1995-11-15 |
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