DE60005731D1 - Magnetische Lagervorrichtung und Vakuumpumpe mit solcher Vorrichtung - Google Patents

Magnetische Lagervorrichtung und Vakuumpumpe mit solcher Vorrichtung

Info

Publication number
DE60005731D1
DE60005731D1 DE60005731T DE60005731T DE60005731D1 DE 60005731 D1 DE60005731 D1 DE 60005731D1 DE 60005731 T DE60005731 T DE 60005731T DE 60005731 T DE60005731 T DE 60005731T DE 60005731 D1 DE60005731 D1 DE 60005731D1
Authority
DE
Germany
Prior art keywords
vacuum pump
magnetic bearing
bearing device
magnetic
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60005731T
Other languages
English (en)
Other versions
DE60005731T2 (de
DE60005731T3 (de
Inventor
Yasushi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14043669&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60005731(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE60005731D1 publication Critical patent/DE60005731D1/de
Publication of DE60005731T2 publication Critical patent/DE60005731T2/de
Application granted granted Critical
Publication of DE60005731T3 publication Critical patent/DE60005731T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00—Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices; Anti-rape devices
    • A61F5/01—Orthopaedic devices, e.g. splints, casts or braces
    • A61F5/04—Devices for stretching or reducing fractured limbs; Devices for distractions; Splints
    • A61F5/042—Devices for stretching or reducing fractured limbs; Devices for distractions; Splints for extension or stretching
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47C—CHAIRS; SOFAS; BEDS
    • A47C7/00—Parts, details, or accessories of chairs or stools
    • A47C7/36—Support for the head or the back
    • A47C7/40—Support for the head or the back for the back
    • A47C7/402—Support for the head or the back for the back adjustable in height
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47C—CHAIRS; SOFAS; BEDS
    • A47C7/00—Parts, details, or accessories of chairs or stools
    • A47C7/50—Supports for the feet or the legs coupled to fixed parts of the chair
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47C—CHAIRS; SOFAS; BEDS
    • A47C9/00—Stools for specified purposes
    • A47C9/002—Stools for specified purposes with exercising means or having special therapeutic or ergonomic effects
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F5/00—Orthopaedic methods or devices for non-surgical treatment of bones or joints; Nursing devices; Anti-rape devices
    • A61F5/01—Orthopaedic devices, e.g. splints, casts or braces
    • A61F5/0102—Orthopaedic devices, e.g. splints, casts or braces specially adapted for correcting deformities of the limbs or for supporting them; Ortheses, e.g. with articulations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
DE60005731T 1999-03-31 2000-03-28 Magnetische Lagervorrichtung und Vakuumpumpe mit solcher Vorrichtung Expired - Lifetime DE60005731T3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP09204999A JP3349679B2 (ja) 1999-03-31 1999-03-31 磁気軸受装置及びこれを備えた真空ポンプ
JP9204999 1999-03-31
EP00302512A EP1041288B2 (de) 1999-03-31 2000-03-28 Magnetische Lagervorrichtung und Vakuumpumpe mit solcher Vorrichtung

Publications (3)

Publication Number Publication Date
DE60005731D1 true DE60005731D1 (de) 2003-11-13
DE60005731T2 DE60005731T2 (de) 2004-04-29
DE60005731T3 DE60005731T3 (de) 2012-03-15

Family

ID=14043669

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60005731T Expired - Lifetime DE60005731T3 (de) 1999-03-31 2000-03-28 Magnetische Lagervorrichtung und Vakuumpumpe mit solcher Vorrichtung

Country Status (5)

Country Link
US (1) US6465924B1 (de)
EP (1) EP1041288B2 (de)
JP (1) JP3349679B2 (de)
KR (1) KR100574079B1 (de)
DE (1) DE60005731T3 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001182746A (ja) * 1999-12-27 2001-07-06 Ebara Corp 磁気軸受装置
JP2002242876A (ja) 2001-02-19 2002-08-28 Stmp Kk 磁気軸受式ポンプ
JP2003013955A (ja) * 2001-07-02 2003-01-15 Ishikawajima Harima Heavy Ind Co Ltd 磁気軸受用ステータコア
JP4282966B2 (ja) * 2002-09-20 2009-06-24 株式会社リコー ポリゴンミラースキャナ
EP1517042A1 (de) 2003-09-17 2005-03-23 Mecos Traxler AG Magnetlagerung für eine Vakuumpumpe
JP4779404B2 (ja) * 2005-03-30 2011-09-28 株式会社島津製作所 ターボ分子ポンプ
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
DE102006043893B4 (de) * 2006-09-19 2008-10-02 Siemens Ag Polzahn mit Permanentmagnet
JP2008196548A (ja) * 2007-02-09 2008-08-28 Ihi Corp 磁気軸受装置
US7557480B2 (en) * 2007-04-05 2009-07-07 Calnetix, Inc. Communicating magnetic flux across a gap with a rotating body
US7638892B2 (en) * 2007-04-16 2009-12-29 Calnetix, Inc. Generating energy from fluid expansion
US8839622B2 (en) * 2007-04-16 2014-09-23 General Electric Company Fluid flow in a fluid expansion system
US7841306B2 (en) * 2007-04-16 2010-11-30 Calnetix Power Solutions, Inc. Recovering heat energy
US8102088B2 (en) * 2008-01-25 2012-01-24 Calnetix Technologies, L.L.C. Generating electromagnetic forces with flux feedback control
DE102008035891A1 (de) 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US8169118B2 (en) * 2008-10-09 2012-05-01 Calnetix Technologies, L.L.C. High-aspect-ratio homopolar magnetic actuator
US8183854B2 (en) * 2008-11-07 2012-05-22 Calnetix Technologies, L.L.C. Measuring linear velocity
US8564281B2 (en) * 2009-05-29 2013-10-22 Calnetix Technologies, L.L.C. Noncontact measuring of the position of an object with magnetic flux
US8378543B2 (en) * 2009-11-02 2013-02-19 Calnetix Technologies, L.L.C. Generating electromagnetic forces in large air gaps
US8796894B2 (en) 2010-01-06 2014-08-05 Calnetix Technologies, L.L.C. Combination radial/axial electromagnetic actuator
US8847451B2 (en) 2010-03-23 2014-09-30 Calnetix Technologies, L.L.C. Combination radial/axial electromagnetic actuator with an improved axial frequency response
US8739538B2 (en) 2010-05-28 2014-06-03 General Electric Company Generating energy from fluid expansion
US8680730B2 (en) * 2010-07-01 2014-03-25 Powertec Industrial Motors, Inc. Low voltage high horsepower brushless motor assembly
US9024493B2 (en) * 2010-12-30 2015-05-05 Dresser-Rand Company Method for on-line detection of resistance-to-ground faults in active magnetic bearing systems
US8482174B2 (en) 2011-05-26 2013-07-09 Calnetix Technologies, Llc Electromagnetic actuator
US9531236B2 (en) 2011-06-02 2016-12-27 Calnetix Technologies, Llc Arrangement of axial and radial electromagnetic actuators
TWI444539B (zh) * 2011-10-28 2014-07-11 Ind Tech Res Inst 磁浮式液態冷媒泵
CN102425556B (zh) * 2011-11-11 2014-07-02 北京中科科仪股份有限公司 一种获取磁悬浮分子泵转子径向悬浮中心的方法
US9024460B2 (en) 2012-01-04 2015-05-05 General Electric Company Waste heat recovery system generator encapsulation
US8984884B2 (en) 2012-01-04 2015-03-24 General Electric Company Waste heat recovery systems
US9018778B2 (en) 2012-01-04 2015-04-28 General Electric Company Waste heat recovery system generator varnishing
US9024494B2 (en) 2013-01-07 2015-05-05 Calnetix Technologies, Llc Mechanical backup bearing arrangement for a magnetic bearing system
DE102013100853A1 (de) * 2013-01-29 2014-07-31 Pfeiffer Vacuum Gmbh Verfahren zum Beschichten und/oder Lackieren von Magnetringen eines Rotor-Magnetlagers, Rotor-Magnetlager sowie Vakuumpumpe
US9683601B2 (en) 2013-03-14 2017-06-20 Calnetix Technologies, Llc Generating radial electromagnetic forces
US9559565B2 (en) 2013-08-22 2017-01-31 Calnetix Technologies, Llc Homopolar permanent-magnet-biased action magnetic bearing with an integrated rotational speed sensor
CN106606377B (zh) * 2015-10-21 2021-08-06 新加坡国立大学 一种医学用自给式主动径向驱动装置
JP6948147B2 (ja) 2017-04-18 2021-10-13 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
JP2019080423A (ja) * 2017-10-24 2019-05-23 株式会社ミツバ モータ及びモータの製造方法
CN110165823A (zh) * 2019-05-13 2019-08-23 珠海格力电器股份有限公司 磁悬浮轴承、电机、压缩机和空调器
CN111981041B (zh) * 2020-08-24 2021-11-23 淮阴工学院 一种磁悬浮轴承径向保护结构及其保护方法
JP6993552B1 (ja) * 2020-10-19 2022-01-31 Ｒｏｔｏｒｉｓｅ合同会社 ラジアル磁気軸受のステータコア
CN113794319B (zh) * 2021-08-30 2022-07-22 本元智慧科技有限公司 一种磁轴承与传感器一体化结构及其装配工艺
NL2032399B1 (en) * 2022-07-07 2024-01-23 Eindhoven Medical Robotics B V Drive unit for a robot joint.

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3045290A (en) † 1957-10-11 1962-07-24 Anderson Controls Inc Method of encapsulating coils
DE2108590A1 (de) * 1971-02-23 1972-09-07 Siemens Ag Anordnung zur Lagerung einer hochtourig, insbesondere elektromotorisch angetriebenen Welle
US4607197A (en) * 1978-04-17 1986-08-19 Imc Magnetics Corporation Linear and rotary actuator
JPS5858853A (ja) † 1981-09-30 1983-04-07 Hitachi Ltd モ−ルド絶縁法
JPS61218355A (ja) * 1985-03-22 1986-09-27 Res Dev Corp Of Japan 回転位置決め機能を有する磁気浮上アクチユエ−タ
FR2613791B1 (fr) * 1987-04-09 1992-03-13 Europ Propulsion Palier magnetique radial a atterrisseur de secours et application a une turbomachine a suspension magnetique active
DE3818196A1 (de) * 1988-05-28 1989-12-07 Asea Brown Boveri Spindel mit elektromotorischem antrieb fuer eine spinnereimaschine
US5270601A (en) * 1991-10-17 1993-12-14 Allied-Signal, Inc. Superconducting composite magnetic bearings
US5289067A (en) * 1992-01-31 1994-02-22 Nsk Ltd. Bearing device
US5514924A (en) * 1992-04-30 1996-05-07 AVCON--Advanced Control Technology, Inc. Magnetic bearing providing radial and axial load support for a shaft
JP3543976B2 (ja) * 1993-06-30 2004-07-21 株式会社東芝 磁気軸受装置
JP2968188B2 (ja) * 1994-07-28 1999-10-25 株式会社荏原製作所 真空ポンプ装置
JP3689439B2 (ja) * 1994-08-09 2005-08-31 光洋精工株式会社 磁気軸受装置
JPH08140305A (ja) * 1994-11-11 1996-05-31 Shinko Electric Co Ltd ターボ冷凍機またはターボヒートポンプ用電動機のスラスト磁気軸受
JPH09291832A (ja) * 1996-04-26 1997-11-11 Toshiba Corp コンバインドサイクル利用液体水素製造装置
JPH1061584A (ja) * 1996-08-21 1998-03-03 Hitachi Ltd 液化ガス用潜没ポンプ装置およびその磁気軸受装置
US5875540A (en) * 1997-01-21 1999-03-02 Siemens Westinghouse Power Corporation Modular design and manufacture of a stator core
JPH11101235A (ja) * 1997-07-30 1999-04-13 Nippon Seiko Kk 磁気軸受

Also Published As

Publication number Publication date
US6465924B1 (en) 2002-10-15
EP1041288A2 (de) 2000-10-04
JP2000283161A (ja) 2000-10-13
EP1041288B1 (de) 2003-10-08
KR100574079B1 (ko) 2006-04-27
DE60005731T2 (de) 2004-04-29
KR20000063094A (ko) 2000-10-25
EP1041288B2 (de) 2011-11-16
DE60005731T3 (de) 2012-03-15
EP1041288A3 (de) 2002-01-02
JP3349679B2 (ja) 2002-11-25

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: BOC EDWARDS JAPAN LTD., TOKIO/TOKYO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP

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