DE60011778D1 - Photovernetzbare zusammensetzungen mit einer iodonium-salz-verbindung - Google Patents

Photovernetzbare zusammensetzungen mit einer iodonium-salz-verbindung

Info

Publication number
DE60011778D1
DE60011778D1 DE60011778T DE60011778T DE60011778D1 DE 60011778 D1 DE60011778 D1 DE 60011778D1 DE 60011778 T DE60011778 T DE 60011778T DE 60011778 T DE60011778 T DE 60011778T DE 60011778 D1 DE60011778 D1 DE 60011778D1
Authority
DE
Germany
Prior art keywords
iodonium salt
salt compound
networkable
photo
compositions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60011778T
Other languages
English (en)
Other versions
DE60011778T2 (de
Inventor
Eiji Takahashi
Akihiro Shirai
Hiroshi Takahashi
Shinichi Kimizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Soda Co Ltd
Original Assignee
Nippon Soda Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soda Co Ltd filed Critical Nippon Soda Co Ltd
Application granted granted Critical
Publication of DE60011778D1 publication Critical patent/DE60011778D1/de
Publication of DE60011778T2 publication Critical patent/DE60011778T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C51/00—Preparation of carboxylic acids or their salts, halides or anhydrides
    • C07C51/347—Preparation of carboxylic acids or their salts, halides or anhydrides by reactions not involving formation of carboxyl groups
    • C07C51/363—Preparation of carboxylic acids or their salts, halides or anhydrides by reactions not involving formation of carboxyl groups by introduction of halogen; by substitution of halogen atoms by other halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C59/00—Compounds having carboxyl groups bound to acyclic carbon atoms and containing any of the groups OH, O—metal, —CHO, keto, ether, groups, groups, or groups
    • C07C59/40—Unsaturated compounds
    • C07C59/58—Unsaturated compounds containing ether groups, groups, groups, or groups
    • C07C59/64—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings
    • C07C59/66—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings the non-carboxylic part of the ether containing six-membered aromatic rings
    • C07C59/68—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings the non-carboxylic part of the ether containing six-membered aromatic rings the oxygen atom of the ether group being bound to a non-condensed six-membered aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C59/00—Compounds having carboxyl groups bound to acyclic carbon atoms and containing any of the groups OH, O—metal, —CHO, keto, ether, groups, groups, or groups
    • C07C59/40—Unsaturated compounds
    • C07C59/58—Unsaturated compounds containing ether groups, groups, groups, or groups
    • C07C59/64—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings
    • C07C59/66—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings the non-carboxylic part of the ether containing six-membered aromatic rings
    • C07C59/68—Unsaturated compounds containing ether groups, groups, groups, or groups containing six-membered aromatic rings the non-carboxylic part of the ether containing six-membered aromatic rings the oxygen atom of the ether group being bound to a non-condensed six-membered aromatic ring
    • C07C59/70—Ethers of hydroxy-acetic acid, e.g. substitutes on the ring
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C63/00—Compounds having carboxyl groups bound to a carbon atoms of six-membered aromatic rings
    • C07C63/68—Compounds having carboxyl groups bound to a carbon atoms of six-membered aromatic rings containing halogen
    • C07C63/72—Polycyclic acids
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/66—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety
    • C07C69/67—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety of saturated acids
    • C07C69/708—Ethers
    • C07C69/712—Ethers the hydroxy group of the ester being etherified with a hydroxy compound having the hydroxy group bound to a carbon atom of a six-membered aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0384—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the main chain of the photopolymer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
DE60011778T 1999-08-02 2000-08-01 Photovernetzbare zusammensetzungen mit einer iodonium-salz-verbindung Expired - Fee Related DE60011778T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP21900999 1999-08-02
JP21900999 1999-08-02
PCT/JP2000/005090 WO2001009075A1 (fr) 1999-08-02 2000-08-01 Composition photodurcissable contenant un compose de sel d'iodionium

Publications (2)

Publication Number Publication Date
DE60011778D1 true DE60011778D1 (de) 2004-07-29
DE60011778T2 DE60011778T2 (de) 2004-11-11

Family

ID=16728840

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60011778T Expired - Fee Related DE60011778T2 (de) 1999-08-02 2000-08-01 Photovernetzbare zusammensetzungen mit einer iodonium-salz-verbindung

Country Status (5)

Country Link
US (1) US6677390B1 (de)
EP (1) EP1201638B1 (de)
AT (1) ATE269842T1 (de)
DE (1) DE60011778T2 (de)
WO (1) WO2001009075A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7223518B2 (en) * 2003-06-06 2007-05-29 Georgia Tech Research Corporation Compositions and methods of use thereof
JP2009292989A (ja) * 2008-06-09 2009-12-17 Konica Minolta Business Technologies Inc 光硬化性組成物およびその硬化物

Family Cites Families (31)

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ZA741203B (en) * 1973-03-23 1975-01-29 Smithkline Corp Veterinary feed compositions for inhibiting rumen microbial deamination
GB1516352A (en) 1974-05-02 1978-07-05 Gen Electric Halonium salts
US4874798A (en) * 1983-02-07 1989-10-17 Union Carbide Corporation Photocopolymerizable compositions based on epoxy and hydroxyl-containing organic materials and substituted cycloaliphatic monoepoxide reactive diluents
US4683317A (en) * 1983-05-23 1987-07-28 General Electric Company Photopolymerizable organic compositions and diaryliodonium salts used therein
US4529490A (en) 1983-05-23 1985-07-16 General Electric Company Photopolymerizable organic compositions and diaryliodonium ketone salts used therein
GB8332073D0 (en) * 1983-12-01 1984-01-11 Ciba Geigy Ag Polymerisable compositions
JPS61166543A (ja) * 1985-01-18 1986-07-28 Fuji Photo Film Co Ltd 光可溶化組成物
US4657779A (en) * 1986-03-19 1987-04-14 Desoto, Inc. Shrinkage-resistant ultraviolet-curing coatings
US5086086A (en) * 1987-08-28 1992-02-04 Minnesota Mining And Manufacturing Company Energy-induced curable compositions
US4840977A (en) * 1987-10-01 1989-06-20 General Electric Company Polymeric iodonium salts, method for making, and heat curable compositions
US4981881A (en) * 1988-03-21 1991-01-01 General Electric Company Non-toxic aryl onium salts, UV curable coating compositions and food packaging use
JP2607162B2 (ja) * 1990-02-02 1997-05-07 富士写真フイルム株式会社 感光性組成物
US5144051A (en) * 1990-05-29 1992-09-01 Minnesota Mining And Manufacturing Company Branched alkoxyphenyl iodonium salt photoinitiators
US5079378A (en) * 1990-07-27 1992-01-07 Polyset Corporation Preparation of diaryliodonium salt photoinitiators having long chain ester groups concatenated with aryl groups
US5073643A (en) * 1990-08-30 1991-12-17 Polyset Corporation High yield synthesis of hydroxyl-containing cationic photoinitiators
US5102771A (en) * 1990-11-26 1992-04-07 Minnesota Mining And Manufacturing Company Photosensitive materials
US5086192A (en) * 1990-12-14 1992-02-04 Minnesota Mining And Manufacturing Company Photopolymerizable compositions and photoinitiators therefor
JP2726348B2 (ja) * 1992-02-03 1998-03-11 沖電気工業株式会社 放射線感応性樹脂組成物
US5318808A (en) * 1992-09-25 1994-06-07 Polyset Company, Inc. UV-curable coatings
DE4306069A1 (de) * 1993-03-01 1994-09-08 Basf Ag Strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen mit verbessertem Kontrast
US5384339A (en) * 1993-03-09 1995-01-24 Starkey; Donn R. Epoxy based balancing compound and method for balancing a rotor utilizing an ultraviolet-curable epoxy resin composition
US5514728A (en) * 1993-07-23 1996-05-07 Minnesota Mining And Manufacturing Company Catalysts and initiators for polymerization
JP3587325B2 (ja) * 1996-03-08 2004-11-10 富士写真フイルム株式会社 ポジ型感光性組成物
EP0795786B1 (de) * 1996-03-11 2002-05-02 Fuji Photo Film Co., Ltd. Positiv-arbeitende fotoempfindliche Zusammensetzung
US5703137A (en) * 1996-03-14 1997-12-30 Rhone-Poulenc Chimie Initiators for the cationic crosslinking of polymers containing organofunctional groups
FR2762001B1 (fr) * 1997-04-11 1999-07-02 Rhodia Chimie Sa Amorceurs non toxiques, resines a groupements organofonctionnels reticulables comprenant les amorceurs, et leur utilisation pour la preparation de polymeres stables et non toxiques
DE59912389D1 (de) * 1999-01-16 2005-09-15 Goldschmidt Gmbh Photoinitiatoren zur kationischen Härtung
KR100538501B1 (ko) * 1999-08-16 2005-12-23 신에쓰 가가꾸 고교 가부시끼가이샤 신규한 오늄염, 레지스트 재료용 광산발생제, 레지스트재료 및 패턴 형성 방법
AU5649400A (en) * 1999-09-21 2001-10-11 Goldschmidt Ag Photoinitiators containing urethane groups for cationic curing
SG98433A1 (en) * 1999-12-21 2003-09-19 Ciba Sc Holding Ag Iodonium salts as latent acid donors
JP3963624B2 (ja) * 1999-12-22 2007-08-22 富士フイルム株式会社 遠紫外線露光用ポジ型フォトレジスト組成物

Also Published As

Publication number Publication date
DE60011778T2 (de) 2004-11-11
EP1201638A4 (de) 2003-01-02
ATE269842T1 (de) 2004-07-15
US6677390B1 (en) 2004-01-13
WO2001009075A1 (fr) 2001-02-08
EP1201638A1 (de) 2002-05-02
EP1201638B1 (de) 2004-06-23

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee