DE502006003379D1 - Verfahren und anordnung zur konfokalen, chromatischen, interferometrischen, spektroskopischen abtastung für optische mehrlagen-datenspeicher - Google Patents

Verfahren und anordnung zur konfokalen, chromatischen, interferometrischen, spektroskopischen abtastung für optische mehrlagen-datenspeicher

Info

Publication number
DE502006003379D1
DE502006003379D1 DE502006003379T DE502006003379T DE502006003379D1 DE 502006003379 D1 DE502006003379 D1 DE 502006003379D1 DE 502006003379 T DE502006003379 T DE 502006003379T DE 502006003379 T DE502006003379 T DE 502006003379T DE 502006003379 D1 DE502006003379 D1 DE 502006003379D1
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DE
Germany
Prior art keywords
chromatic
confocal
interferometrical
arrangement
data storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502006003379T
Other languages
English (en)
Inventor
Klaus Koerner
Reinhard Berger
Ulrich Droste
Christian Kohler
Wolfgang Osten
Christof Pruss
Aiko Ruprecht
Tobias Wiesendanger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Stuttgart
Original Assignee
Universitaet Stuttgart
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Stuttgart filed Critical Universitaet Stuttgart
Publication of DE502006003379D1 publication Critical patent/DE502006003379D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1384—Fibre optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02035—Shaping the focal point, e.g. elongated focus
    • G01B9/02036—Shaping the focal point, e.g. elongated focus by using chromatic effects, e.g. a wavelength dependent focal point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125—Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/127—Lasers; Multiple laser arrays
    • G11B7/1275—Two or more lasers having different wavelengths
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/13—Optical detectors therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/14—Heads, e.g. forming of the optical beam spot or modulation of the optical beam specially adapted to record on, or to reproduce from, more than one track simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0087—Simple or compound lenses with index gradient
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B2007/0003—Recording, reproducing or erasing systems characterised by the structure or type of the carrier
    • G11B2007/0009—Recording, reproducing or erasing systems characterised by the structure or type of the carrier for carriers having data stored in three dimensions, e.g. volume storage
    • G11B2007/0013—Recording, reproducing or erasing systems characterised by the structure or type of the carrier for carriers having data stored in three dimensions, e.g. volume storage for carriers having multiple discrete layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24035—Recording layers
    • G11B7/24038—Multiple laminated recording layers
DE502006003379T 2005-02-03 2006-02-03 Verfahren und anordnung zur konfokalen, chromatischen, interferometrischen, spektroskopischen abtastung für optische mehrlagen-datenspeicher Active DE502006003379D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005006723A DE102005006723B3 (de) 2005-02-03 2005-02-03 Interferometrisches,konfokales Verfahren und interferometrische, konfokale Anordung für optische Datenspeicher, insbesondere Terabyte-Volumenspeicher
PCT/EP2006/000948 WO2006082067A1 (de) 2005-02-03 2006-02-03 Verfahren und anordnung zur konfokalen, chromatischen, interferometrischen, spektroskopischen abtastung für optische mehrlagen-datenspeicher

Publications (1)

Publication Number Publication Date
DE502006003379D1 true DE502006003379D1 (de) 2009-05-20

Family

ID=36441969

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102005006723A Expired - Fee Related DE102005006723B3 (de) 2005-02-03 2005-02-03 Interferometrisches,konfokales Verfahren und interferometrische, konfokale Anordung für optische Datenspeicher, insbesondere Terabyte-Volumenspeicher
DE502006003379T Active DE502006003379D1 (de) 2005-02-03 2006-02-03 Verfahren und anordnung zur konfokalen, chromatischen, interferometrischen, spektroskopischen abtastung für optische mehrlagen-datenspeicher

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102005006723A Expired - Fee Related DE102005006723B3 (de) 2005-02-03 2005-02-03 Interferometrisches,konfokales Verfahren und interferometrische, konfokale Anordung für optische Datenspeicher, insbesondere Terabyte-Volumenspeicher

Country Status (5)

Country Link
US (1) US7876446B2 (de)
EP (1) EP1846923B1 (de)
AT (1) ATE428168T1 (de)
DE (2) DE102005006723B3 (de)
WO (1) WO2006082067A1 (de)

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DE102010037406A1 (de) * 2009-12-25 2011-06-30 Michael Dr. med. 33824 Dickob Anordnung und Verfahren zur Gewinnung diagnostisch relevanter Parameter von humanem Knorpelgewebe mittels Multiphotonen-Fluoreszenzmikroskopie
US8705041B2 (en) * 2010-05-27 2014-04-22 Promet International, Inc. Coaxial interferometer and inspection probe
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JP5790178B2 (ja) * 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
GB2497792A (en) * 2011-12-21 2013-06-26 Taylor Hobson Ltd Metrological apparatus comprising a confocal sensor
KR102337617B1 (ko) 2013-01-23 2021-12-08 루돌프 테크놀로지스 인코퍼레이티드 Tsv 마이크로 제조 프로세스 및 제품들의 특성화
EP2962155B1 (de) * 2013-03-01 2022-04-06 Essilor International Optisches linsenelement mit einem referenzelement unter der oberfläche
JP2014202645A (ja) * 2013-04-05 2014-10-27 キヤノン株式会社 計測装置
DE102013108189A1 (de) * 2013-07-31 2015-02-05 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Anordnung zur optischen Messung einer Prozessgröße und Messgerät umfassend eine solche
TW201608232A (zh) * 2014-08-18 2016-03-01 政美應用股份有限公司 量測圖案化藍寶石基板的方法
TW201608235A (zh) * 2014-08-18 2016-03-01 政美應用股份有限公司 量測圖案化藍寶石基板的光學量測裝置及方法
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JP6969453B2 (ja) * 2018-03-12 2021-11-24 オムロン株式会社 光学計測装置
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Also Published As

Publication number Publication date
US7876446B2 (en) 2011-01-25
WO2006082067A1 (de) 2006-08-10
US20080151253A1 (en) 2008-06-26
EP1846923A1 (de) 2007-10-24
DE102005006723B3 (de) 2006-06-08
EP1846923B1 (de) 2009-04-08
ATE428168T1 (de) 2009-04-15

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