DE50211046D1 - Sensor - Google Patents
SensorInfo
- Publication number
- DE50211046D1 DE50211046D1 DE50211046T DE50211046T DE50211046D1 DE 50211046 D1 DE50211046 D1 DE 50211046D1 DE 50211046 T DE50211046 T DE 50211046T DE 50211046 T DE50211046 T DE 50211046T DE 50211046 D1 DE50211046 D1 DE 50211046D1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50211046T DE50211046D1 (en) | 2001-04-05 | 2002-02-20 | Sensor |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10116931A DE10116931A1 (de) | 2001-04-05 | 2001-04-05 | Sensor |
PCT/DE2002/000621 WO2002082096A2 (de) | 2001-04-05 | 2002-02-20 | Sensor |
DE50211046T DE50211046D1 (en) | 2001-04-05 | 2002-02-20 | Sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE50211046D1 true DE50211046D1 (en) | 2007-11-22 |
Family
ID=7680462
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10116931A Ceased DE10116931A1 (de) | 2001-04-05 | 2001-04-05 | Sensor |
DE50211046T Expired - Lifetime DE50211046D1 (en) | 2001-04-05 | 2002-02-20 | Sensor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10116931A Ceased DE10116931A1 (de) | 2001-04-05 | 2001-04-05 | Sensor |
Country Status (5)
Country | Link |
---|---|
US (1) | US6923062B2 (de) |
EP (1) | EP1379884B1 (de) |
JP (1) | JP4092210B2 (de) |
DE (2) | DE10116931A1 (de) |
WO (1) | WO2002082096A2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4636220B2 (ja) * | 2001-09-03 | 2011-02-23 | トヨタ自動車株式会社 | 物理量検出装置 |
US6865944B2 (en) * | 2002-12-16 | 2005-03-15 | Honeywell International Inc. | Methods and systems for decelerating proof mass movements within MEMS structures |
JP2004286615A (ja) * | 2003-03-24 | 2004-10-14 | Denso Corp | 半導体加速度センサ |
EP1491901A1 (de) * | 2003-06-25 | 2004-12-29 | Matsushita Electric Works, Ltd. | Halbleiter-Beschleunigungsaufnehmer und Verfahren zu seiner Herstellung |
US7075424B1 (en) * | 2004-07-08 | 2006-07-11 | North Carolina A&T State University | System for damage location using a single channel continuous acoustic emission sensor |
DE102005037741A1 (de) * | 2005-08-10 | 2007-02-15 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Anschlag |
DE102006012616B4 (de) | 2006-03-20 | 2022-07-07 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit gestaffeltem Anschlag |
DE102006033176B4 (de) | 2006-07-18 | 2023-05-25 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einem Anschlagelement |
DE102006053290B4 (de) * | 2006-11-13 | 2023-08-03 | Robert Bosch Gmbh | Beschleunigungssensor |
DE102006058747A1 (de) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Mikromechanischer z-Sensor |
US8516891B2 (en) * | 2007-01-16 | 2013-08-27 | Analog Devices, Inc. | Multi-stage stopper system for MEMS devices |
US8011247B2 (en) * | 2008-06-26 | 2011-09-06 | Honeywell International Inc. | Multistage proof-mass movement deceleration within MEMS structures |
DE102009000407B4 (de) * | 2009-01-26 | 2022-09-08 | Robert Bosch Gmbh | Sensorvorrichtung und Herstellungsverfahren für eine Sensorvorrichtung |
WO2010086416A1 (en) | 2009-01-30 | 2010-08-05 | Imec | Stretchable electronic device |
WO2010086033A1 (en) | 2009-01-30 | 2010-08-05 | Interuniversitair Microelektronica Centrum Vzw | Stretchable electronic device |
ITTO20090597A1 (it) * | 2009-07-31 | 2011-02-01 | St Microelectronics Srl | Struttura di rilevamento microelettromeccanica ad asse z con ridotte derive termiche |
DE102009029095B4 (de) * | 2009-09-02 | 2017-05-18 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
US9151733B1 (en) | 2011-03-07 | 2015-10-06 | North Carolina A&T State University | Acoustic emission sensor array |
US8596123B2 (en) * | 2011-05-05 | 2013-12-03 | Freescale Semiconductor, Inc. | MEMS device with impacting structure for enhanced resistance to stiction |
US20130019678A1 (en) * | 2011-07-22 | 2013-01-24 | Lazaroff Dennis M | Limiting travel of proof mass within frame of MEMS device |
JP5935402B2 (ja) * | 2012-03-08 | 2016-06-15 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP2014134481A (ja) * | 2013-01-11 | 2014-07-24 | Seiko Epson Corp | 物理量センサー、電子機器、及び移動体 |
JP6205921B2 (ja) * | 2013-07-11 | 2017-10-04 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
DE102013222747A1 (de) | 2013-11-08 | 2015-05-13 | Robert Bosch Gmbh | Mikromechanischer Z-Sensor |
JP2015123526A (ja) * | 2013-12-26 | 2015-07-06 | ソニー株式会社 | 機能素子、加速度センサおよびスイッチ |
DE102014202816B4 (de) | 2014-02-17 | 2022-06-30 | Robert Bosch Gmbh | Wippeneinrichtung für einen mikromechanischen Z-Sensor |
CN109455663B (zh) * | 2014-06-05 | 2023-12-12 | 株式会社村田制作所 | Mems器件 |
JP6515477B2 (ja) * | 2014-10-06 | 2019-05-22 | 大日本印刷株式会社 | 力学量センサおよび力学量測定装置 |
US10858241B2 (en) * | 2015-04-09 | 2020-12-08 | Rensselaer Polytechnic Institute | Enhanced control of shuttle mass motion in MEMS devices |
DE102015207639B4 (de) * | 2015-04-27 | 2022-10-06 | Robert Bosch Gmbh | Seismisches Erfassungselement für einen mikromechanischen Sensor |
US20170023606A1 (en) * | 2015-07-23 | 2017-01-26 | Freescale Semiconductor, Inc. | Mems device with flexible travel stops and method of fabrication |
DE102016200491A1 (de) * | 2016-01-15 | 2017-07-20 | Robert Bosch Gmbh | Mikromechanische Feder für einen Inertialsensor |
JP6562878B2 (ja) * | 2016-06-30 | 2019-08-21 | 株式会社東芝 | 角速度取得装置 |
DE102016214962A1 (de) * | 2016-08-11 | 2018-02-15 | Robert Bosch Gmbh | Mikromechanischer Sensorkern für Inertialsensor |
DE102017218595A1 (de) * | 2016-10-19 | 2018-04-19 | Robert Bosch Gmbh | Mikromechanische Feder für ein Sensorelement |
JP7139661B2 (ja) | 2018-04-02 | 2022-09-21 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、電子機器および移動体 |
JP7003076B2 (ja) * | 2019-03-08 | 2022-01-20 | 株式会社東芝 | センサ |
JP7383978B2 (ja) | 2019-10-23 | 2023-11-21 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
DE102020203576A1 (de) | 2020-03-19 | 2021-09-23 | Robert Bosch Gesellschaft mit beschränkter Haftung | System, insbesondere mikroelektromechanisches System, Verfahren zur Herstellung eines Systems, Verfahren zum Betrieb eines Systems |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3114006B2 (ja) | 1994-08-29 | 2000-12-04 | セイコーインスツルメンツ株式会社 | 半導体装置、及び、その製造方法 |
JPH09127151A (ja) * | 1995-11-01 | 1997-05-16 | Murata Mfg Co Ltd | 加速度センサ |
DE19817357B4 (de) | 1998-04-18 | 2008-10-30 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE19825298C2 (de) | 1998-06-05 | 2003-02-13 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer Sensoranordnung und Sensoranordnung |
US6389899B1 (en) * | 1998-06-09 | 2002-05-21 | The Board Of Trustees Of The Leland Stanford Junior University | In-plane micromachined accelerometer and bridge circuit having same |
JP2000338126A (ja) * | 1999-05-26 | 2000-12-08 | Matsushita Electric Works Ltd | 半導体加速度センサ |
DE19930779B4 (de) | 1999-07-03 | 2010-05-06 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
EP1311863A4 (de) | 2000-06-21 | 2003-07-30 | Input Output Inc | Beschleunigungsmesser mit gefalteten balken |
-
2001
- 2001-04-05 DE DE10116931A patent/DE10116931A1/de not_active Ceased
-
2002
- 2002-02-20 JP JP2002579815A patent/JP4092210B2/ja not_active Expired - Lifetime
- 2002-02-20 US US10/474,287 patent/US6923062B2/en not_active Expired - Lifetime
- 2002-02-20 WO PCT/DE2002/000621 patent/WO2002082096A2/de active IP Right Grant
- 2002-02-20 EP EP02714049A patent/EP1379884B1/de not_active Expired - Lifetime
- 2002-02-20 DE DE50211046T patent/DE50211046D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE10116931A1 (de) | 2002-10-17 |
JP4092210B2 (ja) | 2008-05-28 |
US6923062B2 (en) | 2005-08-02 |
EP1379884B1 (de) | 2007-10-10 |
WO2002082096A2 (de) | 2002-10-17 |
EP1379884A2 (de) | 2004-01-14 |
US20040129077A1 (en) | 2004-07-08 |
WO2002082096A3 (de) | 2003-05-08 |
JP2004531714A (ja) | 2004-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |