DE59207962D1 - Kryopumpe mit einem im wesentlichen topfförmigen gehäuse - Google Patents

Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Info

Publication number
DE59207962D1
DE59207962D1 DE59207962T DE59207962T DE59207962D1 DE 59207962 D1 DE59207962 D1 DE 59207962D1 DE 59207962 T DE59207962 T DE 59207962T DE 59207962 T DE59207962 T DE 59207962T DE 59207962 D1 DE59207962 D1 DE 59207962D1
Authority
DE
Germany
Prior art keywords
cryopump
shaped housing
essentially pot
pot
essentially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59207962T
Other languages
English (en)
Inventor
Monika Mattern-Klosson
Hans-Juergen Mundinger
Hans-Ulrich Haefner
Uwe Timm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Priority to DE59207962T priority Critical patent/DE59207962D1/de
Application granted granted Critical
Publication of DE59207962D1 publication Critical patent/DE59207962D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
DE59207962T 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse Expired - Fee Related DE59207962D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59207962T DE59207962D1 (de) 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4201755A DE4201755A1 (de) 1992-01-23 1992-01-23 Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse
DE59207962T DE59207962D1 (de) 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse
PCT/EP1992/000869 WO1993015318A1 (de) 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Publications (1)

Publication Number Publication Date
DE59207962D1 true DE59207962D1 (de) 1997-03-06

Family

ID=6450093

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4201755A Withdrawn DE4201755A1 (de) 1992-01-23 1992-01-23 Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse
DE59207962T Expired - Fee Related DE59207962D1 (de) 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4201755A Withdrawn DE4201755A1 (de) 1992-01-23 1992-01-23 Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse

Country Status (5)

Country Link
US (1) US5542257A (de)
EP (1) EP0608232B1 (de)
JP (1) JPH07502793A (de)
DE (2) DE4201755A1 (de)
WO (1) WO1993015318A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6532749B2 (en) 1999-09-22 2003-03-18 The Coca-Cola Company Stirling-based heating and cooling device
US6272867B1 (en) 1999-09-22 2001-08-14 The Coca-Cola Company Apparatus using stirling cooler system and methods of use
US6266963B1 (en) * 1999-10-05 2001-07-31 The Coca-Cola Company Apparatus using stirling cooler system and methods of use
US6263679B1 (en) 2000-04-05 2001-07-24 Helix Technology Corporation Particulate dam for cryopump flange
US6550255B2 (en) 2001-03-21 2003-04-22 The Coca-Cola Company Stirling refrigeration system with a thermosiphon heat exchanger
US6581389B2 (en) 2001-03-21 2003-06-24 The Coca-Cola Company Merchandiser using slide-out stirling refrigeration deck
US7037083B2 (en) 2003-01-08 2006-05-02 Brooks Automation, Inc. Radiation shielding coating
US20050274128A1 (en) * 2004-06-10 2005-12-15 Genesis Cryopump with enhanced hydrogen pumping
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
WO2006085868A2 (en) * 2005-02-08 2006-08-17 Sumitomo Heavy Industries, Ltd. Improved cryopump
KR100914383B1 (ko) * 2006-06-20 2009-08-28 주식회사 엘지화학 폴리헤테로고리 화합물, 이를 이용한 유기 전자 소자 및 이유기 전자 소자를 포함하는 전자 장치
US10760562B2 (en) * 2007-01-17 2020-09-01 Edwards Vacuum Llc Pressure burst free high capacity cryopump
JP4436863B2 (ja) * 2007-10-29 2010-03-24 キヤノンアネルバテクニクス株式会社 再生構造を備えた冷却トラップユニット
KR101456892B1 (ko) * 2008-07-01 2014-10-31 브룩스 오토메이션, 인크. 극저온 펌프에 대한 온도 제어를 제공하기 위한 방법 및 장치
US9186601B2 (en) 2012-04-20 2015-11-17 Sumitomo (Shi) Cryogenics Of America Inc. Cryopump drain and vent
US9174144B2 (en) 2012-04-20 2015-11-03 Sumitomo (Shi) Cryogenics Of America Inc Low profile cryopump
JP5570550B2 (ja) * 2012-05-21 2014-08-13 住友重機械工業株式会社 クライオポンプ
WO2014173809A1 (en) * 2013-04-24 2014-10-30 Siemens Plc An assembly comprising a two-stage cryogenic refrigerator and associated mounting arrangement
EP3120021B1 (de) * 2014-03-21 2023-05-10 Edwards Vacuum, LLC Hybride frontanordnung einer kryopumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3140820A (en) * 1962-05-31 1964-07-14 Robert E Clausing Method for maintaining very high vacuum in a system
FR2146100B2 (de) * 1971-07-16 1974-03-29 Air Liquide
DE2512235A1 (de) * 1975-03-20 1976-09-23 Bosch Gmbh Robert Kuehlfalle fuer vakuumanlagen
US4719938A (en) * 1985-01-22 1988-01-19 Helix Technology Corporation Self-cleaning valve and cryopump utilizing the same
DE8804218U1 (de) * 1988-03-29 1988-05-11 Leybold Ag, 6450 Hanau, De

Also Published As

Publication number Publication date
EP0608232A1 (de) 1994-08-03
JPH07502793A (ja) 1995-03-23
US5542257A (en) 1996-08-06
EP0608232B1 (de) 1997-01-22
DE4201755A1 (de) 1993-07-29
WO1993015318A1 (de) 1993-08-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee